JP5483620B2 - アクチュエータ - Google Patents
アクチュエータ Download PDFInfo
- Publication number
- JP5483620B2 JP5483620B2 JP2011159587A JP2011159587A JP5483620B2 JP 5483620 B2 JP5483620 B2 JP 5483620B2 JP 2011159587 A JP2011159587 A JP 2011159587A JP 2011159587 A JP2011159587 A JP 2011159587A JP 5483620 B2 JP5483620 B2 JP 5483620B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- fixed
- fixed electrode
- movable electrode
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Micromachines (AREA)
Description
Claims (1)
- 基板の上に離間して配列された4つ以上の固定電極と、
隣り合う前記固定電極の間に各々配置され、少なくとも一端がばね部で支持されてとなり合う前記固定電極の間に入り込んで前記基板の法線方向に変位可能とされてとなり合う前記固定電極に接触しない範囲の幅とされた複数の櫛歯部を備えた可動電極と
を少なくとも備え、
前記固定電極は、各々異なる高さに形成され、
前記可動電極は、前記固定電極に電圧を印加することで発生する静電引力により変位することを特徴とするアクチュエータ。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011159587A JP5483620B2 (ja) | 2011-07-21 | 2011-07-21 | アクチュエータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2011159587A JP5483620B2 (ja) | 2011-07-21 | 2011-07-21 | アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013027143A JP2013027143A (ja) | 2013-02-04 |
JP5483620B2 true JP5483620B2 (ja) | 2014-05-07 |
Family
ID=47784927
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011159587A Expired - Fee Related JP5483620B2 (ja) | 2011-07-21 | 2011-07-21 | アクチュエータ |
Country Status (1)
Country | Link |
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JP (1) | JP5483620B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6653902B2 (ja) * | 2013-08-08 | 2020-02-26 | 国立大学法人静岡大学 | アクチュエータ |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005283678A (ja) * | 2004-03-26 | 2005-10-13 | Miyota Kk | 静電型アクチュエータ及びその製造方法 |
JP4385937B2 (ja) * | 2004-12-15 | 2009-12-16 | セイコーエプソン株式会社 | アクチュエータ |
JP4626596B2 (ja) * | 2006-09-26 | 2011-02-09 | パナソニック電工株式会社 | 可動構造体及びそれを備えた光学素子 |
-
2011
- 2011-07-21 JP JP2011159587A patent/JP5483620B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
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JP2013027143A (ja) | 2013-02-04 |
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