SE9704840D0 - Tryckgivare för detektering av små tryckdifferenser och låga tryck - Google Patents
Tryckgivare för detektering av små tryckdifferenser och låga tryckInfo
- Publication number
- SE9704840D0 SE9704840D0 SE9704840A SE9704840A SE9704840D0 SE 9704840 D0 SE9704840 D0 SE 9704840D0 SE 9704840 A SE9704840 A SE 9704840A SE 9704840 A SE9704840 A SE 9704840A SE 9704840 D0 SE9704840 D0 SE 9704840D0
- Authority
- SE
- Sweden
- Prior art keywords
- diaphragm
- base plate
- thickness
- plate
- capacitor
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (8)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9704840A SE9704840D0 (sv) | 1997-12-22 | 1997-12-22 | Tryckgivare för detektering av små tryckdifferenser och låga tryck |
PCT/SE1998/002441 WO1999032866A2 (en) | 1997-12-22 | 1998-12-22 | A pressure sensor and a method of manufacturing a pressure sensor |
AT98964670T ATE513194T1 (de) | 1997-12-22 | 1998-12-22 | Drucksensor zur erfassung von kleinen druckdifferenzen und niedrigen druckwerten |
EP98964670A EP1060374B1 (en) | 1997-12-22 | 1998-12-22 | A pressure sensor for detecting small pressure differences and low pressures |
AU19942/99A AU1994299A (en) | 1997-12-22 | 1998-12-22 | A pressure sensor for detecting small pressure differences and low pressures |
US10/642,106 US20040099061A1 (en) | 1997-12-22 | 2003-08-15 | Pressure sensor for detecting small pressure differences and low pressures |
US11/011,615 US7284439B2 (en) | 1997-12-22 | 2004-12-15 | Method for producing a pressure sensor for detecting small pressure differences and low pressures |
US11/134,001 US7389697B2 (en) | 1997-12-22 | 2005-05-20 | Pressure sensor for detecting small pressure differences and low pressures |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
SE9704840A SE9704840D0 (sv) | 1997-12-22 | 1997-12-22 | Tryckgivare för detektering av små tryckdifferenser och låga tryck |
Publications (1)
Publication Number | Publication Date |
---|---|
SE9704840D0 true SE9704840D0 (sv) | 1997-12-22 |
Family
ID=20409543
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SE9704840A SE9704840D0 (sv) | 1997-12-22 | 1997-12-22 | Tryckgivare för detektering av små tryckdifferenser och låga tryck |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1060374B1 (sv) |
AT (1) | ATE513194T1 (sv) |
AU (1) | AU1994299A (sv) |
SE (1) | SE9704840D0 (sv) |
WO (1) | WO1999032866A2 (sv) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1128172B1 (de) * | 2000-02-22 | 2011-04-06 | Endress + Hauser GmbH + Co. KG | Drucksensor |
EP2018533B1 (en) * | 2006-04-25 | 2018-10-03 | Rosemount, Inc. | Pressure sensor using near net shape sintered ceramics |
CN114720048B (zh) * | 2022-06-09 | 2022-09-02 | 季华实验室 | 一种电容薄膜真空计及neg薄膜制备方法 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4425799A (en) * | 1982-06-03 | 1984-01-17 | Kavlico Corporation | Liquid capacitance pressure transducer technique |
US4587851A (en) * | 1985-02-26 | 1986-05-13 | Edward Mortberg | High vacuum capacitance manometer having Px side open housing |
JPS63149531A (ja) * | 1986-12-12 | 1988-06-22 | Fuji Electric Co Ltd | 静電容量式圧力センサ |
FI84401C (sv) * | 1987-05-08 | 1991-11-25 | Vaisala Oy | Kapacitiv tryckgivarkonstruktion |
DE4129414A1 (de) * | 1990-11-13 | 1993-03-11 | Endress Hauser Gmbh Co | Verwendung eines speziellen tiegels beim melt-spinning einer aktivlot-legierung |
US5485345A (en) * | 1994-11-14 | 1996-01-16 | Texas Instruments Incorporated | Pressure transducer apparatus |
US5499158A (en) * | 1994-11-14 | 1996-03-12 | Texas Instruments Incorporated | Pressure transducer apparatus with monolithic body of ceramic material |
-
1997
- 1997-12-22 SE SE9704840A patent/SE9704840D0/sv unknown
-
1998
- 1998-12-22 EP EP98964670A patent/EP1060374B1/en not_active Expired - Lifetime
- 1998-12-22 WO PCT/SE1998/002441 patent/WO1999032866A2/en active Application Filing
- 1998-12-22 AU AU19942/99A patent/AU1994299A/en not_active Abandoned
- 1998-12-22 AT AT98964670T patent/ATE513194T1/de not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO1999032866A3 (en) | 1999-08-26 |
AU1994299A (en) | 1999-07-12 |
EP1060374B1 (en) | 2011-06-15 |
WO1999032866A2 (en) | 1999-07-01 |
ATE513194T1 (de) | 2011-07-15 |
EP1060374A2 (en) | 2000-12-20 |
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