JP5608094B2 - 顕微鏡検査用試料取付け台 - Google Patents
顕微鏡検査用試料取付け台 Download PDFInfo
- Publication number
- JP5608094B2 JP5608094B2 JP2010539939A JP2010539939A JP5608094B2 JP 5608094 B2 JP5608094 B2 JP 5608094B2 JP 2010539939 A JP2010539939 A JP 2010539939A JP 2010539939 A JP2010539939 A JP 2010539939A JP 5608094 B2 JP5608094 B2 JP 5608094B2
- Authority
- JP
- Japan
- Prior art keywords
- mount
- stage
- connector
- electrical
- motomeko
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2251—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/30—Base structure with heating device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/34—Microscope slides, e.g. mounting specimens on microscope slides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2007—Holding mechanisms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2008—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated specially adapted for studying electrical or magnetical properties of objects
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Description
顕微鏡検査用試料を装置上に置くステップと、
前記装置を取付け台に固定するステップと、
機械的及び電気的に接続可能な前記取付け台とステージとを対合可能にインターフェースさせるステップと、
電気を印加して前記試料を電気的、化学的、及び/又は熱的に操作するステップと、
in‐situ変化を検出及び分析するステップと、
を含む。
Claims (21)
- 少なくとも1つの顕微鏡検査用試料を顕微鏡内で直接的にin‐situ操作、実験及び分析するシステムであって、当該システムは、ステージとインターフェースをとる取付け台を備え、
前記取付け台は、試料を支持するのに有用な装置を前記取付け台に固定する2以上のコンタクトを備え、
信号リード線が、前記取付け台から前記装置への電気的接続を確立するために前記取付け台に埋め込まれて前記取付け台から電気的に絶縁され、
前記ステージは、前記取付け台に電気的に接続可能なレセプタクルを備え、
前記レセプタクルは、前記顕微鏡の外壁に電気的に接続可能である、システム。 - 前記装置は、
(a)少なくとも1つのメンブレン領域を備えるメンブレンと、
(b)前記メンブレンと接触する少なくとも1つの導電素子と、を備える、請求項1に記載のシステム。 - 前記取付け台は、少なくとも1つの対合可能取付け台コネクタと、電気的取付け台コネクタと、を備える、請求項1又は2に記載のシステム。
- 前記対合可能取付け台コネクタはダブテール・コネクタを備える、請求項3に記載のシステム。
- 前記電気的取付け台コネクタは前記ステージ上の前記レセプタクルと対合する、請求項3に記載のシステム。
- 取付け台ボイドをさらに備え、前記取付け台ボイドは、電子又は他の信号が前記取付け台を通過して検出器に到達することを可能にする、請求項1に記載のシステム。
- 前記対合可能取付け台コネクタは、前記ステージと機械的にインターフェースをとるように位置決めされる、請求項3に記載のシステム。
- 前記ステージは、対合可能ステージ・コネクタと、ステージ・ボイドと、を備える、請求項1〜7のいずれか1項に記載のシステム。
- 前記対合可能ステージ・コネクタはダブテール・コネクタを備える、請求項8に記載のシステム。
- 前記2以上のコンタクトは、ばね張力が前記取付け台に前記装置を固定するようにばね荷重をかけられる、請求項1〜9のいずれか1項に記載のシステム。
- 前記2以上のコンタクトは、前記取付け台上の前記信号リード線から前記装置上の電極までの電気的接続を提供する、請求項1に記載のシステム。
- 導管が、電気的接続を可能にするために前記顕微鏡の外壁に前記レセプタクルを接続する、請求項1に記載のシステム。
- 前記導管は、それ自体の全体にわたって延在する電気的配線を含む、請求項12に記載のシステム。
- 前記ステージは顕微鏡ステージに固定可能である、請求項1〜13のいずれか1項に記載のシステム。
- 前記顕微鏡は電子顕微鏡である、請求項1〜14のいずれか1項に記載のシステム。
- in‐situ実験用の前記試料に電気的刺激及び/又は熱刺激をもたらす、請求項1〜15のいずれか1項に記載のシステム。
- STEMモードのin‐situ実験向けである、請求項1〜16のいずれか1項に記載のシステム。
- SEMモードのin‐situ実験向けである、請求項1〜17のいずれか1項に記載のシステム。
- 単一のin‐situ実験、複数の順次in‐situ実験、又は複数の同時in‐situ実験向けである、請求項1〜18のいずれか1項に記載のシステム。
- 前記対合可能ステージ・コネクタは、それ自体の上に少なくとも1つの電気的ステージ・コネクタを含む、請求項8に記載のシステム。
- 顕微鏡検査用試料をin‐situで操作、実験及び分析する方法であって、
顕微鏡検査用試料を装置上に置くステップと、
請求項1に記載のシステムを固定するステップと、
電気を印加して前記試料を電気的、化学的及び/又は熱的に操作するステップと、
in‐situ変化を検出及び分析するステップと、を含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US1620607P | 2007-12-21 | 2007-12-21 | |
US61/016,206 | 2007-12-21 | ||
PCT/US2008/088052 WO2009086319A2 (en) | 2007-12-21 | 2008-12-22 | Specimen mount for microscopy |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011508388A JP2011508388A (ja) | 2011-03-10 |
JP5608094B2 true JP5608094B2 (ja) | 2014-10-15 |
Family
ID=40825072
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010539939A Active JP5608094B2 (ja) | 2007-12-21 | 2008-12-22 | 顕微鏡検査用試料取付け台 |
Country Status (4)
Country | Link |
---|---|
US (1) | US9064672B2 (ja) |
EP (1) | EP2240811A4 (ja) |
JP (1) | JP5608094B2 (ja) |
WO (1) | WO2009086319A2 (ja) |
Families Citing this family (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5608094B2 (ja) | 2007-12-21 | 2014-10-15 | プロトチップス,インコーポレイテッド | 顕微鏡検査用試料取付け台 |
EP2942801A1 (en) | 2009-09-24 | 2015-11-11 | Protochips, Inc. | Methods of using temperature control devices in electron microscopy |
JP5583263B2 (ja) * | 2010-04-07 | 2014-09-03 | ザ ガバニング カウンシル オブ ザ ユニヴァーシティー オブ トロント | 電子顕微鏡用マニピュレーターキャリヤ |
US8466432B2 (en) | 2010-04-12 | 2013-06-18 | Protochips, Inc. | Sample holder providing interface to semiconductor device with high density connections |
US8829469B2 (en) | 2010-08-02 | 2014-09-09 | Protochips, Inc. | Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices |
GB201113066D0 (en) * | 2011-07-29 | 2011-09-14 | Univ Bristol | Optical device |
WO2013102064A1 (en) | 2011-12-30 | 2013-07-04 | Protochips, Inc. | Sample holder for electron microscopy for low-current, low-noise analysis |
NL2009469C2 (en) * | 2012-09-14 | 2014-03-18 | Denssolutions B V | Double tilt holder and multicontact device. |
US9733156B2 (en) | 2012-10-29 | 2017-08-15 | Perkinelmer Health Sciences, Inc. | Sample platforms and methods of using them |
US9412572B2 (en) | 2012-10-28 | 2016-08-09 | Perkinelmer Health Sciences, Inc. | Sample holders and methods of using them |
US9117641B2 (en) | 2012-10-29 | 2015-08-25 | Perkinelmer Health Sciences, Inc. | Direct sample analysis device adapters and methods of using them |
WO2014066873A1 (en) * | 2012-10-28 | 2014-05-01 | Perkinelmer Health Sciences, Inc. | Sample platforms and methods of using them |
JP2016501428A (ja) | 2012-11-16 | 2016-01-18 | プロトチップス,インコーポレイテッド | 電子顕微鏡ホルダにおいて試料支持体への電気的接続を形成する方法 |
JP6373568B2 (ja) * | 2013-10-07 | 2018-08-15 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
WO2015187814A1 (en) | 2014-06-03 | 2015-12-10 | Protochips, Inc. | Method for optimizing fluid flow across a sample within an electron microscope sample holder |
JP6406710B2 (ja) * | 2015-08-25 | 2018-10-17 | 本田技研工業株式会社 | サンプルホルダ |
JP6471070B2 (ja) * | 2015-08-26 | 2019-02-13 | 本田技研工業株式会社 | 分析用電池 |
EP3345205B1 (en) | 2015-08-31 | 2023-08-16 | Protochips, Inc. | A mems frame heating platform for electron imagable fluid reservoirs or larger conductive samples |
USD841183S1 (en) | 2016-03-08 | 2019-02-19 | Protochips, Inc. | Window E-chip for an electron microscope |
US12000789B2 (en) | 2021-12-23 | 2024-06-04 | Fei Company | Method and system for positioning and transferring a sample |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2481554A (en) * | 1946-12-17 | 1949-09-13 | Thomas W Winstead | Thermoplastic film heat sealing element |
JPS5086940U (ja) * | 1973-12-13 | 1975-07-24 | ||
US4888463A (en) * | 1987-09-08 | 1989-12-19 | Middlebrook Thomas F | Thermal microscope stage |
JPH04267054A (ja) * | 1991-02-21 | 1992-09-22 | Sanyo Electric Co Ltd | 有機電解液電池用正極の製造方法 |
US5124645A (en) * | 1991-04-24 | 1992-06-23 | The United States Of America As Represented By The Secretary Of The Air Force | Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor |
FR2687250A1 (fr) | 1992-02-07 | 1993-08-13 | Merlin Gerin | Dispositif de coupure a contacts multiples. |
JPH0644936A (ja) * | 1992-05-29 | 1994-02-18 | Hitachi Ltd | 電子線装置、及び電子線装置用試料ホルダー |
US5343018A (en) * | 1992-10-30 | 1994-08-30 | Wisconsin Alumni Research Foundation | Microscope lens and stage heater with flexible objective lens casing heater sleeve |
US5552321A (en) * | 1993-08-24 | 1996-09-03 | Bioptechs Inc. | Temperature controlled culture dish apparatus |
US5821545A (en) | 1995-11-07 | 1998-10-13 | Molecular Imaging Corporation | Heated stage for a scanning probe microscope |
JPH10185781A (ja) * | 1996-12-25 | 1998-07-14 | Mitsubishi Electric Corp | 電子顕微鏡用試料ホルダおよびその製法 |
JP3483544B2 (ja) * | 2000-12-13 | 2004-01-06 | 株式会社東海ヒット | 透明面温度センサ及び透明面温度制御装置 |
US20060025002A1 (en) | 2004-07-28 | 2006-02-02 | The Board Of Trustees Of The University Of Illinois | TEM MEMS device holder and method of fabrication |
JP4502193B2 (ja) * | 2004-08-10 | 2010-07-14 | 国立大学法人 奈良先端科学技術大学院大学 | 回路形成用カセットおよびその利用 |
NL1027025C2 (nl) | 2004-09-13 | 2006-03-14 | Univ Delft Tech | Microreactor voor een transmissie elektronenmicroscoop en verwarmingselement en werkwijze voor vervaardiging daarvan. |
US7713053B2 (en) | 2005-06-10 | 2010-05-11 | Protochips, Inc. | Reusable template for creation of thin films; method of making and using template; and thin films produced from template |
US7491934B2 (en) | 2006-01-13 | 2009-02-17 | Ut-Battelle, Llc | SEM technique for imaging and measuring electronic transport in nanocomposites based on electric field induced contrast |
JP4923716B2 (ja) * | 2006-05-11 | 2012-04-25 | 株式会社日立製作所 | 試料分析装置および試料分析方法 |
US8920723B2 (en) | 2006-11-16 | 2014-12-30 | Protochips, Inc. | Sample support structure and methods |
WO2008109406A1 (en) | 2007-03-02 | 2008-09-12 | Protochips, Inc. | Membrane supports with reinforcement features |
WO2009117412A1 (en) | 2008-03-17 | 2009-09-24 | Protochips, Inc. | Specimen holder used for mounting samples in electron microscopes |
WO2008141147A1 (en) | 2007-05-09 | 2008-11-20 | Protochips, Inc. | Microscopy support structures |
JP5608094B2 (ja) | 2007-12-21 | 2014-10-15 | プロトチップス,インコーポレイテッド | 顕微鏡検査用試料取付け台 |
JP4267054B1 (ja) * | 2008-07-14 | 2009-05-27 | 株式会社ミラック光学 | 複合アリ溝摺動ステージ |
-
2008
- 2008-12-22 JP JP2010539939A patent/JP5608094B2/ja active Active
- 2008-12-22 WO PCT/US2008/088052 patent/WO2009086319A2/en active Application Filing
- 2008-12-22 EP EP08868958A patent/EP2240811A4/en not_active Withdrawn
- 2008-12-22 US US12/809,717 patent/US9064672B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP2240811A2 (en) | 2010-10-20 |
WO2009086319A3 (en) | 2009-10-01 |
US20110032611A1 (en) | 2011-02-10 |
EP2240811A4 (en) | 2012-09-05 |
US9064672B2 (en) | 2015-06-23 |
JP2011508388A (ja) | 2011-03-10 |
WO2009086319A2 (en) | 2009-07-09 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5608094B2 (ja) | 顕微鏡検査用試料取付け台 | |
WO1995008181A2 (en) | A system for analyzing surfaces of samples | |
US10847343B1 (en) | Microscopy | |
Kourkoutis et al. | Electron microscopy of biological materials at the nanometer scale | |
JP4923716B2 (ja) | 試料分析装置および試料分析方法 | |
Fuoss et al. | Apparatus for x-ray diffraction in ultrahigh vacuum | |
US5986270A (en) | Particle-optical apparatus including a low-temperature specimen holder | |
US20190287759A1 (en) | Transmission Electron Microscopy | |
EP2555221B1 (en) | Method of studying a sample in an ETEM | |
Diebolder et al. | Pushing the resolution limits in cryo electron tomography of biological structures | |
CN110895287B (zh) | 一种真空互联的表面分析装置及其使用方法 | |
JP2017518519A (ja) | in situ(その場)分析のためのバッテリキャリア | |
US11295929B2 (en) | Sample holder for electron microscopy | |
US20120244038A1 (en) | Scanning Tunneling Microscope Assembly, Reactor, and System | |
JP5015869B2 (ja) | モジュラガスイオン源 | |
US7081630B2 (en) | Compact microcolumn for automated assembly | |
JP2008131047A (ja) | 標本支持台と標本支持台の使用の下で検査物質を検査する方法 | |
Westphall et al. | Cryogenic Soft Landing Improves Structural Preservation of Protein Complexes | |
TWI354798B (en) | Electron beam apparatus | |
Jonić et al. | Comparison of single‐particle analysis and electron tomography approaches: an overview | |
US12000789B2 (en) | Method and system for positioning and transferring a sample | |
WO2020186310A1 (en) | X-ray diffraction sample cell device and method | |
US20150185461A1 (en) | Holder and Multicontact Device | |
CN110530942B (zh) | 一种电化学实验平台微探针的夹持与固定装置 | |
US11955357B2 (en) | In-situ temperature controlling sample stage customized for coupled interconnection between in-situ high-pressure reaction cell and ultrahigh vacuum characterization |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20111219 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130905 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130910 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20140307 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20140801 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20140829 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5608094 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R313531 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |