JP5616046B2 - Flying spot type surface or inner layer inspection device - Google Patents

Flying spot type surface or inner layer inspection device Download PDF

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JP5616046B2
JP5616046B2 JP2009238481A JP2009238481A JP5616046B2 JP 5616046 B2 JP5616046 B2 JP 5616046B2 JP 2009238481 A JP2009238481 A JP 2009238481A JP 2009238481 A JP2009238481 A JP 2009238481A JP 5616046 B2 JP5616046 B2 JP 5616046B2
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light
light guide
inner layer
light receiving
type surface
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JP2011085488A (en
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武彦 酒井
武彦 酒井
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Nidec Copal Electronics Corp
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Description

本発明はポリゴンスキャナやガルバノスキャナを使用してレーザ光や白色光を走査し、スキャナ受光ユニットで受光するフライングスポット方式の素ガラス、成膜ガラス、光学フィルム等のＦＰＤ関連素材や、銅箔、ステンレス板、アルミ素管等の金属素材や樹脂板、光学ガラス基板、感光ドラム、セラミック板等の工業製品等の表面あるいは内層検査装置に関する。   The present invention uses a polygon scanner or a galvano scanner to scan laser light or white light, and receives light with a scanner light receiving unit, such as a flying spot type raw glass, film-forming glass, optical film, and other FPD-related materials, copper foil, The present invention relates to a surface or inner layer inspection apparatus for industrial products such as a metal material such as a stainless steel plate and an aluminum base tube, a resin plate, an optical glass substrate, a photosensitive drum and a ceramic plate.

従来、フライングスポット方式の表面あるいは内層検査装置に用いられる受光ユニットは、透明なアクリルやガラス棒1本で形成された導光体をスリット付きの円筒鏡で被い、前記導光体の端面には少なくとも1個以上の受光センサが取付けられている。   Conventionally, a light receiving unit used in a flying spot type surface or inner layer inspection apparatus covers a light guide formed of transparent acrylic or one glass rod with a cylindrical mirror with a slit, and is placed on the end surface of the light guide. At least one light receiving sensor is attached.

このように構成された受光ユニットでも、ある程度まで小型化することはできるが、導光棒の一部に拡散面（ブラスト加工や回折格子等）を設け、感度を上げるために円筒鏡で多重反射させる必要があるので、開口部を広く取れず、広範囲の光を集めることができないという欠点があるとともに、多重反射するということは受光センサの反応が鈍いことを意味し、高速化には自ずと限界があり、高速、高感度、小型、低コストで処理できるフライングスポット方式の表面あるいは内層検査装置を得るのは難しいという問題があった。   Although the light receiving unit configured in this way can be downsized to a certain extent, a diffuser surface (blasting, diffraction grating, etc.) is provided on a part of the light guide bar, and multiple reflections are made with a cylindrical mirror to increase sensitivity. In addition to having the disadvantage that the aperture cannot be made wide and a wide range of light cannot be collected, multiple reflection means that the response of the light receiving sensor is dull and the speedup is naturally limited. Therefore, there is a problem that it is difficult to obtain a flying spot type surface or inner layer inspection apparatus which can be processed at high speed, high sensitivity, small size and low cost.

特開２００５−２０１７８２JP-A 2005-201782 特開２００５−３５１６８４JP 2005-351684 A

本発明は以上のような従来の欠点に鑑み、導光体で広範囲の光を集めることができ、高感度、高速化、小型、低コストで成膜ガラス、光学フィルム等のＦＰＤ関連素材、銅箔等の金属素材、光学ガラス基板、感光ドラム等の工業製品の表面あるいは内層検査を行なうことができるフライングスポット方式の表面あるいは内層検査装置を提供することを目的としている。   In view of the above-described conventional drawbacks, the present invention can collect a wide range of light with a light guide, and has high sensitivity, high speed, small size, low cost, FPD-related materials such as film-forming glass and optical film, copper, and the like. An object of the present invention is to provide a flying spot type surface or inner layer inspection apparatus capable of inspecting the surface or inner layer of an industrial product such as a metal material such as foil, an optical glass substrate or a photosensitive drum.

本発明の前記ならびにそのほかの目的と新規な特徴は次の説明を添付図面と照らし合わせて読むと、より完全に明らかになるであろう。   The above and other objects and novel features of the present invention will become more fully apparent when the following description is read in conjunction with the accompanying drawings.

ただし、図面はもっぱら解説のためのものであって、本発明の技術的範囲を限定するものではない。   However, the drawings are for explanation only and do not limit the technical scope of the present invention.

上記目的を達成するために、本発明はポリゴンスキャナやガルバノスキャナを使用して、レーザ光や白色光を走査し、スキャナ受光ユニットで受光するフライングスポット方式の表面あるいは内層検査装置において、前記スキャナ受光ユニットを複数本の導光棒を束ねた導光体と、この導光体の一端部に取付けられた受光センサと、前記導光体の他端部に取付けられたミラーあるいは受光センサとでフライングスポット方式の表面あるいは内層検査装置を構成している。   In order to achieve the above object, the present invention provides a flying spot type surface or inner layer inspection apparatus that scans laser light or white light using a polygon scanner or a galvano scanner and receives light by a scanner light receiving unit. Flying unit with a light guide in which a plurality of light guide rods are bundled, a light receiving sensor attached to one end of the light guide, and a mirror or light receiving sensor attached to the other end of the light guide It constitutes a spot type surface or inner layer inspection device.

以上の説明から明らかなように、本発明にあっては次に列挙する効果が得られる。
（１）ポリゴンスキャナやガルバノスキャナを使用して、レーザ光や白色光を走査し、スキャナ受光ユニットで受光するフライングスポット方式の表面あるいは内層検査装置において、前記スキャナ受光ユニットを複数本の導光棒を束ねた導光体と、この導光体の一端部に取付けられた受光センサと、前記導光体の他端部に取付けられたミラーあるいは受光センサによって、複数本の導光棒を束ねた導光体を用いているので、従来の１本の導光棒を用いるものと比べ、小径複数化により、境界面を増加でき、光を取り入れる効率を数十倍にできる。 As is clear from the above description, the present invention has the following effects.
(1) In a flying spot type surface or inner layer inspection apparatus that scans laser light or white light using a polygon scanner or a galvano scanner and receives light by a scanner light receiving unit, the scanner light receiving unit includes a plurality of light guide bars. A plurality of light guide rods were bundled by a light guide body bundled, a light receiving sensor attached to one end portion of the light guide body, and a mirror or light receiving sensor attached to the other end portion of the light guide body. Since the light guide is used, the boundary surface can be increased and the efficiency of taking in light can be increased by several tens of times by using a plurality of small diameters as compared with the conventional case using one light guide bar.

また、レンズ効果により、透過光を拡散させ、取り込み確率を向上でき、高感度、高速化、小型、低コスト化を図ることができる。
（２）前記（１）により、複数本の導光棒を束ねた導光体を用いるので、導光体として従来のように円筒鏡が不要で、簡単な箱状の反射鏡を用いても、用いなくても十分な光量が得られる。
（３）前記（１）によって、複数本の導光棒を束ねた導光体を用いるだけでよいので、構造が簡単で、導光体の配置場所の自由度を上げることができ、安価に実施することができる。
（４）請求項２は前記（１）〜（３）と同様な効果が得られるとともに、複数本の導光棒の光の取り入れを導光棒束ね材がじゃまするのを効率よく阻止することができる。
（５）請求項３は前記（１）〜（３）と同様な効果が得られるとともに、複数本の導光棒の端部を分割し、分割部分にそれぞれ受光センサを取付けているので、副走査方向の受光面積を大幅に増やすことができる。 Further, the transmitted light can be diffused by the lens effect to improve the capture probability, and high sensitivity, high speed, small size, and low cost can be achieved.
(2) According to the above (1), since a light guide body in which a plurality of light guide rods are bundled is used, a cylindrical mirror is not necessary as a light guide body, and a simple box-like reflector can be used. Even if it is not used, a sufficient light amount can be obtained.
(3) According to the above (1), it is only necessary to use a light guide in which a plurality of light guide rods are bundled. Therefore, the structure is simple, the degree of freedom of the location of the light guide can be increased, and the cost is low. Can be implemented.
(4) Claim 2 can obtain the same effects as the above (1) to (3), and efficiently prevent the light guide bar bundling material from jerking light from a plurality of light guide bars. Can do.
(5) The third aspect can obtain the same effects as the above (1) to (3), and the end portions of the plurality of light guide rods are divided, and the light receiving sensors are respectively attached to the divided portions. The light receiving area in the scanning direction can be greatly increased.

本発明を実施するための第１の形態の概略説明図。BRIEF DESCRIPTION OF THE DRAWINGS Schematic explanatory drawing of the 1st form for implementing this invention. 受光ユニットの正面図。The front view of a light-receiving unit. 図２の３−３線に沿う拡大断面図。The expanded sectional view which follows the 3-3 line of FIG. 導光体の光を取り込む状態を示す説明図。Explanatory drawing which shows the state which takes in the light of a light guide. 従来品と本発明のビーム入射位置と受光量の関係を示す図。The figure which shows the relationship between the beam incident position and light reception amount of a conventional product and this invention. 散乱光を使用する装置の説明図。Explanatory drawing of the apparatus which uses scattered light. 透過光を使用する装置の説明図。Explanatory drawing of the apparatus which uses transmitted light. 本発明を実施するための第２の形態の概略説明図。Schematic explanatory drawing of the 2nd form for implementing this invention. 受光ユニットの正面図。The front view of a light-receiving unit. 図９の１０−１０線に沿う断面図。Sectional drawing which follows the 10-10 line of FIG. 本発明を実施するための第３の形態の概略説明図。Schematic explanatory drawing of the 3rd form for implementing this invention. 受光ユニットの正面図。The front view of a light-receiving unit. 図１２の１３−１３線に沿う断面図。Sectional drawing which follows the 13-13 line | wire of FIG. 本発明を実施するための第４の形態の概略説明図。Schematic explanatory drawing of the 4th form for implementing this invention. 受光ユニットの正面図。The front view of a light-receiving unit. 図１５の１６−１６線に沿う断面図。FIG. 16 is a cross-sectional view taken along line 16-16 in FIG. 15; 本発明を実施するための第５の形態の概略説明図。Schematic explanatory drawing of the 5th form for implementing this invention. 受光ユニットの正面図。The front view of a light-receiving unit. 受光ユニットの側面図。The side view of a light-receiving unit. 受光ユニットの平面図。The top view of a light-receiving unit. 受光ユニットの断面図。Sectional drawing of a light-receiving unit. 本発明を実施するための第６の形態の概略説明図。Schematic explanatory drawing of the 6th form for implementing this invention. 受光ユニットの説明図。Explanatory drawing of a light-receiving unit. 図２３の２４−２４線に沿う断面図。FIG. 24 is a cross-sectional view taken along line 24-24 of FIG. 図２３の２５−２５線に沿う断面図。FIG. 25 is a sectional view taken along line 25-25 in FIG. 本発明を実施するための第７の形態の概略説明図。Schematic explanatory drawing of the 7th form for implementing this invention. 受光ユニットの説明図。Explanatory drawing of a light-receiving unit. 図２７の２８−２８線に沿う断面図。FIG. 28 is a sectional view taken along line 28-28 in FIG. 27; 図２７の２９−２９線に沿う断面図。FIG. 29 is a sectional view taken along line 29-29 in FIG. 27;

以下、図面に示す本発明を実施するための形態により、本発明を詳細に説明する。   Hereinafter, the present invention will be described in detail with reference to the embodiments shown in the drawings.

図１ないし図７に示す本発明を実施するための第１の形態において、１は本発明のフライングスポット方式の表面あるいは内層検査装置で、このフライングスポット方式の表面あるいは内層検査装置１は検査物２にレーザ光を走査するスキャナユニット３と、このスキャナユニット３からの走査光を、前記検査物２を介した反射光、透過光、散乱光、本発明の実施の形態では反射光４を受光する受光ユニット５とで構成されている。   In the first embodiment for carrying out the present invention shown in FIGS. 1 to 7, reference numeral 1 denotes a flying spot type surface or inner layer inspection apparatus according to the present invention. The flying spot type surface or inner layer inspection apparatus 1 is an inspection object. The scanner unit 3 that scans the laser beam 2 and the scanning light from the scanner unit 3 are received as reflected light, transmitted light, scattered light, and reflected light 4 in the embodiment of the present invention. And the light receiving unit 5 that performs the above operation.

前記受光ユニット５は図２および図３に示すように、複数本、本発明の実施の形態では１２本のアクリル棒やガラス等の透明素材の屈折率の高い導光棒６、この１２本の導光棒６全体を束ねて覆う低屈折率の透明パイプを用いた導光棒束ね材７とで構成された導光体８と、この導光体８の一端部に取付けられたＰＭＴ やフォトダイオードを用いた受光センサ９と、前記導光体８の他端部に取付けられた、該導光体に取り込まれた光を前記受光センサ９へ反射させるミラー１０とで構成されている。   As shown in FIGS. 2 and 3, the light receiving unit 5 includes a plurality of light guide bars 6 having a high refractive index of a transparent material such as 12 acrylic bars and glass in the embodiment of the present invention. A light guide 8 composed of a light guide rod bundling material 7 using a transparent pipe having a low refractive index that covers and covers the entire light guide rod 6, and a PMT or a photo attached to one end of the light guide 8 A light receiving sensor 9 using a diode and a mirror 10 attached to the other end of the light guide 8 and reflecting the light taken in the light guide to the light receiving sensor 9 are configured.

上記構成のフライングスポット方式の表面あるいは内層検査装置１は、スキャナユニット３からの走査線３ａを検査物２に照射し、反射光４を受光ユニット５で受ける。   The flying spot type surface or inner layer inspection apparatus 1 configured as described above irradiates the inspection object 2 with the scanning line 3 a from the scanner unit 3 and receives the reflected light 4 by the light receiving unit 5.

この時、受光ユニット５の導光体８は１２本の導光棒６を低屈折率の透明パイプを用いた導光棒束ね材７で束ねられているため、図４および図５に示すように境界面が増加し、光を取り入れる効率が高くなり、光の取り込み確率が向上し、高感度、高速化で、取り込んだ光を受光センサ９へ導くことができる。   At this time, since the light guide 8 of the light receiving unit 5 is formed by bundling 12 light guide rods 6 with a light guide rod bundling material 7 using a transparent pipe having a low refractive index, as shown in FIGS. The boundary surface increases, the efficiency of taking in light increases, the probability of taking in light improves, and the taken-in light can be guided to the light receiving sensor 9 with high sensitivity and high speed.

なお、図６に示すように検査物２からの散乱光１１を受光できる位置に受光ユニット５を配置してもよく、また、内層検査をする場合には、図７に示すように検査物２を透過する透過光１２を受光できる位置に受光ユニット５を配置して使用する。   In addition, as shown in FIG. 6, the light receiving unit 5 may be arranged at a position where the scattered light 11 from the inspection object 2 can be received, and when performing the inner layer inspection, as shown in FIG. The light receiving unit 5 is disposed and used at a position where the transmitted light 12 that passes through can be received.

[発明を実施するための異なる形態]
次に、図８ないし図２９に示す本発明を実施するための異なる形態につき説明する。なお、これらの本発明を実施するための異なる形態の説明に当って、前記本発明を実施するための第１の形態と同一構成部分には同一符号を付して重複する説明を省略する。 [Different forms for carrying out the invention]
Next, different modes for carrying out the present invention shown in FIGS. 8 to 29 will be described. In the description of the different embodiments for carrying out the present invention, the same components as those in the first embodiment for carrying out the present invention are denoted by the same reference numerals, and redundant description is omitted.

図８ないし図１０に示す本発明を実施するための第２の形態において、前記本発明を実施するための第１の形態と主に異なる点は、１２本の導光棒６の両端部だけを透明パイプを用いた導光棒束ね材７Ａ、７Ａで束ねた導光体８Ａを使用した受光ユニット５Ａを用いた点で、このような受光ユニット５Ａを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ａにしても、前記本発明を実施するための第１形態と同様な作用効果が得られる。   The second embodiment for carrying out the present invention shown in FIGS. 8 to 10 is mainly different from the first embodiment for carrying out the present invention only in both end portions of 12 light guide rods 6. The surface of a flying spot system constructed using such a light receiving unit 5A in that a light receiving unit 5A using a light guide 8A bundled with light guide rod bundling members 7A and 7A using transparent pipes is used. Even in the inner layer inspection apparatus 1A, the same effects as those of the first embodiment for carrying out the present invention can be obtained.

図１１ないし図１３に示す本発明を実施するための第３の形態において、前記本発明を実施するための第１の形態と主に異なる点は、１２本の導光棒６を低屈折率の透明フィルムを用いた導光棒束ね材７Ｂで束ねた導光体８Ｂを使用した受光ユニット５Ｂを用いた点で、このような受光ユニット５Ｂを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ｂにしても、前記本発明を実施するための第１の形態と同様な作用効果が得られる。   The third embodiment for carrying out the present invention shown in FIGS. 11 to 13 is mainly different from the first embodiment for carrying out the present invention in that twelve light guide rods 6 have a low refractive index. The surface or inner layer inspection of the flying spot method constructed using such a light receiving unit 5B in that the light receiving unit 5B using the light guide 8B bundled with the light guide rod bundling material 7B using the transparent film is used. Even with the apparatus 1B, the same effect as the first embodiment for carrying out the present invention can be obtained.

図１４ないし図１６に示す本発明を実施するための第４の形態において、前記本発明を実施するための第１の形態と主に異なる点は、導光体８の他端部にミラーに代え受光センサ９を設けた２個の受光センサ９、９を使用した受光ユニット５Ｃを用いた点で、このような受光ユニット５Ｃを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ｃにしても、前記本発明を実施するための第１の形態と同様な作用効果が得られる。   The fourth embodiment for carrying out the present invention shown in FIGS. 14 to 16 is mainly different from the first embodiment for carrying out the present invention in that a mirror is provided at the other end of the light guide 8. Instead of using a light receiving unit 5C using two light receiving sensors 9, 9 provided with a light receiving sensor 9, a flying spot type surface or inner layer inspection apparatus 1C configured using such a light receiving unit 5C is provided. Also, the same effect as the first embodiment for carrying out the present invention can be obtained.

図１７ないし図２１に示す本発明を実施するための第５の形態において、前記本発明を実施するための第１の形態と主に異なる点は、導光体８を箱状の反射鏡１３内に設置した受光ユニット５Ｄを用いた点で、このような受光ユニット５Ｄを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ｄにしても、前記本発明を実施するための第１の形態と同様な作用効果が得られるとともに、簡単で安価に製造することができる反射鏡１３によって、さらなる十分な光量が得られる。   The fifth embodiment for carrying out the present invention shown in FIGS. 17 to 21 is mainly different from the first embodiment for carrying out the present invention in that the light guide 8 is replaced by a box-shaped reflecting mirror 13. The first embodiment for carrying out the present invention is also applied to a flying spot type surface or inner layer inspection apparatus 1D configured using such a light receiving unit 5D in that it uses a light receiving unit 5D installed inside. In addition to the same operational effects as described above, the reflecting mirror 13 that can be manufactured easily and inexpensively provides a further sufficient amount of light.

なお、前記反射鏡１３は一側部が開口した箱状のケース体１４と、このケース体１４の下部内底面に固定された支持金具１５に固定された後端反射鏡１６と、前記ケース体１４の内側下面に固定された下部反射鏡１７と、前記ケース体１４内で前記後端反射鏡１６の上部より、該ケース体１４の開口部側の上面に位置する前記支持金具１５に固定された上部反射鏡１８とで構成されている。   The reflecting mirror 13 includes a box-shaped case body 14 having an opening on one side, a rear end reflecting mirror 16 fixed to a support fitting 15 fixed to the bottom inner bottom surface of the case body 14, and the case body. The lower reflecting mirror 17 fixed to the inner lower surface of the case 14, and the support metal fitting 15 positioned on the upper surface of the case body 14 on the opening side from the upper portion of the rear end reflecting mirror 16 in the case body 14 are fixed. And an upper reflecting mirror 18.

図２２ないし図２５に示す本発明を実施するための第６の形態において、前記本発明を実施するための第１の形態と主に異なる点は、複数本の導光棒６の一端部側を、透明パイプを用いた導光棒束ね材７で束ねるとともに、他端部側を２分割し、その端部を透明パイプを用いた導光棒束ね材７Ａ、７Ａで束ねて、それぞれ受光センサ９、９に取付けた受光ユニット５Ｅを用いた点で、このような受光ユニット５Ｅを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ｅにしても、前記本発明を実施するための第１の形態と同様な作用効果が得られるとともに、２個の受光センサ９、９を使用しているので、副走査方向の受光面積を大幅に増やすことができる。   The sixth embodiment for carrying out the present invention shown in FIGS. 22 to 25 is mainly different from the first embodiment for carrying out the present invention in that one end side of a plurality of light guide rods 6. Are bundled with a light guide rod bundling material 7 using a transparent pipe, the other end side is divided into two, and the ends thereof are bundled with light guide bar bundling materials 7A and 7A using a transparent pipe. 9, a flying spot type surface or inner layer inspection apparatus 1E constructed using such a light receiving unit 5E is used to implement the first embodiment for carrying out the present invention. The same effect as that of the embodiment can be obtained, and since the two light receiving sensors 9, 9 are used, the light receiving area in the sub-scanning direction can be greatly increased.

図２６ないし図２９に示す本発明を実施するための第７の形態において、前記本発明を実施するための第１の形態と主に異なる点は、複数本の導光棒６を束ねた２個の導光棒の束１９、１９の間に両面鏡２０を介装した導光体８Ｃを使用した受光ユニット５Ｆを用いた点で、このような受光ユニット５Ｆを用いて構成したフライングスポット方式の表面あるいは内層検査装置１Ｆにしても前記本発明を実施するための第１の形態と同様な作用効果が得られるとともに、近接した受光位置の光量差（受光角度による影響）を計測する必要がある時に効果を発揮させることができる。   The seventh embodiment for carrying out the present invention shown in FIGS. 26 to 29 is mainly different from the first embodiment for carrying out the present invention in that a plurality of light guide rods 6 are bundled together. A flying spot system configured using such a light receiving unit 5F in that a light receiving unit 5F using a light guide 8C having a double-sided mirror 20 interposed between a bundle of light guide bars 19 and 19 is used. The surface or inner layer inspection apparatus 1F can obtain the same effect as the first embodiment for carrying out the present invention, and measure the light amount difference (influence by the light receiving angle) at the adjacent light receiving positions. It can be effective at some point.

なお、前記本発明を実施するための各実施の形態では１２本の導光棒６を束ねた導光体８、８Ａ、８Ｂ、８Ｃを用いたが、複数本以上の導光棒を束ねて形成した導光体でも同様な作用効果が得られる。   In each of the embodiments for carrying out the present invention, the light guides 8, 8A, 8B, and 8C in which 12 light guide bars 6 are bundled are used. However, a plurality of light guide bars are bundled. The same effect can be obtained with the formed light guide.

本発明はフライングスポット方式の表面あるいは内層検査装置を製造する産業で利用される。   The present invention is used in the industry of manufacturing a flying spot type surface or inner layer inspection apparatus.

１、１Ａ、１Ｂ、１Ｃ、１Ｄ、１Ｅ、１Ｆ：フライングスポット方式の表面あるいは内層検査装置、
２：検査物、 ３：スキャナユニット、
４：反射光、
５、５Ａ、５Ｂ、５Ｃ、５Ｄ、５Ｅ、５Ｆ：受光ユニット、
６：導光棒、 ７、７Ａ、７Ｂ：導光棒束ね材、
８、８Ａ、８Ｂ、８Ｃ：導光体、９：受光センサ、
１０：ミラー、 １１：散乱光、
１２：透過光、 １３：反射鏡、
１４：ケース体、 １５：支持金具、
１６：後端反射鏡、 １７：下部反射鏡、
１８：上部反射鏡、 １９：導光棒の束、
２０：両面鏡。 1, 1A, 1B, 1C, 1D, 1E, 1F: Flying spot type surface or inner layer inspection device,
2: Inspection object, 3: Scanner unit,
4: Reflected light
5, 5A, 5B, 5C, 5D, 5E, 5F: light receiving unit,
6: Light guide rod 7, 7, A, 7B: Light guide rod bundling material,
8, 8A, 8B, 8C: light guide, 9: light receiving sensor,
10: mirror, 11: scattered light,
12: Transmitted light, 13: Reflector,
14: Case body, 15: Support metal fitting,
16: Rear end reflecting mirror, 17: Lower reflecting mirror,
18: Upper reflector, 19: Bundle of light guide rods,
20: Double-sided mirror.

Claims (3)

ポリゴンスキャナやガルバノスキャナを使用して、レーザ光や白色光を走査し、スキャナ受光ユニットで受光するフライングスポット方式の表面あるいは内層検査装置において、前記スキャナ受光ユニットを複数本の導光棒をレンズ効果により、透過光を拡散させ、取り込み確率を向上できるように束ねた導光体と、この導光体の一端部に取付けられた受光センサと、前記導光体の他端部に取付けられたミラーあるいは受光センサとで構成されていることを特徴とするフライングスポット方式の表面あるいは内層検査装置。 In a flying spot type surface or inner layer inspection device that scans laser light or white light using a polygon scanner or galvano scanner and receives the light with a scanner light receiving unit, the scanner light receiving unit has a plurality of light guide rods with a lens effect. By diffusing transmitted light, the light guides bundled so as to improve the capture probability, a light receiving sensor attached to one end of the light guide, and a mirror attached to the other end of the light guide Alternatively, a flying spot type surface or inner layer inspection apparatus characterized by comprising a light receiving sensor. 導光体は複数本の導光棒と、この複数本の導光棒を覆うように束ねて固定する低屈折率の透明パイプや低屈折率の透明フィルム、あるいは複数本の導光棒の両端部を低屈折率の透明パイプを用いた導光棒束ね材とで構成されていることを特徴とする請求項１記載のフライングスポット方式の表面あるいは内層検査装置。 The light guide is composed of a plurality of light guide rods and a low refractive index transparent pipe or a low refractive index transparent film that is bundled and fixed so as to cover the plurality of light guide rods, or both ends of the plurality of light guide rods. 2. The flying spot type surface or inner layer inspection device according to claim 1, wherein the portion is composed of a light guide rod bundling material using a transparent pipe having a low refractive index. 導光体の一端部に取付けられた受光センサは導光体の複数本の導光棒の端部を分割し、該分割部分にそれぞれ受光センサを取付けたことを特徴とする請求項１記載のフライングスポット方式の表面あるいは内層検査装置。 2. The light receiving sensor attached to one end of the light guide body divides the ends of a plurality of light guide rods of the light guide body, and the light receiving sensors are attached to the divided portions, respectively. Flying spot type surface or inner layer inspection device.
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