JP5618190B2 - 供給搬出システム - Google Patents
供給搬出システム Download PDFInfo
- Publication number
- JP5618190B2 JP5618190B2 JP2010175933A JP2010175933A JP5618190B2 JP 5618190 B2 JP5618190 B2 JP 5618190B2 JP 2010175933 A JP2010175933 A JP 2010175933A JP 2010175933 A JP2010175933 A JP 2010175933A JP 5618190 B2 JP5618190 B2 JP 5618190B2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- stroke
- movement
- slide conveyor
- traverser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/063—Transporting devices for sheet glass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Nonlinear Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Intermediate Stations On Conveyors (AREA)
- Control Of Conveyors (AREA)
Description
一列に配置された複数のカセット載置台と、
処理装置のステーションと、
前記複数のカセット載置台と処理装置のステーションとの間に渡って、直線経路上を移動するトラバーサ台車と、
物品の移載装置を備え、前記トラバーサ台車に搭載されると共に、トラバーサ台車上を前記直線経路と平行に移動するスライドコンベヤと、
前記トラバーサ台車と前記スライドコンベヤとを同時に移動させるように制御する、コントローラとを備えている。
(1) トラバーサ台車とスライドコンベヤとを同時に移動させることにより、移動時間を短縮できる。このため基板の大形化に対応でき、ステーション5の付近で基板を移動させるルートが多数生じた場合に、移動距離の長いルートにも対応できる。
(2) 今回の目的地と次回の目的地とを把握し、次回の目的地に応じて事前にスライドコンベヤの位置を変化させると、スライドコンベヤのストロークを長くとることができ、移動時間をさらに短縮できる。
(3) 今回の移動方向と次回の移動方向が逆向きの場合、それぞれの移動を最短時間で実行するように制御すると、簡単な制御で高速で移動できる。
(4) 今回の移動と次回の移動とで移動方向が同じ場合、ストロークが短くトラバーサ台車の最高速度が低い側の移動に、スライドコンベヤのストロークを優先的に割り当てる。するとストロークが短いため、台車が低速でしか移動できない区間を、高速で移動できる。
(5) 台車が移動する区間毎に、ストロークの割り当ての最適値を記載したテーブルを設けると、処理が簡単になる。
(6) 2回続けて同じ方向に移動し、最初のストロークが長い際に、トラバーサ台車を最初の移動で逆方向に移動させると、次回の移動でトラバーサ台車をより有効に活用でき、移動時間を短縮できる。
(7) トラバーサ台車の待機時に、次回の移動に合わせスライドコンベヤの位置を調整すると、次回の移動時間を短縮できる。
4 処理装置
5 ステーション
6 スタッカークレーン
7 走行レール
8 昇降台
9 マスト
10 移載装置
12 生産管理コントローラ
14 搬送コントローラ
16 スタッカークレーンコントローラ
18 供給搬出システムコントローラ
20 カセットステーション
21 カセット
22 トラバーサ台車
23 走行レール
24 スライドコンベヤ
25 ネジ軸
26 機上レール
28 移動モータ
30 機上コントローラ
32 走行モータ
33,34 走行車輪
35 ナット
36 基板
37 ローラ
40 支持部
41 ガイド
42 ローラ
50 受信バッファ
51 ストロークテーブル
52 台車状態テーブル
53 カセットステーションテーブル
54 ストローク制御部
55 速度パターン作成部
56 カセット管理部
58,59 サーボ系
Claims (2)
- カセット内に収納された複数の物品を、1物品ずつ処理装置へ供給搬出する供給搬出システムであって、
一列に配置された複数のカセット載置台と、
処理装置のステーションと、
前記複数のカセット載置台と処理装置のステーションとの間に渡って、直線経路上を移動するトラバーサ台車と、
物品の移載装置を備え、前記トラバーサ台車に搭載されると共に、トラバーサ台車上を前記直線経路と平行に移動するスライドコンベヤと、
前記トラバーサ台車と前記スライドコンベヤとを同時に移動させるように制御する、コントローラとを備え、
前記コントローラは、少なくとも今回の目的地と次回の目的地とを把握し、次回の移動開始前に、次回の目的地に応じてスライドコンベヤの位置を変化させることを特徴とする、供給搬出システム。 - 前記カセット載置台を、物品供給カセット用と、物品排出カセット用と、予備のカセット用との間で切替自在に、少なくとも3個備えていることを特徴とする、請求項1の供給搬出システム。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010175933A JP5618190B2 (ja) | 2010-08-05 | 2010-08-05 | 供給搬出システム |
CN201110191543.2A CN102398776B (zh) | 2010-08-05 | 2011-07-08 | 供给搬出*** |
KR1020110073653A KR20120014101A (ko) | 2010-08-05 | 2011-07-25 | 공급 반출 시스템 |
TW100127693A TWI491546B (zh) | 2010-08-05 | 2011-08-04 | Supply out of the system |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010175933A JP5618190B2 (ja) | 2010-08-05 | 2010-08-05 | 供給搬出システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012038832A JP2012038832A (ja) | 2012-02-23 |
JP5618190B2 true JP5618190B2 (ja) | 2014-11-05 |
Family
ID=45837325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010175933A Expired - Fee Related JP5618190B2 (ja) | 2010-08-05 | 2010-08-05 | 供給搬出システム |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5618190B2 (ja) |
KR (1) | KR20120014101A (ja) |
CN (1) | CN102398776B (ja) |
TW (1) | TWI491546B (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104470831B (zh) * | 2012-08-31 | 2016-08-24 | 村田机械株式会社 | 移载装置 |
CN104986558B (zh) * | 2015-07-10 | 2017-03-29 | 东莞市科隆威自动化设备有限公司 | 双线印刷机中间交叉移载产品的交叉移载装置 |
CN104985924B (zh) * | 2015-07-10 | 2017-05-31 | 东莞市科隆威自动化设备有限公司 | 具有中间交叉移载装置的双线印刷机及硅片移载方法 |
US10996232B2 (en) * | 2016-09-09 | 2021-05-04 | The Procter & Gamble Company | System and method for independently routing container-loaded vehicles to create different finished products |
EP4194378A1 (en) | 2016-09-09 | 2023-06-14 | The Procter & Gamble Company | System and method for independently routing vehicles and delivering containers and closures to unit operation stations |
CN109690430B (zh) | 2016-09-09 | 2022-06-24 | 宝洁公司 | 基于需求生产产品的***和方法 |
CN109110497B (zh) * | 2018-08-31 | 2021-06-11 | 惠科股份有限公司 | 一种显示面板的搬运***和搬运方法 |
CN110482220A (zh) * | 2019-07-26 | 2019-11-22 | 蚌埠凯盛工程技术有限公司 | 一种玻璃基板存储工艺、装置及应用 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0197614A (ja) * | 1987-10-08 | 1989-04-17 | Bridgestone Corp | 移載装置 |
JPH09100024A (ja) * | 1995-10-05 | 1997-04-15 | Denso Corp | 自走搬送車 |
JP4222007B2 (ja) * | 2002-11-19 | 2009-02-12 | 村田機械株式会社 | 搬送システム |
JP4065997B2 (ja) * | 2003-05-23 | 2008-03-26 | 株式会社ダイフク | 台車式搬送装置 |
JP4363432B2 (ja) * | 2006-09-21 | 2009-11-11 | 村田機械株式会社 | 移載装置 |
JP2009184422A (ja) * | 2008-02-04 | 2009-08-20 | Hitachi Plasma Display Ltd | 無人搬送台車 |
JP5090269B2 (ja) * | 2008-06-25 | 2012-12-05 | 台湾大福高科技設備股▲分▼有限公司 | 基板収納容器 |
-
2010
- 2010-08-05 JP JP2010175933A patent/JP5618190B2/ja not_active Expired - Fee Related
-
2011
- 2011-07-08 CN CN201110191543.2A patent/CN102398776B/zh not_active Expired - Fee Related
- 2011-07-25 KR KR1020110073653A patent/KR20120014101A/ko not_active Application Discontinuation
- 2011-08-04 TW TW100127693A patent/TWI491546B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TW201210923A (en) | 2012-03-16 |
TWI491546B (zh) | 2015-07-11 |
CN102398776B (zh) | 2015-06-03 |
JP2012038832A (ja) | 2012-02-23 |
KR20120014101A (ko) | 2012-02-16 |
CN102398776A (zh) | 2012-04-04 |
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