JP5549233B2 - カラーフィルタ基板の露光方法 - Google Patents
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1339—Gaskets; Spacers; Sealing of cells
- G02F1/13394—Gaskets; Spacers; Sealing of cells spacers regularly patterned on the cell subtrate, e.g. walls, pillars
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
- G02F1/133509—Filters, e.g. light shielding masks
- G02F1/133514—Colour filters
- G02F1/133516—Methods for their manufacture, e.g. printing, electro-deposition or photolithography
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2022—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure
- G03F7/203—Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure comprising an imagewise exposure to electromagnetic radiation or corpuscular radiation
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
- G03F7/70466—Multiple exposures, e.g. combination of fine and coarse exposures, double patterning or multiple exposures for printing a single feature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/133388—Constructional arrangements; Manufacturing methods with constructional differences between the display region and the peripheral region
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Optics & Photonics (AREA)
- Mathematical Physics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Optical Filters (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
図1は、本発明の各実施形態に共通する基本的な露光方法を示す平面図である。図2は、本発明の各実施形態に共通する基本的なフォトマスクの開口の配置を示す平面図であって、図1のA部分の拡大図である。図1において、右下がりのハッチングで示す領域は表示画素が配列される表示領域であり、右上がりのハッチングで示す領域は後述する第1の非表示領域である。また、以降の各図面においては、説明の便宜上、互いに直交するX方向及びY方向を用いて基板の向きを特定する。具体的には、X方向は、表示領域の対向する短辺に平行な方向であり、Y方向は、表示領域の対向するに長辺に平行な方向である(以下の図においても同様である)。
図6は、第1の実施形態に係るカラーフィルタ基板の一部の断面図であり、より特定的には、(a)は、図5のI−Iラインに沿う部分及びII―IIに沿う部分に相当する断面図であり、(b)は、図5のIII−IIIラインに沿う部分に相当する断面図である。
図8は、第2の実施形態に係るカラーフィルタ基板上のPS及びダミーPSの断面図である。より特定的には、(a)は、図5のI−Iラインに沿う部分に相当する断面図であり、(b)は、図5のII―IIに沿う部分に相当する断面図であり、(c)は、図5のIII−IIIラインに沿う部分に相当する断面図である。
20 基板
30 フォトマスク
31、32 開口の配列
40 表示領域
51 第1の非表示領域
52 第2の非表示領域
61 ブラックマトリクス
62 着色層
63 ITO膜
71、72 ダミーPS
81 第1のレイヤー
82 第2のレイヤー
83 第3のレイヤー
84 第4のレイヤー
90 PS
91〜94 レイヤー
Claims (2)
- 第1の方向に延びる一対の辺と前記第1の方向と直交する第2の方向に延びる一対の辺とを有する矩形状の複数の表示領域と、前記第1の方向の辺の各々に沿う一対の第1の非表示領域と、前記第2の方向の辺の各々に沿う一対の第2の非表示領域とを有し、前記表示領域に複数の着色画素及び複数のフォトスペーサー(PS)が設けられ、前記第1及び第2の非表示領域の各々の、少なくとも前記複数の表示領域間の各領域に複数のダミーフォトスペーサー(ダミーPS)が設けられるカラーフィルタ基板の露光方法であって、
フォトレジストを塗布した基板を前記第1の方向に搬送しながら、間欠的に複数回の露光を行い、前記第1の非表示領域に第1のダミーPSを構成する第1のレイヤーを形成する工程と、
フォトレジストを塗布した基板を前記第2の方向に搬送しながら、間欠的に複数回の露光を行い、前記第2の非表示領域に第2のダミーPSを構成する第2のレイヤーを形成する工程とを備え、
前記第1のレイヤーを形成する工程と、前記第2のレイヤーを形成する工程とを任意の順序で行い、
前記第1のレイヤーと前記第2のレイヤーとを、前記着色画素を形成する材料とは異なる材料により形成する、カラーフィルタ基板の露光方法。 - 第1の方向に延びる一対の辺と前記第1の方向と直交する第2の方向に延びる一対の辺とを有する矩形状の複数の表示領域と、前記第1の方向の辺の各々に沿う一対の第1の非表示領域と、前記第2の方向の辺の各々に沿う一対の第2の非表示領域とを有し、前記表示領域に複数の着色画素及び複数のフォトスペーサー(PS)が設けられ、前記第1及び第2の非表示領域の各々の、少なくとも前記複数の表示領域間の各領域に複数のダミーフォトスペーサー(ダミーPS)が設けられるカラーフィルタ基板の露光方法であって、
第1の色のフォトレジストを塗布した基板を前記第1の方向に搬送しながら、間欠的に複数回の露光を行い、前記表示領域内に第1の色の着色画素を形成すると共に、前記第1の非表示領域内に前記第1の色の着色画素を形成する材料と同一材料からなり、第1のダミーPSを構成する第1のレイヤーを形成する工程と、
第2の色のフォトレジストを塗布した基板を前記第2の方向に搬送しながら、間欠的に複数回の露光を行い、前記表示領域内に第2の色の着色画素を形成すると共に、前記第2の非表示領域内に前記第2の色の着色画素を形成する材料と同一材料からなり、第2のダミーPSを構成する第2のレイヤーを形成する工程と、
第3の色のフォトレジストを塗布した基板を前記第1または前記第2の方向に搬送しながら、間欠的に複数回の露光を行い、前記表示領域に第3の色の着色画素を形成する工程と、
フォトレジストを塗布した基板に対して1回の露光を行い、前記第1の非表示領域内の第1のレイヤー上に前記第1のダミーPSを構成する第3のレイヤーを形成すると共に、前記第2の非表示領域内の第2のレイヤー上に前記第2のダミーPSを構成する第4のレイヤーを形成する工程とを備え、
前記第1の色の着色画素及び前記第1のレイヤーを形成する工程と、前記第2の色の着色画素及び前記第2のレイヤーを形成する工程と、前記第3の色の着色画素を形成する工程とを任意の順序で行い、
前記第3及び第4のレイヤーを、前記着色画素を形成する材料とは異なる材料により形成する、カラーフィルタ基板の露光方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2010008534A JP5549233B2 (ja) | 2010-01-18 | 2010-01-18 | カラーフィルタ基板の露光方法 |
KR1020127019753A KR20120107124A (ko) | 2010-01-18 | 2011-01-07 | 컬러 필터 기판의 노광 방법 |
CN2011800057080A CN102713694A (zh) | 2010-01-18 | 2011-01-07 | 彩色滤光片基板的曝光方法 |
PCT/JP2011/000049 WO2011086882A1 (ja) | 2010-01-18 | 2011-01-07 | カラーフィルタ基板の露光方法 |
US13/521,963 US8908302B2 (en) | 2010-01-18 | 2011-01-07 | Exposure method for color filter substrate |
TW100101570A TWI514015B (zh) | 2010-01-18 | 2011-01-17 | 彩色濾光片基板之曝光方法 |
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JP2010008534A JP5549233B2 (ja) | 2010-01-18 | 2010-01-18 | カラーフィルタ基板の露光方法 |
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JP2011145630A JP2011145630A (ja) | 2011-07-28 |
JP5549233B2 true JP5549233B2 (ja) | 2014-07-16 |
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US (1) | US8908302B2 (ja) |
JP (1) | JP5549233B2 (ja) |
KR (1) | KR20120107124A (ja) |
CN (1) | CN102713694A (ja) |
TW (1) | TWI514015B (ja) |
WO (1) | WO2011086882A1 (ja) |
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CN106573454B (zh) | 2014-07-09 | 2018-09-18 | 三菱瓦斯化学株式会社 | 合成树脂叠层体 |
TW201603249A (zh) * | 2014-07-14 | 2016-01-16 | 元太科技工業股份有限公司 | 電路保護結構與具有電路保護結構的顯示裝置 |
US10634602B2 (en) | 2015-06-12 | 2020-04-28 | Cytochip Inc. | Fluidic cartridge for cytometry and additional analysis |
US11491487B2 (en) | 2017-10-23 | 2022-11-08 | Cytochip Inc. | Devices and methods for measuring analytes and target particles |
KR20210157939A (ko) * | 2020-06-22 | 2021-12-30 | 삼성디스플레이 주식회사 | 표시 장치 및 표시 장치의 제조 방법 |
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AU5066799A (en) * | 1998-08-24 | 2000-03-14 | Nikon Corporation | Method and apparatus for scanning exposure, and micro device |
JP4428792B2 (ja) * | 2000-03-06 | 2010-03-10 | キヤノン株式会社 | 露光装置 |
CN2715192Y (zh) * | 2004-03-27 | 2005-08-03 | 鸿富锦精密工业(深圳)有限公司 | 液晶显示面板 |
JP4777682B2 (ja) | 2005-04-08 | 2011-09-21 | 株式会社ブイ・テクノロジー | スキャン露光装置 |
JP5382899B2 (ja) | 2005-10-25 | 2014-01-08 | 株式会社ブイ・テクノロジー | 露光装置 |
JP4957020B2 (ja) * | 2006-03-07 | 2012-06-20 | 凸版印刷株式会社 | 液晶表示装置用カラーフィルタの製造方法及び液晶表示装置用カラーフィルタ |
JP4764237B2 (ja) * | 2006-04-11 | 2011-08-31 | 株式会社ブイ・テクノロジー | 露光装置 |
US8451426B2 (en) * | 2006-06-07 | 2013-05-28 | V Technology Co., Ltd. | Exposure method and exposure apparatus |
JP2008158138A (ja) * | 2006-12-22 | 2008-07-10 | Dainippon Printing Co Ltd | カラーフィルタ基板および液晶表示装置 |
JP2009116068A (ja) * | 2007-11-07 | 2009-05-28 | Toppan Printing Co Ltd | カラーフィルタの製造方法及びカラーフィルタ |
TWI468748B (zh) * | 2009-04-28 | 2015-01-11 | Toppan Printing Co Ltd | 彩色濾光片、液晶顯示裝置、彩色濾光片之製造方法 |
CN101609227B (zh) * | 2009-07-08 | 2011-05-25 | 友达光电股份有限公司 | 彩色滤光层及其制造方法 |
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- 2010-01-18 JP JP2010008534A patent/JP5549233B2/ja active Active
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2011
- 2011-01-07 US US13/521,963 patent/US8908302B2/en not_active Expired - Fee Related
- 2011-01-07 KR KR1020127019753A patent/KR20120107124A/ko not_active Application Discontinuation
- 2011-01-07 WO PCT/JP2011/000049 patent/WO2011086882A1/ja active Application Filing
- 2011-01-07 CN CN2011800057080A patent/CN102713694A/zh active Pending
- 2011-01-17 TW TW100101570A patent/TWI514015B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
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US20120287525A1 (en) | 2012-11-15 |
JP2011145630A (ja) | 2011-07-28 |
CN102713694A (zh) | 2012-10-03 |
US8908302B2 (en) | 2014-12-09 |
TW201232061A (en) | 2012-08-01 |
KR20120107124A (ko) | 2012-09-28 |
TWI514015B (zh) | 2015-12-21 |
WO2011086882A1 (ja) | 2011-07-21 |
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