JP5608402B2 - Method for manufacturing composite optical element and apparatus for manufacturing the same - Google Patents
Method for manufacturing composite optical element and apparatus for manufacturing the same Download PDFInfo
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- JP5608402B2 JP5608402B2 JP2010078030A JP2010078030A JP5608402B2 JP 5608402 B2 JP5608402 B2 JP 5608402B2 JP 2010078030 A JP2010078030 A JP 2010078030A JP 2010078030 A JP2010078030 A JP 2010078030A JP 5608402 B2 JP5608402 B2 JP 5608402B2
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- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
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- 238000004364 calculation method Methods 0.000 description 3
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- 206010010071 Coma Diseases 0.000 description 1
- 238000003848 UV Light-Curing Methods 0.000 description 1
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Description
本発明は、２つの光学基材が樹脂層を有する複合光学素子において、光学基材間の偏芯を調整する複合光学素子の製造方法及びその製造装置に関する。 The present invention relates to a composite optical element manufacturing method for adjusting the eccentricity between optical base materials in a composite optical element in which two optical base materials have resin layers, and a manufacturing apparatus therefor.
例えば、２つの光学基材を接合して得られる複合光学素子において、光学性能を保つためには、製造する際に、夫々の光学基材の光軸を高精度に調芯することが必要である。このような複合光学素子の調芯を行う従来例として、例えば特許文献１に記載の技術が公知である。 For example, in order to maintain optical performance in a composite optical element obtained by joining two optical base materials, it is necessary to align the optical axes of the respective optical base materials with high accuracy when manufacturing. is there. As a conventional example for aligning such a composite optical element, for example, a technique described in Patent Document 1 is known.
この特許文献１では、第１レンズ体と、第２レンズ体と、それら２枚のレンズ面同士が対面する状態で、第１レンズ体上に載置された第２レンズ体を保持する保持部材と、第２レンズ体を第１レンズ体に押し付けながら第２レンズ体を摺動させるＸＹＺ軸ステージと、を有している。そして、第１レンズ体と第２レンズ体を透過した光の焦点像から光軸のずれを検出し、そのずれがなくなるまで第２レンズ体の光学面を第１レンズ体の光学面に沿って摺動させて光軸合わせを行うものである。 In Patent Document 1, a first lens body, a second lens body, and a holding member that holds a second lens body placed on the first lens body in a state where the two lens surfaces face each other. And an XYZ axis stage that slides the second lens body while pressing the second lens body against the first lens body. Then, a deviation of the optical axis is detected from the focus image of the light transmitted through the first lens body and the second lens body, and the optical surface of the second lens body is moved along the optical surface of the first lens body until the deviation is eliminated. The optical axis is aligned by sliding.
しかしながら、特許文献１では、第１レンズ体と第２レンズ体とが光学面で当接し、第２レンズ体が第１レンズ体の光学面に沿って摺動する構成である。このため、例えば、第１レンズ体と第２レンズ体とが当接せず、レンズ体間に樹脂層がある複合光学素子を作成する場合、樹脂の厚さを制御しつつ、第１レンズ体の貼り合わせ面の球芯の光軸方向位置と、第２レンズ体の貼り合わせ面における球芯の光軸方向位置とを一致させることができない。 However, in Patent Document 1, the first lens body and the second lens body abut on the optical surface, and the second lens body slides along the optical surface of the first lens body. For this reason, for example, when creating a composite optical element in which the first lens body and the second lens body do not come into contact with each other and the resin layer is between the lens bodies, The optical axis direction position of the spherical core of the bonding surface cannot be matched with the optical axis position of the spherical core on the bonding surface of the second lens body.
すなわち、特許文献１では、第１レンズ体と第２レンズ体の光学面を沿わせる必要があるため、レンズ体間の樹脂の厚みは一義的に決まってしまう。このため、レンズ体の形状制約を受けずに、樹脂の厚みを所望の厚さに制御しつつ、偏芯精度を高精度に調芯することは困難である。 That is, in Patent Document 1, since the optical surfaces of the first lens body and the second lens body must be aligned, the resin thickness between the lens bodies is uniquely determined. For this reason, it is difficult to adjust the eccentric accuracy with high accuracy while controlling the thickness of the resin to a desired thickness without being restricted by the shape of the lens body.
本発明は、斯かる課題を解決するためになされたもので、第１の光学基材と第２の光学基材との間に樹脂を配した状態で夫々の光学面の光学基材を当接させずに光学芯を独立して調整することにより、光学基材の形状制御を受けずに樹脂の厚みを所望の厚さに制御しつつ、高精度に偏芯調整を行うことが可能な複合光学素子の製造方法及びその製造装置を提供することを目的とする。 The present invention has been made to solve such a problem, and the optical substrates of the respective optical surfaces are applied in a state where a resin is disposed between the first optical substrate and the second optical substrate. By adjusting the optical core independently without touching it, it is possible to adjust the eccentricity with high accuracy while controlling the thickness of the resin to a desired thickness without receiving the shape control of the optical base material. An object of the present invention is to provide a method of manufacturing a composite optical element and a manufacturing apparatus thereof.
本発明は、第１の光学基材及び第２の光学基材の間に樹脂層を有する複合光学素子の製造方法であって、偏芯調整の基準となる基準光軸を設定する工程と、前記第１の光学基材を前記基準光軸に対して垂直方向に移動させ、前記第１の光学基材の有する一方の光学芯を前記基準光軸に一致させる工程と、前記第１の光学基材を前記基準光軸に対して傾斜方向に移動させ、前記第１の光学基材の有する他方の光学芯を前記基準光軸に一致させる工程と、前記第２の光学基材を前記基準光軸に対して垂直方向に移動させ、前記第２の光学基材の有する一方の光学芯を前記基準光軸に一致させる工程と、前記第２の光学基材を前記基準光軸に対して傾斜方向に移動させ、前記第２の光学基材の有する他方の光学芯を前記基準光軸に一致させる工程と、前記第１と第２の光学基材の少なくとも一方の貼り合わせ面に樹脂を供給する工程と、前記第１と第２の光学基材間で前記樹脂を押延する工程と、前記樹脂を硬化させる工程と、を備える。 The present invention is a method for manufacturing a composite optical element having a resin layer between a first optical substrate and a second optical substrate, the step of setting a reference optical axis that serves as a reference for eccentricity adjustment, Moving the first optical base material in a direction perpendicular to the reference optical axis and matching one optical core of the first optical base material with the reference optical axis; Moving the base material in an inclination direction with respect to the reference optical axis, and matching the other optical core of the first optical base material with the reference optical axis; and moving the second optical base material to the reference optical axis. Moving in a direction perpendicular to the optical axis to match one optical core of the second optical substrate with the reference optical axis, and moving the second optical substrate relative to the reference optical axis. A step of moving in the tilt direction and matching the other optical core of the second optical substrate with the reference optical axis; Supplying a resin to at least one bonding surface of the first and second optical substrates, a step of stretching the resin between the first and second optical substrates, and curing the resin And a step of causing.
また、特に前記第１と第２の光学基材間で前記樹脂を押延する工程として、前記第１の光学基材の空間位置と、前記第２の光学基材の空間位置と、から樹脂厚を所望の厚さにするための距離制御の値を算出する工程と、算出された前記距離制御の値に従って前記第１の光学基材と前記第２の光学基材の少なくとも一方を移動させる工程と、を備えることが好ましい。 In particular, as a step of stretching the resin between the first and second optical base materials, a resin is obtained from the spatial position of the first optical base material and the spatial position of the second optical base material. A step of calculating a distance control value for making the thickness a desired thickness, and moving at least one of the first optical substrate and the second optical substrate according to the calculated distance control value; It is preferable to provide a process.
また、本発明は、第１の光学基材及び第２の光学基材が樹脂を介して接合された複合光学素子の製造装置であって、基準光軸を設定する基準光軸設定手段と、前記第１の光学基材を前記基準光軸に対して垂直方向に移動し、前記基準光軸に対して調整を行う第１の調整手段と、前記第１の光学基材を前記基準光軸に対して傾斜方向に移動し、前記基準光軸に対して調整を行う第２の調整手段と、前記第２の光学基材を前記基準光軸に対して垂直方向に移動し、前記基準光軸に対して調整を行う第３の調整手段と、前記第２の光学基材を前記基準光軸に対して傾斜方向に移動し、前記基準光軸に対して調整を行う第４の調整手段と、前記第１と第２の光学基材の少なくとも一方の貼り合わせ面に樹脂を供給する供給手段と、前記樹脂を硬化させる硬化手段と、前記第１〜第４の調整手段を制御する制御手段と、を備える。 Further, the present invention is a composite optical element manufacturing apparatus in which a first optical substrate and a second optical substrate are bonded via a resin, and a reference optical axis setting means for setting a reference optical axis; A first adjusting unit configured to move the first optical substrate in a direction perpendicular to the reference optical axis and adjust the reference optical axis; and to adjust the first optical substrate to the reference optical axis. And a second adjusting means for adjusting the reference optical axis, and the second optical substrate is moved in a direction perpendicular to the reference optical axis, and the reference light Third adjusting means for adjusting the axis, and fourth adjusting means for moving the second optical base material in an inclined direction with respect to the reference optical axis and adjusting the reference optical axis Supply means for supplying resin to at least one bonding surface of the first and second optical substrates; and curing the resin Comprising a curing means, and control means for controlling the first to fourth adjusting means.
また、この際、前記第１の調整手段は前記第１の光学基材の反貼り合わせ面を保持し、前記第３の調整手段は前記第２の光学基材の反貼り合わせ面を保持するのが好ましい。
さらに、この際、前記制御手段は、前前記第１の光学基材の空間位置と、前記第２の光学基材の空間位置と、から樹脂厚を所望の厚さにするための距離制御の値を算出する演算を行い、算出された前記距離制御の値に従って前記第１〜第４の調整手段の少なくとも一つを制御することが好ましい。
At this time, the first adjusting means holds the anti-bonding surface of the first optical substrate, and the third adjusting means holds the anti-bonding surface of the second optical substrate. Is preferred.
Further, at this time, the control means performs distance control for making the resin thickness a desired thickness from the spatial position of the first optical base and the spatial position of the second optical base. It is preferable that an operation for calculating a value is performed, and at least one of the first to fourth adjustment units is controlled according to the calculated value of the distance control.
本発明によれば、第１の光学基材と第２の光学基材との間に樹脂を配した光学素子において、夫々の光学面の光学芯を独立して調整することにより、高精度に偏芯調整を行った上で、光学基材の接合を行うことが可能な複合光学素子の製造方法及びその製造装置を提供することができる。 According to the present invention, in an optical element in which a resin is disposed between a first optical substrate and a second optical substrate, the optical cores of the respective optical surfaces are independently adjusted, thereby achieving high accuracy. It is possible to provide a method for manufacturing a composite optical element and an apparatus for manufacturing the same, which can be bonded to an optical substrate after performing eccentricity adjustment.
以下、図面に基づき本発明の実施の形態を説明する。
［第１の実施の形態］
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
（光学面の偏芯の説明）
図１は、紫外線硬化型樹脂１６で貼り合わせる前の第１の光学基材１２と第２の光学基材１４の断面図である。
複合光学素子１０（図２参照）は、第１の光学基材１２と第２の光学基材１４とを紫外線硬化型樹脂１６により貼り合わせて得られる。
(Explanation of eccentricity of optical surface)
FIG. 1 is a cross-sectional view of the first optical substrate 12 and the second optical substrate 14 before being bonded together with the ultraviolet curable resin 16.
The composite optical element 10 (see FIG. 2) is obtained by bonding the first optical substrate 12 and the second optical substrate 14 with an ultraviolet curable resin 16.
この複合光学素子１０において、第１の光学基材１２は光学面１２ａ、１２ｂを、第２の光学基材１４は光学面１４ａ、１４ｂを有している。ここで、複合光学素子１０の光学芯は、光学面１２ａ、１２ｂが有する第１及び第２の光学芯ｃ１、ｃ２と、光学面１４ａ、１４ｂが有する第３及び第４の光学芯ｃ３、ｃ４と、全部で４個存在する。そして、複合光学素子１０が所望の光学性能を発揮するため、これらの第１〜第４の光学芯（ｃ１〜ｃ４）が全て同一直線上に結ばれるように各光学芯（ｃ１〜ｃ４）を調整（偏芯調整）することが求められている。 In this composite optical element 10, the first optical substrate 12 has optical surfaces 12a and 12b, and the second optical substrate 14 has optical surfaces 14a and 14b. Here, the optical cores of the composite optical element 10 are the first and second optical cores c1 and c2 of the optical surfaces 12a and 12b, and the third and fourth optical cores c3 and c4 of the optical surfaces 14a and 14b. And there are 4 in total. In order for the composite optical element 10 to exhibit desired optical performance, the optical cores (c1 to c4) are arranged so that the first to fourth optical cores (c1 to c4) are all connected on the same straight line. Adjustment (eccentricity adjustment) is required.
すなわち、第１の光学芯ｃ１と第２の光学芯ｃ２を結ぶ光学基材１２の光軸Ｌ１と、第３の光学芯ｃ３と第４の光学芯ｃ４を結ぶ光学基材１４の光軸Ｌ２とが、基準光軸Ｌ０と高精度に一致していなければならない。なお、この基準光軸Ｌ０とは、偏芯調整の基準となる光軸のことである。 That is, the optical axis L1 of the optical base 12 connecting the first optical core c1 and the second optical core c2, and the optical axis L2 of the optical base 14 connecting the third optical core c3 and the fourth optical core c4. Must coincide with the reference optical axis L0 with high accuracy. The reference optical axis L0 is an optical axis that serves as a reference for eccentricity adjustment.
また、光学芯とは、理想像が得られる光学面位置を表すものであって、光学面形状が球面で構成される場合は、球面の曲率中心をいい、光学面形状が非球面で構成される場合は、非球面中央部の球面近似における曲率中心をいうものとする。また、理想像とは、光学基材に光を透過させた際に測定できる、チャート像、波面収差像、軸上コマ収差像についての理想像である。 The optical core represents the position of the optical surface where an ideal image can be obtained.If the optical surface shape is a spherical surface, it means the center of curvature of the spherical surface, and the optical surface shape is an aspherical surface. The center of curvature in the spherical approximation of the central part of the aspherical surface. The ideal image is an ideal image for a chart image, a wavefront aberration image, and an axial coma image that can be measured when light is transmitted through the optical substrate.
これら光学基材を透過する像は、基材の球芯の位置ズレ、光学基材内部の屈折率分布および複屈折が大きくなることで、理想像から乖離した像が形成される。
すなわち、本実施の形態の偏芯とは、理想像から乖離した像（理想像ズレ）が形成された状態を指し、偏芯調整とは、当該理想像ズレを解消するために基材球芯位置を調整することを指す。
These images transmitted through the optical base material are formed so as to deviate from the ideal image by increasing the positional deviation of the spherical core of the base material, the refractive index distribution inside the optical base material, and the birefringence.
That is, the eccentricity in the present embodiment refers to a state in which an image deviating from an ideal image (ideal image deviation) is formed, and the eccentricity adjustment refers to a base material spherical core in order to eliminate the ideal image deviation. Refers to adjusting the position.
また、光学基材の貼り合わせ面とは、他方の光学基材と樹脂を挟んで対向する光学面のことをいい、反貼り合わせ面とは、他方の光学基材と対向しない光学面をいう。
さらに、シフトとは光軸に対する光学面の光学芯の平行移動をいい、チルトとは光軸に対する光学面の光学芯の傾きをいう。
Further, the bonding surface of the optical substrate refers to an optical surface facing the other optical substrate with the resin interposed therebetween, and the anti-bonding surface refers to an optical surface not facing the other optical substrate. .
Further, shift refers to the parallel movement of the optical core of the optical surface with respect to the optical axis, and tilt refers to the tilt of the optical core of the optical surface with respect to the optical axis.
（光学基材の形状）
第１の光学基材１２は、近似曲率半径Ｒ１＝２５mmの非球面形状を持つ反貼り合わせ面１２ａと、近似曲率半径Ｒ２＝２８mmの非球面形状を持つ貼り合わせ面１２ｂを有する両凹形状のレンズである。また、中心肉厚ｔ１＝３mm、外径Ｄ１＝５０mmのガラス成形レンズである。また、材質は、Ｓ−ＬＡＨ５３（オハラ（株）社製）である。
(Optical substrate shape)
The first optical substrate 12 has a biconcave shape having an anti-bonding surface 12a having an aspherical shape with an approximate curvature radius R1 = 25 mm and a bonding surface 12b having an aspherical shape with an approximate curvature radius R2 = 28 mm. It is a lens. Further, the glass molded lens has a center thickness t1 = 3 mm and an outer diameter D1 = 50 mm. The material is S-LAH53 (manufactured by OHARA INC.).
第２の光学基材１４は、近似曲率半径Ｒ３＝４６mmの非球面形状を持つ反貼り合わせ面１４ａと、近似曲率半径Ｒ４＝３５mmの非球面形状を持つ貼り合わせ面１４ｂを有する凸メニスカス形状のレンズである。また、中心肉厚ｔ２＝７mm、外径Ｄ２＝３６mmのガラス成形レンズである。また、材質は、Ｓ−ＢＡＬ４２（オハラ（株）社製）である。 The second optical substrate 14 has a convex meniscus shape having an anti-bonding surface 14a having an aspherical shape with an approximate curvature radius R3 = 46 mm and a bonding surface 14b having an aspherical shape with an approximate curvature radius R4 = 35 mm. It is a lens. Further, the glass molded lens has a center thickness t2 = 7 mm and an outer diameter D2 = 36 mm. Further, the material is S-BAL42 (manufactured by OHARA INC.).
（製造装置の構成）
図２は、第１の実施の形態の複合光学素子の製造装置２０の全体構成を示す図である。なお、図１と同一又は相当する部材には同一の符号を付して説明する。
複合光学素子の製造装置２０は、紫外線硬化型樹脂１６を挟んで対向配置された第１の光学基材１２及び第２の光学基材１４に光を透過し、夫々の光学面の光学芯ｃ１〜ｃ４を求めて偏芯調整を行い、第１と第２の光学基材１２，１４を接合する装置である。この製造装置２０は、第１〜第４の調整手段２１、２５、２９、３３と、制御手段としての制御パソコン４４とを備えている。
(Configuration of manufacturing equipment)
FIG. 2 is a diagram illustrating an overall configuration of the composite optical element manufacturing apparatus 20 according to the first embodiment. In addition, the same code | symbol is attached | subjected and demonstrated to the member which is the same as that of FIG. 1, or is equivalent.
The composite optical element manufacturing apparatus 20 transmits light to the first optical base material 12 and the second optical base material 14 that are disposed to face each other with the ultraviolet curable resin 16 interposed therebetween, and the optical core c1 of each optical surface. -C4 is an apparatus for performing eccentricity adjustment and joining the first and second optical base materials 12 and 14. The manufacturing apparatus 20 includes first to fourth adjustment means 21, 25, 29, and 33, and a control personal computer 44 as a control means.
第１の調整手段２１は、第１の光学基材１２を移動可能に保持する。そして、第１の光学基材１２の反貼り合わせ面１２ａが有する第１の光学芯ｃ１（図１参照）が基準光軸Ｌ０と一致するよう、後述される方法により（基準光軸設定手段である光源３８、計測用の像形成部材（十字チャート）４０、像検出器４２を用いて）形成される基準光軸Ｌ０に対して垂直方向（ｘｙ平面と平行な方向）に第１の光学基材１２を移動させる。 The 1st adjustment means 21 hold | maintains the 1st optical base material 12 so that a movement is possible. The first optical core c1 (see FIG. 1) of the anti-bonding surface 12a of the first optical base 12 is aligned with the reference optical axis L0 (by the reference optical axis setting means). A first optical base in a direction perpendicular to a reference optical axis L0 (using a light source 38, a measurement image forming member (cross chart) 40, and an image detector 42) (direction parallel to the xy plane). The material 12 is moved.
この第１の調整手段２１は、第１の光学基材１２を保持する第１の治具２２と、駆動ロッド２３と、駆動ロッド２３を介して第１の治具２２を移動させる第１のモータ２４とを有している。 The first adjusting means 21 includes a first jig 22 that holds the first optical substrate 12, a drive rod 23, and a first jig 22 that moves the first jig 22 via the drive rod 23. And a motor 24.
第１の治具２２は、第１の光学基材１２をｘｙ方向に位置規制する治具であり、端部が尖った円筒形状となっているベルクランプ機構を有している。第１の治具２２は、このベルクランプ機構により、第１の光学基材１２を点で保持する。本実施の形態ではベルクランプ機構により、光学基材の球面部分を保持しているが、他の実施の形態で用いられるスクロールチャック機構や、光学基材の側面や球面の外周部を保持するような保持機構等を用いても良い。 The first jig 22 is a jig for regulating the position of the first optical substrate 12 in the xy direction, and has a bell clamp mechanism having a cylindrical shape with a sharp end. The 1st jig | tool 22 hold | maintains the 1st optical base material 12 with a point with this bell clamp mechanism. In this embodiment, the spherical portion of the optical substrate is held by the bell clamp mechanism. However, the scroll chuck mechanism used in other embodiments, the side surface of the optical substrate, and the outer peripheral portion of the spherical surface are held. A holding mechanism or the like may be used.
第２の調整手段２５は、第１の光学基材１２の側面に当接する。そして、第１の光学芯ｃ１（図１参照）を基準光軸Ｌ０に一致させたまま、第１の光学基材１２の貼り合わせ面１２ｂが有する第２の光学芯ｃ２（図１参照）が基準光軸Ｌ０と一致するよう、基準光軸Ｌ０に対して傾斜方向（θ方向）に第１の光学基材１２を傾斜移動させる。 The second adjustment unit 25 contacts the side surface of the first optical base 12. And the 2nd optical core c2 (refer FIG. 1) which the bonding surface 12b of the 1st optical base material 12 has with the 1st optical core c1 (refer FIG. 1) matched with the reference | standard optical axis L0. The first optical base 12 is tilted and moved in the tilt direction (θ direction) with respect to the reference optical axis L0 so as to coincide with the reference optical axis L0.
この第２の調整手段２５は、第１の光学基材１２を保持する第２の治具２６と、駆動ロッド２７と、駆動ロッド２７を介して第２の治具２６を移動させる第２のモータ２８とを有している。 The second adjusting means 25 includes a second jig 26 that holds the first optical base 12, a drive rod 27, and a second jig 26 that moves the second jig 26 via the drive rod 27. And a motor 28.
第３の調整手段２９は、第２の光学基材１４を移動可能に保持する。そして、第２の光学基材１４の反貼り合わせ面１４ａが有する第３の光学芯ｃ３（図１参照）が基準光軸Ｌ０と一致するよう、基準光軸Ｌ０に対して垂直方向（ｘｙ平面と平行な方向）に第２の光学基材１４を移動させる。 The 3rd adjustment means 29 hold | maintains the 2nd optical base material 14 so that a movement is possible. Then, a direction perpendicular to the reference optical axis L0 (xy plane) so that the third optical core c3 (see FIG. 1) of the anti-bonding surface 14a of the second optical base material 14 coincides with the reference optical axis L0. The second optical base material 14 is moved in a direction parallel to the direction.
この第３の調整手段２９は、第２の光学基材１４を保持する第３の治具３０と、駆動ロッド３１と、駆動ロッド３１を介して第３の治具３０を移動させる第３のモータ３２とを有している。
第３の治具３０は、第２の光学基材１４をｘｙ方向に位置規制する治具であり、第１の治具２２と同様に、ベルクランプ機構を有している。
The third adjusting means 29 includes a third jig 30 that holds the second optical base material 14, a drive rod 31, and a third jig 30 that moves the third jig 30 via the drive rod 31. And a motor 32.
The third jig 30 is a jig that restricts the position of the second optical base material 14 in the xy direction, and has a bell clamp mechanism as in the first jig 22.
第４の調整手段３３は、第２の光学基材１４の側面に当接する。そして、第３の光学芯ｃ３を基準光軸Ｌ０に一致させたまま、第２の光学基材１４の貼り合わせ面１４ｂが有する第４の光学芯ｃ４（図１参照）が基準光軸Ｌ０に一致するように基準光軸Ｌ０に対して傾斜方向（θ方向）に第２の光学基材１４を傾斜移動させる。 The fourth adjustment means 33 contacts the side surface of the second optical base material 14. Then, with the third optical core c3 aligned with the reference optical axis L0, the fourth optical core c4 (see FIG. 1) of the bonding surface 14b of the second optical base material 14 is set to the reference optical axis L0. The second optical base material 14 is tilted and moved in the tilt direction (θ direction) with respect to the reference optical axis L0 so as to match.
この第４の調整手段３３は、第２の光学基材１４を保持する第４の治具３４と、駆動ロッド３５と、駆動ロッド３５を介して第４の治具３４を移動させる第４のモータ３６とを有している。 The fourth adjustment means 33 includes a fourth jig 34 that holds the second optical base material 14, a drive rod 35, and a fourth jig 34 that moves the fourth jig 34 via the drive rod 35. And a motor 36.
さらに、これら第１〜第４の調整手段２１、２５、２９、３３は、制御パソコン４４によって制御される。この制御パソコン４４は、ＣＰＵやＲＯＭ等を備えた一般に使用されているパソコンである。 Further, the first to fourth adjusting means 21, 25, 29, 33 are controlled by the control personal computer 44. The control personal computer 44 is a commonly used personal computer equipped with a CPU, a ROM and the like.
例えば、この制御パソコン４４は、基準光軸Ｌ０と第１の光学芯ｃ１の間の差分がなくなるように演算して第１のモータ２４を駆動し、偏芯調整が行われる。同様に、第２のモータ２８、第３のモータ３２及び第４のモータ３６も同様にして制御駆動される。 For example, the control personal computer 44 calculates the difference between the reference optical axis L0 and the first optical core c1 and drives the first motor 24 to adjust the eccentricity. Similarly, the second motor 28, the third motor 32, and the fourth motor 36 are similarly controlled and driven.
また、図２において、符号３８は偏芯計測に用いる光源、４０は計測用の像形成部材、４２は像検出器、４６はハーフミラー、４８は紫外線照射に用いられる光源である。
なお、本構成において、光源３８にはレーザ光源を使用しているが、コリメート光を放出する光源であればどのような光源でもよい。また、光源３８とハーフミラー４６、及び像検出器４２を結ぶ基準光軸Ｌ０と、光源４８とハーフミラー４６とを結ぶ照射軸（成形軸）とが、予め高精度に調整されていることは勿論である。なお、ハーフミラー４６の代わりに、紫外線光を折り曲げるグラスファイバーを用いてもよい。
In FIG. 2, reference numeral 38 denotes a light source used for eccentricity measurement, 40 denotes an image forming member for measurement, 42 denotes an image detector, 46 denotes a half mirror, and 48 denotes a light source used for ultraviolet irradiation.
In this configuration, a laser light source is used as the light source 38, but any light source that emits collimated light may be used. Further, the reference optical axis L0 connecting the light source 38 and the half mirror 46 and the image detector 42 and the irradiation axis (molding axis) connecting the light source 48 and the half mirror 46 are adjusted with high accuracy in advance. Of course. Instead of the half mirror 46, a glass fiber that bends ultraviolet light may be used.
更に、像形成部材４０は、本構成では十字チャートを用いたが、公知の透過光観察手段を付与させるものであれば任意の形状、方式であればよく、治具レンズおよびフォーカス機構を具備してもよい。同様に、本構成の像検出器４２では対物レンズを含むＣＣＤカメラを用いているが、光を検出できる機器であればどのような機構でもよい。 Furthermore, the cross-chart is used as the image forming member 40 in this configuration, but it may be of any shape and method as long as it can provide a known transmitted light observation means, and includes a jig lens and a focus mechanism. May be. Similarly, in the image detector 42 of this configuration, a CCD camera including an objective lens is used, but any mechanism may be used as long as it can detect light.
（基材保持方法）
反貼り合わせ面１２ａの非球面形状部に第１の治具２２を当接させ、不図示の真空吸着装置により真空吸着を行うことで、第１の治具２２は、第１の光学基材１２を保持する。そして、第１のモータ２４の駆動が駆動ロッド２３を介して第１の治具２２に伝わり、第１の光学基材１２が、第１の治具２２とともに基準光軸Ｌ０に対するｘｙ軸方向の移動をする。
(Substrate holding method)
By bringing the first jig 22 into contact with the aspherical surface portion of the anti-bonding surface 12a and performing vacuum suction with a vacuum suction device (not shown), the first jig 22 becomes the first optical base material. 12 is held. Then, the drive of the first motor 24 is transmitted to the first jig 22 via the drive rod 23, and the first optical base 12 is moved in the xy-axis direction with respect to the reference optical axis L0 together with the first jig 22. Move.
同様の方法で、反貼り合わせ面１４ｂの非球面形状部に第３の治具３０を当接させ、第２の治具３０は、第２の光学基材１４を保持する。これにより、第３のモータ３２の駆動が駆動ロッド３１を介して第１の治具３０に伝わり、第２の光学基材１４が、第３の治具３０とともに基準光軸Ｌ０に対するｘｙ軸方向の移動をする。 In the same manner, the third jig 30 is brought into contact with the aspherical surface portion of the anti-bonding surface 14 b, and the second jig 30 holds the second optical base material 14. As a result, the drive of the third motor 32 is transmitted to the first jig 30 via the drive rod 31, and the second optical base material 14 together with the third jig 30 is in the xy-axis direction with respect to the reference optical axis L0. To move.
（調芯及び成型方法）
以下、図２を参照しながら、図３の偏芯調整に関するフローチャートを示す図、及び図４Ａ〜図４Ｆの光学芯の調整方法の説明図に基づき、本実施の形態の複合光学素子の製造方法について説明する。
(Alignment and molding method)
Hereinafter, referring to FIG. 2, a method for manufacturing the composite optical element of the present embodiment, based on the flowchart illustrating the eccentricity adjustment in FIG. 3 and the explanatory diagrams of the optical core adjustment method in FIGS. 4A to 4F. Will be described.
ここで、光源３８から発したコリメート光が、像形成部材（十字チャート）４０を通過して、像検出器４２にてコリメート光を検出することで基準光軸Ｌ０が設定される。
次に、第１の光学基材１２の有する第１の光学芯ｃ１、第２の光学芯ｃ２の偏芯調整を行う。
Here, the collimated light emitted from the light source 38 passes through the image forming member (cross chart) 40, and the collimated light is detected by the image detector 42, whereby the reference optical axis L0 is set.
Next, the eccentric adjustment of the first optical core c1 and the second optical core c2 of the first optical substrate 12 is performed.
第１の光学基材１２が、第１の治具２２に保持されるとき、図４Ａに示すように、第１の光学芯ｃ１は基準光軸Ｌ０に必ずしも一致していない。
そのため、図４Ｂに示すように、第１の光学芯ｃ１を基準光軸Ｌ０に一致させるように第１の治具２２を移動させる。
When the first optical substrate 12 is held by the first jig 22, as shown in FIG. 4A, the first optical core c1 does not necessarily coincide with the reference optical axis L0.
Therefore, as shown in FIG. 4B, the first jig 22 is moved so that the first optical core c1 coincides with the reference optical axis L0.
この場合、図２に示すように、光源３８から像形成部材（十字チャート）４０を通過したコリメート光は、第１の光学基材１２を透過して、像検出器４２において像が検出される。ここで得られた像と、透過光を用いた公知の偏芯調整量算出方法（例えば、特開２００８−２５６９００号公報参照）によって得られた偏芯調整量に基づき、制御パソコン４４を介して第１の光学基材１２及び第１の治具２２を基準光軸Ｌ０に対してｘｙ軸方向に移動させる。こうして、第１の光学芯ｃ１を基準光軸Ｌ０に一致させる（図３のＳ１）。 In this case, as shown in FIG. 2, the collimated light that has passed through the image forming member (cross chart) 40 from the light source 38 passes through the first optical base 12 and an image is detected by the image detector 42. . Based on the image obtained here and the eccentricity adjustment amount obtained by a known eccentricity adjustment amount calculation method using transmitted light (for example, see Japanese Patent Application Laid-Open No. 2008-256900), via the control personal computer 44. The first optical base 12 and the first jig 22 are moved in the xy-axis direction with respect to the reference optical axis L0. In this way, the first optical core c1 is aligned with the reference optical axis L0 (S1 in FIG. 3).
本実施の形態では、以下の光学芯と基準光軸の一致は、全て制御パソコン４４を介した偏芯調整量の算出によって行う。 In the present embodiment, the coincidence of the following optical core and the reference optical axis is all performed by calculating the eccentricity adjustment amount via the control personal computer 44.
次に、像形成部材４０のパターンを変更し、第２の光学芯ｃ２についての偏芯像を検出し、第１の光学基材１２の貼り合わせ面１２ｂの偏芯調整量を算出する。この後、第１の光学基材１２の側面に第２の治具２６を当接させる。そして、図４Ｃに示すように、第１の治具２２に保持された第１の光学基材１２を、第２の治具２６により基準光軸Ｌ０に対してθ方向に傾斜移動させて、第２の光学芯ｃ２を基準光軸Ｌ０に一致させる（図３のＳ２）。 Next, the pattern of the image forming member 40 is changed, an eccentric image about the second optical core c2 is detected, and the eccentricity adjustment amount of the bonding surface 12b of the first optical substrate 12 is calculated. Thereafter, the second jig 26 is brought into contact with the side surface of the first optical base 12. Then, as shown in FIG. 4C, the first optical base 12 held by the first jig 22 is inclined and moved in the θ direction with respect to the reference optical axis L0 by the second jig 26, The second optical core c2 is made to coincide with the reference optical axis L0 (S2 in FIG. 3).
なお、第１の光学基材１２はベルクランプ機構を有する第１の治具２２により保持されているため、すでに調整した第１の光学芯ｃ１は、移動することはない。
これで、第１の光学基材１２において、反貼り合わせ面１２ａが有する第１の光学芯ｃ１と、貼り合わせ面１２ｂが有する第２の光学芯ｃ２とが、基準光軸Ｌ０に一致する。
In addition, since the 1st optical base material 12 is hold | maintained by the 1st jig | tool 22 which has a bell clamp mechanism, the already adjusted 1st optical core c1 does not move.
Thus, in the first optical substrate 12, the first optical core c1 included in the anti-bonding surface 12a and the second optical core c2 included in the bonding surface 12b coincide with the reference optical axis L0.
なお、本実施例では第１の光学芯を基準光軸Ｌ０に対してｘｙ方向に移動させ、第２の光学芯を基準光軸Ｌ０に対してθ方向に傾斜移動させて偏芯調整を行った。しかし、これに代えて第１の光学芯を基準光軸Ｌ０に対してθ方向に傾斜移動させ、第２の光学芯を基準光軸Ｌ０に対してｘｙ方向に移動させて偏芯調整を行っても良い。これは他の実施の形態においても同様である。 In this embodiment, the first optical core is moved in the xy direction with respect to the reference optical axis L0, and the second optical core is inclined and moved in the θ direction with respect to the reference optical axis L0 to perform eccentricity adjustment. It was. However, instead of this, the first optical core is inclined and moved in the θ direction with respect to the reference optical axis L0, and the second optical core is moved in the xy direction with respect to the reference optical axis L0 to perform the eccentricity adjustment. May be. The same applies to other embodiments.
同様に、第２の光学基材１４の偏芯調整を行うが、ここで、不図示の供給手段により、第１の光学基材１２の貼り合わせ面１２ｂに紫外線硬化型樹脂１６を吐出する。
本実施の形態では、Ｓ２の工程後に、紫外線硬化型樹脂１６を第１の光学基材１２上へ供給している（図４Ｄ参照）。そして、第２の光学基材１４の偏芯調整と同時に、第２の光学基材１４が、紫外線硬化型樹脂１６の押延を行う。
Similarly, the eccentricity adjustment of the second optical base material 14 is performed. Here, the ultraviolet curable resin 16 is discharged onto the bonding surface 12b of the first optical base material 12 by a supply unit (not shown).
In the present embodiment, after the step S2, the ultraviolet curable resin 16 is supplied onto the first optical substrate 12 (see FIG. 4D). Then, simultaneously with the eccentricity adjustment of the second optical base material 14, the second optical base material 14 stretches the ultraviolet curable resin 16.
また、紫外線硬化型樹脂１６の供給は、全ての光学基材間の偏芯調整が完了する前ならいつでも良く、例えば最初の偏芯調整前や偏芯調整途中で供給を行っても良い。 The ultraviolet curable resin 16 may be supplied any time before the eccentricity adjustment between all the optical bases is completed. For example, the ultraviolet curable resin 16 may be supplied before the first eccentricity adjustment or during the eccentricity adjustment.
紫外線硬化型樹脂１６の供給後、第２の光学基材１４の有する第３の光学芯ｃ３、第４の光学芯ｃ４の偏芯調整を行う。図２、図４Ｄに示すように、第３の治具３０が、第２の光学基材４の反貼り合わせ面１４ａを移動可能に保持する。 After supplying the ultraviolet curable resin 16, the eccentric adjustment of the third optical core c3 and the fourth optical core c4 of the second optical base material 14 is performed. As shown in FIGS. 2 and 4D, the third jig 30 holds the anti-bonding surface 14a of the second optical base material 4 so as to be movable.
次に、図４Ｅに示すように、第３の治具３０が基準光軸Ｌ０に対して垂直方向（ｘｙ軸方向）に移動することによって、第３の光学芯ｃ３を基準光軸Ｌ０と一致させる。
この際、第３のモータ３２をｚ軸方向にも動かすことにより、第３の光学芯ｃ３を基準光軸Ｌ０と一致させると共に、基準光軸Ｌ０と平行方向（ｚ軸方向）の移動によって、第２の光学基材１４を第１の光学基材１２に接近させる（図４Ｅ参照）。
Next, as shown in FIG. 4E, the third jig 30 moves in the direction perpendicular to the reference optical axis L0 (xy axis direction), so that the third optical core c3 coincides with the reference optical axis L0. Let
At this time, by moving the third motor 32 also in the z-axis direction, the third optical core c3 is made to coincide with the reference optical axis L0, and by movement in a direction parallel to the reference optical axis L0 (z-axis direction), The 2nd optical base material 14 is made to approach the 1st optical base material 12 (refer FIG. 4E).
次に、第２の光学基材１４の側面に第４の治具３４を当接させる。さらに、図４Ｆに示すように、第３の光学芯ｃ３を基準光軸Ｌ０に一致させたまま、この第３の光学芯ｃ３を中心として第４の光学芯ｃ４を基準光軸Ｌ０に対してθ方向に傾斜移動させて、第４の光学芯ｃ４を基準光軸Ｌ０に一致させる（図３のＳ４）。この時、第４の治具３４の第４の光学芯ｃ４を基準光軸Ｌ０に一致させながら第２の光学基材１４と紫外線硬化型樹脂１６とを接触させ、所定の樹脂肉厚になるまで押し広げる（図４Ｆ参照）。 Next, the fourth jig 34 is brought into contact with the side surface of the second optical base material 14. Further, as shown in FIG. 4F, with the third optical core c3 aligned with the reference optical axis L0, the fourth optical core c4 is centered on the third optical core c3 with respect to the reference optical axis L0. The fourth optical core c4 is made to coincide with the reference optical axis L0 by tilting in the θ direction (S4 in FIG. 3). At this time, the second optical substrate 14 and the ultraviolet curable resin 16 are brought into contact with each other while the fourth optical core c4 of the fourth jig 34 is aligned with the reference optical axis L0, and a predetermined resin thickness is obtained. (See FIG. 4F).
なお、第２の光学基材１４はベルクランプ機構を有する第３の治具により保持されているため、すでに調整した第２の光学基材１４の反貼り合わせ面１４ａの第３の光学芯ｃ３は、移動することはない。 In addition, since the 2nd optical base material 14 is hold | maintained by the 3rd jig | tool which has a bell clamp mechanism, the 3rd optical core c3 of the anti-bonding surface 14a of the 2nd optical base material 14 which has already been adjusted. Never move.
これで、第２の光学基材１４において、反貼り合わせ面１４ａが有する第３の光学芯ｃ３と、貼り合わせ面１４ｂが有する第４の光学芯ｃ４とが、基準光軸Ｌ０と一致する。
なお、前述した第１の光学基材と同様に、第２の光学基材の偏芯調整においても、これに代えて第３の光学芯を基準光軸Ｌ０に対してθ方向に傾斜移動させ、第４の光学芯を基準光軸Ｌ０に対してｘｙ方向に移動させて偏芯調整を行っても良い。これは他の実施の形態においても同様である。
Thus, in the second optical base material 14, the third optical core c3 included in the anti-bonding surface 14a and the fourth optical core c4 included in the bonding surface 14b coincide with the reference optical axis L0.
As in the case of the first optical substrate described above, in the eccentric adjustment of the second optical substrate, instead, the third optical core is inclined and moved in the θ direction with respect to the reference optical axis L0. The eccentric adjustment may be performed by moving the fourth optical core in the xy direction with respect to the reference optical axis L0. The same applies to other embodiments.
以上により、第１〜第４までの各光学芯が、基準光軸Ｌ０に一致し、これによって、それぞれの光学面の高精度な偏芯調整が完了する。 As described above, the first to fourth optical cores coincide with the reference optical axis L0, thereby completing the highly accurate eccentric adjustment of each optical surface.
（肉厚の制御方法）
紫外線硬化型樹脂１６の供給は、Ｓ３の工程の前であればいつでも良く、Ｓ１の前であっても良い。例えば、Ｓ２の工程の完了後に紫外線硬化樹脂１６を不図示の供給手段により、第１の光学基材１２上へ供給した後に（図４Ｄ参照）、第３の光学芯ｃ３を基準光軸Ｌ０に一致させながら基準光軸Ｌ０の方向に第２の光学基材１４を第１の光学基材１２に接近移動させ（図４Ｅ参照）、第４の光学芯ｃ４を基準光軸Ｌ０に一致させながら第２の光学基材１４と紫外線硬化型樹脂１６とを接触させつつ所定の樹脂肉厚になるまで押し広げる（図４Ｆ参照）。
(Wall thickness control method)
The supply of the ultraviolet curable resin 16 may be any time before the step of S3, or may be before S1. For example, after the UV curing resin 16 is supplied onto the first optical base 12 by a supply unit (not shown) after the step S2 is completed (see FIG. 4D), the third optical core c3 is set to the reference optical axis L0. The second optical base 14 is moved closer to the first optical base 12 in the direction of the reference optical axis L0 while making them coincide (see FIG. 4E), and the fourth optical core c4 is made to coincide with the reference optical axis L0. The second optical base material 14 and the ultraviolet curable resin 16 are brought into contact with each other and pushed up to a predetermined resin thickness (see FIG. 4F).
尚、紫外線硬化型樹脂１６の肉厚の制御方法は、制御パソコン４４を介して第１の治具２２と第３の治具３０の距離制御によって行うことができる。すなわち、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１及び貼り合わせ面１２ｂの第２の光学芯ｃ２が基準光軸Ｌ０に一致した後、固定されている第１の治具２２の位置により第１の光学基材１２の第１の光学芯ｃ１の高さ位置が決定される。 The method for controlling the thickness of the ultraviolet curable resin 16 can be performed by controlling the distance between the first jig 22 and the third jig 30 via the control personal computer 44. That is, the first optical core c1 of the anti-bonding surface 12a of the first optical substrate 12 and the second optical core c2 of the bonding surface 12b are aligned with the reference optical axis L0 and then fixed. The height position of the first optical core c1 of the first optical base 12 is determined by the position of the jig 22.
次に、第１の光学基材１２の第１の光学芯ｃ１の高さ位置に対する第２の光学基材１４の光学芯ｃ３の高さ位置は、所望の複合光学素子の形状として一義的に求まる。このため、第１の光学基材１２の空間位置と、第２の光学基材１４の空間位置から、樹脂厚を所望の厚さにするための夫々の治具の距離制御の値が、制御パソコン４４によって算出される。 Next, the height position of the optical core c3 of the second optical base material 14 relative to the height position of the first optical core c1 of the first optical base material 12 is uniquely defined as the shape of the desired composite optical element. I want. For this reason, the distance control value of each jig for setting the resin thickness to a desired thickness is controlled from the spatial position of the first optical substrate 12 and the spatial position of the second optical substrate 14. Calculated by the personal computer 44.
そして、第２の光学基材１４の第３の光学芯ｃ３の高さが第１の光学芯ｃ１の高さに対して所望の間隔となるように、先ほど算出された距離制御の値に従って、制御パソコン４４を介して第２の光学基材１４を保持した第２の治具３０を第１の治具２２に近づける（基準光軸Ｌ０に平行方向な移動）。これにより、第１の光学基材１２と第２の光学基材１４の間隔（樹脂肉厚）を仮決定する。 Then, according to the distance control value calculated earlier, the height of the third optical core c3 of the second optical base material 14 is a desired interval with respect to the height of the first optical core c1. The second jig 30 holding the second optical base material 14 is brought close to the first jig 22 via the control personal computer 44 (movement parallel to the reference optical axis L0). Thereby, the space | interval (resin thickness) of the 1st optical base material 12 and the 2nd optical base material 14 is tentatively determined.
このように、光学基材１２，１４間の基準光軸Ｌ０と平行方向の位置において、仮決定を行うことで、素早く光学基材１２，１４間の間隔調整を行うことができる。
なお、この仮決定のための移動は、第１の治具２２及び第２の治具３０のどちらを動かしても良いし、両方を一度に動かしても良い。
As described above, the provisional determination is performed at the position in the direction parallel to the reference optical axis L0 between the optical base materials 12 and 14, whereby the interval between the optical base materials 12 and 14 can be quickly adjusted.
Note that the movement for temporary determination may be performed by moving either the first jig 22 or the second jig 30 or both at once.
仮決定の後は、制御パソコン４４による第２の光学基材１４の偏心調整を行う際に、理想像が得られるように、治具３０がシフト方向、チルト方向の少なくとも一方において動く。
これにより、第１の光学基材１２と第２の光学基材１４の間隔は本決定される。（図４Ｆ参照）。
After the provisional determination, the jig 30 moves in at least one of the shift direction and the tilt direction so that an ideal image can be obtained when the eccentricity adjustment of the second optical base material 14 is performed by the control personal computer 44.
Thereby, the space | interval of the 1st optical base material 12 and the 2nd optical base material 14 is determined this time. (See FIG. 4F).
（硬化方法）
調芯作業の終了後、制御パソコン４４を介して硬化手段である光源４８（本実施の形態ではメタルハライドランプを用いた）を起動させ、ハーフミラー４６を介して紫外線硬化型樹脂１６へ紫外線照射を行う。これにより、任意時間の照射後、第１の光学基材１２、紫外線硬化型樹脂１６、及び第２の光学基材１４からなる３層の複合光学素子１０が得られる。本実施の形態では、樹脂層を形成するために紫外線硬化型樹脂１６を用いたが、熱硬化型樹脂や熱可塑性樹脂でもよく、その場合、紫外線照射のための光源４８に代えて、熱源を用いて樹脂の硬化、可塑を行う。
(Curing method)
After the alignment work is completed, a light source 48 (a metal halide lamp is used in the present embodiment), which is a curing means, is activated via the control personal computer 44, and the ultraviolet curable resin 16 is irradiated with ultraviolet rays via the half mirror 46. Do. Thereby, the composite optical element 10 of 3 layers which consists of the 1st optical base material 12, the ultraviolet curable resin 16, and the 2nd optical base material 14 is obtained after irradiation for arbitrary time. In the present embodiment, the ultraviolet curable resin 16 is used to form the resin layer. However, a thermosetting resin or a thermoplastic resin may be used. In this case, a heat source is used instead of the light source 48 for ultraviolet irradiation. Used to cure and plasticize the resin.
なお、本実施の形態では、第１の光学基材１２と第２の光学基材１４との間に樹脂を配した複合光学素子１０について説明したが、これに限らない。例えば、複数（３つ以上）の夫々の光学基材の間に樹脂を配した複合光学素子に対しても、同様に適用することができる。 In the present embodiment, the composite optical element 10 in which a resin is disposed between the first optical base 12 and the second optical base 14 has been described. However, the present invention is not limited to this. For example, the present invention can be similarly applied to a composite optical element in which a resin is disposed between a plurality (three or more) of optical substrates.
本実施の形態によれば、第１の光学基材１２と第２の光学基材１４との間にエネルギー硬化型樹脂１６を配した状態で当該各レンズ面の各光学芯を独立して調整することができる。 According to the present embodiment, each optical core of each lens surface is independently adjusted with the energy curable resin 16 disposed between the first optical base 12 and the second optical base 14. can do.
また、得られた複合光学素子１０は、第１の光学基材１２における、反貼り合わせ面１２ａの第１の光学芯ｃ１と貼り合わせ面１２ｂの第２の光学芯ｃ２とを結ぶ軸と、第２の光学基材１４における、反貼り合わせ面１４ａの第３の光学芯ｃ３と貼り合わせ面１４ｂの第４の光学芯ｃ４とを結ぶ軸とのズレ（偏芯精度）は、シフト３μｍ、チルト２分であった。こうして、偏芯精度の優れた複合光学素子１０が得られた。 In addition, the obtained composite optical element 10 has an axis connecting the first optical core c1 of the anti-bonding surface 12a and the second optical core c2 of the bonding surface 12b in the first optical base 12; The deviation (eccentricity accuracy) between the second optical base material 14 and the axis connecting the third optical core c3 of the anti-bonding surface 14a and the fourth optical core c4 of the bonding surface 14b is 3 μm shift. The tilt was 2 minutes. Thus, the composite optical element 10 having excellent eccentricity accuracy was obtained.
［第２の実施の形態］
図５は、第２の実施の形態の複合光学素子の製造装置の全体構成を示す図である。なお、第１の実施の形態と同一又は相当する部材には同一の符号を付して説明する。
[Second Embodiment]
FIG. 5 is a diagram illustrating an overall configuration of a composite optical element manufacturing apparatus according to the second embodiment. In addition, the same code | symbol is attached | subjected and demonstrated to the member which is the same as that of 1st Embodiment, or corresponds.
（光学基材の形状）
第１の光学基材１２は、近似曲率半径Ｒ１＝２４．１mmの非球面形状を持つ反貼り合わせ面１２ａと、近似曲率半径Ｒ２＝１３．６mmの非球面形状を持つ貼り合わせ面１２ｂを有する両凸形状のレンズである。また、中心肉厚ｔ１＝３mm、外径Ｄ１＝３０mmのプラスチック成形レンズである。また、材料はＣＯＰ（シクロオレフィンポリマー）樹脂（ゼオネックス４８０Ｒ：日本ゼオン（株）社製）である。
(Optical substrate shape)
The first optical substrate 12 has an anti-bonding surface 12a having an aspherical shape with an approximate curvature radius R1 = 24.1 mm and a bonding surface 12b having an aspherical shape with an approximate curvature radius R2 = 13.6 mm. It is a biconvex lens. Further, it is a plastic molded lens having a center thickness t1 = 3 mm and an outer diameter D1 = 30 mm. The material is COP (cycloolefin polymer) resin (ZEONEX 480R: manufactured by Nippon Zeon Co., Ltd.).
第２の光学基材１４は、近似曲率半径Ｒ３＝５６．５mmの非球面形状を持つ反貼り合わせ面１４ａと、近似曲率半径Ｒ４＝１５．１mmの非球面形状を持つ貼り合わせ面１４ｂを有する凸メニスカス形状のレンズである。また、中心肉厚ｔ２＝４mm、外径Ｄ２＝２８mmのプラスチック成形レンズである。また、材料は、ＣＯＰ（シクロオレフィンポリマー）樹脂（ゼオネックス３３０Ｒ：日本ゼオン（株）社製）である。 The second optical substrate 14 has an anti-bonding surface 14a having an aspherical shape with an approximate curvature radius R3 = 56.5 mm, and a bonding surface 14b having an aspherical shape with an approximate curvature radius R4 = 15.1 mm. It is a convex meniscus lens. Further, it is a plastic molded lens having a center thickness t2 = 4 mm and an outer diameter D2 = 28 mm. The material is COP (cycloolefin polymer) resin (Zeonex 330R: manufactured by Nippon Zeon Co., Ltd.).
（製造装置の構成）
この複合光学素子の製造装置２０は、紫外線硬化型樹脂１６を挟んで対向配置された第１の光学基材１２及び第２の光学基材１４に光を透過し、夫々の光学面の光学芯ｃ１〜ｃ４を求めて偏芯調整を行い、第１と第２の光学基材１２，１４を接合する。次いで、第１の光学基材１２を剥離して、第２の光学基材１４に紫外線硬化型樹脂１６が接合された複合光学素子１０を得る装置である。この製造装置２０は、第１〜第４の調整手段２１、２５、２９、３３と、制御手段としての制御パソコン４４と、剥離手段５１とを備えている。
(Configuration of manufacturing equipment)
The composite optical element manufacturing apparatus 20 transmits light to the first optical base 12 and the second optical base 14 that are arranged to face each other with the ultraviolet curable resin 16 interposed therebetween, and the optical core of each optical surface. The first and second optical base materials 12 and 14 are joined by obtaining c1 to c4 and adjusting the eccentricity. Next, the first optical substrate 12 is peeled off to obtain the composite optical element 10 in which the ultraviolet curable resin 16 is bonded to the second optical substrate 14. The manufacturing apparatus 20 includes first to fourth adjustment means 21, 25, 29, 33, a control personal computer 44 as a control means, and a peeling means 51.
第１の実施の形態においては、第１〜第４の調整手段２１、２５、２９、３３は夫々独立していた。しかし、本実施の形態においては、図５のように、第２の調整手段２５の先に、ロッドを介して第１の調整手段２１が設けられている。また、第４の調整手段３３の先に、ロッドを介して第３の調整手段２９が設けられている。このように、本実施の形態では、１つの光学基材における、ｘｙ方向を調整する調整手段と、θ方向を調整する調整手段が一体に形成されている。 In the first embodiment, the first to fourth adjusting means 21, 25, 29, and 33 are independent of each other. However, in the present embodiment, as shown in FIG. 5, the first adjusting means 21 is provided through the rod in front of the second adjusting means 25. Further, a third adjusting means 29 is provided at the tip of the fourth adjusting means 33 via a rod. As described above, in the present embodiment, the adjusting means for adjusting the xy direction and the adjusting means for adjusting the θ direction in one optical base material are integrally formed.
また、第１の実施の形態では、調整手段としてベルクランプ機構が用いられていたが、本実施の形態では、スクロールチャック機構が用いられている。これらの機構により、光学基材の球面部分が広くてベルクランプで光学面を保持できない基材形状であっても、球面部の外周を保持することで偏心調整を行うことができる。 In the first embodiment, a bell clamp mechanism is used as the adjusting means. In the present embodiment, a scroll chuck mechanism is used. By these mechanisms, even when the spherical surface portion of the optical base material is wide and the optical surface cannot be held by the bell clamp, the eccentric adjustment can be performed by holding the outer periphery of the spherical surface portion.
また、剥離手段５１は、第１の光学基材１２の貼り合わせ面１２ｂに爪をかける離型爪治具５２と、駆動ロッド５３と、駆動ロッド５３を介して離型爪治具５２を移動させる第５のモータ５４とを有している。また、第１の実施の形態では、像形成部材に十字チャートを用いていたが、本実施の形態では輪帯穴を用いている。これらの点が前述した第１の実施の形態と相違している。 Further, the peeling means 51 moves the release claw jig 52 for clawing the bonding surface 12 b of the first optical substrate 12, the drive rod 53, and the release rod jig 52 via the drive rod 53. And a fifth motor 54 to be operated. In the first embodiment, a cross chart is used for the image forming member. However, in this embodiment, an annular hole is used. These points are different from the first embodiment described above.
その他の構成は、第１の実施の形態と同様であり、第１の実施の形態と同一又は相当する部材には同一の符号を付して説明する。 Other configurations are the same as those of the first embodiment, and members that are the same as or correspond to those of the first embodiment are denoted by the same reference numerals.
（基材保持方法）
基材保持方法は、第１の光学素子の円周部に第１の治具２２を当接させ、不図示の真空吸着装置により真空吸着を行うことで、第１の治具２２は、第１の光学基材１２を保持する。そして、第１のモータ２４の駆動が駆動ロッド２３を介して第１の治具２２に伝わり、第１の光学基材１２が、第１の治具２２とともに基準光軸Ｌ０に対するｘｙ軸方向の移動をする。
(Substrate holding method)
In the substrate holding method, the first jig 22 is brought into contact with the circumferential portion of the first optical element, and vacuum suction is performed by a vacuum suction device (not shown). One optical substrate 12 is held. Then, the drive of the first motor 24 is transmitted to the first jig 22 via the drive rod 23, and the first optical base 12 is moved in the xy-axis direction with respect to the reference optical axis L0 together with the first jig 22. Move.
同様の方法で、第２の光学素子の円周部に第３の治具３０を当接させ、第３の治具３０は、第２の光学基材１４を保持する。これにより、第３のモータ３２の駆動が駆動ロッド３１を介して第１の治具３０に伝わり、第２の光学基材１４が、第３の治具３０とともに基準光軸Ｌ０に対するｘｙ軸方向の移動をする。 In a similar manner, the third jig 30 is brought into contact with the circumferential portion of the second optical element, and the third jig 30 holds the second optical base material 14. As a result, the drive of the third motor 32 is transmitted to the first jig 30 via the drive rod 31, and the second optical base material 14 together with the third jig 30 is in the xy-axis direction with respect to the reference optical axis L0. To move.
（調芯及び成型方法）
本実施の形態の複合光学素子の製造方法について説明する。先ず、第１の実施の形態と同様に、第１の治具２２によって第１の光学基材１２を保持（真空吸着）する。
その後、像形成部材（輪帯穴）４０を通過したコリメート光が第１の光学基材１２を透過することで得られた像を、像検出器４２が検出する。さらに、得られた像と、公知の偏芯調整量算出方法によって導きだした偏芯調整量に基づき、制御パソコン４４を介して第１の治具２２を基準光軸Ｌ０に対してｘｙ軸方向に移動させる。こうして、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１を基準光軸Ｌ０に対して調整する。これにより、第１の光学芯ｃ１と基準光軸Ｌ０との調整が完了する。
(Alignment and molding method)
A method for manufacturing the composite optical element of the present embodiment will be described. First, as in the first embodiment, the first optical base 12 is held (vacuum suction) by the first jig 22.
Thereafter, the image detector 42 detects an image obtained by transmitting the collimated light that has passed through the image forming member (ring zone hole) 40 through the first optical base 12. Further, based on the obtained image and the eccentricity adjustment amount derived by a known eccentricity adjustment amount calculation method, the first jig 22 is moved in the xy-axis direction with respect to the reference optical axis L0 via the control personal computer 44. Move to. Thus, the first optical core c1 of the anti-bonding surface 12a of the first optical base 12 is adjusted with respect to the reference optical axis L0. Thereby, the adjustment of the first optical core c1 and the reference optical axis L0 is completed.
次に、像形成部材４０のパターンを変更し、第２の光学芯ｃ２についての偏芯像を検出し、基準光軸Ｌ０との偏芯量を算出する。この後、第１の治具２２を含む第１の調整手段２１を第２の治具２６により移動させて、第１の光学基材１２と第１の治具２２の両方を基準光軸Ｌ０に対してθ方向に傾斜移動させる。そして、第２の光学芯ｃ２を基準光軸Ｌ０に一致させる。 Next, the pattern of the image forming member 40 is changed, an eccentric image with respect to the second optical core c2 is detected, and the amount of eccentricity with respect to the reference optical axis L0 is calculated. Thereafter, the first adjusting means 21 including the first jig 22 is moved by the second jig 26, and both the first optical base 12 and the first jig 22 are moved to the reference optical axis L0. Is tilted in the θ direction. Then, the second optical core c2 is made to coincide with the reference optical axis L0.
以上で、基準光軸Ｌ０と第１の光学基材１２の光軸（第１の光学芯ｃ１と第２の光学芯ｃ２を結ぶ軸）は高精度な調芯が完了する。
次に、同様にして、第２の光学基材１４の光軸（第３の光学芯ｃ３と第４の光学芯ｃ４を結ぶ軸）と基準光軸Ｌ０とを調整する。
Thus, the reference optical axis L0 and the optical axis of the first optical base 12 (the axis connecting the first optical core c1 and the second optical core c2) are completed with high accuracy.
Next, similarly, the optical axis of the second optical substrate 14 (the axis connecting the third optical core c3 and the fourth optical core c4) and the reference optical axis L0 are adjusted.
すなわち、第３の光学芯ｃ３を、第３の治具３０のｘｙ面内での移動により偏芯調整を行う。さらに、第３の治具３０を含む第３の調整手段２９を第４の治具３４により移動させることで、第２の光学基材１４と第３の治具３０の両方がθ方向に移動し、第４の光学芯ｃ４が、基準光軸Ｌ０に一致する。以上により、第１〜第４までの各光学芯が、基準光軸Ｌ０に一致し、これによって、それぞれの光学面の高精度な偏芯調整が完了する。 That is, the eccentric adjustment of the third optical core c3 is performed by moving the third jig 30 in the xy plane. Furthermore, by moving the third adjusting means 29 including the third jig 30 by the fourth jig 34, both the second optical base material 14 and the third jig 30 move in the θ direction. The fourth optical core c4 coincides with the reference optical axis L0. As described above, the first to fourth optical cores coincide with the reference optical axis L0, thereby completing the highly accurate eccentric adjustment of each optical surface.
第１の実施の形態と異なり、本実施の形態では、樹脂の押延を第１の光学基材１２の偏芯調整前に行う。紫外線硬化型樹脂１６を不図示の供給手段により、第１の光学基材１２に供給する。その後、第２の光学基材１４を（基準光軸Ｌ０と平行な方向に）移動させ、第２の光学基材１４と当該樹脂１６とを接触させ、更に所定の樹脂肉厚になるまで接近移動（下降）させる。 Unlike the first embodiment, in this embodiment, the resin is stretched before adjusting the eccentricity of the first optical base 12. The ultraviolet curable resin 16 is supplied to the first optical substrate 12 by supply means (not shown). Thereafter, the second optical base material 14 is moved (in a direction parallel to the reference optical axis L0), the second optical base material 14 and the resin 16 are brought into contact with each other, and further approached until a predetermined resin thickness is reached. Move (down).
そして、第１の光学基材１２の調芯を実施し、その後、第２の光学基材１４の調芯を実施し、樹脂層を含む４つの面１２ａ、１２ｂ、１４ａ、１４ｂの光学芯ｃ１〜ｃ４についての偏芯調整が完了する。 Then, alignment of the first optical substrate 12 is performed, and then alignment of the second optical substrate 14 is performed, and the optical core c1 of the four surfaces 12a, 12b, 14a, 14b including the resin layer is performed. The eccentricity adjustment for .about.c4 is completed.
（硬化、剥離方法）
調芯後、制御パソコン４４を介して硬化手段である光源４８（本実施の形態ではメタルハライドランプを用いた）を起動させ、ハーフミラー４６を介して紫外線硬化型樹脂１６に紫外線照射を行う。
(Curing and peeling method)
After the alignment, a light source 48 (a metal halide lamp is used in the present embodiment), which is a curing means, is activated via the control personal computer 44, and the ultraviolet curable resin 16 is irradiated with ultraviolet rays via the half mirror 46.
更に、当該樹脂１６の硬化後に離型爪治具５２を第１の光学基材１２のコバ部に当接させた後に、第２の光学基材１４を基準光軸Ｌ０の方向に上昇させて第２の光学基材１４を樹脂層から離間させる。これにより、第１の光学基材１２と紫外線硬化型樹脂１６からなる２層の複合光学素子１１が得られる。 Further, after the resin 16 is cured, the release claw jig 52 is brought into contact with the edge portion of the first optical substrate 12, and then the second optical substrate 14 is raised in the direction of the reference optical axis L0. The second optical substrate 14 is separated from the resin layer. As a result, a two-layer composite optical element 11 composed of the first optical base 12 and the ultraviolet curable resin 16 is obtained.
本実施の形態によれば、得られた複合光学素子１１は、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１と貼り合わせ面１２ｂの第２の光学芯ｃ２とを結ぶ軸と、第２の光学基材１４の貼り合わせ面１４ｂから転写された樹脂層上の第４の光学芯ｃ４とを結ぶ軸とのズレ（偏芯精度）は、シフト５μｍ、チルト１分であった。こうして、偏芯精度の優れた２層からなる複合光学素子１１が得られた。 According to the present embodiment, the obtained composite optical element 11 includes a first optical core c1 of the anti-bonding surface 12a of the first optical base 12 and a second optical core c2 of the bonding surface 12b. And the axis connecting the fourth optical core c4 on the resin layer transferred from the bonding surface 14b of the second optical base material 14 have a shift of 5 μm and a tilt of 1 Minutes. Thus, a composite optical element 11 composed of two layers having excellent eccentricity accuracy was obtained.
［第３の実施の形態］
図６は、第３の実施の形態の複合光学素子の製造装置の全体構成を示す図である。なお、第１の実施の形態と同一又は相当する部材には同一の符号を付して説明する。
[Third Embodiment]
FIG. 6 is a diagram illustrating an overall configuration of a composite optical element manufacturing apparatus according to the third embodiment. In addition, the same code | symbol is attached | subjected and demonstrated to the member which is the same as that of 1st Embodiment, or corresponds.
（光学基材の形状）
第１の光学基材１２は、近似曲率半径Ｒ１＝２４．１mmの非球面形状の面を持つ反貼り合わせ面１２ａと、近似曲率半径Ｒ２＝１３．６mmの非球面形状を持つ貼り合わせ面１２ｂを有する両凹形状のレンズである。また、中心肉厚ｔ１＝３mm、外径Ｄ１＝２５．２mmのガラス成形レンズである。また、材料はＳ−ＬＡＨ５３（オハラ（株）社製）である。
(Optical substrate shape)
The first optical base 12 includes an anti-bonding surface 12a having an aspheric surface with an approximate curvature radius R1 = 24.1 mm, and a bonding surface 12b having an aspheric shape with an approximate curvature radius R2 = 13.6 mm. This is a biconcave lens. Further, the glass molded lens has a center thickness t1 = 3 mm and an outer diameter D1 = 25.2 mm. The material is S-LAH53 (manufactured by OHARA INC.).
第２の光学基材１４は、近似曲率半径Ｒ３＝５６．５mmの非球面形状を持つ反貼り合わせ面１４ａと、近似曲率半径Ｒ４＝１５．１mmの非球面形状を持つ貼り合わせ面１４ｂと、を有する両凸形状のレンズである。また、中心肉厚ｔ２＝４mm、外径Ｄ２＝２５．２mmのガラス成形レンズである。また、材料は、Ｓ−ＢＡＬ４２（オハラ（株）社製）である。 The second optical substrate 14 includes an anti-bonding surface 14a having an aspherical shape with an approximate curvature radius R3 = 56.5 mm, and a bonding surface 14b having an aspherical shape with an approximate curvature radius R4 = 15.1 mm. It is a biconvex lens having Further, the glass molded lens has a center thickness t2 = 4 mm and an outer diameter D2 = 25.2 mm. The material is S-BAL42 (manufactured by OHARA INC.).
（製造装置の構成）
図６において、装置構成は第１の実施の形態と略同様である。本実施の形態では、調整光としてのレーザ光を照射する光源３８、及びその反射光を検出する像検出器４２を有している。本実施の形態では、この像検出器４２で照射したレーザ光の反射光を検出するようにした点が前述した各実施の形態と相違している。
(Configuration of manufacturing equipment)
In FIG. 6, the apparatus configuration is substantially the same as that of the first embodiment. In the present embodiment, a light source 38 that emits laser light as adjustment light and an image detector 42 that detects the reflected light are provided. The present embodiment is different from the above-described embodiments in that the reflected light of the laser light irradiated by the image detector 42 is detected.
（基材保持方法）
基材保持方法は、第１の実施の形態と同様であるので、その説明を省略する。
(Substrate holding method)
Since the substrate holding method is the same as that of the first embodiment, the description thereof is omitted.
（調芯及び成型方法）
第１の実施の形態で説明したように、第１の治具２２によって第１の光学基材１２を保持（真空吸着）した後、光源３８からコリメートレーザー光源を照射し、第１の光学基材１２の反貼り合わせ面１２ａにより反射したコリメート光を像検出器４２が検出する。
(Alignment and molding method)
As described in the first embodiment, after the first optical base 12 is held (vacuum suction) by the first jig 22, the collimated laser light source is irradiated from the light source 38, and the first optical substrate is irradiated. The image detector 42 detects the collimated light reflected by the anti-bonding surface 12 a of the material 12.
こうして、得られた反射像により公知の偏芯調整量算出方法に基づき、制御パソコン４４を介して第１の治具２２をｘｙ面内で移動させて、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１を基準光軸Ｌ０に対して補正する。これにより、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１と基準光軸Ｌ０との調整が完了する。 Thus, based on a known eccentricity adjustment amount calculation method based on the obtained reflection image, the first jig 22 is moved in the xy plane via the control personal computer 44, and the first optical substrate 12 is anti-bonded. The first optical core c1 of the mating surface 12a is corrected with respect to the reference optical axis L0. Thereby, adjustment with the 1st optical core c1 of the anti-bonding surface 12a of the 1st optical base material 12 and the reference | standard optical axis L0 is completed.
次に、第１の光学基材１２の貼り合わせ面１２ｂの第２の光学芯ｃ２についての反射像を像検出器４２で検出し、第１の光学基材１２の貼り合わせ面１２ｂの第２の光学芯ｃ２の偏芯量を算出する。この後、第１の光学基材１２のコバ部に第２の治具２６を当接移動させる。次いで、ベルクランプ機構を有する第１の治具２２により保持された第１の光学基材１２を、第１の光学芯ｃ１を基準光軸Ｌ０に一致させたまま基準光軸Ｌ０に対してθ方向移動させる。こうして、第１の光学基材１２の貼り合わせ面１２ｂの第２の光学芯ｃ２を基準光軸Ｌ０に対して補正する。 Next, a reflected image of the second optical core c2 of the bonding surface 12b of the first optical base 12 is detected by the image detector 42, and the second of the bonding surface 12b of the first optical base 12 is detected. The amount of eccentricity of the optical core c2 is calculated. Thereafter, the second jig 26 is moved in contact with the edge portion of the first optical base 12. Next, the first optical base material 12 held by the first jig 22 having a bell clamp mechanism is placed on the reference optical axis L0 with the first optical core c1 aligned with the reference optical axis L0. Move the direction. Thus, the second optical core c2 of the bonding surface 12b of the first optical substrate 12 is corrected with respect to the reference optical axis L0.
これにより、基準光軸Ｌ０と第１の光学基材１２の光軸（第１の光学芯ｃ１と第２の光学芯ｃ２を結ぶ軸）とは、高精度に調芯される。 Thus, the reference optical axis L0 and the optical axis of the first optical base 12 (the axis connecting the first optical core c1 and the second optical core c2) are aligned with high accuracy.
次に、同様にして、第２の光学基材１４の光軸（第３の光学芯ｃ３と第４の光学芯ｃ４を結ぶ軸）と基準光軸Ｌ０とを調整する。
すなわち、第２の光学基材１４の反貼り合わせ面１４ａの第３の光学芯ｃ３は、第３の治具３０をｘｙ面内で移動させることにより偏芯調整される。そして、第２の光学基材１４の貼り合わせ面１４ｂの第４の光学芯ｃ４は、第４の治具３４を移動させることにより、第３の光学芯ｃ３を基準光軸Ｌ０に一致させたまま、第２の光学基材１４をθ方向に移動させ、偏芯調整を行う。
Next, similarly, the optical axis of the second optical substrate 14 (the axis connecting the third optical core c3 and the fourth optical core c4) and the reference optical axis L0 are adjusted.
That is, the eccentricity of the third optical core c3 of the anti-bonding surface 14a of the second optical base material 14 is adjusted by moving the third jig 30 in the xy plane. And the 4th optical core c4 of the bonding surface 14b of the 2nd optical base material 14 moved the 4th jig | tool 34, and made the 3rd optical core c3 correspond with the reference | standard optical axis L0. As it is, the second optical base material 14 is moved in the θ direction to adjust the eccentricity.
また、成形方法に関しては、第２の実施の形態と同様、両方の光学基材の偏芯調整後に行うため、その説明を省略する。 Further, since the molding method is performed after the eccentricity adjustment of both optical base materials, as in the second embodiment, the description thereof is omitted.
本実施の形態によれば、得られた複合光学素子１０は、第１の光学基材１２の反貼り合わせ面１２ａの第１の光学芯ｃ１と貼り合わせ面１２ｂの第２の光学芯ｃ２とを結ぶ軸と、第２の光学基材１４の反貼り合わせ面１４ａの第３の光学芯ｃ３と貼り合わせ面１４ｂの第４の光学芯ｃ４とを結ぶ軸とのズレ（偏芯精度）は、シフト７μｍ、チルト２分であった。こうして、偏芯精度の優れた複合光学素子１０が得られた。 According to the present embodiment, the obtained composite optical element 10 includes a first optical core c1 of the anti-bonding surface 12a of the first optical base 12 and a second optical core c2 of the bonding surface 12b. And an axis connecting the third optical core c3 of the anti-bonding surface 14a of the second optical base material 14 and the fourth optical core c4 of the bonding surface 14b (eccentricity accuracy) is The shift was 7 μm and the tilt was 2 minutes. Thus, the composite optical element 10 having excellent eccentricity accuracy was obtained.
１０ 複合光学素子
１１ 複合光学素子
１２ 第１の光学基材
１２ａ 反貼り合わせ面
１２ｂ 貼り合わせ面
１４ 第２の光学基材
１４ａ 反貼り合わせ面
１４ｂ 貼り合わせ面
１６ 紫外線硬化型樹脂
２０ 複合光学素子の製造装置
２１ 第１の調整手段
２２ 第１の治具
２３ 駆動ロッド
２４ 第１のモータ
２５ 第２の調整手段
２６ 第２の治具
２７ 駆動ロッド
２８ 第２のモータ
２９ 第３の調整手段
３０ 第３の治具
３１ 駆動ロッド
３２ 第３のモータ
３３ 第４の調整手段
３４ 第４の治具
３５ 駆動ロッド
３６ 第４のモータ
３８ 光源
４０ 像形成部材
４２ 像検出器
４４ 制御パソコン
４６ ハーフミラー
４８ 光源
５１ 剥離手段
５２ 離型爪治具
５３ 駆動ロッド
５４ 第４のモータ
Ｌ０ 基準光軸
Ｃ１ 第１の光学芯
Ｃ２ 第２の光学芯
Ｃ３ 第３の光学芯
Ｃ４ 第４の光学芯
DESCRIPTION OF SYMBOLS 10 Composite optical element 11 Composite optical element 12 1st optical base material 12a Anti-bonding surface 12b Bonding surface 14 Second optical base material 14a Anti-bonding surface 14b Bonding surface 16 UV curable resin 20 Composite optical element Manufacturing apparatus 21 First adjusting means 22 First jig 23 Driving rod 24 First motor 25 Second adjusting means 26 Second jig 27 Driving rod 28 Second motor 29 Third adjusting means 30 Third Third jig 31 Driving rod 32 Third motor 33 Fourth adjusting means 34 Fourth jig 35 Driving rod 36 Fourth motor 38 Light source 40 Image forming member 42 Image detector 44 Control personal computer 46 Half mirror 48 Light source 51 Peeling means 52 Release claw jig 53 Drive rod 54 Fourth motor L0 Reference optical axis C1 First optical core C2 Second optical core C3 Third optical core C4 Fourth optical core C4 Gakushin
Claims (5)
偏芯調整の基準となる基準光軸を設定する工程と、
前記第１の光学基材を前記基準光軸に対して垂直方向に移動させ、前記第１の光学基材の有する一方の光学芯を前記基準光軸に一致させる工程と、
前記第１の光学基材の前記一方の光学芯を前記基準軸に一致させる工程の後に、前記第１の光学基材の前記一方の光学芯を前記基準光軸に一致せた状態を保持しながら、前記第１の光学基材を前記基準光軸に対して傾斜方向に移動させ、前記第１の光学基材の有する他方の光学芯を前記基準光軸に一致させる工程と、
前記第２の光学基材を前記基準光軸に対して垂直方向に移動させ、前記第２の光学基材の有する一方の光学芯を前記基準光軸に一致させる工程と、
前記第２の光学基材の前記一方の光学芯を前記基準軸に一致させる工程の後に、前記第２の光学基材の前記一方の光学芯を前記基準光軸に一致せた状態を保持しながら、前記第２の光学基材を前記基準光軸に対して傾斜方向に移動させ、前記第２の光学基材の有する他方の光学芯を前記基準光軸に一致させる工程と、
前記第１と第２の光学基材の少なくとも一方の貼り合わせ面に樹脂を供給する工程と、
前記第１と第２の光学基材間で前記樹脂を押延する工程と、
前記樹脂を硬化させる工程と、
を備える
ことを特徴とする複合光学素子の製造方法。 A method for producing a composite optical element having a resin layer between a first optical substrate and a second optical substrate,
Setting a reference optical axis as a reference for eccentricity adjustment;
Moving the first optical substrate in a direction perpendicular to the reference optical axis, and matching one optical core of the first optical substrate with the reference optical axis;
After the step of aligning the one optical core of the first optical substrate with the reference axis, the state where the one optical core of the first optical substrate is aligned with the reference optical axis is maintained. While moving the first optical substrate in a tilt direction with respect to the reference optical axis, and matching the other optical core of the first optical substrate with the reference optical axis;
Moving the second optical substrate in a direction perpendicular to the reference optical axis, and matching one optical core of the second optical substrate with the reference optical axis;
After the step of aligning the one optical core of the second optical substrate with the reference axis, the state where the one optical core of the second optical substrate is aligned with the reference optical axis is maintained. While moving the second optical base material in an inclined direction with respect to the reference optical axis, and matching the other optical core of the second optical base material with the reference optical axis;
Supplying a resin to at least one bonding surface of the first and second optical substrates;
Stretching the resin between the first and second optical substrates;
Curing the resin;
A method for producing a composite optical element, comprising:
前記第１の光学基材の空間位置と、前記第２の光学基材の空間位置と、から樹脂厚を所望の厚さにするための距離制御の値を算出する工程と、
算出された前記距離制御の値に従って前記第１の光学基材と前記第２の光学基材の少なくとも一方を移動させる工程と、を備える
ことを特徴とする請求項１に記載の複合光学素子の製造方法。 As a step of stretching the resin between the first and second optical substrates,
Calculating a distance control value for making the resin thickness a desired thickness from the spatial position of the first optical substrate and the spatial position of the second optical substrate;
The step of moving at least one of the first optical base material and the second optical base material according to the calculated value of the distance control comprises the composite optical element according to claim 1. Production method.
基準光軸を設定する基準光軸設定手段と、
前記第１の光学基材を前記基準光軸に対して垂直方向に移動可能に保持し、前記基準光軸に対して、前記第１の光学基材の有する一方の光学芯を一致させる調整を行う第１の調整手段と、
前記第１の光学基材を前記基準光軸に対して傾斜方向に移動可能に保持し、前記第１の調整手段が前記第１の光学基材の前記一方の光学芯を前記基準光軸に一致せた状態を保持しながら、前記基準光軸に対して、前記第１の光学基材の有する他方の光学芯を前記基準光軸に一致させる調整を行う第２の調整手段と、
前記第２の光学基材を前記基準光軸に対して垂直方向に移動可能に保持し、前記基準光軸に対して、前記第２の光学基材の有する一方の光学芯を一致させる調整を行う第３の調整手段と、
前記第２の光学基材を前記基準光軸に対して傾斜方向に移動可能に保持し、前記第３の調整手段が前記第２の光学基材の前記一方の光学芯を前記基準光軸に一致せた状態を保持しながら、前記基準光軸に対して、前記第２の光学基材の有する他方の光学芯を前記基準光軸に一致させる調整を行う第４の調整手段と、
前記第１と第２の光学基材の少なくとも一方の貼り合わせ面に樹脂を供給する供給手段と、
前記樹脂を硬化させる硬化手段と、
前記第１〜第４の調整手段を制御する制御手段と、を備える
ことを特徴とする複合光学素子の製造装置。 An apparatus for manufacturing a composite optical element in which a first optical substrate and a second optical substrate are bonded via a resin,
A reference optical axis setting means for setting a reference optical axis;
Adjustment that holds the first optical base so as to be movable in a direction perpendicular to the reference optical axis, and makes one optical core of the first optical base coincide with the reference optical axis. First adjusting means to perform;
The first optical base is held so as to be movable in an inclined direction with respect to the reference optical axis, and the first adjusting means uses the one optical core of the first optical base as the reference optical axis. A second adjusting means for adjusting the other optical core of the first optical base material to match the reference optical axis with respect to the reference optical axis while maintaining the matched state ;
The second optical substrate is held so as to be movable in a direction perpendicular to the reference optical axis, and adjustment is performed so that one optical core of the second optical substrate coincides with the reference optical axis. Third adjusting means to perform;
The second optical base is held so as to be movable in an inclined direction with respect to the reference optical axis, and the third adjusting means uses the one optical core of the second optical base as the reference optical axis. A fourth adjusting means for adjusting the other optical core of the second optical base material to match the reference optical axis with respect to the reference optical axis while maintaining the matched state ;
Supply means for supplying resin to at least one bonding surface of the first and second optical substrates;
Curing means for curing the resin;
And a control means for controlling the first to fourth adjusting means. An apparatus for producing a composite optical element, comprising:
前記第３の調整手段は前記第２の光学基材の反貼り合わせ面を保持する、
ことを特徴とする請求項３に記載の複合光学素子の製造装置。 The first adjusting means holds the anti-bonding surface of the first optical substrate,
The third adjusting means holds the anti-bonding surface of the second optical substrate;
The composite optical element manufacturing apparatus according to claim 3.
ことを特徴とする請求項３に記載の複合光学素子の製造装置。
The control means calculates a distance control value for making the resin thickness a desired thickness from the spatial position of the first optical substrate and the spatial position of the second optical substrate. The apparatus for manufacturing a composite optical element according to claim 3, wherein at least one of the first to fourth adjustment units is controlled according to the calculated distance control value.
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