JP5597247B2 - 太陽電池及びその製造方法 - Google Patents
太陽電池及びその製造方法 Download PDFInfo
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- JP5597247B2 JP5597247B2 JP2012503332A JP2012503332A JP5597247B2 JP 5597247 B2 JP5597247 B2 JP 5597247B2 JP 2012503332 A JP2012503332 A JP 2012503332A JP 2012503332 A JP2012503332 A JP 2012503332A JP 5597247 B2 JP5597247 B2 JP 5597247B2
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- 238000004519 manufacturing process Methods 0.000 title description 35
- 230000031700 light absorption Effects 0.000 claims description 63
- 239000000758 substrate Substances 0.000 claims description 55
- 238000000926 separation method Methods 0.000 claims description 35
- 150000001875 compounds Chemical class 0.000 claims description 13
- 239000004642 Polyimide Substances 0.000 claims description 7
- 239000000463 material Substances 0.000 claims description 7
- 229920001721 polyimide Polymers 0.000 claims description 7
- 239000004743 Polypropylene Substances 0.000 claims description 6
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 6
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 6
- -1 polypropylene Polymers 0.000 claims description 6
- 229920001155 polypropylene Polymers 0.000 claims description 6
- 229920000642 polymer Polymers 0.000 claims description 5
- 229910004205 SiNX Inorganic materials 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 1
- 229910052814 silicon oxide Inorganic materials 0.000 claims 1
- 238000000034 method Methods 0.000 description 54
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 28
- 239000010408 film Substances 0.000 description 27
- 238000000059 patterning Methods 0.000 description 20
- 229910052751 metal Inorganic materials 0.000 description 14
- 239000002184 metal Substances 0.000 description 14
- 239000011787 zinc oxide Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 10
- 239000002243 precursor Substances 0.000 description 8
- 239000011669 selenium Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 239000011159 matrix material Substances 0.000 description 5
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 229910052980 cadmium sulfide Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052733 gallium Inorganic materials 0.000 description 4
- 229910052738 indium Inorganic materials 0.000 description 4
- 239000011810 insulating material Substances 0.000 description 4
- 230000001678 irradiating effect Effects 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 229920000307 polymer substrate Polymers 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 2
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 2
- XTXRWKRVRITETP-UHFFFAOYSA-N Vinyl acetate Chemical compound CC(=O)OC=C XTXRWKRVRITETP-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229920001577 copolymer Polymers 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- YNLHHZNOLUDEKQ-UHFFFAOYSA-N copper;selanylidenegallium Chemical compound [Cu].[Se]=[Ga] YNLHHZNOLUDEKQ-UHFFFAOYSA-N 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 229910052711 selenium Inorganic materials 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000002207 thermal evaporation Methods 0.000 description 2
- 239000005341 toughened glass Substances 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007646 gravure printing Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000001552 radio frequency sputter deposition Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/05—Electrical interconnection means between PV cells inside the PV module, e.g. series connection of PV cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0445—PV modules or arrays of single PV cells including thin film solar cells, e.g. single thin film a-Si, CIS or CdTe solar cells
- H01L31/046—PV modules composed of a plurality of thin film solar cells deposited on the same substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/042—PV modules or arrays of single PV cells
- H01L31/0475—PV cell arrays made by cells in a planar, e.g. repetitive, configuration on a single semiconductor substrate; PV cell microarrays
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Health & Medical Sciences (AREA)
- Molecular Biology (AREA)
- Photovoltaic Devices (AREA)
Description
Claims (3)
- 基板の上に互いに離隔して配置された複数個の後面電極パターンと、
前記後面電極パターンが配置された前記基板の上に電極間の連結のためのコンタクトパターン及び単位セルに分けるための分離パターンが形成された光吸収層パターンと、
前記光吸収層の上に配置され、前記分離パターンにより離隔して配置された前面電極パターンと、
前記後面電極パターンの間に配置された絶縁パターンと、を含み、
前記前面電極パターンは、前記コンタクトパターンの内に挿入されて前記後面電極パターンと電気的に連結されるものを含み、
前記後面電極パターンは、前記基板の一部が除去され前記基板から延びた前記絶縁パターンが形成された後、前記絶縁パターンの間に形成され、前記後面電極パターンが前記絶縁パターンの高さより低く形成されることを特徴とする、太陽電池。 - 前記絶縁パターンは、SiOx(x=2〜4)、SiNx(x=4)、高分子化合物PMMA(Polymethyl methacrylate)、ポリイミド(polyimide)、ポリプロピレン(polypropylene)のうち、いずれか1つで形成されたことを特徴とする、請求項1に記載の太陽電池。
- 前記絶縁パターンは、前記基板と同じ物質で形成されたことを特徴とする、請求項1〜2のいずれか一項に記載の太陽電池。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020090027874A KR101063641B1 (ko) | 2009-03-31 | 2009-03-31 | 태양전지 및 이의 제조방법 |
KR1020090027875A KR101114018B1 (ko) | 2009-03-31 | 2009-03-31 | 태양전지 및 이의 제조방법 |
KR10-2009-0027875 | 2009-03-31 | ||
KR10-2009-0027874 | 2009-03-31 | ||
PCT/KR2010/001989 WO2010114313A2 (ko) | 2009-03-31 | 2010-03-31 | 태양전지 및 이의 제조방법 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014021025A Division JP6055787B2 (ja) | 2009-03-31 | 2014-02-06 | 太陽電池及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2012522394A JP2012522394A (ja) | 2012-09-20 |
JP5597247B2 true JP5597247B2 (ja) | 2014-10-01 |
Family
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Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012503332A Expired - Fee Related JP5597247B2 (ja) | 2009-03-31 | 2010-03-31 | 太陽電池及びその製造方法 |
JP2014021025A Expired - Fee Related JP6055787B2 (ja) | 2009-03-31 | 2014-02-06 | 太陽電池及びその製造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
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JP2014021025A Expired - Fee Related JP6055787B2 (ja) | 2009-03-31 | 2014-02-06 | 太陽電池及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US9741884B2 (ja) |
EP (2) | EP2416377B1 (ja) |
JP (2) | JP5597247B2 (ja) |
CN (1) | CN102449778B (ja) |
WO (1) | WO2010114313A2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101262501B1 (ko) | 2011-04-04 | 2013-05-08 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
KR101241467B1 (ko) * | 2011-10-13 | 2013-03-11 | 엘지이노텍 주식회사 | 태양전지 및 이의 제조방법 |
KR101777598B1 (ko) * | 2011-10-17 | 2017-09-14 | 한국전자통신연구원 | 태양전지 제조방법 |
KR20140066285A (ko) * | 2012-11-22 | 2014-06-02 | 삼성에스디아이 주식회사 | 태양 전지 및 이의 제조 방법 |
CN104051551B (zh) * | 2013-03-14 | 2017-03-01 | 台湾积体电路制造股份有限公司 | 薄膜太阳能电池及其形成方法 |
US20140261657A1 (en) * | 2013-03-14 | 2014-09-18 | Tsmc Solar Ltd. | Thin film solar cell and method of forming same |
KR20150031889A (ko) * | 2013-09-17 | 2015-03-25 | 엘지이노텍 주식회사 | 테양전지 |
NL2014040B1 (en) * | 2014-12-23 | 2016-10-12 | Stichting Energieonderzoek Centrum Nederland | Method of making a curent collecting grid for solar cells. |
JP6030176B2 (ja) * | 2015-03-19 | 2016-11-24 | 株式会社東芝 | 光電変換素子とその製造方法 |
KR102039215B1 (ko) * | 2016-03-28 | 2019-10-31 | 주식회사 엘지화학 | 유기 태양전지 모듈 및 이의 제조 방법 |
US11183605B2 (en) * | 2017-04-19 | 2021-11-23 | (Cnbm) Bengbu Design Research Institute For Glass Industry Co. Ltd | Method for producing a layer structure for thin-film solar cells using etching or laser ablation to produce rear-electrode-layer-free region |
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US7718347B2 (en) | 2006-03-31 | 2010-05-18 | Applied Materials, Inc. | Method for making an improved thin film solar cell interconnect using etch and deposition process |
US20080072956A1 (en) * | 2006-09-07 | 2008-03-27 | Guardian Industries Corp. | Solar cell with antireflective coating comprising metal fluoride and/or silica and method of making same |
TWI335085B (en) * | 2007-04-19 | 2010-12-21 | Ind Tech Res Inst | Bifacial thin film solar cell and method for fabricating the same |
JPWO2009020073A1 (ja) | 2007-08-06 | 2010-11-04 | シャープ株式会社 | 薄膜光電変換モジュールの製造方法および製造装置 |
TWI405340B (zh) | 2007-08-31 | 2013-08-11 | Nexpower Technology Corp | 薄膜太陽能電池與其製作方法 |
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- 2010-03-31 WO PCT/KR2010/001989 patent/WO2010114313A2/ko active Application Filing
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- 2010-03-31 EP EP10759038.2A patent/EP2416377B1/en not_active Not-in-force
- 2010-03-31 EP EP14154555.8A patent/EP2743993B1/en not_active Not-in-force
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Also Published As
Publication number | Publication date |
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WO2010114313A3 (ko) | 2011-01-27 |
JP2012522394A (ja) | 2012-09-20 |
US9893221B2 (en) | 2018-02-13 |
CN102449778B (zh) | 2016-03-09 |
US20150040962A1 (en) | 2015-02-12 |
EP2416377B1 (en) | 2015-07-01 |
EP2743993A1 (en) | 2014-06-18 |
EP2416377A2 (en) | 2012-02-08 |
US20120031459A1 (en) | 2012-02-09 |
WO2010114313A2 (ko) | 2010-10-07 |
CN102449778A (zh) | 2012-05-09 |
US9741884B2 (en) | 2017-08-22 |
JP2014112711A (ja) | 2014-06-19 |
EP2743993B1 (en) | 2015-07-15 |
JP6055787B2 (ja) | 2016-12-27 |
EP2416377A4 (en) | 2013-08-21 |
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