JP5645429B2 - Liquid supply device - Google Patents

Liquid supply device Download PDF

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JP5645429B2
JP5645429B2 JP2010048005A JP2010048005A JP5645429B2 JP 5645429 B2 JP5645429 B2 JP 5645429B2 JP 2010048005 A JP2010048005 A JP 2010048005A JP 2010048005 A JP2010048005 A JP 2010048005A JP 5645429 B2 JP5645429 B2 JP 5645429B2
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liquid
liquid supply
bag
container
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JP2011184048A (en
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信 前嶋
信 前嶋
直人 高田
直人 高田
健太郎 和田
健太郎 和田
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Disco Corp
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Description

本発明は、柔軟なフィルム状の袋部内の液体を外部へ供給する液体供給装置に関する。   The present invention relates to a liquid supply apparatus that supplies liquid in a flexible film-like bag portion to the outside.

飲料水や工業用の薬液等の液体を保存したり搬送したりするために、缶や瓶、硬質の樹脂製ボトル等の様々な定形型容器が使用されている（例えば、特開２００５−３３５７１３号公報及び特開２００７−２０４１２０号公報参照）。   In order to store and transport liquids such as drinking water and industrial chemicals, various shaped containers such as cans, bottles, and hard resin bottles are used (for example, JP-A-2005-335713). And Japanese Patent Application Laid-Open No. 2007-204120).

近年では、空となった容器の容易な廃棄や、容器自体の軽量化のため、定形型容器にかわって柔軟なフィルム状の袋状容器が広い用途で使用され始めている。こうした柔軟な袋状容器は、使用後折りたたんで収納可能であったり、容器自体の重さが非常に軽いため、輸送コストの大幅削減等の大きな効果が期待されている。また、こうした柔軟な袋状容器等の不定形な液体容器の中に保存された液体、例えば飲料水や工業用の薬液等を外部に送出する液体供給装置も開発されている。   In recent years, in order to easily dispose of empty containers and to reduce the weight of the containers themselves, flexible film-like bag-like containers have begun to be used in a wide range of applications in place of regular containers. Such a flexible bag-like container can be folded and stored after use, or the weight of the container itself is very light, so that a great effect such as a significant reduction in transportation cost is expected. In addition, a liquid supply device has been developed that delivers liquid stored in an irregular liquid container such as a flexible bag-like container, such as drinking water or industrial chemicals, to the outside.

特開２００５−３３５７１３号公報JP 2005-335713 A 特開２００７−２０４１２０号公報JP 2007-204120 A

しかし、不定形な液体容器を用いた液体供給装置の場合、容器自体の形状が不定形であるという特徴から定型容器とは違った工夫が必要となる。例えば、容器の固定方法の工夫、内部の液体を残らず注出する方法の工夫、内部の液体の残量を正確に把握する工夫等が必要である。   However, in the case of a liquid supply apparatus using an irregular liquid container, a device different from the regular container is required because of the characteristic that the shape of the container itself is irregular. For example, it is necessary to devise a method for fixing the container, a device to pour out all the liquid inside, and a device to accurately grasp the remaining amount of liquid inside.

容器自体が不定形であるため、容器の固定は何らかの枠体内に載置するか、又は箱の中に収めた後箱ごと装置内部に載置する必要があるが、内容物が液体であるためその重量は重い場合が多く、上方から箱内に収めるのは容易ではない。   Since the container itself is indefinite, the container must be fixed in some frame or placed inside the box and then placed inside the device, but the contents are liquid. The weight is often heavy, and it is not easy to fit in the box from above.

更に、容器が不定形であるため、残量無く液体を注出するには袋の外部から圧力等をかけて搾り出したり、容器の底近くに注出口を設ける等の工夫が必要であるが、圧力手段が必要であったり、注出口が低くなり使いにくいといった課題が残る。また、定形型の容器であれば、液面の高さを見れば即座に残量が把握可能であるが、容器の形状が変化してしまえば液面高さによる残量把握は正確とは言えない。   Furthermore, since the container is indeterminate, it is necessary to devise such as squeezing with pressure from the outside of the bag or providing a spout near the bottom of the container to pour out liquid without remaining amount, Problems remain, such as the need for pressure means, and the use of a lower outlet, making it difficult to use. In addition, if the container is of a fixed shape, the remaining amount can be grasped immediately by looking at the height of the liquid level, but if the shape of the container changes, the remaining amount based on the liquid level is not accurate. I can not say.

本発明はこのような点に鑑みてなされたものであり、その目的とするところは、単純な構成で容易に容器の載置が可能であり、内部の液体を残らず送出可能で且つ残量の把握が可能な不定形液体容器内の液体を送出する液体供給装置を提供することである。   The present invention has been made in view of the above points, and the object of the present invention is to easily place a container with a simple configuration, to send out all the liquid inside, and to leave the remaining amount. It is an object of the present invention to provide a liquid supply apparatus that delivers liquid in an irregular liquid container capable of grasping the above.

本発明によると、柔軟なフィルム状部材からなる袋部と、該袋部の口に装着された筒状の首部と該首部の上端外周から外側へ張り出す環状フランジとを備えた注出口と、を有する不定形液体容器内の液体を送出する液体供給装置であって、底部と、該底部から立設された側部と、該側部に支持され該側部から中央に向かって形成された該環状フランジの外径より小さく該首部の直径より大きい幅の案内溝を有する天井部とを含む枠体と、該注出口から該袋部内に挿入される送出用パイプと、該送出用パイプの途中に介装された吸い上げポンプとを含む液体供給手段とを具備し、該注出口の該環状フランジを該天井部より上方にして該首部を該案内溝に挿入しつつ、該袋部を該枠体内に収容して該首部を該案内溝の所定の位置に固定すると、該袋部内の液体の重量で該案内溝に該環状フランジが係合し該袋部が該枠体内に垂下して固定され、該送出用パイプは該枠体内に垂下した該袋部の底部近傍に到達する長さを有し、該枠体の該底部を構成する底板は、該案内溝の該所定の位置の直下に窪み部若しくは開口部を有し、該窪み部若しくは該開口部周囲の該底板の少なくとも一部は該窪み部若しくは該開口部に向かって下方に傾斜して形成されており、該不定形液体容器内の液体が該傾斜によって該窪み部内若しくは該開口部内に落ち込んだ袋部に溜まり易くなっていることを特徴とする液体供給装置が提供される。 According to the present invention, a spout comprising a bag portion made of a flexible film-like member, a cylindrical neck portion attached to the mouth of the bag portion, and an annular flange projecting outward from the outer periphery of the upper end of the neck portion; A liquid supply apparatus for delivering liquid in an irregular liquid container having a bottom portion, a side portion standing upright from the bottom portion, and supported by the side portion and formed from the side portion toward the center A frame including a ceiling portion having a guide groove having a width smaller than the outer diameter of the annular flange and larger than the diameter of the neck portion; a delivery pipe inserted into the bag portion from the spout; and Liquid supply means including a suction pump interposed in the middle, and the bag portion is inserted into the guide groove while the annular flange of the spout is located above the ceiling portion and the neck portion is inserted into the guide groove. fixing the該首unit housed inside the frame in position in the guide groove then, the The annular flange engages with the guide groove by the weight of the liquid in the part, the bag part is suspended and fixed in the frame, and the delivery pipe reaches near the bottom of the bag part suspended in the frame. The bottom plate constituting the bottom portion of the frame body has a recess or an opening immediately below the predetermined position of the guide groove, and the bottom plate around the recess or the opening. At least a part of the bag is formed so as to be inclined downward toward the recess or the opening, and the liquid in the irregular liquid container is dropped into the recess or the opening due to the inclination. Provided is a liquid supply device characterized in that it is easily collected .

好ましくは、前記送出用パイプの吸引口は、前記窪み部内若しくは前記開口部内に落ち込んだ袋部付近に位置付けられる。 Preferably, the suction port of the delivery pipe is positioned in the recess or in the vicinity of the bag part that has fallen into the opening .

好ましくは、枠体は重量測定器上に配設されており、これにより不定形液体容器内の残量を容易に把握することができる。   Preferably, the frame is disposed on the weight measuring device, whereby the remaining amount in the irregular liquid container can be easily grasped.

本発明の液体供給装置によると、枠体に側方から不定形液体容器を挿入するので、不必要に重い容器を持ち上げる必要がない。更に注出口が上方にあるので、注出口にパイプを挿入するのも容易である。パイプが不定形容器の底部にまで届く長さを有しているため、内部の液体を残量無く送出できる。   According to the liquid supply device of the present invention, since the irregular liquid container is inserted into the frame from the side, there is no need to lift an unnecessarily heavy container. Furthermore, since the spout is above, it is easy to insert a pipe into the spout. Since the pipe has a length that reaches the bottom of the irregular container, the liquid inside can be delivered without remaining.

底部に窪み若しくは開口部が形成されている実施形態においては、不定形液体容器の固定に効果がある上、液体がパイプの吸込口付近に溜まるような構成となっているため、容器の変形による液体の送出残が発生しないという効果を奏する。更に、枠体が重量測定器上に載置されているため、液体の残量を常に正確に把握することが可能であり、容器の大きさや材質の変更があっても、容易に対応することができる。   In the embodiment in which a recess or an opening is formed at the bottom, the liquid container is effective in fixing the irregular liquid container, and the liquid is collected near the suction port of the pipe. There is an effect that no remaining liquid is generated. In addition, since the frame is placed on the weight measuring device, it is possible to accurately grasp the remaining amount of liquid at all times, and to easily cope with changes in the size and material of the container. Can do.

本発明の液体供給装置が適用可能な混合液供給装置の全体構成図である。1 is an overall configuration diagram of a mixed liquid supply apparatus to which a liquid supply apparatus of the present invention is applicable. 不定形液体容器の一例を示す斜視図である。It is a perspective view which shows an example of an amorphous liquid container. 本発明第１実施形態に係る液体供給装置の分解斜視図である。It is a disassembled perspective view of the liquid supply apparatus which concerns on 1st Embodiment of this invention. 液体供給装置内に不定形液体容器を装着した状態の斜視図である。It is a perspective view of the state which mounted | wore with the amorphous liquid container in the liquid supply apparatus. 本発明第２実施形態に係る液体供給装置に不定形液体容器を装着した状態の斜視図である。It is a perspective view of the state which mounted | wore the liquid supply apparatus which concerns on 2nd Embodiment of this invention with the amorphous liquid container. 図５のＶＩ―ＶＩ線断面図である。FIG. 6 is a cross-sectional view taken along line VI-VI in FIG. 5.

以下、本発明の実施形態を図面を参照して詳細に説明する。図１を参照すると、本発明の液体供給装置を採用した混合液供給装置の全体構成図が示されている。符号２で示された混合液供給装置は、研磨装置４に液体と研磨剤が混合された混合液（スラリー）を供給する。後で詳細に説明する液体供給装置６内には、純水等の液体とシリカ等の研磨剤が混合された濃度の高い研磨剤原液９が収容された不定形液体容器８が収容されている。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, there is shown an overall configuration diagram of a mixed liquid supply apparatus employing a liquid supply apparatus of the present invention. The liquid mixture supply apparatus indicated by reference numeral 2 supplies the polishing apparatus 4 with a liquid mixture (slurry) in which a liquid and an abrasive are mixed. A liquid supply device 6, which will be described in detail later, contains an irregular liquid container 8 in which a high concentration abrasive stock solution 9 in which a liquid such as pure water and an abrasive such as silica are mixed is contained. .

１０は希釈タンクであり、不定形液体容器８内の濃度の高い研磨剤原液９が管路（研磨剤原液供給路）１４を介して希釈タンク１０内に供給されるとともに、液体供給路１６を介して純水等の液体が希釈タンク１０内に供給され、研磨剤原液９が液体により希釈され、希釈タンク１０は濃度が希釈されたスラリー（混合液）１８を収容する。   Denoted at 10 is a dilution tank, and a high-concentration abrasive stock solution 9 in the irregular liquid container 8 is supplied into the dilution tank 10 via a pipe line (abrasive stock solution supply channel) 14, and the liquid supply channel 16 is passed through the dilution tank 10. Then, a liquid such as pure water is supplied into the dilution tank 10, the stock slurry 9 is diluted with the liquid, and the dilution tank 10 contains a slurry (mixed solution) 18 having a diluted concentration.

希釈タンク１０内には図示しない攪拌装置が設置されており、この攪拌装置で研磨剤源液９と液体供給路１６を介して送られた液体とを攪拌して、濃度が希釈された一様濃度のスラリー１８とする。２０は吸い上げポンプであり、管路１４には開閉弁２２が挿入されている。一方、液体供給路１６には流量調整弁２４が挿入されている。   A stirring device (not shown) is installed in the dilution tank 10, and the stirring agent source liquid 9 and the liquid sent through the liquid supply path 16 are stirred by this stirring device to uniformly dilute the concentration. A slurry 18 having a concentration is obtained. Reference numeral 20 denotes a suction pump, and an open / close valve 22 is inserted in the pipe 14. On the other hand, a flow rate adjusting valve 24 is inserted into the liquid supply path 16.

希釈タンク１０からは管路（第１混合液供給路）２６を介して希釈された混合液（スラリー）１８が供給タンク１２に供給され、供給タンク１２は濃度の希釈された混合液１８を収容する。管路２６にはポンプ２８及び開閉弁３０が挿入されている。   From the dilution tank 10, a diluted liquid (slurry) 18 is supplied to the supply tank 12 via a pipe line (first mixed liquid supply path) 26, and the supply tank 12 stores the diluted mixed liquid 18. To do. A pump 28 and an on-off valve 30 are inserted in the pipe line 26.

供給タンク１２からは管路（第２混合液供給路）３２を介して濃度の希釈された混合液（スラリー）１８が研磨装置４に供給され、研磨装置４で半導体ウエーハ等の板状物の研磨が実施される。管路３２にはポンプ３４及び開閉弁３６が挿入されている。   A liquid mixture (slurry) 18 having a diluted concentration is supplied from the supply tank 12 through a pipe line (second liquid mixture supply path) 32 to the polishing apparatus 4, and a plate-like object such as a semiconductor wafer is formed by the polishing apparatus 4. Polishing is performed. A pump 34 and an on-off valve 36 are inserted in the pipe line 32.

液体供給装置６は重量測定器３８上に搭載されている。同様に、希釈タンク１８も重量測定器４０上に搭載されている。重量測定器３８，４０は制御手段（コントローラ）４２に接続されている。   The liquid supply device 6 is mounted on the weight measuring device 38. Similarly, the dilution tank 18 is also mounted on the weight measuring device 40. The weight measuring devices 38 and 40 are connected to a control means (controller) 42.

制御手段４２のメモリには予め液体供給装置６の重量と不定形液体容器８本体の重量の和が記憶されており、制御手段４２では重量測定器３８で測定した液体供給装置６と研磨剤原液９を含む不定形液体容器８の総重量から液体供給装置６と不定形液体容器８本体の重量を減算することにより、研磨剤原液９の正確な残量を算出することができ、この研磨剤原液の残量は液晶ディスプレイ等の残量表示手段４４に表示される。   The memory of the control means 42 stores in advance the sum of the weight of the liquid supply device 6 and the weight of the amorphous liquid container 8 main body. The control means 42 stores the liquid supply device 6 and the abrasive stock solution measured by the weight measuring device 38. By subtracting the weights of the liquid supply device 6 and the amorphous liquid container 8 main body from the total weight of the irregular liquid container 8 including 9, the exact remaining amount of the abrasive stock solution 9 can be calculated. The remaining amount of the stock solution is displayed on a remaining amount display means 44 such as a liquid crystal display.

供給タンク１２には、複数の液面センサ４６ａ，４６ｂ，４６ｃ，４６ｄが設置されている。液面センサ４６ａ〜４６ｄは制御手段４２に接続されており、供給タンク１２内の混合液（スラリー）１８の液面が液面センサ４６ｃと４６ｄの間に来た場合に、制御手段４２で開閉弁３０を開くとともにポンプ２８を駆動して、希釈タンク１０内の混合液（スラリー）１８を供給タンク１２内に供給する。   In the supply tank 12, a plurality of liquid level sensors 46a, 46b, 46c, 46d are installed. The liquid level sensors 46a to 46d are connected to the control means 42. When the liquid level of the mixed liquid (slurry) 18 in the supply tank 12 comes between the liquid level sensors 46c and 46d, the liquid level sensors 46a to 46d are opened and closed by the control means 42. The valve 30 is opened and the pump 28 is driven to supply the mixed liquid (slurry) 18 in the dilution tank 10 into the supply tank 12.

ポンプ２０，２８，３４は制御手段４２に接続されており、制御手段４２によりその駆動が制御される。流量調整弁２４も制御手段４２に接続されており、流量調整弁２４で純水等の液体の供給量を調整して、研磨剤原液９を所望の濃度の混合液（スラリー）１８に調整する。   The pumps 20, 28 and 34 are connected to the control means 42, and their driving is controlled by the control means 42. The flow rate adjusting valve 24 is also connected to the control means 42, and the supply amount of liquid such as pure water is adjusted by the flow rate adjusting valve 24 to adjust the abrasive stock solution 9 to a mixed solution (slurry) 18 having a desired concentration. .

希釈タンク１０内の混合液（スラリー）１８の残量は、重量測定器４０上に希釈タンク１０を搭載することにより、不定形液体容器８内の研磨剤原液の残量と同様な方法により、制御手段４２で容易に算出することができる。   The remaining amount of the mixed liquid (slurry) 18 in the dilution tank 10 can be obtained by mounting the dilution tank 10 on the weight measuring device 40 in the same manner as the remaining amount of the abrasive stock solution in the amorphous liquid container 8. It can be easily calculated by the control means 42.

希釈タンク１０内の混合液（スラリー）１８の濃度調整は、ポンプ２０の駆動時間及び流量調整弁２４を介して供給される液体の量を制御するとともに、更に希釈タンク１０内の混合液（スラリー）１８の残量に基づいて、所望の濃度に調整することができる。   The adjustment of the concentration of the liquid mixture (slurry) 18 in the dilution tank 10 controls the driving time of the pump 20 and the amount of liquid supplied via the flow rate adjustment valve 24, and further, the liquid mixture (slurry in the dilution tank 10). ) Based on the remaining amount of 18, the desired density can be adjusted.

特に図示しないが、研磨剤原液供給路１４及び液体供給路１６中に流量計を設けて、希釈タンク１０内に供給される研磨剤原液９及び液体供給源１５から供給される純水等の液体の量を正確に測定することにより、希釈タンク１０内の混合液（スラリー）１８の濃度をより正確に調整することができる。   Although not particularly shown, a flowmeter is provided in the abrasive stock solution supply path 14 and the liquid supply path 16, and a liquid such as pure water supplied from the abrasive stock solution 9 and the liquid supply source 15 supplied into the dilution tank 10. By accurately measuring the amount of, the concentration of the mixed liquid (slurry) 18 in the dilution tank 10 can be adjusted more accurately.

以上の説明は、本発明の液体供給装置６を混合液供給装置２の研磨剤原液の供給に適用した例についての説明であるが、以下図２乃至図６を参照して、液体供給装置６の詳細な構造について説明する。   The above description is an example in which the liquid supply apparatus 6 of the present invention is applied to supply of the abrasive stock solution of the mixed liquid supply apparatus 2. The liquid supply apparatus 6 will be described below with reference to FIGS. The detailed structure of will be described.

図２を参照すると、不定形液体容器８の一例の斜視図が示されている。不定形液体容器８は、柔軟なフィルム状部材からなる袋部４８と、袋部４８の口に装着された筒状の首部５２と該首部５２の上端外周から外側へ張り出す環状フランジ５４とを備えた注出口５０とを有している。袋部４８内には、上述した研磨剤原液、飲料水、工業用の薬液等の液体４９が収容されている。   Referring to FIG. 2, a perspective view of an example of the irregular liquid container 8 is shown. The irregular liquid container 8 includes a bag portion 48 made of a flexible film-like member, a cylindrical neck portion 52 attached to the mouth of the bag portion 48, and an annular flange 54 projecting outward from the outer periphery of the upper end of the neck portion 52. And a spout 50 provided. In the bag part 48, the liquid 49, such as the above-mentioned abrasive stock solution, drinking water, and industrial chemical solution, is accommodated.

図３を参照すると、本発明第１実施形態の液体供給装置６の分解斜視図が示されている。液体供給装置６は、底板５６と、底板５６に立設された４本の柱５８と、柱５８で支持された天井板６０とを有する枠体７を含んでいる。   Referring to FIG. 3, an exploded perspective view of the liquid supply device 6 according to the first embodiment of the present invention is shown. The liquid supply device 6 includes a frame 7 having a bottom plate 56, four columns 58 erected on the bottom plate 56, and a ceiling plate 60 supported by the columns 58.

天井板６０には、天井板６０の側部から中央に向かって伸長する図２に示した不定形液体容器８の環状フランジ５４の外径より小さく首部５２の直径より大きい幅の案内溝６２が形成されている。天井板６０の側部には切欠き６５を有するブラケット６４が突設されている。   The ceiling plate 60 has a guide groove 62 that extends from the side of the ceiling plate 60 toward the center and has a width smaller than the outer diameter of the annular flange 54 of the amorphous liquid container 8 shown in FIG. Is formed. A bracket 64 having a notch 65 protrudes from the side of the ceiling plate 60.

６６は液体供給手段であり、図２に示した不定形液体容器８の注出口５０から袋部４８内に挿入される送出用パイプ６８と、送出用パイプ６８の途中に介装された吸い上げポンプ２０とから構成される。   Reference numeral 66 denotes liquid supply means, which is a delivery pipe 68 inserted into the bag portion 48 from the spout 50 of the irregular liquid container 8 shown in FIG. 2 and a suction pump interposed in the middle of the delivery pipe 68. 20.

送出用パイプ６８の出口部近傍にはコック（栓）７０が装着されている。液体供給手段６６は、その不使用時には、送出用パイプ６８が矢印Ａで示すように枠体７のブラケット６４の切欠き６５内に収容されて、ブラケット６４で支持されている。   A cock 70 is attached in the vicinity of the outlet of the delivery pipe 68. When the liquid supply means 66 is not in use, the delivery pipe 68 is accommodated in the notch 65 of the bracket 64 of the frame body 7 as indicated by the arrow A, and is supported by the bracket 64.

図２に示した不定形液体容器８を液体供給装置６内に収容するには、注出口５０の環状フランジ５４を液体供給装置６の天井板６０より上方にして、図４に示すように首部５２を案内溝６２中に挿入する。   To accommodate the irregular liquid container 8 shown in FIG. 2 in the liquid supply device 6, the annular flange 54 of the spout 50 is located above the ceiling plate 60 of the liquid supply device 6 so that the neck portion as shown in FIG. 52 is inserted into the guide groove 62.

これにより、不定形液体容器８の袋部４８が枠体７内に収容され、袋部４８内の液体４９の重量で案内溝６２に環状フランジ５４が係合し、袋部４８が枠体７内に垂下して不定形液体容器８が固定される。   Thereby, the bag portion 48 of the irregular liquid container 8 is accommodated in the frame body 7, the annular flange 54 is engaged with the guide groove 62 by the weight of the liquid 49 in the bag portion 48, and the bag portion 48 is in the frame body 7. The indeterminate liquid container 8 is fixed by hanging inside.

ブラケット６４に支持されている液体供給手段６６をブラケット６４から取り外して、送出用パイプ６８を注出口５０から不定形液体容器８内に挿入し、環状フランジ５４で吸い上げポンプ２０を支持する。この状態が図４に示されており、送出用パイプ６８は枠体７内に垂下した袋部４８の底部近傍に到達する長さを有している。   The liquid supply means 66 supported by the bracket 64 is removed from the bracket 64, the delivery pipe 68 is inserted into the irregular liquid container 8 from the spout 50, and the suction pump 20 is supported by the annular flange 54. This state is shown in FIG. 4, and the delivery pipe 68 has a length that reaches the vicinity of the bottom of the bag portion 48 that hangs down in the frame body 7.

不定形液体容器８内の液体４９を外部に供給するには、コック７０を開けてから吸出し用ポンプ２０を駆動する。これにより、例えば図１に示した実施形態に示されるように液体４９が管路１４内に送り出される。   In order to supply the liquid 49 in the irregular liquid container 8 to the outside, the suction pump 20 is driven after the cock 70 is opened. As a result, for example, as shown in the embodiment shown in FIG.

図５を参照すると、本発明第２実施形態の液体供給装置６Ａの斜視図が示されている。図６は図５のＶＩ−ＶＩ線断面図である。図５に示すように、不定形液体容器８が枠体７Ａ内に固定される際は、注出口５０の首部５２が案内溝６２の所定の位置で固定される。   Referring to FIG. 5, a perspective view of a liquid supply apparatus 6A according to the second embodiment of the present invention is shown. 6 is a sectional view taken along line VI-VI in FIG. As shown in FIG. 5, when the irregular liquid container 8 is fixed in the frame 7 </ b> A, the neck portion 52 of the spout 50 is fixed at a predetermined position of the guide groove 62.

枠体７Ａの底板５６Ａは、案内溝６２の所定の位置の直下に開口５７を有している。図６に示すように、底板５６Ａは角度θ傾斜して取り付けられている。これにより、不定形液体容器８内の液体４９は、底板５６Ａの開口５７内に落ち込んだ袋部４８ａ内に底板５６Ａの傾斜取付によって溜まり易くなっている。   The bottom plate 56 </ b> A of the frame body 7 </ b> A has an opening 57 immediately below a predetermined position of the guide groove 62. As shown in FIG. 6, the bottom plate 56 </ b> A is attached with an angle θ inclined. As a result, the liquid 49 in the irregular liquid container 8 is easily accumulated by the inclined mounting of the bottom plate 56A in the bag portion 48a that has fallen into the opening 57 of the bottom plate 56A.

送出用パイプ６８の下端は開口５７内に落ち込んだ袋部４８ａ内に到達する長さに形成されている。底板５６Ａに開口５７を形成するのに替えて、厚い底板を採用して底板に窪みを形成するようにしてもよい。   The lower end of the delivery pipe 68 is formed to have a length that reaches the inside of the bag portion 48 a that has fallen into the opening 57. Instead of forming the opening 57 in the bottom plate 56A, a thick bottom plate may be adopted to form a recess in the bottom plate.

本実施形態によると、底板５６Ａに開口５７が形成されているため、不定形液体容器８の固定に効果がある上、液体４９が送出用パイプ６８の吸引口付近の袋部４８ａ内に溜まるような構成となっているため、容器８の変形による液体の送出残が発生しない。   According to the present embodiment, since the opening 57 is formed in the bottom plate 56A, it is effective in fixing the irregular liquid container 8, and the liquid 49 is accumulated in the bag portion 48a near the suction port of the delivery pipe 68. Therefore, there is no liquid delivery residue due to the deformation of the container 8.

また、図１に示すように液体供給装置６を重量測定器３８上に載置すると、不定形液体容器８内の液体の残量を常に正確に把握することが可能であり、容器の大きさや材質の変更があっても、容易に対応することができる。   Further, when the liquid supply device 6 is placed on the weight measuring device 38 as shown in FIG. 1, it is possible to always accurately grasp the remaining amount of liquid in the irregular liquid container 8, and the size of the container Even if there is a change in material, it can be easily handled.

２ 混合液供給装置
４ 研磨装置
６ 液体供給装置
７ 枠体
８ 不定形液体容器
９ 研磨剤原液
１０ 希釈タンク
１２ 供給タンク
１８ 混合液（スラリー）
２０ 吸い上げポンプ
３８，４０ 重量測定器
４８ 袋部
４９ 液体
５０ 注出口
５２ 首部
５４ 環状フランジ
５６ 底板
５７ 開口
６０ 天井板
６２ 案内溝
６６ 液体供給手段
６８ 送出用パイプ 2 Mixed liquid supply device 4 Polishing device 6 Liquid supply device 7 Frame 8 Indeterminate liquid container 9 Abrasive stock solution 10 Dilution tank 12 Supply tank 18 Mixed solution (slurry)
20 Suction pump 38, 40 Weight measuring device 48 Bag 49 Liquid 50 Outlet 52 Neck 54 Annular flange 56 Bottom plate 57 Opening 60 Ceiling plate 62 Guide groove 66 Liquid supply means 68 Delivery pipe

Claims (3)

柔軟なフィルム状部材からなる袋部と、該袋部の口に装着された筒状の首部と該首部の上端外周から外側へ張り出す環状フランジとを備えた注出口と、を有する不定形液体容器内の液体を送出する液体供給装置であって、
底部と、該底部から立設された側部と、該側部に支持され該側部から中央に向かって形成された該環状フランジの外径より小さく該首部の直径より大きい幅の案内溝を有する天井部とを含む枠体と、
該注出口から該袋部内に挿入される送出用パイプと、該送出用パイプの途中に介装された吸い上げポンプとを含む液体供給手段とを具備し、
該注出口の該環状フランジを該天井部より上方にして該首部を該案内溝に挿入しつつ、該袋部を該枠体内に収容して該首部を該案内溝の所定の位置に固定すると、該袋部内の液体の重量で該案内溝に該環状フランジが係合し該袋部が該枠体内に垂下して固定され、
該送出用パイプは該枠体内に垂下した該袋部の底部近傍に到達する長さを有し、
該枠体の該底部を構成する底板は、該案内溝の該所定の位置の直下に窪み部若しくは開口部を有し、該窪み部若しくは該開口部周囲の該底板の少なくとも一部は該窪み部若しくは該開口部に向かって下方に傾斜して形成されており、
該不定形液体容器内の液体が該傾斜によって該窪み部内若しくは該開口部内に落ち込んだ袋部に溜まり易くなっていることを特徴とする液体供給装置。 An indeterminate liquid having a bag portion made of a flexible film-like member, a cylindrical neck portion attached to the mouth of the bag portion, and a spout provided with an annular flange projecting outward from the outer periphery of the upper end of the neck portion A liquid supply device for delivering a liquid in a container,
A bottom, a side standing from the bottom, and a guide groove having a width smaller than the outer diameter of the annular flange supported by the side and formed from the side toward the center and larger than the diameter of the neck. A frame including a ceiling portion having,
A liquid supply means including a delivery pipe inserted into the bag portion from the spout, and a suction pump interposed in the middle of the delivery pipe;
When the annular portion of the spout is located above the ceiling portion and the neck portion is inserted into the guide groove , the bag portion is accommodated in the frame body and the neck portion is fixed at a predetermined position of the guide groove. The annular flange is engaged with the guide groove by the weight of the liquid in the bag portion, and the bag portion is suspended and fixed in the frame body,
The delivery pipe has a length that reaches the vicinity of the bottom of the bag portion that hangs down in the frame ,
The bottom plate constituting the bottom of the frame has a recess or an opening immediately below the predetermined position of the guide groove, and at least a part of the bottom plate around the recess or the opening is the recess. Or inclined downward toward the opening or the opening,
The liquid supply apparatus according to claim 1, wherein the liquid in the irregular liquid container is easily collected in the recess or the bag part that has fallen into the opening due to the inclination . 前記送出用パイプの吸引口は、前記窪み部内若しくは前記開口部内に落ち込んだ袋部付近に位置付けられることを特徴とする請求項１記載の液体供給装置。 The liquid supply device according to claim 1 , wherein the suction port of the delivery pipe is positioned in the recess or in the vicinity of the bag part that has fallen into the opening . 前記枠体が重量測定器上に配設されていることを特徴とする請求項１又は２記載の液体供給装置。   The liquid supply apparatus according to claim 1, wherein the frame is disposed on a weight measuring device.
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