JP5676100B2 - ニアネットシェイプ焼結セラミックを用いた圧力センサ - Google Patents
ニアネットシェイプ焼結セラミックを用いた圧力センサ Download PDFInfo
- Publication number
- JP5676100B2 JP5676100B2 JP2009507749A JP2009507749A JP5676100B2 JP 5676100 B2 JP5676100 B2 JP 5676100B2 JP 2009507749 A JP2009507749 A JP 2009507749A JP 2009507749 A JP2009507749 A JP 2009507749A JP 5676100 B2 JP5676100 B2 JP 5676100B2
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- chamber
- deflectable
- sintered ceramic
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y80/00—Products made by additive manufacturing
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Description
Claims (5)
- センサボディと、センサボディに取付けられた偏向可能な部品と、を有し、
偏向可能な部品は、検出されるべきパラメータに応答する、センサにおいて、
センサボディと偏向可能な部品は、酸窒化アルミニウムスピネルおよびアルミン酸マグネシウムスピネルの少なくとも1つからなるニアネットシェイプ焼結セラミックで形成され、
センサボディは、チャンバを有する第1の部分と、チャンバを有する第2の部分と、を含み、
第1の部分は、第2の部分中へ延びてこれに取付けられ、
偏向可能な部品が、第1の部分のチャンバと第2の部分のチャンバとの間に取付けられる、
ことを特徴とするセンサ。 - 検出されるべきパラメータは圧力であり、
センサボディおよび偏向可能な部品は、少なくとも1つの圧力検出チャンバを構成する、
請求項1に記載のセンサ。 - センサは、容量型差圧センサからなり、
偏向可能な部品は、第1のチャンバと第2のチャンバとの間に位置決めされた中央ダイヤフラムを含み、
中央ダイヤフラムは、第1および第2のチャンバの中の流体圧力の関数として偏向可能である、
請求項2に記載のセンサ。 - 焼結セラミックは、約350GPa(50.8×106psi)未満の弾性係数および約1.5MPa・m-1/2より大きい破壊靱性を有するセラミック材料からなる、請求項1に記載のセンサ。
- 金属温度センサは、センサボディの表面に固定される、請求項1に記載のセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US79481306P | 2006-04-25 | 2006-04-25 | |
US60/794,813 | 2006-04-25 | ||
PCT/US2007/009858 WO2007127170A2 (en) | 2006-04-25 | 2007-04-24 | Pressure sensor using near net shape sintered ceramics |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2009535622A JP2009535622A (ja) | 2009-10-01 |
JP2009535622A5 JP2009535622A5 (ja) | 2012-07-19 |
JP5676100B2 true JP5676100B2 (ja) | 2015-02-25 |
Family
ID=38656123
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009507749A Expired - Fee Related JP5676100B2 (ja) | 2006-04-25 | 2007-04-24 | ニアネットシェイプ焼結セラミックを用いた圧力センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7503220B2 (ja) |
EP (1) | EP2018533B1 (ja) |
JP (1) | JP5676100B2 (ja) |
CN (1) | CN101479586B (ja) |
RU (1) | RU2452929C2 (ja) |
WO (1) | WO2007127170A2 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11191155B1 (en) | 2020-12-10 | 2021-11-30 | International Business Machines Corporation | Tamper-respondent assembly with structural material within sealed inner compartment |
US11716808B2 (en) | 2020-12-10 | 2023-08-01 | International Business Machines Corporation | Tamper-respondent assemblies with porous heat transfer element(s) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7819014B1 (en) | 2009-04-23 | 2010-10-26 | Rosemount Inc. | Capacitive gage pressure sensor with vacuum dielectric |
US8333118B2 (en) * | 2010-02-02 | 2012-12-18 | Mks Instruments, Inc. | Capacitive pressure sensor |
US8511180B2 (en) * | 2010-09-02 | 2013-08-20 | Ofer Melamed | Pressure difference flowmeter with flow barrier between a conduit and a reference tube |
DE102011006517A1 (de) | 2011-03-31 | 2012-10-04 | Endress + Hauser Gmbh + Co. Kg | Druckfest gekapselter Differenzdrucksensor |
EP2584332A1 (en) * | 2011-10-19 | 2013-04-24 | Baumer Bourdon Haenni SAS | Pressure sensor |
DE102012106236A1 (de) * | 2012-07-11 | 2014-01-16 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
DE102012110152A1 (de) * | 2012-07-11 | 2014-05-15 | Endress + Hauser Gmbh + Co. Kg | Verfahren zum Fügen von Keramikkörpern mittels eines Aktivhartlots, Baugruppe mit mindestens zwei miteinander gefügten Keramikkörpern, insbesondere Druckmesszelle |
US9103738B2 (en) | 2012-09-07 | 2015-08-11 | Dynisco Instruments Llc | Capacitive pressure sensor with intrinsic temperature compensation |
US8984952B2 (en) | 2012-09-07 | 2015-03-24 | Dynisco Instruments Llc | Capacitive pressure sensor |
US8943895B2 (en) | 2012-09-07 | 2015-02-03 | Dynisco Instruments Llc | Capacitive pressure sensor |
JP6286278B2 (ja) * | 2014-05-16 | 2018-02-28 | アズビル株式会社 | 差圧センサおよび差圧センサの製造方法 |
AT515945B1 (de) * | 2014-09-05 | 2016-01-15 | Piezocryst Advanced Sensorics | Sensorelement |
US9857259B2 (en) | 2014-09-30 | 2018-01-02 | Rosemount Inc. | Differential pressure sensor with high pressure capabilities |
US9683675B2 (en) * | 2014-11-24 | 2017-06-20 | General Electric Company | Pressure modulator |
DE102014119407A1 (de) * | 2014-12-22 | 2016-06-23 | Endress + Hauser Gmbh + Co. Kg | Differenzdrucksensor und Differenzdruckmessaufnehmer mit einem solchen Differenzdrucksensor |
WO2019222598A1 (en) | 2018-05-17 | 2019-11-21 | Rosemount Inc. | Measuring element and measuring device comprising the same |
KR102085037B1 (ko) * | 2018-06-11 | 2020-04-23 | 두온시스템(주) | 트랜스미터 제조 방법 |
CN110265543B (zh) * | 2019-06-17 | 2022-08-02 | 中北大学 | 差动电容式陶瓷耐高温压敏芯片 |
US11226253B2 (en) | 2019-12-23 | 2022-01-18 | Rosemount Inc. | High range differential pressure sensor |
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US4520116A (en) | 1981-08-31 | 1985-05-28 | Raytheon Company | Transparent aluminum oxynitride and method of manufacture |
JPH01301134A (ja) * | 1988-05-30 | 1989-12-05 | Nippon Beeles- Kk | 圧力伝送器 |
JPH02221146A (ja) * | 1989-02-21 | 1990-09-04 | Uingu Haisera:Kk | セラミックス焼結体の製造方法 |
JPH0318735A (ja) * | 1989-06-15 | 1991-01-28 | Matsushita Electric Ind Co Ltd | 圧力・温度センサ素子 |
JPH064516B2 (ja) * | 1990-01-19 | 1994-01-19 | 新日本製鐵株式会社 | 溶融金属用セラミックス焼結体および製造方法 |
US5189916A (en) * | 1990-08-24 | 1993-03-02 | Ngk Spark Plug Co., Ltd. | Pressure sensor |
JP2724419B2 (ja) * | 1990-08-28 | 1998-03-09 | 日本特殊陶業株式会社 | 圧力センサ |
US5526112A (en) * | 1993-03-05 | 1996-06-11 | Sahagen; Armen N. | Probe for monitoring a fluid medium |
JPH08510830A (ja) * | 1993-03-05 | 1996-11-12 | アーメン エヌ サハゲン | 流体媒体の監視用プローブ |
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JPH10274587A (ja) * | 1997-03-28 | 1998-10-13 | Yamatake:Kk | 差圧発信器 |
SE9704840D0 (sv) * | 1997-12-22 | 1997-12-22 | Cecap Ab | Tryckgivare för detektering av små tryckdifferenser och låga tryck |
RU2141103C1 (ru) * | 1998-03-12 | 1999-11-10 | Государственное научно-производственное предприятие "НИИПП" | Чувствительный элемент датчика давления |
US6473711B1 (en) | 1999-08-13 | 2002-10-29 | Rosemount Inc. | Interchangeable differential, absolute and gage type of pressure transmitter |
US6520020B1 (en) | 2000-01-06 | 2003-02-18 | Rosemount Inc. | Method and apparatus for a direct bonded isolated pressure sensor |
AU2001234961A1 (en) * | 2000-02-11 | 2001-08-20 | Rosemount, Inc. | Optical pressure sensor |
CN1119638C (zh) * | 2000-11-03 | 2003-08-27 | 中国科学院合肥智能机械研究所 | 一种基于陶瓷厚膜技术的六维力传感器 |
DE10117142A1 (de) * | 2001-04-05 | 2002-10-10 | Endress & Hauser Gmbh & Co Kg | Kapazitiver Differenz-Drucksensor |
JP2003127124A (ja) * | 2001-10-18 | 2003-05-08 | Taiheiyo Cement Corp | セラミックス成形体の製造方法 |
US6848316B2 (en) | 2002-05-08 | 2005-02-01 | Rosemount Inc. | Pressure sensor assembly |
US6843133B2 (en) | 2002-06-18 | 2005-01-18 | Rosemount, Inc. | Capacitive pressure transmitter |
US6907790B2 (en) | 2003-03-21 | 2005-06-21 | Rosemount Inc. | Gage pressure output from an absolute pressure measurement device |
-
2007
- 2007-04-24 RU RU2008146134/28A patent/RU2452929C2/ru not_active IP Right Cessation
- 2007-04-24 JP JP2009507749A patent/JP5676100B2/ja not_active Expired - Fee Related
- 2007-04-24 EP EP07755929.2A patent/EP2018533B1/en not_active Not-in-force
- 2007-04-24 WO PCT/US2007/009858 patent/WO2007127170A2/en active Application Filing
- 2007-04-24 US US11/789,443 patent/US7503220B2/en active Active
- 2007-04-24 CN CN2007800234996A patent/CN101479586B/zh active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11191155B1 (en) | 2020-12-10 | 2021-11-30 | International Business Machines Corporation | Tamper-respondent assembly with structural material within sealed inner compartment |
US11716808B2 (en) | 2020-12-10 | 2023-08-01 | International Business Machines Corporation | Tamper-respondent assemblies with porous heat transfer element(s) |
Also Published As
Publication number | Publication date |
---|---|
WO2007127170A2 (en) | 2007-11-08 |
CN101479586B (zh) | 2012-06-20 |
EP2018533A4 (en) | 2016-03-23 |
RU2008146134A (ru) | 2010-05-27 |
EP2018533A2 (en) | 2009-01-28 |
EP2018533B1 (en) | 2018-10-03 |
JP2009535622A (ja) | 2009-10-01 |
RU2452929C2 (ru) | 2012-06-10 |
US20070245829A1 (en) | 2007-10-25 |
WO2007127170A3 (en) | 2008-07-31 |
CN101479586A (zh) | 2009-07-08 |
US7503220B2 (en) | 2009-03-17 |
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