JP5474498B2 - 塗布接着剤の検査方法及び検査装置 - Google Patents
塗布接着剤の検査方法及び検査装置 Download PDFInfo
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- JP5474498B2 JP5474498B2 JP2009257975A JP2009257975A JP5474498B2 JP 5474498 B2 JP5474498 B2 JP 5474498B2 JP 2009257975 A JP2009257975 A JP 2009257975A JP 2009257975 A JP2009257975 A JP 2009257975A JP 5474498 B2 JP5474498 B2 JP 5474498B2
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- 239000000853 adhesive Substances 0.000 title claims description 127
- 230000001070 adhesive effect Effects 0.000 title claims description 127
- 238000007689 inspection Methods 0.000 title claims description 34
- 238000000034 method Methods 0.000 title claims description 21
- 239000011248 coating agent Substances 0.000 title claims description 16
- 238000000576 coating method Methods 0.000 title claims description 16
- 239000000758 substrate Substances 0.000 claims description 109
- 238000001514 detection method Methods 0.000 claims description 25
- 238000005452 bending Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 9
- 230000001788 irregular Effects 0.000 description 5
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000003384 imaging method Methods 0.000 description 3
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
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- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Description
2: 保持部
3: 光照射装置
4: 光検出装置
10: 制御装置
I1’: 進入光
I1,I2,I3:入射光
L: 接着剤
R1: 正反射光
R10,R20:正反射光
R11,R21:反射光
S: 基板
Claims (4)
- 基板の粗面に塗布された透明な接着剤の検査方法であって、接着剤に入光した際に、基板の粗面である基板表面に対して垂直に近い側へ角度が変化するように屈曲する方向の光を、接着剤が塗布されているべき位置に向けて、前記基板表面に沿う方向から前記照射して、その光の反射光を接着剤塗布箇所の上方で受光し、受光した光の強度分布に基づいて基板上の接着剤の位置情報を取得することを特徴とする塗布接着剤の検査方法。
- 基板の接着剤塗布面を囲む位置から光照射を行なうことを特徴とする請求項1に記載の
塗布接着剤の検査方法。 - 基板の粗面に塗布された透明な接着剤の検査装置であって、
基板を保持する保持部と、
前記保持部上の接着剤に入光した際に、基板の粗面である基板表面に対して垂直に近い側へ角度が変化するように屈曲する方向の光を、接着剤が塗布されているべき位置に向けて、前記基板表面に沿う方向から照射する光照射装置と、
光照射装置から照射された光の反射光を接着剤塗布箇所の上方で受光し、受光した光の強度分布情報を出力する光検出装置とを備えたことを特徴とする塗布接着剤の検査装置。 - 前記光照射装置が、前記基板の一つの辺に沿って配設される湾曲状フレームと、前記一つの辺に相対向する他の辺に沿って配設される湾曲状フレームとを備え、湾曲状フレームには、所定ピッチで配設される複数個の光源を有し、各光源からの光が、板の粗面に対して垂直に近い側へ角度が変化するように屈曲する方向の光であることを特徴とする請求項3に記載の塗布接着剤の検査装置。
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JP2009257975A JP5474498B2 (ja) | 2009-11-11 | 2009-11-11 | 塗布接着剤の検査方法及び検査装置 |
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JP2009257975A JP5474498B2 (ja) | 2009-11-11 | 2009-11-11 | 塗布接着剤の検査方法及び検査装置 |
Publications (2)
Publication Number | Publication Date |
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JP2011102759A JP2011102759A (ja) | 2011-05-26 |
JP5474498B2 true JP5474498B2 (ja) | 2014-04-16 |
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JP2009257975A Active JP5474498B2 (ja) | 2009-11-11 | 2009-11-11 | 塗布接着剤の検査方法及び検査装置 |
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JP (1) | JP5474498B2 (ja) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06334319A (ja) * | 1993-05-27 | 1994-12-02 | Matsushita Electric Ind Co Ltd | 接着剤塗布装置 |
JP2000275186A (ja) * | 1999-03-26 | 2000-10-06 | Toppan Forms Co Ltd | 糊検査装置及び方法 |
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