JP5699793B2 - Steel plate having artificial space, method for producing the same, and method for evaluating leakage magnetic flux flaw detector using the same - Google Patents

Steel plate having artificial space, method for producing the same, and method for evaluating leakage magnetic flux flaw detector using the same Download PDF

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JP5699793B2
JP5699793B2 JP2011106653A JP2011106653A JP5699793B2 JP 5699793 B2 JP5699793 B2 JP 5699793B2 JP 2011106653 A JP2011106653 A JP 2011106653A JP 2011106653 A JP2011106653 A JP 2011106653A JP 5699793 B2 JP5699793 B2 JP 5699793B2
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岩田　圭司
圭司 岩田
山田　亘
亘 山田
藤　健彦
健彦 藤
弘昭 菊池
弘昭 菊池
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Nippon Steel Corp
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本発明は、漏洩磁束探傷装置による内部欠陥検出機能を評価するために用いる人工空間を有する鋼板とその製造方法並びにこれを用いた漏洩磁束探傷装置の評価方法に関するものである。   The present invention relates to a steel plate having an artificial space used for evaluating an internal defect detection function of a leakage magnetic flux flaw detector, a method for manufacturing the same, and a method for evaluating a leakage magnetic flux flaw detector using the same.

近年、鋼材の品質に対する要求は厳しさを増している。これに応えるべく、鋼材の表面欠陥はいうまでもなく内部欠陥を的確に検出する技術の開発がなされている。強磁性体材料である鋼材の欠陥を検出するために非破壊検査法による欠陥検出技術が実用化されている。欠陥検出技術としては、超音波探傷法、放射線透過法、漏洩磁束探傷法がある。鋼材の表面あるいは浅いところにある内部欠陥を検出するときには、検出感度や測定の簡便さから漏洩磁束探傷法が用いられている。   In recent years, the demand for the quality of steel materials has been increasing. In order to respond to this, development of technology for accurately detecting internal defects as well as surface defects of steel materials has been made. In order to detect a defect in a steel material which is a ferromagnetic material, a defect detection technique based on a nondestructive inspection method has been put into practical use. As the defect detection technique, there are an ultrasonic flaw detection method, a radiation transmission method, and a leakage magnetic flux flaw detection method. When detecting an internal defect on the surface of a steel material or in a shallow place, a leakage magnetic flux flaw detection method is used from the viewpoint of detection sensitivity and simplicity of measurement.

通常の漏洩磁束探傷では、図１のように鋼材１に磁化器３で磁界を印加して、鋼材１の内部に磁束４を発生させ、内部欠陥によって表面に現れる漏洩磁束６を磁界センサ７で検出し、出力電圧信号処理部で内部欠陥の有無や大きさを推定する。ここで、磁界センサ７と鋼材１との距離Ｌは小さいほど出力電圧が大きく取れることから内部欠陥の検出性能が向上する。漏洩磁束を検出する磁界センサとしては、軟磁性材料にコイルを巻いた電磁誘導タイプセンサ、軟磁性薄膜で構成された磁気抵抗素子や半導体磁界センサの一つであるホール素子を用いている。ホール素子は半導体の一方向に直流電流を流して、外部磁界によって電流の方向と直交する方向に電圧が発生する素子である。   In a normal leakage magnetic flux flaw detection, as shown in FIG. 1, a magnetic field is applied to the steel material 1 by the magnetizer 3 to generate a magnetic flux 4 inside the steel material 1, and the magnetic flux sensor 6 generates the leakage magnetic flux 6 that appears on the surface due to internal defects. The output voltage signal processing unit detects the presence and size of an internal defect. Here, as the distance L between the magnetic field sensor 7 and the steel material 1 is smaller, the output voltage can be increased, so that the internal defect detection performance is improved. As the magnetic field sensor for detecting the leakage magnetic flux, an electromagnetic induction type sensor in which a coil is wound around a soft magnetic material, a magnetoresistive element composed of a soft magnetic thin film, or a Hall element which is one of semiconductor magnetic field sensors is used. The Hall element is an element that generates a voltage in a direction perpendicular to the direction of current by flowing a direct current in one direction of the semiconductor by an external magnetic field.

特許文献１では、電磁誘導タイプなどの軟磁性材料を用いた磁界センサは、高感度なものほど磁気飽和し易い点に着目し、絶縁性基板または半導体基板面上に複数個の前記ホール素子をプリント基板上に一定間隔で列状に一列あるいは多数列配置漏洩磁束検出用磁界センサモジュールを開示している。   In Patent Document 1, a magnetic field sensor using a soft magnetic material such as an electromagnetic induction type pays attention to the fact that the higher the sensitivity, the easier the magnetic saturation, and a plurality of the Hall elements are formed on an insulating substrate or a semiconductor substrate surface. A magnetic field sensor module for detecting a leakage magnetic flux arranged in a line or a line at regular intervals on a printed circuit board is disclosed.

特許文献２では、コイルを装着した直方体コアを高精度で対向配列させるとともに差動結合した感磁素子が多数千鳥状に配置される検出センサを、鋼帯巻掛ロールの外周縁又は内周縁に配置した電磁石によって磁化される鋼帯上方に配設したことを特徴とする鋼帯欠陥検出装置を開示している。   In Patent Document 2, a detection sensor in which a rectangular parallelepiped core having a coil mounted thereon is opposed to each other with high accuracy and a large number of differentially coupled magnetosensitive elements are arranged in a staggered manner is provided on the outer peripheral edge or inner peripheral edge of the steel strip winding roll. Disclosed is a steel strip defect detection device that is disposed above a steel strip that is magnetized by a disposed electromagnet.

特許文献３では、通過中の鋼板（強磁性体金属被検体）を異なる複数の磁化条件で磁化し、各々の磁化条件下で同一場所における漏洩磁束の測定を行い、これらの測定結果同士を演算し、その演算結果に基づいて欠陥判定を行うことを特徴とする漏洩磁束探傷方法を開示している。   In Patent Document 3, a passing steel plate (ferromagnetic metal object) is magnetized under a plurality of different magnetization conditions, leakage magnetic flux is measured at the same location under each magnetization condition, and these measurement results are calculated. In addition, there is disclosed a leakage magnetic flux flaw detection method characterized by performing defect determination based on the calculation result.

非特許文献１ないし２には、鋼管のように円筒状の被検査材の周囲を検査用のセンサを有するプローブが周回して欠陥を検出する技術が開示されている。   Non-Patent Documents 1 and 2 disclose a technique in which a probe having a sensor for inspection circulates around a cylindrical inspection object such as a steel pipe to detect a defect.

非特許文献３には、ホールセンサを円筒状の物体に配置し、センサを周回させることなく、直径が１０８ｍｍのパイプの内部欠陥を検出する技術が開示されている。   Non-Patent Document 3 discloses a technique in which a Hall sensor is arranged on a cylindrical object and an internal defect of a pipe having a diameter of 108 mm is detected without rotating the sensor.

特開２０００−１０７０５６号公報JP 2000-107056 A 特開平８−３２７６０３号公報JP-A-8-327603 特開２０００−２２７４１８号公報JP 2000-227418 A

「山陽の非破壊検査技術」 ６１頁〜６９頁 Sanyo Technical Report，Ｖｏｌ．１１，２００４，Ｎｏ．１“Sanyo's Nondestructive Inspection Technology” pages 61-69 Sanyo Technical Report, Vol. 11, 2004, no. 1 「製品精整の高精度化」 ３７頁〜４１頁 新日鉄技報第３８６号，２００７年"High precision of product refinement" Pages 37-41 Nippon Steel Technical Report No. 386, 2007 “Inspection of the internal cracks on a pipe using a bobbin-type magnetizer and cylinder-type hall sensors array”, pp.33-34 , The 15th international workshop on Electromagnetic Nondestructive Evaluation (ENDE) 2010“Inspection of the internal cracks on a pipe using a bobbin-type magnetizer and cylinder-type hall sensors array”, pp.33-34, The 15th international workshop on Electromagnetic Nondestructive Evaluation (ENDE) 2010

しかしながら、従来の技術には以下のような問題がある。   However, the conventional techniques have the following problems.

近年、品質の厳格化に伴い、鋼板表面は言うまでもなく鋼板の内部に存在する欠陥を検出するニーズは高まりつつある。特に、鋼板表面から２００μｍ程度の深さに介在物が存在すると、これが破壊の起点となり鋼板が破断したり、圧延ロールに疵をつけ、周期疵発生の原因となる。内部欠陥の形状は、球状であったり、立方体形状であったり不定形の形状であったりする。しかしながら、内部欠陥検出装置が鋼板表面から所定の深さにおける内部欠陥を検出できるのか否かを評価する具体的手段がないのが実情であった。   In recent years, with stricter quality, there is an increasing need to detect defects existing in the steel sheet, not to mention the surface of the steel sheet. In particular, when inclusions are present at a depth of about 200 μm from the surface of the steel sheet, this becomes a starting point of fracture, and the steel sheet breaks, or the rolling roll is wrinkled, causing periodic wrinkles. The shape of the internal defect may be a spherical shape, a cubic shape, or an irregular shape. However, the actual situation is that there is no specific means for evaluating whether or not the internal defect detection device can detect internal defects at a predetermined depth from the surface of the steel sheet.

本発明は、漏洩磁束探傷装置が鋼板の表面から２００μｍ程度の深さに存在する介在物を検出するか否かを具体的に評価するための手段と方法を提供することにある。   It is an object of the present invention to provide means and a method for specifically evaluating whether or not a leakage magnetic flux flaw detector detects an inclusion existing at a depth of about 200 μm from the surface of a steel plate.

発明者らは、鋭意研究開発の結果、空間の球相当直径が同一であれば、その空間が真空であっても、あるいは気体、ＳｉＯ2、Ａｌ2Ｏ3で充填されていても、その空間の透磁率は実際の鋼板中に存在し同一の球相当直径を有する介在物の透磁率とほぼ同じであることを見出した。球相当直径とは、所定の空間と同じ体積を有する球の直径を意味する。そこでその点に着目し、鋼材表面から２００μｍ程度の位置に球相当直径１０μｍ〜９０μｍである人工空間をつくり、これを検出できるか否かをもって内部欠陥検出装置の評価とすることで課題を解決することができることを見出したのである。 As a result of diligent research and development, the inventors have determined that if the space has the same equivalent sphere diameter, even if the space is vacuum or filled with gas, SiO 2 , Al 2 O 3 , the space It has been found that the magnetic permeability of is substantially the same as the permeability of inclusions present in an actual steel plate and having the same equivalent sphere diameter. The equivalent sphere diameter means the diameter of a sphere having the same volume as a predetermined space. Therefore, paying attention to that point, an artificial space having a sphere equivalent diameter of 10 μm to 90 μm is created at a position of about 200 μm from the surface of the steel material, and the problem is solved by evaluating whether or not this can be detected as an internal defect detection device. I found out that I could do it.

本発明の要旨は以下のとおりである。
（１）第１鋼材と第２鋼材の一方又は両方に空間を形成し、当該空間を有する面を接合面として第１鋼材と第２鋼材を拡散接合により接合することによって人工空間を形成した鋼板であって、
当該鋼板は、鋼板表面から１５０〜２５０μｍの位置にその中心を有する球相当直径が１０μｍ〜９０μｍの人工空間を少なくとも一つ有し、
前記人工空間は、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物が充填されており、
前記人工空間毎に、その球相当直径、その中心と鋼板表面との距離、その中心の鋼板表面へ垂直になされた投影位置が既知であることを特徴とする人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板。
ただし、球相当直径とは、当該人工空間と同じ体積を有する球の直径を意味する。
（２）第１鋼材と第２鋼材の一方の表面を削って球相当直径が１０μｍ〜９０μｍの球と同じ体積を有する空間を作り、前記第１鋼材と第２鋼材とを空間を有する表面を接合面として拡散接合により接合することによって鋼材中に人工空間を形成し、該人工空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物で充填し、
第１鋼材の接合面でない表面を削り、第１鋼材の表面と人工空間の中心との距離を１５０〜２５０μｍとすることを特徴とする上記（１）に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。
（３）第１鋼材表面を削って１０μｍ〜９０μｍの直径を有する半球状の空間を作り、第２鋼材表面にも第１鋼材と同一の半球状の空間を作り、
第１鋼材と第２鋼材につくられた半球状の空間が結合されて形成される球状空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物を充填し、
第１鋼材と第２鋼材とを拡散接合により接合し、
接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記拡散接合部とが１５０〜２５０μｍとすることを特徴とする上記（１）に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。
（４）第１鋼材表面を削って直径１０μｍ〜９０μｍの球と同じ体積を有する上蓋のない立方体状空間を作り、前記上蓋のない立方体状空間と第２鋼材が結合されて形成される人工空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物で充填し、
第１鋼材と第２鋼材とを拡散接合により接合し、
接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記拡散接合部とが１５０〜２５０μｍから前記人工空間の球相当直径の半分の長さを差し引いた距離とすることを特徴とする上記（１）に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。
（５）上記（１）に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板を用い、人工空間を内部欠陥として検出するか否かを判定することを特徴とする感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置の内部欠陥検出性能検査方法。
The gist of the present invention is as follows.
(1) A steel plate in which an artificial space is formed by forming a space in one or both of the first steel material and the second steel material, and joining the first steel material and the second steel material by diffusion bonding using the surface having the space as a joining surface. Because
The steel sheet has at least one artificial space having a spherical equivalent diameter of 10 μm to 90 μm having a center at a position of 150 to 250 μm from the steel sheet surface,
The artificial space is filled with SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof,
A magnetosensitive region having an artificial space, characterized in that, for each artificial space, a sphere equivalent diameter, a distance between the center and the steel plate surface, and a projection position perpendicular to the steel plate surface at the center are known. A steel plate for evaluating a leakage magnetic flux flaw detector using a 20 μm square Hall element.
However, the sphere equivalent diameter means the diameter of a sphere having the same volume as the artificial space.
(2) One surface of the first steel material and the second steel material is scraped to create a space having the same volume as a sphere having a sphere equivalent diameter of 10 μm to 90 μm, and the first steel material and the second steel material have a surface having a space. An artificial space is formed in the steel by joining by diffusion bonding as a joining surface, and the artificial space is filled with SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof,
A magnetic sensitive region having an artificial space according to (1) above, wherein a surface of the first steel material that is not a joint surface is cut, and the distance between the surface of the first steel material and the center of the artificial space is 150 to 250 μm. Of manufacturing a steel plate for evaluation of a leakage magnetic flux flaw detector using a 20 μm square Hall element.
(3) The surface of the first steel material is cut to create a hemispherical space having a diameter of 10 μm to 90 μm, and the same hemispherical space as that of the first steel material is also formed on the second steel material surface.
The spherical space in which the first steel and hemispherical space created in the second steel is formed are combined, filled with SiO 2, Al 2 O 3, ZrO 2, TiO 2, CaO, MgO or a mixture thereof ,
The first steel material and the second steel material are joined by diffusion bonding,
The surface of the 1st steel material which is not a joining surface is shaved, and the surface of the 1st steel material and the said diffusion joined part are 150-250 micrometers, The magnetosensitive area | region which has the artificial space as described in said (1) characterized by the above-mentioned is 20 micrometers A method for manufacturing a steel plate for evaluation of a leakage magnetic flux flaw detector using a square Hall element.
(4) An artificial space formed by cutting the surface of the first steel material to form a cubic space without an upper lid having the same volume as a sphere having a diameter of 10 μm to 90 μm and combining the cubic space without the upper lid and the second steel material. and filled with SiO 2, Al 2 O 3, ZrO 2, TiO 2, CaO, MgO or mixtures thereof,
The first steel material and the second steel material are joined by diffusion bonding,
The surface of the 1st steel material which is not a joining surface is shaved, and the surface of the 1st steel material and the said diffusion junction part are set as the distance which deducted the length of the half of the sphere equivalent diameter of the said artificial space from 150-250 micrometers. A method for producing a steel plate for evaluation of a leakage magnetic flux flaw detector using a Hall element having an artificial space as described in (1) and having a magnetosensitive area of 20 μm square.
(5) Using a steel plate for leakage magnetic flux flaw detector evaluation using the Hall element having the artificial space described in (1) and having a magnetosensitive area of 20 μm square, whether or not the artificial space is detected as an internal defect is determined. An internal defect detection performance inspection method for a leakage magnetic flux flaw detector using a Hall element having a magnetosensitive area of 20 μm square.

本発明の方法により、漏洩磁束探傷装置が鋼材表面から２００μｍ程度の位置に存在する１０μｍ〜９０μｍの球相当直径を有する大きさの介在物を検出できるか否かをオフラインで適切に評価できるという顕著な効果を奏する。   By the method of the present invention, it is possible to appropriately evaluate whether or not the leakage magnetic flux flaw detector can detect inclusions having a sphere-equivalent diameter of 10 μm to 90 μm existing at a position of about 200 μm from the steel material surface. Has an effect.

漏洩磁束探傷装置の一例を示す図である。It is a figure which shows an example of a leakage magnetic flux flaw detector. 球状の人工空間を有する鋼板の断面図であり、（ａ）は接合後、（ｂ）は接合前を示す。It is sectional drawing of the steel plate which has spherical artificial space, (a) is after joining, (b) shows before joining. 立法体状の人工空間を有する鋼板の断面図であり、（ａ）は接合後、（ｂ）は接合前を示す。It is sectional drawing of the steel plate which has a legitimate artificial space, (a) after joining, (b) shows before joining. 球状の人工空間を有する鋼板を用いた漏洩磁束探傷装置の検査Inspection of leakage magnetic flux flaw detector using steel plate with spherical artificial space 立方体状の人工空間を有する鋼板を用いた漏洩磁束探傷装置の検査Inspection of leakage magnetic flux flaw detector using steel plate with cubic artificial space 実施例に用いた形状の人工空間を有する鋼板とそれへの漏洩磁束探傷装置の検査Inspection of a steel plate having an artificial space with the shape used in the embodiment and a leakage magnetic flux flaw detector to the steel plate 実施例に用いた形状の人工空間を有する鋼板の断面図であり、（ａ）は接合後、（ｂ）は接合前を示す。It is sectional drawing of the steel plate which has the artificial space of the shape used for the Example, (a) is after joining, (b) shows before joining. 疑似介在物を有する鋼板への検査結果Inspection results for steel plates with pseudo inclusions 実ラインで製造された鋼板への介在物検査結果Inclusion inspection results for steel plates manufactured on actual lines

本発明において、鋼板の内部に形成する人工空間の形状は、当該人工空間と同じ体積を有する球の直径を球相当直径としたとき、球相当直径が１０〜９０μｍであれば人工空間の形状を問わない。また、人工空間を有する鋼板の製造方法としては、第１鋼材と第２鋼材の一方の表面を削って球相当直径が１０μｍ〜９０μｍの球と同じ体積を有する空間を作り、前記第１鋼材と第２鋼材とを空間を有する表面を接合面として拡散接合により接合することによって鋼材中に人工空間を形成し、該人工空間を真空にし、あるいは気体、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物で充填し、第１鋼材の接合面でない表面を削り、第１鋼材の表面と人工空間の中心との距離を１５０〜２５０μｍとする方法を採用することができる。 In the present invention, the shape of the artificial space formed inside the steel plate is the shape of the artificial space when the diameter of the sphere having the same volume as the artificial space is a sphere equivalent diameter, and the sphere equivalent diameter is 10 to 90 μm. It doesn't matter. Moreover, as a manufacturing method of the steel plate which has artificial space, the space which has the same volume as a ball | bowl whose sphere equivalent diameter is 10 micrometers-90 micrometers by shaving one surface of 1st steel material and 2nd steel material, and said 1st steel material, An artificial space is formed in the steel material by joining the second steel material by diffusion bonding using a surface having a space as a joint surface, and the artificial space is evacuated, or gas, SiO 2 , Al 2 O 3 , ZrO 2 , Filling with TiO 2 , CaO, MgO or a mixture thereof, scraping the surface that is not the joint surface of the first steel material, and adopting a method in which the distance between the surface of the first steel material and the center of the artificial space is 150 to 250 μm. it can.

以下、第１の実施の形態として人工空間が球状である場合、第２の実施の形態として人工空間が立方体状である場合について説明する。   Hereinafter, a case where the artificial space is spherical as the first embodiment and a case where the artificial space is cubic as the second embodiment will be described.

［第１の実施形態］
第１の実施形態は、直径が１０μｍ〜９０μｍの球状の人工空間を少なくとも一つを内包する人工空間を有する鋼板を用いて漏洩磁束探傷装置の内部欠陥検出性能を検査する方法である。 [First Embodiment]
The first embodiment is a method for inspecting internal defect detection performance of a leakage magnetic flux flaw detector using a steel plate having an artificial space containing at least one spherical artificial space having a diameter of 10 μm to 90 μm.

（検査に用いる鋼板）
検査に用いる鋼板について図２を用いて説明する。 (Steel plate used for inspection)
The steel plate used for the inspection will be described with reference to FIG.

検査には、鋼板表面から１５０〜２５０μｍの位置にその中心を有する直径が１０μｍ〜９０μｍの球状の人工空間を少なくとも一つ以上内包する鋼板を用いる。球状の人工空間は疑似内部欠陥に相当する。   For the inspection, a steel plate that includes at least one spherical artificial space having a diameter of 10 μm to 90 μm at a position 150 to 250 μm from the surface of the steel plate is used. The spherical artificial space corresponds to a pseudo internal defect.

前記球状の人工空間毎に、その直径、その中心と鋼板表面との距離、その中心の鋼板表面側への垂直投影位置が既知である。どこにどのような疑似内部欠陥が存在するかを把握していなければ正確な内部欠陥検出装置の評価を行うことができないからである。   For each of the spherical artificial spaces, the diameter, the distance between the center and the steel plate surface, and the vertical projection position of the center on the steel plate surface side are known. This is because an accurate evaluation of the internal defect detection device cannot be performed unless it is known where and what kind of pseudo internal defect exists.

前記球状の人工空間は人工球状欠陥であり、検出する介在物に応じて、人工空間を真空とし、あるいは気体、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物が充填されていても良い。気体の種類としては、空気、アルゴン、又は水素とすることができる。 The spherical artificial space is an artificial spherical defect, and depending on the inclusion to be detected, the artificial space is evacuated or gas, SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof. May be filled. The type of gas can be air, argon, or hydrogen.

（検査に用いる鋼板の製造方法）
鋼板を２枚用意し、一方を第１鋼材、他方を第２鋼材と称する。 (Manufacturing method of steel plate used for inspection)
Two steel plates are prepared, one is called the first steel material and the other is called the second steel material.

まず、第１鋼材表面を削って１０μｍ〜９０μｍの直径を有する半球状の空間を作り、第２鋼材表面にも第１鋼材と同一の半球状の空間を作る。   First, the surface of the first steel material is cut to create a hemispherical space having a diameter of 10 μm to 90 μm, and the same hemispherical space as the first steel material is also formed on the surface of the second steel material.

次に、第１鋼材と第２鋼材につくられた半球状の空間が結合されて球状空間となるように第１鋼材と第２鋼材とを拡散接合により接合する。拡散接合をするのは簡易かつ確実に鋼板を接合できるからである。拡散接合は、制御された雰囲気中で第１鋼材と第２鋼材を融点以下でかつ再結晶温度以上に加熱し、大きな形状変化を生じないように加圧して接合する方法である。接合面が平滑でかつ清浄であることが重要であり、接合前に機械的あるいは化学的に研磨し、表面粗さを２．５μｍ以下とすると良い。接合雰囲気としては、真空（１０-2〜１０-4Ｐａ）とするか、あるいはアルゴンや水素雰囲気とする。 Next, the first steel material and the second steel material are joined by diffusion bonding so that the hemispherical spaces formed in the first steel material and the second steel material are joined to form a spherical space. The reason why the diffusion bonding is performed is that the steel plates can be bonded easily and reliably. Diffusion bonding is a method in which the first steel material and the second steel material are heated to a temperature below the melting point and above the recrystallization temperature in a controlled atmosphere, and are pressed and bonded so as not to cause a significant shape change. It is important that the joining surface is smooth and clean, and it is preferable that the surface roughness be 2.5 μm or less by mechanically or chemically polishing before joining. The bonding atmosphere is a vacuum (10 −2 to 10 −4 Pa), or an argon or hydrogen atmosphere.

人工空間内部の雰囲気について、通常は拡散接合を行う際の雰囲気の種類によって決まる。即ち、拡散接合を真空中で行えば、人工空間は真空となる。また、拡散接合をアルゴン雰囲気中で行えば人工空間はアルゴンで充填される。一方、拡散接合の前に人工空間の内部にＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物を充填すれば、拡散接合後の人工空間がこれら酸化物で充填されることとなる。 The atmosphere inside the artificial space is usually determined by the type of atmosphere when performing diffusion bonding. That is, if diffusion bonding is performed in a vacuum, the artificial space becomes a vacuum. If diffusion bonding is performed in an argon atmosphere, the artificial space is filled with argon. On the other hand, if the artificial space is filled with SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof before diffusion bonding, the artificial space after diffusion bonding is filled with these oxides. Will be.

さらに、接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記拡散接合した面との距離が１５０〜２５０μｍとなるようにする。こうすることで、１０μｍ〜９０μｍの直径を有する球状の人工空間の中心が第１鋼材表面から１５０〜２５０μｍの位置とすることができるからである。   Furthermore, the surface of the 1st steel material which is not a joining surface is shaved, and it is made for the distance of the surface of a 1st steel material, and the said diffusion-bonded surface to be 150-250 micrometers. This is because the center of the spherical artificial space having a diameter of 10 μm to 90 μm can be positioned 150 to 250 μm from the surface of the first steel material.

（検査に用いる鋼板の数値限定理由）
鋼板表面から２００μｍ程度の位置に存在する介在物を検出し得るか否かを評価することが目的である。製造誤差はおよそ−５０〜＋５０μｍ程度あることから、鋼材表面から１５０〜２５０μｍの位置に球状空間を作ることとした。また、検出対象の内部欠陥である介在物の大きさが１０μｍ〜９０μｍであることから球状の人工空間の直径を１０μｍ〜９０μｍとした。 (Reason for limiting numerical values of steel sheets used for inspection)
The purpose is to evaluate whether or not inclusions present at a position of about 200 μm from the steel sheet surface can be detected. Since the manufacturing error is about −50 to +50 μm, a spherical space is formed at a position 150 to 250 μm from the steel surface. Moreover, since the size of the inclusion which is an internal defect to be detected is 10 μm to 90 μm, the diameter of the spherical artificial space is set to 10 μm to 90 μm.

図４を用いて漏洩磁束探傷装置の内部欠陥検出性能を検査する態様について説明する。   An aspect of inspecting the internal defect detection performance of the leakage magnetic flux flaw detector will be described with reference to FIG.

検査に用いる鋼板の表面上に励磁コイル９から構成される磁化器３と磁気センサ７を設置する。設置後、励磁コイル９に直流電流を流し、鋼材から発生する磁界を磁気センサ７で測定する。測定後、励磁コイル９の直流電流を止め、交流電流を流し、鋼材を消磁させる。その後、図４のｘ方向に磁化器３とセンサ７を動かし、これら操作を繰り返す。ここで、検出信号としては、例えば、磁界の空間微分値とし、空間微分値に変化があるところが、疑似内部欠陥の存在位置となる。なお、磁界値の変化で、疑似内部欠陥の存在を検知することもでき、この場合は、疑似介在物がない鋼材から発生する磁界分布の差で変化を見ることになる。   A magnetizer 3 and a magnetic sensor 7 including an exciting coil 9 are installed on the surface of a steel plate used for inspection. After installation, a direct current is passed through the exciting coil 9 and the magnetic field generated from the steel material is measured by the magnetic sensor 7. After the measurement, the direct current of the exciting coil 9 is stopped, the alternating current is passed, and the steel material is demagnetized. Thereafter, the magnetizer 3 and the sensor 7 are moved in the x direction in FIG. 4, and these operations are repeated. Here, as the detection signal, for example, the spatial differential value of the magnetic field is used, and the place where the spatial differential value changes is the position where the pseudo internal defect exists. The presence of a pseudo internal defect can also be detected by a change in the magnetic field value. In this case, the change is observed by a difference in magnetic field distribution generated from a steel material having no pseudo inclusions.

［第２の実施形態］
第２の実施形態は、球相当直径が１０μｍ〜９０μｍの人工立方体状空間を少なくとも一つ以上内包する鋼板を用いて漏洩磁束探傷装置の内部欠陥検出性能を検査する方法である。検査に用いる鋼板について図２を用いて説明する。 [Second Embodiment]
The second embodiment is a method for inspecting the internal defect detection performance of the leakage magnetic flux flaw detector using a steel plate containing at least one artificial cubic space having a sphere equivalent diameter of 10 μm to 90 μm. The steel plate used for the inspection will be described with reference to FIG.

（検査に用いる鋼板の構造）
検査には、鋼板表面から１５０〜２５０μｍの位置にその中心を有する球相当直径が１０μｍ〜９０μｍの人工立方体状空間を少なくとも一つ内包する鋼板を用いる。立方体状人工空間は疑似内部欠陥に相当する。 (Structure of steel plate used for inspection)
For the inspection, a steel plate containing at least one artificial cubic space having a sphere-equivalent diameter of 10 μm to 90 μm having a center at a position 150 to 250 μm from the surface of the steel plate is used. The cubic artificial space corresponds to a pseudo internal defect.

前記立方体状人工空間毎に、１辺の長さ、その中心と鋼板表面との距離、その中心の鋼板表面への垂直投影位置が既知である。どこにどのような疑似内部欠陥が存在するかを把握していなければ正確な内部欠陥検出装置の評価を行うことができないからである。   For each of the cubic artificial spaces, the length of one side, the distance between the center and the steel plate surface, and the vertical projection position of the center on the steel plate surface are known. This is because an accurate evaluation of the internal defect detection device cannot be performed unless it is known where and what kind of pseudo internal defect exists.

前記立方体状人工空間は人工立方体状欠陥であり、検出する介在物に応じて、人工空間を真空とし、あるいは気体、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物が充填されていても良い。 The cubic artificial space is an artificial cubic defect, and depending on the inclusions to be detected, the artificial space is evacuated or gas, SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or these The mixture may be filled.

（検査に用いる鋼板の製造方法）
鋼板を２枚用意し、一方を第１鋼材、他方を第２鋼材と称する。 (Manufacturing method of steel plate used for inspection)
Two steel plates are prepared, one is called the first steel material and the other is called the second steel material.

直径がｄである球の体積はπｄ3／６であるから、当該球と同じ体積の立方体についてはその１辺が(π／６)1/3ｄ≒０．８ｄとなる。そこで、図３（ｂ）に示すように第２鋼材表面を削って１辺が８μｍ〜７０μｍの直方体状空間を作り、これと第１鋼材とを拡散接合により接合することで、立方体空間を成形する。あるいは、第１鋼材表面を削って１辺が８μｍ〜７０μｍであり、当該１辺の長さの半分を深さとする上蓋のない直方体状空間を作り、前記上蓋のない直方体状空間の上に第１鋼材と同様な直方体を作った第２鋼材を第１鋼材と拡散接合により接合することで、立方体空間を成形する。拡散接合をするのは簡易かつ確実に鋼板を接合できるからである。拡散接合は前記第１の実施の形態と同様に実施することが出来る。 Since the volume of a sphere having a diameter of d is [pi] d 3/6, the one side for a cube of the same volume as the sphere is (π / 6) 1/3 d ≒ 0.8d. Therefore, as shown in FIG. 3 (b), the surface of the second steel material is cut to create a rectangular parallelepiped space with sides of 8 μm to 70 μm, and this and the first steel material are joined by diffusion bonding to form a cubic space. To do. Alternatively, the surface of the first steel material is scraped to form a rectangular parallelepiped space without an upper lid having one side of 8 μm to 70 μm and a half of the length of the one side as a depth, and the first steel material is formed on the rectangular parallelepiped space without the upper lid. A cubic space is formed by joining a second steel material, which has a rectangular parallelepiped shape similar to the one steel material, to the first steel material by diffusion bonding. The reason why the diffusion bonding is performed is that the steel plates can be bonded easily and reliably. Diffusion bonding can be performed in the same manner as in the first embodiment.

第１鋼材と第２鋼材とで形成される立方体状の人工空間を真空とし、あるいは気体、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物が充填した後に、第１鋼材と第２鋼材とを拡散接合により接合する。 After the cubic artificial space formed by the first steel material and the second steel material is evacuated or filled with gas, SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof, The first steel material and the second steel material are joined by diffusion bonding.

接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記人工空間の中心との距離を１５０〜２５０μｍとする。こうすることで、図３（ａ）に示すように、１０μｍ〜９０μｍの球相当直径を有する立方体の中心が第１鋼材表面から１５０〜２５０μｍの位置となる。   The surface of the 1st steel material which is not a joining surface is shaved, and the distance of the surface of a 1st steel material and the center of the said artificial space shall be 150-250 micrometers. By doing so, as shown in FIG. 3A, the center of a cube having a sphere equivalent diameter of 10 μm to 90 μm is positioned 150 to 250 μm from the surface of the first steel material.

（検査に用いる鋼板の数値限定理由）
鋼板表面から２００μｍ程度の位置に存在する介在物を検出できるか否かを評価することが目的である。製造誤差はおよそ−５０〜＋５０μｍ程度あることから、鋼材表面から１５０〜２５０μｍの位置に立方体状空間を作ることとした。 (Reason for limiting numerical values of steel sheets used for inspection)
The purpose is to evaluate whether or not inclusions present at a position of about 200 μm from the steel sheet surface can be detected. Since the manufacturing error is about −50 to +50 μm, a cubic space is formed at a position 150 to 250 μm from the steel surface.

また、内部欠陥である介在物の大きさ（球相当直径）が１０μｍ〜９０μｍであることから立方体状人工空間の体積を直径１０μｍ〜９０μｍの球と同一とした。   In addition, since the size of inclusions (equivalent sphere diameter) which is an internal defect is 10 μm to 90 μm, the volume of the cubic artificial space is made the same as a sphere having a diameter of 10 μm to 90 μm.

図５を用いて漏洩磁束探傷装置の内部欠陥検出性能を検査する態様について説明する。   An aspect of inspecting the internal defect detection performance of the leakage magnetic flux flaw detector will be described with reference to FIG.

検査に用いる鋼板の上に励磁コイル９から構成される磁化器３と磁気センサ７を設置する。設置後、励磁コイル９に直流電流を流し、鋼材から発生する磁界を測定する。測定後、励磁コイル９の直流電流を止め、交流電流を流し、鋼材を消磁させる。その後、図５のｘ方向に磁化器３とセンサ７を動かし、これら操作を繰り返す。ここで、検出信号としては、例えば、磁界の空間微分値とし、空間微分値に変化があるところが、疑似内部欠陥の存在位置となる。なお、磁界値の変化で、疑似内部欠陥の存在を検知することもでき、この場合は、疑似介在物がない鋼材から発生する磁界分布の差で変化を見ることになる。   A magnetizer 3 and a magnetic sensor 7 including an exciting coil 9 are installed on a steel plate used for inspection. After installation, a direct current is passed through the exciting coil 9 to measure the magnetic field generated from the steel material. After the measurement, the direct current of the exciting coil 9 is stopped, the alternating current is passed, and the steel material is demagnetized. Thereafter, the magnetizer 3 and the sensor 7 are moved in the x direction in FIG. 5 and these operations are repeated. Here, as the detection signal, for example, the spatial differential value of the magnetic field is used, and the place where the spatial differential value changes is the position where the pseudo internal defect exists. The presence of a pseudo internal defect can also be detected by a change in the magnetic field value. In this case, the change is observed by a difference in magnetic field distribution generated from a steel material having no pseudo inclusions.

本発明に従い、図６に示すように、表層から２２５μｍ深さ内部に、径５０μｍ高さ５０μｍの円柱状の人工空間（疑似内部欠陥）が存在する長さ１００ｍｍ、幅１０ｍｍ、厚み４ｍｍの試料を作成した。ここで、鋼板の材質は、Ｓ４５Ｃの炭素鋼であり、円柱状の人工空間（疑似内部欠陥）は、拡散接合前に、図７（ｂ）に示すように、鋼板の一つに、直径５０μｍのドリルで５０μｍの深さまで切削し、もう一つの同じ寸法の鋼板を穴の開いた方の鋼板に重ねて、公知の拡散接合法により真空雰囲気中で接合した。その後、疑似内部欠陥の表面からの深さを調整するために、図７（ａ）の表面１４側を研磨し、最終的に図６に示す表面から２００μｍ深さに人工空間（疑似内部欠陥）が存在するように作成した。ここで、図６に示す疑似内部欠陥の断面が長方形ではなく、一方が三角状に描いているのは、ドリル加工の場合、ドリル先端が鋭角な形状によるものである。加工方法によって、人工空間（疑似内部欠陥）の形状は、正確な球形や立方形状からずれた形をとる場合がある。本発明では、本実施例のように、内部欠陥の形状が、円柱状と三角錐状を組み合わせたものも含まれる。人工空間内の雰囲気は真空となった。   In accordance with the present invention, as shown in FIG. 6, a sample having a length of 100 mm, a width of 10 mm, and a thickness of 4 mm in which a cylindrical artificial space (pseudo internal defect) having a diameter of 50 μm and a height of 50 μm exists within a depth of 225 μm from the surface layer. Created. Here, the material of the steel plate is S45C carbon steel, and the columnar artificial space (pseudo internal defect) has a diameter of 50 μm in one of the steel plates as shown in FIG. Then, another steel plate having the same dimensions was stacked on the steel plate having the hole and joined in a vacuum atmosphere by a known diffusion bonding method. Thereafter, in order to adjust the depth from the surface of the pseudo internal defect, the surface 14 side in FIG. 7A is polished, and finally the artificial space (pseudo internal defect) is 200 μm deep from the surface shown in FIG. Created to exist. Here, the reason why the cross section of the pseudo internal defect shown in FIG. 6 is not rectangular but one is drawn in a triangular shape is that the drill tip has an acute angle shape in the case of drilling. Depending on the processing method, the shape of the artificial space (pseudo internal defect) may take a shape deviated from an accurate spherical shape or cubic shape. In the present invention, as in the present embodiment, the shape of the internal defect includes a combination of a columnar shape and a triangular pyramid shape. The atmosphere in the artificial space became a vacuum.

本作成した試料を用いて、図６に示されているように、励磁コイル９から構成された磁化器３と磁気センサ７を鋼板の長手方向（Ｘ方向）に走査させて疑似内部欠陥の位置検知を行った。ここで、励磁コイルには、０．８Ａの直流電流を流し、磁気センサには、感磁領域が２０μｍ角の磁気ホール素子を用いた。位置検知には、試料に発生する磁界の空間微分値を信号として測定した。   As shown in FIG. 6, by using the sample thus prepared, the magnetizer 3 and the magnetic sensor 7 composed of the exciting coil 9 are scanned in the longitudinal direction (X direction) of the steel plate, and the position of the pseudo internal defect is detected. Detection was performed. Here, a direct current of 0.8 A was passed through the exciting coil, and a magnetic Hall element having a magnetosensitive area of 20 μm square was used as the magnetic sensor. For position detection, the spatial differential value of the magnetic field generated in the sample was measured as a signal.

図８（ａ）は、鋼材の材質がＳ４５Ｃの内部介在物が無い場合の長さ１００ｍｍ、幅１０ｍｍ、厚み４ｍｍの試料を使った内部欠陥検知の結果を示す。グラフが示すように、内部欠陥の存在を示す磁界の空間微分値は得られない。一方、上述の図６に示すような内部欠陥が表層から２００μｍ深さにある試料では、図８（ｂ）が示すように、内部欠陥を示す磁界の空間微分値の変化を信号として得ることができた。   FIG. 8A shows the result of internal defect detection using a sample having a length of 100 mm, a width of 10 mm, and a thickness of 4 mm when the steel material has no internal inclusion of S45C. As the graph shows, a spatial differential value of the magnetic field indicating the presence of internal defects cannot be obtained. On the other hand, in the sample in which the internal defect as shown in FIG. 6 is 200 μm deep from the surface layer, as shown in FIG. 8B, the change in the spatial differential value of the magnetic field indicating the internal defect can be obtained as a signal. did it.

一方、具体的に工場で製造された実際の鋼材試料に対して、深さ２００μｍ内部に存在する５０μｍ径の介在物の検知を行った。上述と同様に、励磁器３と磁気センサ７を鋼板表面上に設置し、直流電流０．８Ａを流し、感磁領域が２０μｍ角の磁気ホール素子を用いて、鋼板表面上を走査検知した。その結果、図９に示すように、磁界の空間微分値に変化が出た部分を取り出し、断面研磨と顕微鏡観察を行ったところ、介在物の存在を確認出来た。また、この試料を、さらにスライム法などで介在物のみの抽出を行い、成分分析したところ、シリカ系の介在物であることを確認出来た。   On the other hand, inclusions with a diameter of 50 μm present inside a depth of 200 μm were detected for an actual steel material sample specifically manufactured in a factory. In the same manner as described above, the exciter 3 and the magnetic sensor 7 were installed on the surface of the steel sheet, a direct current of 0.8 A was passed, and a magnetic Hall element having a magnetosensitive area of 20 μm square was scanned and detected on the surface of the steel sheet. As a result, as shown in FIG. 9, when a portion where the spatial differential value of the magnetic field changed was taken out and subjected to cross-sectional polishing and microscopic observation, the presence of inclusions could be confirmed. Further, this sample was further extracted only with inclusions by the slime method and analyzed for components, and it was confirmed that it was a silica-based inclusion.

また、上記人工空間内に、気体としてアルゴン又は窒素、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯ、並びにこれらの混合物を入れて拡散接合し、上記と同様、鋼材に発生する磁界の空間微分値を信号として測定した。ここで、アルゴン、窒素は、拡散接合時の雰囲気をアルゴン、窒素に置き換えて行ったものである。結果を表１に示す。いずれの充填の場合も、図６に示すような内部欠陥が表層から２００μｍ深さにある試料では、内部欠陥を示す磁界の空間微分値の変化が信号として得られた。 In addition, argon or nitrogen, SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO, and a mixture thereof are put into the artificial space as diffusion gas and diffusion-bonded. The spatial differential value of the magnetic field to be measured was measured as a signal. Here, argon and nitrogen are obtained by replacing the atmosphere during diffusion bonding with argon and nitrogen. The results are shown in Table 1. In any case, in the sample in which the internal defect as shown in FIG. 6 was at a depth of 200 μm from the surface layer, a change in the spatial differential value of the magnetic field indicating the internal defect was obtained as a signal.

Figure 0005699793
Figure 0005699793

１ 被検査材
２ 人工空間を有する鋼板
３ 磁化器
４ 磁束
５ 内部欠陥
６ 漏洩磁束
７ 磁気センサ
８ 信号処理部
９ 励磁コイル
１０ 人工空間
１１ 接合部
１２ 人工立法体空間
１３ 疑似介在物
１４ 研磨表面 DESCRIPTION OF SYMBOLS 1 Test material 2 Steel plate with artificial space 3 Magnetizer 4 Magnetic flux
5 Internal defects 6 Leakage magnetic flux
7 Magnetic sensor 8 Signal processor
9 Excitation coil 10 Artificial space 11 Joint 12 Artificial body space 13 Pseudo inclusion 14 Polishing surface

Claims (5)

第１鋼材と第２鋼材の一方又は両方に空間を形成し、当該空間を有する面を接合面として第１鋼材と第２鋼材を拡散接合により接合することによって人工空間を形成した鋼板であって、
当該鋼板は、鋼板表面から１５０〜２５０μｍの位置にその中心を有する球相当直径が１０μｍ〜９０μｍの人工空間を少なくとも一つ有し、
前記人工空間は、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物が充填されており、
前記人工空間毎に、その球相当直径、その中心と鋼板表面との距離、その中心の鋼板表面へ垂直になされた投影位置が既知であることを特徴とする人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板。
ただし、球相当直径とは、当該人工空間と同じ体積を有する球の直径を意味する。 A steel plate in which an artificial space is formed by forming a space in one or both of the first steel material and the second steel material, and joining the first steel material and the second steel material by diffusion bonding with a surface having the space as a joining surface. ,
The steel sheet has at least one artificial space having a spherical equivalent diameter of 10 μm to 90 μm having a center at a position of 150 to 250 μm from the steel sheet surface,
The artificial space is filled with SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof,
A magnetosensitive region having an artificial space, characterized in that, for each artificial space, a sphere equivalent diameter, a distance between the center and the steel plate surface, and a projection position perpendicular to the steel plate surface at the center are known. A steel plate for evaluating a leakage magnetic flux flaw detector using a 20 μm square Hall element.
However, the sphere equivalent diameter means the diameter of a sphere having the same volume as the artificial space. 第１鋼材と第２鋼材の一方の表面を削って球相当直径が１０μｍ〜９０μｍの球と同じ体積を有する空間を作り、前記第１鋼材と第２鋼材とを空間を有する表面を接合面として拡散接合により接合することによって鋼材中に人工空間を形成し、該人工空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物で充填し、
第１鋼材の接合面でない表面を削り、第１鋼材の表面と人工空間の中心との距離を１５０〜２５０μｍとすることを特徴とする請求項１に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。 A surface having the same volume as a sphere having a sphere equivalent diameter of 10 μm to 90 μm is formed by scraping one surface of the first steel material and the second steel material, and the surface having the space is used as a joint surface with the first steel material and the second steel material. An artificial space is formed in the steel material by bonding by diffusion bonding, and the artificial space is filled with SiO 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof,
The magnetosensitive region having an artificial space according to claim 1, wherein a surface of the first steel material that is not a joint surface is shaved, and a distance between the surface of the first steel material and the center of the artificial space is 150 to 250 μm. A method for manufacturing a steel plate for evaluating a leakage magnetic flux flaw detector using a 20 μm square Hall element. 第１鋼材表面を削って１０μｍ〜９０μｍの直径を有する半球状の空間を作り、第２鋼材表面にも第１鋼材と同一の半球状の空間を作り、
第１鋼材と第２鋼材につくられた半球状の空間が結合されて形成される球状空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物を充填し、
第１鋼材と第２鋼材とを拡散接合により接合し、
接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記拡散接合部とが１５０〜２５０μｍとすることを特徴とする請求項１に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。 The first steel material surface is cut to create a hemispherical space having a diameter of 10 μm to 90 μm, and the second steel material surface is also made the same hemispherical space as the first steel material,
The spherical space in which the first steel and hemispherical space created in the second steel is formed are combined, filled with SiO 2, Al 2 O 3, ZrO 2, TiO 2, CaO, MgO or a mixture thereof ,
The first steel material and the second steel material are joined by diffusion bonding,
The surface of the 1st steel material which is not a joining surface is shaved, and the surface of the 1st steel material and the said diffusion joined part are 150-250 micrometers, The magnetosensitive area | region which has an artificial space of Claim 1 characterized by the above-mentioned. Of manufacturing a steel plate for evaluation of leakage magnetic flux flaw detector using a Hall element. 第１鋼材表面を削って直径１０μｍ〜９０μｍの球と同じ体積を有する上蓋のない立方体状空間を作り、前記上蓋のない立方体状空間と第２鋼材が結合されて形成される人工空間を、ＳｉＯ2、Ａｌ2Ｏ3、ＺrＯ2、ＴｉＯ2、ＣａＯ、ＭｇＯないしこれらの混合物で充填し、
第１鋼材と第２鋼材とを拡散接合により接合し、
接合面でない第１鋼材の表面を削り、第１鋼材の表面と前記拡散接合部とが１５０〜２５０μｍから前記人工空間の球相当直径の半分の長さを差し引いた距離とすることを特徴とする請求項１に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板の製造方法。 The surface of the first steel material is cut to create a cubic space without an upper lid having the same volume as a sphere having a diameter of 10 μm to 90 μm, and an artificial space formed by combining the cubic space without the upper lid and the second steel material is made of SiO 2 2 , Al 2 O 3 , ZrO 2 , TiO 2 , CaO, MgO or a mixture thereof,
The first steel material and the second steel material are joined by diffusion bonding,
The surface of the 1st steel material which is not a joining surface is shaved, and the surface of the 1st steel material and the said diffusion junction part are set as the distance which deducted the length of the half of the sphere equivalent diameter of the said artificial space from 150-250 micrometers. A manufacturing method of a steel plate for evaluation of a leakage magnetic flux flaw detector using the Hall element having an artificial space according to claim 1 and having a magnetosensitive area of 20 μm square. 請求項１に記載の人工空間を有する、感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置評価用鋼板を用い、人工空間を内部欠陥として検出するか否かを判定することを特徴とする感磁領域が２０μｍ角のホール素子を用いた漏洩磁束探傷装置の内部欠陥検出性能検査方法。   It is determined whether or not to detect an artificial space as an internal defect using a steel plate for leakage magnetic flux flaw detector evaluation using the Hall element having the artificial space according to claim 1 and having a magnetosensitive area of 20 μm square. An internal defect detection performance inspection method for a leakage magnetic flux flaw detector using a Hall element having a magnetic sensitive area of 20 μm square.
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