JP5666267B2 - 塗布型拡散剤組成物 - Google Patents
塗布型拡散剤組成物 Download PDFInfo
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- JP5666267B2 JP5666267B2 JP2010262967A JP2010262967A JP5666267B2 JP 5666267 B2 JP5666267 B2 JP 5666267B2 JP 2010262967 A JP2010262967 A JP 2010262967A JP 2010262967 A JP2010262967 A JP 2010262967A JP 5666267 B2 JP5666267 B2 JP 5666267B2
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- 239000003795 chemical substances by application Substances 0.000 title claims description 68
- 239000000203 mixture Substances 0.000 title claims description 58
- 239000011248 coating agent Substances 0.000 title claims description 27
- 238000000576 coating method Methods 0.000 title claims description 27
- 238000009792 diffusion process Methods 0.000 claims description 63
- 239000012535 impurity Substances 0.000 claims description 62
- 239000007859 condensation product Substances 0.000 claims description 47
- 239000000758 substrate Substances 0.000 claims description 44
- 239000004065 semiconductor Substances 0.000 claims description 35
- 150000001875 compounds Chemical class 0.000 claims description 17
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 14
- 125000003118 aryl group Chemical group 0.000 claims description 13
- 125000000962 organic group Chemical group 0.000 claims description 12
- 125000004432 carbon atom Chemical group C* 0.000 claims description 10
- 125000000217 alkyl group Chemical group 0.000 claims description 9
- 125000003545 alkoxy group Chemical group 0.000 claims description 8
- 239000003960 organic solvent Substances 0.000 claims description 8
- 125000002947 alkylene group Chemical group 0.000 claims description 5
- 125000003700 epoxy group Chemical group 0.000 claims description 5
- 125000004429 atom Chemical group 0.000 claims description 4
- 239000007858 starting material Substances 0.000 claims description 4
- 229910021478 group 5 element Inorganic materials 0.000 claims description 2
- 238000000034 method Methods 0.000 description 39
- -1 silane compound Chemical class 0.000 description 12
- 238000009833 condensation Methods 0.000 description 10
- 230000005494 condensation Effects 0.000 description 10
- 239000004094 surface-active agent Substances 0.000 description 9
- 125000001183 hydrocarbyl group Chemical group 0.000 description 8
- 238000006460 hydrolysis reaction Methods 0.000 description 8
- 125000001424 substituent group Chemical group 0.000 description 8
- 238000011156 evaluation Methods 0.000 description 7
- 238000010304 firing Methods 0.000 description 7
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- 239000000243 solution Substances 0.000 description 6
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- XTHFKEDIFFGKHM-UHFFFAOYSA-N Dimethoxyethane Chemical compound COCCOC XTHFKEDIFFGKHM-UHFFFAOYSA-N 0.000 description 4
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- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
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- 230000000052 comparative effect Effects 0.000 description 4
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- 238000000059 patterning Methods 0.000 description 4
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- ARXJGSRGQADJSQ-UHFFFAOYSA-N 1-methoxypropan-2-ol Chemical compound COCC(C)O ARXJGSRGQADJSQ-UHFFFAOYSA-N 0.000 description 3
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- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
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- 239000000654 additive Substances 0.000 description 3
- 125000004122 cyclic group Chemical group 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 230000003301 hydrolyzing effect Effects 0.000 description 3
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- 238000000206 photolithography Methods 0.000 description 3
- 229920001296 polysiloxane Polymers 0.000 description 3
- 239000000047 product Substances 0.000 description 3
- 238000004528 spin coating Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- LZDKZFUFMNSQCJ-UHFFFAOYSA-N 1,2-diethoxyethane Chemical compound CCOCCOCC LZDKZFUFMNSQCJ-UHFFFAOYSA-N 0.000 description 2
- VPBZZPOGZPKYKX-UHFFFAOYSA-N 1,2-diethoxypropane Chemical compound CCOCC(C)OCC VPBZZPOGZPKYKX-UHFFFAOYSA-N 0.000 description 2
- LEEANUDEDHYDTG-UHFFFAOYSA-N 1,2-dimethoxypropane Chemical compound COCC(C)OC LEEANUDEDHYDTG-UHFFFAOYSA-N 0.000 description 2
- JOLQKTGDSGKSKJ-UHFFFAOYSA-N 1-ethoxypropan-2-ol Chemical compound CCOCC(C)O JOLQKTGDSGKSKJ-UHFFFAOYSA-N 0.000 description 2
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- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- FFWSICBKRCICMR-UHFFFAOYSA-N 5-methyl-2-hexanone Chemical compound CC(C)CCC(C)=O FFWSICBKRCICMR-UHFFFAOYSA-N 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- 102100036200 Bisphosphoglycerate mutase Human genes 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-N Butyric acid Chemical compound CCCC(O)=O FERIUCNNQQJTOY-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-OWOJBTEDSA-N Fumaric acid Chemical compound OC(=O)\C=C\C(O)=O VZCYOOQTPOCHFL-OWOJBTEDSA-N 0.000 description 2
- 101000594702 Homo sapiens Bisphosphoglycerate mutase Proteins 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 2
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 150000001298 alcohols Chemical class 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 125000005428 anthryl group Chemical group [H]C1=C([H])C([H])=C2C([H])=C3C(*)=C([H])C([H])=C([H])C3=C([H])C2=C1[H] 0.000 description 2
- 125000002029 aromatic hydrocarbon group Chemical group 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000007795 chemical reaction product Substances 0.000 description 2
- XBDQKXXYIPTUBI-UHFFFAOYSA-N dimethylselenoniopropionate Natural products CCC(O)=O XBDQKXXYIPTUBI-UHFFFAOYSA-N 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
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- 150000002148 esters Chemical class 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 229940093915 gynecological organic acid Drugs 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 150000007522 mineralic acids Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 125000001624 naphthyl group Chemical group 0.000 description 2
- 229910017604 nitric acid Inorganic materials 0.000 description 2
- 235000005985 organic acids Nutrition 0.000 description 2
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 2
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 125000000542 sulfonic acid group Chemical group 0.000 description 2
- 229910052717 sulfur Inorganic materials 0.000 description 2
- 239000011593 sulfur Substances 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 2
- DTGKSKDOIYIVQL-WEDXCCLWSA-N (+)-borneol Chemical group C1C[C@@]2(C)[C@@H](O)C[C@@H]1C2(C)C DTGKSKDOIYIVQL-WEDXCCLWSA-N 0.000 description 1
- 125000006273 (C1-C3) alkyl group Chemical group 0.000 description 1
- 125000006527 (C1-C5) alkyl group Chemical group 0.000 description 1
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 1
- GDXHBFHOEYVPED-UHFFFAOYSA-N 1-(2-butoxyethoxy)butane Chemical compound CCCCOCCOCCCC GDXHBFHOEYVPED-UHFFFAOYSA-N 0.000 description 1
- HQSLKNLISLWZQH-UHFFFAOYSA-N 1-(2-propoxyethoxy)propane Chemical compound CCCOCCOCCC HQSLKNLISLWZQH-UHFFFAOYSA-N 0.000 description 1
- RWNUSVWFHDHRCJ-UHFFFAOYSA-N 1-butoxypropan-2-ol Chemical compound CCCCOCC(C)O RWNUSVWFHDHRCJ-UHFFFAOYSA-N 0.000 description 1
- RRQYJINTUHWNHW-UHFFFAOYSA-N 1-ethoxy-2-(2-ethoxyethoxy)ethane Chemical compound CCOCCOCCOCC RRQYJINTUHWNHW-UHFFFAOYSA-N 0.000 description 1
- 125000006218 1-ethylbutyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C([H])([H])[H] 0.000 description 1
- SBASXUCJHJRPEV-UHFFFAOYSA-N 2-(2-methoxyethoxy)ethanol Chemical compound COCCOCCO SBASXUCJHJRPEV-UHFFFAOYSA-N 0.000 description 1
- DJCYDDALXPHSHR-UHFFFAOYSA-N 2-(2-propoxyethoxy)ethanol Chemical compound CCCOCCOCCO DJCYDDALXPHSHR-UHFFFAOYSA-N 0.000 description 1
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- 125000006176 2-ethylbutyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(C([H])([H])*)C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000004493 2-methylbut-1-yl group Chemical group CC(C*)CC 0.000 description 1
- 125000005916 2-methylpentyl group Chemical group 0.000 description 1
- YEYKMVJDLWJFOA-UHFFFAOYSA-N 2-propoxyethanol Chemical compound CCCOCCO YEYKMVJDLWJFOA-UHFFFAOYSA-N 0.000 description 1
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- VATRWWPJWVCZTA-UHFFFAOYSA-N 3-oxo-n-[2-(trifluoromethyl)phenyl]butanamide Chemical compound CC(=O)CC(=O)NC1=CC=CC=C1C(F)(F)F VATRWWPJWVCZTA-UHFFFAOYSA-N 0.000 description 1
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- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-M Bisulfite Chemical compound OS([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-M 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 1
- JYFHYPJRHGVZDY-UHFFFAOYSA-N Dibutyl phosphate Chemical compound CCCCOP(O)(=O)OCCCC JYFHYPJRHGVZDY-UHFFFAOYSA-N 0.000 description 1
- KKUKTXOBAWVSHC-UHFFFAOYSA-N Dimethylphosphate Chemical compound COP(O)(=O)OC KKUKTXOBAWVSHC-UHFFFAOYSA-N 0.000 description 1
- XOBKSJJDNFUZPF-UHFFFAOYSA-N Methoxyethane Chemical compound CCOC XOBKSJJDNFUZPF-UHFFFAOYSA-N 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
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- MIJYHJNSTXWNQX-UHFFFAOYSA-N butyl diethyl methyl silicate Chemical compound CCCCO[Si](OC)(OCC)OCC MIJYHJNSTXWNQX-UHFFFAOYSA-N 0.000 description 1
- OIEKEOOORZPUGH-UHFFFAOYSA-N butyl diethyl propyl silicate Chemical compound CCCCO[Si](OCC)(OCC)OCCC OIEKEOOORZPUGH-UHFFFAOYSA-N 0.000 description 1
- BNMJSBUIDQYHIN-UHFFFAOYSA-N butyl dihydrogen phosphate Chemical compound CCCCOP(O)(O)=O BNMJSBUIDQYHIN-UHFFFAOYSA-N 0.000 description 1
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- AGBZIWDKCKUACI-UHFFFAOYSA-N butyl ethyl methyl propyl silicate Chemical compound CCCCO[Si](OC)(OCC)OCCC AGBZIWDKCKUACI-UHFFFAOYSA-N 0.000 description 1
- WWIIWYLGTMNOEU-UHFFFAOYSA-N butyl methyl dipropyl silicate Chemical compound CCCCO[Si](OC)(OCCC)OCCC WWIIWYLGTMNOEU-UHFFFAOYSA-N 0.000 description 1
- GPLARHNOLLDPGA-UHFFFAOYSA-N butyl trimethyl silicate Chemical compound CCCCO[Si](OC)(OC)OC GPLARHNOLLDPGA-UHFFFAOYSA-N 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 150000001735 carboxylic acids Chemical class 0.000 description 1
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- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 125000006165 cyclic alkyl group Chemical group 0.000 description 1
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- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 1
- 125000001511 cyclopentyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C1([H])[H] 0.000 description 1
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- 125000002704 decyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
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- WXAYXYTUOFVMKE-UHFFFAOYSA-N diethyl dipropyl silicate Chemical compound CCCO[Si](OCC)(OCC)OCCC WXAYXYTUOFVMKE-UHFFFAOYSA-N 0.000 description 1
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- HOXUFWMHAIJENN-UHFFFAOYSA-N dimethyl dipropyl silicate Chemical compound CCCO[Si](OC)(OC)OCCC HOXUFWMHAIJENN-UHFFFAOYSA-N 0.000 description 1
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- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
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- BHXIWUJLHYHGSJ-UHFFFAOYSA-N ethyl 3-ethoxypropanoate Chemical compound CCOCCC(=O)OCC BHXIWUJLHYHGSJ-UHFFFAOYSA-N 0.000 description 1
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 1
- LWVQRZRMDDXSQO-UHFFFAOYSA-N ethyl methyl dipropyl silicate Chemical compound CCCO[Si](OC)(OCC)OCCC LWVQRZRMDDXSQO-UHFFFAOYSA-N 0.000 description 1
- ZJXZSIYSNXKHEA-UHFFFAOYSA-L ethyl phosphate(2-) Chemical compound CCOP([O-])([O-])=O ZJXZSIYSNXKHEA-UHFFFAOYSA-L 0.000 description 1
- ITAHRPSKCCPKOK-UHFFFAOYSA-N ethyl trimethyl silicate Chemical compound CCO[Si](OC)(OC)OC ITAHRPSKCCPKOK-UHFFFAOYSA-N 0.000 description 1
- 125000000816 ethylene group Chemical group [H]C([H])([*:1])C([H])([H])[*:2] 0.000 description 1
- 125000003983 fluorenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 235000011087 fumaric acid Nutrition 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- 150000002334 glycols Chemical class 0.000 description 1
- 125000005843 halogen group Chemical group 0.000 description 1
- 125000003187 heptyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- TZMQHOJDDMFGQX-UHFFFAOYSA-N hexane-1,1,1-triol Chemical compound CCCCCC(O)(O)O TZMQHOJDDMFGQX-UHFFFAOYSA-N 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 1
- 125000004491 isohexyl group Chemical group C(CCC(C)C)* 0.000 description 1
- 125000001972 isopentyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])C([H])([H])* 0.000 description 1
- 125000003253 isopropoxy group Chemical group [H]C([H])([H])C([H])(O*)C([H])([H])[H] 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- BDJSOPWXYLFTNW-UHFFFAOYSA-N methyl 3-methoxypropanoate Chemical compound COCCC(=O)OC BDJSOPWXYLFTNW-UHFFFAOYSA-N 0.000 description 1
- CAAULPUQFIIOTL-UHFFFAOYSA-N methyl dihydrogen phosphate Chemical compound COP(O)(O)=O CAAULPUQFIIOTL-UHFFFAOYSA-N 0.000 description 1
- PKWNWHSONVFEON-UHFFFAOYSA-N methyl tripentyl silicate Chemical compound CCCCCO[Si](OC)(OCCCCC)OCCCCC PKWNWHSONVFEON-UHFFFAOYSA-N 0.000 description 1
- WUHFHHFIAKZOGV-UHFFFAOYSA-N methyl triphenyl silicate Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC)OC1=CC=CC=C1 WUHFHHFIAKZOGV-UHFFFAOYSA-N 0.000 description 1
- 125000001570 methylene group Chemical group [H]C([H])([*:1])[*:2] 0.000 description 1
- 125000006606 n-butoxy group Chemical group 0.000 description 1
- 125000003506 n-propoxy group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])O* 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 125000001400 nonyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 125000002868 norbornyl group Chemical group C12(CCC(CC1)C2)* 0.000 description 1
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 238000007645 offset printing Methods 0.000 description 1
- 150000004028 organic sulfates Chemical class 0.000 description 1
- 125000005375 organosiloxane group Chemical group 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 1
- 125000001147 pentyl group Chemical group C(CCCC)* 0.000 description 1
- 125000005561 phenanthryl group Chemical group 0.000 description 1
- 150000003014 phosphoric acid esters Chemical class 0.000 description 1
- 125000004437 phosphorous atom Chemical group 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001451 polypropylene glycol Polymers 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- 235000019260 propionic acid Nutrition 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- IUVKMZGDUIUOCP-BTNSXGMBSA-N quinbolone Chemical compound O([C@H]1CC[C@H]2[C@H]3[C@@H]([C@]4(C=CC(=O)C=C4CC3)C)CC[C@@]21C)C1=CCCC1 IUVKMZGDUIUOCP-BTNSXGMBSA-N 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 125000002914 sec-butyl group Chemical group [H]C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 125000003548 sec-pentyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- LSNNMFCWUKXFEE-UHFFFAOYSA-L sulfite Chemical class [O-]S([O-])=O LSNNMFCWUKXFEE-UHFFFAOYSA-L 0.000 description 1
- 150000003460 sulfonic acids Chemical class 0.000 description 1
- 125000004213 tert-butoxy group Chemical group [H]C([H])([H])C(O*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- KCTGOQZIKPDZNK-UHFFFAOYSA-N tetrapentyl silicate Chemical compound CCCCCO[Si](OCCCCC)(OCCCCC)OCCCCC KCTGOQZIKPDZNK-UHFFFAOYSA-N 0.000 description 1
- ADLSSRLDGACTEX-UHFFFAOYSA-N tetraphenyl silicate Chemical compound C=1C=CC=CC=1O[Si](OC=1C=CC=CC=1)(OC=1C=CC=CC=1)OC1=CC=CC=C1 ADLSSRLDGACTEX-UHFFFAOYSA-N 0.000 description 1
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 1
- HSDAZXVGQVMFAY-UHFFFAOYSA-N tributyl methyl silicate Chemical compound CCCCO[Si](OC)(OCCCC)OCCCC HSDAZXVGQVMFAY-UHFFFAOYSA-N 0.000 description 1
- PZOOLKGCOFWELU-UHFFFAOYSA-N tributyl propyl silicate Chemical compound CCCCO[Si](OCCC)(OCCCC)OCCCC PZOOLKGCOFWELU-UHFFFAOYSA-N 0.000 description 1
- CXZMPNCYSOLUEK-UHFFFAOYSA-N triethyl propyl silicate Chemical compound CCCO[Si](OCC)(OCC)OCC CXZMPNCYSOLUEK-UHFFFAOYSA-N 0.000 description 1
- WKEXHTMMGBYMTA-UHFFFAOYSA-N trimethyl propyl silicate Chemical compound CCCO[Si](OC)(OC)OC WKEXHTMMGBYMTA-UHFFFAOYSA-N 0.000 description 1
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Description
縮合生成物(A)は、下記一般式(1)で表されるアルコキシシランを出発原料とし、下記一般式(1)で表されるアルコキシシランを加水分解して得られる反応生成物である。
Si(OR51)a(OR52)b(OR53)c(OR54)d・・・(2)
(2)式中、R51、R52、R53及びR54は、それぞれ独立に上記R2と同じ有機基を表す。a、b、c及びdは、0≦a≦4、0≦b≦4、0≦c≦4、0≦d≦4であって、かつa+b+c+d=4の条件を満たす整数である。
R65Si(OR66)e(OR67)f(OR68)g・・・(3)
(3)式中、R65は上記R1と同じ有機基を表す。R66、R67、及びR68は、それぞれ独立に上記R2と同じ有機基を表す。e、f、及びgは、0≦e≦3、0≦f≦3、0≦g≦3であって、かつe+f+g=3の条件を満たす整数である。
R70R71Si(OR72)h(OR73)i・・・(4)
(4)式中、R70及びR71は上記R1と同じ有機基を表す。R72、及びR73は、それぞれ独立に上記R2と同じ有機基を表す。h及びiは、0≦h≦2、0≦i≦2であって、かつh+i=2の条件を満たす整数である。
R13−X (5)
[上記式(5)中、R13は、置換基を有していてもよい炭化水素基であり、Xはスルホン酸基である。]
縮合生成物(B)は、下記一般式(7)で表されるアルコキシシランを出発原料とし、下記一般式(7)で表されるアルコキシシランを縮合生成物(A)と同様の方法で加水分解して得られる反応生成物である。
不純物拡散成分(C)は、一般にドーパントとして太陽電池の製造に用いられる化合物である。不純物拡散成分(C)は、III族(13族)またはV族(15族)元素の化合物を含むN型またはP型の不純物拡散成分であり、太陽電池における電極を形成する工程において、半導体基板内にN型またはP型の不純物拡散層(不純物拡散領域)を形成することができる。不純物拡散成分(C)に含まれるV族元素の化合物としては、たとえば、P2O5、Bi2O3、Sb(OCH2CH3)3、SbCl3、As(OC4H9)3、リン酸ジブチル、リン酸モノブチル、リン酸ジエチル、リン酸モノエチル、リン酸ジメチル、リン酸モノメチルなどのリン酸エステルが挙げられる。不純物拡散成分(C)の濃度は、半導体基板に形成される不純物拡散層の層厚等に応じて適宜調整される。なお、III族の不純物拡散成分(C)としては、B2O3、ホウ素トリオクチルなどのホウ酸エステル類、Al2O3等が挙げられる。
図1を参照して、N型の半導体基板にインクジェット方式によりN型の不純物拡散成分(C)を含有する上述の拡散剤組成物を吐出してパターンを形成する工程と、拡散剤組成物中の不純物拡散成分(C)を半導体基板に拡散させる工程と、を含む不純物拡散層の形成方法と、これにより不純物拡散層が形成された半導体基板を備えた太陽電池の製造方法について説明する。図1(A)〜(C)は、実施形態に係る不純物拡散層の形成方法を含む太陽電池の製造方法を説明するための工程断面図である。
構造A−5:オルガノシロキサン(信越化学社製、X−41−1056)
構造B−1:Si(OC2H5)4の加水分解生成物
DPGM:ジプロピレングリコールモノメチルエーテル
各実施例、各参考例および各比較例の拡散剤組成物を用いて、インクジェットプリンタ(武蔵エンジニアリング社製)を使用して鏡面処理された半導体ウエハ上に5ピクセル線(500μm幅)を印刷(1回塗り)した。印刷結果について、5000Å以上の塗布膜厚が得られた場合を良好(○)、2000Å以上5000Å未満の塗布膜厚が得られた場合を不可(△)、2000Å未満の塗布膜厚が得られた場合を不適当(×)とした。
各実施例、各参考例および各比較例の拡散剤組成物を用いて、3μmの段差を有する半導体ウエハ上にインクジェットプリンタ(武蔵エンジニアリング社製)を使用して印刷した後、950℃で焼成、拡散処理を行った。焼成、拡散処理後に顕微鏡観察にてクラックが確認された場合を不適当(×)、焼成、拡散処理後に顕微鏡観察にてクラックが確認されない場合を良好(○)とした。
拡散性能の評価は、拡散処理後のシート抵抗値を測定することにより評価を行った。シート抵抗値が低い程、拡散性能が高いと考えられる。実施例27〜30、37、40〜41の拡散剤組成物を用いて、それぞれP型Si基板(面方位<100>、抵抗率5〜15Ω・cm)の上にスピン塗布法により塗布を行った。Si基板上に塗布された拡散剤組成物の膜厚は約7000Åである。100℃、200℃で各1分間のプリベークを実施した後、加熱炉(光洋サーモシステム製 VF−1000)を用いて窒素雰囲気下で950℃、30分間の加熱を行った。その後、Si基板を5%HF水溶液に10分間浸漬し、基板表面の酸化膜を除去した。なお、実施例27〜30について、それぞれ、2点ずつ試料を作製した。各試料について、4探針法(国際電気製VR−70)により5カ所のシート抵抗値を測定し、各実施例についてそれぞれ計10点のシート抵抗値を得た後、計10点の平均値を算出した。このようにして得られたシート抵抗値の平均値を表5に示す。シート抵抗値のターゲットは使用目的・条件によって異なるが、300Ω/□以下であることが好ましく、より好ましくは150Ω/□以下、さらに100Ω/□以下であることが最も好ましい。
Claims (8)
- 半導体基板への不純物拡散成分の拡散に用いられる拡散剤組成物であって、
下記一般式(1)で表されるアルコキシシランを出発原料とする縮合生成物(A)と、
不純物拡散成分(C)と、
有機溶剤(D)と、
を含有し、
前記縮合生成物(A)は、下記一般式(2)で表される構造を含むことを特徴とする塗布型拡散剤組成物。
- 前記Yが、アルキル基、アリール基、エポキシ基、または−R3−R4 で表される基である、請求項1に記載の塗布型拡散剤組成物。
複数個のX、Yは同一であっても異なっていてもよい。R4は、アリール基またはエチレン性不飽和二重結合を含有する基であり、R3は炭素数1〜9のアルキレン基であり、異なるR3を有する場合があってもよい。 - 前記縮合生成物(A)と前記縮合生成物(B)とのSiO2換算質量比(A:B)が100:0〜5:95である請求項3に記載の塗布型拡散剤組成物。
- 前記不純物拡散成分(C)は、III族元素またはV族元素の化合物を含むことを特徴とする請求項1乃至4のいずれか1項に記載の塗布型拡散剤組成物。
- 前記縮合生成物(A)及び前記縮合生成物(B)中の全SiO2換算質量に対して、前記不純物拡散成分(C)中の不純物原子の換算質量の比が、SiO2換算質量:不純物原子換算質量=95:5〜50:50の範囲である請求項3または4に記載の塗布型拡散剤組成物。
- インクジェットによる塗布に用いられる請求項1乃至6のいずれか1項に記載の塗布型拡散剤組成物。
- 0.5μm以上の段差を有する基板への塗布用である請求項1乃至7のいずれか1項に記載の塗布型拡散剤組成物。
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