JP5527941B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP5527941B2 JP5527941B2 JP2008111151A JP2008111151A JP5527941B2 JP 5527941 B2 JP5527941 B2 JP 5527941B2 JP 2008111151 A JP2008111151 A JP 2008111151A JP 2008111151 A JP2008111151 A JP 2008111151A JP 5527941 B2 JP5527941 B2 JP 5527941B2
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- layer
- single crystal
- semiconductor layer
- film
- semiconductor
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- 239000003504 photosensitizing agent Substances 0.000 description 1
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- 238000002294 plasma sputter deposition Methods 0.000 description 1
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1237—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a different composition, shape, layout or thickness of the gate insulator in different devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1233—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with different thicknesses of the active layer in different devices
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Description
本発明の半導体装置の製造方法について、図1〜図6、図9、及び図14を参照して説明する。
本実施の形態においては、本発明にしたがって実施の形態1とは異なった態様の半導体装置を作製する例につき説明する。
本実施の形態では、膜厚の異なる単結晶半導体層を支持基板に設ける他の方法を示す。
本発明の半導体装置においては、支持基板101上に膜厚の薄い単結晶半導体層150と、膜厚の厚い単結晶半導体層160とを貼付によって形成することを特徴としているが、各単結晶半導体層の最表面には、イオン照射工程による分離面の一部が残留している場合がある(図17(A)参照)。この分離面51、52は、通常の単結晶半導体層の表面状態に比べて平坦性に劣るため、以降の工程での不良を生じないために表面状態の改善が必要となる。
本発明を適用して、様々な表示機能を有する半導体装置を作製することができる。即ち、それら表示機能を有する半導体装置を表示部に組み込んだ様々な電子機器に本発明を適用できる。本実施の形態では、高性能でかつ高信頼性を付与することを目的とした表示機能を有する半導体装置を有する電子機器の例を説明する。
本発明によって形成される表示素子を有する半導体装置によって、テレビジョン装置を完成させることができる。高性能で、かつ高信頼性を付与することを目的としたテレビジョン装置の例を説明する。
Claims (3)
- 第1の回路群及び第2の回路群を有し、
前記第1の回路群は、
第1の単結晶半導体層と、
前記第1の単結晶半導体層の側面に接する領域を有する、酸化物を有する第1の層と、
前記第1の単結晶半導体層の上方、及び前記酸化物を有する第1の層の上方の、第1のゲート絶縁層と、
前記第1の単結晶半導体層と重なる領域を有する、第1のゲート電極とを有し、
前記第2の回路群は、
第2の単結晶半導体層と、
前記第2の単結晶半導体層の側面に接する領域を有する、酸化物を有する第2の層と、
前記第2の単結晶半導体層の上方、及び前記酸化物を有する第2の層の上方の、第2のゲート絶縁層と、
前記第2の単結晶半導体層と重なる領域を有する、第2のゲート電極とを有し、
前記酸化物を有する第1の層は、フッ素又は塩素を有する領域を有し、
前記酸化物を有する第2の層は、フッ素又は塩素を有する領域を有し
前記第1の単結晶半導体層は、前記第2の単結晶半導体層よりも薄いことを特徴とする半導体装置。 - 第1の回路群、第2の回路群、及び第3の回路群を有し、
前記第1の回路群は、
第1の単結晶半導体層と、
前記第1の単結晶半導体層の側面に接する領域を有する、酸化物を有する第1の層と、
前記第1の単結晶半導体層の上方、及び前記酸化物を有する第1の層の上方の、第1のゲート絶縁層と、
前記第1の単結晶半導体層と重なる領域を有する、第1のゲート電極とを有し、
前記第2の回路群は、
第2の単結晶半導体層と、
前記第2の単結晶半導体層の側面に接する領域を有する、酸化物を有する第2の層と、
前記第2の単結晶半導体層の上方、及び前記酸化物を有する第2の層の上方の、第2のゲート絶縁層と、
前記第2の単結晶半導体層と重なる領域を有する、第2のゲート電極とを有し、
前記第3の回路群は、
非晶質領域又は多結晶領域を有する第3の半導体層と、
前記第3の半導体層の側面に接する領域を有する、酸化物を有する第3の層と、
前記第3の半導体層の上方、及び前記酸化物を有する第3の層の上方の、第3のゲート絶縁層と、
前記第3の半導体層と重なる領域を有する、第3のゲート電極とを有し、
前記酸化物を有する第1の層は、フッ素又は塩素を有する領域を有し、
前記酸化物を有する第2の層は、フッ素又は塩素を有する領域を有し、
前記第1の単結晶半導体層は、前記第2の単結晶半導体層よりも薄いことを特徴とする半導体装置。 - 請求項1又は請求項2において、
前記第1のゲート絶縁層は、前記第2のゲート絶縁層よりも薄いことを特徴とする半導体装置。
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US8581260B2 (en) * | 2007-02-22 | 2013-11-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device including a memory |
US8736587B2 (en) * | 2008-07-10 | 2014-05-27 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
TWI654689B (zh) | 2008-12-26 | 2019-03-21 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
JP5740132B2 (ja) | 2009-10-26 | 2015-06-24 | 株式会社半導体エネルギー研究所 | 表示装置及び半導体装置 |
US8673426B2 (en) * | 2011-06-29 | 2014-03-18 | Semiconductor Energy Laboratory Co., Ltd. | Driver circuit, method of manufacturing the driver circuit, and display device including the driver circuit |
FR3037438B1 (fr) * | 2015-06-09 | 2017-06-16 | Soitec Silicon On Insulator | Procede de fabrication d'un element semi-conducteur comprenant une couche de piegeage de charges |
FR3058561B1 (fr) | 2016-11-04 | 2018-11-02 | Soitec | Procede de fabrication d'un element semi-conducteur comprenant un substrat hautement resistif |
JP6887307B2 (ja) * | 2017-05-19 | 2021-06-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
CN107845646A (zh) * | 2017-10-25 | 2018-03-27 | 上海中航光电子有限公司 | 一种阵列基板及其制作方法、显示面板和显示装置 |
WO2019087937A1 (ja) * | 2017-11-02 | 2019-05-09 | 東レ株式会社 | 集積回路およびその製造方法ならびにそれを用いた無線通信装置 |
CN110620120B (zh) * | 2019-09-25 | 2022-07-29 | 福州京东方光电科技有限公司 | 阵列基板及其制作方法、显示装置 |
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