JP5472341B2 - Plate material dividing apparatus and plate material dividing method - Google Patents

Description

この発明は、板材を割って分割する技術に関する。   The present invention relates to a technique for splitting a plate material.

サファイア基板など、硬度が高くかつ脆性を有する板材の分割は、例えば、次のようにしてなされる。   The division of a plate material having high hardness and brittleness such as a sapphire substrate is performed as follows, for example.

まず、板材の一主面側に分割溝を形成する。そして、一対のダイ上に板材を載置する。この際、分割溝が一対のダイ間で当該ダイに向くようにする。そして、ダイの反対側から、刃を板材の分割溝に沿った位置に押付けることで、基板に負荷を加えて前記分割溝で板材を割る。   First, a dividing groove is formed on one main surface side of the plate material. And a board | plate material is mounted on a pair of die | dye. At this time, the dividing groove is set to face the die between the pair of dies. Then, by pressing the blade from the opposite side of the die to a position along the dividing groove of the plate material, a load is applied to the substrate and the plate material is divided by the dividing groove.

なお、サファイア基板等にレーザー光で分割用の起点を形成して、サファイア基板を割る技術は、例えば、特許文献１に開示されている。   In addition, the technique which forms the starting point for a division | segmentation with a laser beam on a sapphire board | substrate etc., and breaks a sapphire board | substrate is disclosed by patent document 1, for example.

国際公開第２００６／０６２０１７号パンフレットInternational Publication No. 2006/062017 Pamphlet

しかしながら、板材やダイを正確に平面とすることは困難であり、また、刃とダイとを正確に平行な位置関係とすることは困難である。例えば、一般的には、板材やダイの平面度は５μｍ程度であり、また、刃とダイとの平行度も５μｍ程度以上ある。このため、ダイや刃を板材に押し当てた際に、それらのダイや刃が板材に接触しない部分が生じ、任意の数点でのみ接触する。そして、分割溝の応力が最大となる溝先端部のうち、刃と板材との接点が２つのダイと板材との接点間（の中央）に無い部分では、分割方向の応力が小さくなってしまう。そのような応力状態でも、分割するのに十分な応力を作用させるためには、刃やダイに大きな負荷を加える必要がある。   However, it is difficult to make the plate material and the die accurately flat, and it is difficult to make the blade and the die accurately parallel to each other. For example, generally, the flatness of the plate material or die is about 5 μm, and the parallelism between the blade and the die is about 5 μm or more. For this reason, when the die or blade is pressed against the plate material, a portion where the die or blade does not contact the plate material is generated, and contact is made only at an arbitrary number of points. And, in the portion where the contact between the blade and the plate material is not between the contact points of the two dies and the plate material (in the center) among the groove tip portions where the stress of the divided groove is maximum, the stress in the division direction becomes small. . Even in such a stress state, it is necessary to apply a large load to the blade or the die in order to exert a sufficient stress to divide.

そこで、本発明は、より小さな負荷で板材を割って分割できるようにすることを目的とする。   Then, an object of this invention is to enable it to divide | segment a board | plate material with a smaller load.

上記課題を解決するため、第１の態様に係る板材分割装置は、板材に形成された直線状分割ライン部に沿って前記板材を分割する板材分割装置であって、前記直線状分割ライン部の延在方向に沿って前記板材の主面に当接可能な直線状当接部分を有し、前記直線状当接部分がその延在方向に沿って複数箇所で、前記板材と略直交する方向に沿って変位可能で、かつ、前記板材に向けてその変位量に応じた付勢力で付勢される変位可能当接機構部と、前記板材を分割する力として、前記直線状当接部分を前記板材の主面に押付ける力を作用させる分割力印加機構部と、を備えたものである。   In order to solve the above-described problem, a plate material dividing device according to a first aspect is a plate material dividing device that divides the plate material along a linear dividing line portion formed on the plate material, and includes the linear dividing line portion. A linear contact portion that can contact the main surface of the plate material along the extending direction, and the linear contact portion is in a plurality of locations along the extending direction and substantially orthogonal to the plate material. And a displaceable abutment mechanism that is urged toward the plate by an urging force corresponding to the amount of displacement, and a force that divides the plate as the linear abutment portion. And a splitting force applying mechanism for applying a pressing force to the main surface of the plate material.

また、板材分割装置は、前記板材のうち前記直線状分割ライン部の側方部分を固定支持する板材固定部をさらに備え、前記変位可能当接機構部は、前記板材固定部による固定支持部分から前記直線状分割ライン部を挟んで反対側で前記板材の主面に当接可能に配設され、前記分割力印加機構部は、前記板材固定部及び前記変位可能当接機構部のうち少なくとも一方を、前記変位可能当接機構部を前記板材に押付ける方向に移動させるものである。   Further, the plate material dividing device further includes a plate material fixing portion that fixes and supports a side portion of the linear dividing line portion of the plate material, and the displaceable contact mechanism portion is provided from a fixed support portion by the plate material fixing portion. It is arranged to be able to contact the main surface of the plate material on the opposite side across the linear dividing line portion, and the dividing force application mechanism portion is at least one of the plate material fixing portion and the displaceable contact mechanism portion. Is moved in a direction in which the displaceable contact mechanism is pressed against the plate member.

第２の態様に係る板材分割装置は、前記変位可能当接機構部の前記直線状当接部分は、その延在方向に沿って設けられた複数の分割当接部分を有し、前記各分割当接部分がそれぞれ独立して前記板材と略直交する方向に変位可能で、かつ、独立して変位量に応じた付勢力で付勢されるものである。   In the plate material dividing apparatus according to the second aspect, the linear contact portion of the displaceable contact mechanism portion includes a plurality of divided contact portions provided along the extending direction, and each of the divided contact portions is provided. The contact portions can be independently displaced in a direction substantially perpendicular to the plate material, and are independently urged by an urging force corresponding to the amount of displacement.

第３の態様に係る板材分割装置は、前記変位可能当接機構部が、前記直線状当接部分の延在方向に沿って複数箇所で、その直線状当接部分の変位量に応じた物理量を検出する検出部を有するものである。   In the plate material splitting device according to the third aspect, the displaceable contact mechanism section has a physical quantity corresponding to the amount of displacement of the linear contact portion at a plurality of locations along the extending direction of the linear contact portion. It has a detection part which detects.

第４の態様に係る板材分割装置は、前記変位可能当接機構部が、前記直線状分割ライン部の延在方向に沿って配設された複数の分割当接部と、前記各分割当接部を前記板材と略直交する方向に沿って変位可能に支持する分割支持部と、前記各分割当接部を前記板材に向けて付勢する複数の分割付勢部を有するものである。   In the plate material splitting device according to the fourth aspect, the displaceable contact mechanism portion includes a plurality of split contact portions disposed along an extending direction of the linear split line portion, and each of the split contact portions. And a plurality of divided urging portions for urging the divided abutting portions toward the plate member. The divided support portions support the portion so as to be displaceable along a direction substantially orthogonal to the plate member.

この場合、第５の態様のように、前記各分割付勢部は、バネ又は圧縮剛性を呈する部材であってもよい。   In this case, as in the fifth aspect, each of the divided urging portions may be a spring or a member exhibiting compression rigidity.

第６の態様に係る板材分割装置は、前記変位可能当接機構部を、固定端部と当接端部との間に形成した凹部形成部分で前記当接端部を前記固定端部に対して変位可能かつ付勢可能に支持した一体型分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設した構成としたものである。   In the plate separating apparatus according to the sixth aspect, the displaceable contact mechanism portion is a recessed portion formed between the fixed end portion and the contact end portion. Thus, a plurality of integral divided contact portions supported so as to be displaceable and biasable are arranged along the extending direction of the linear divided line portion.

第７の態様に係る板材分割装置は、前記変位可能当接機構部を、弾性変形可能な材料で形成された弾性分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設した構成としたものである。   In the plate material dividing device according to the seventh aspect, the displaceable contact mechanism portion includes a plurality of elastic division contact portions formed of an elastically deformable material along the extending direction of the linear division line portion. The arrangement is arranged.

第８の態様に係る板材分割装置は、前記変位可能当接機構部を、複数の平行平板機構部を、前記直線状分割ライン部の延在方向に沿って配設した構成としたものである。   In the plate material dividing apparatus according to the eighth aspect, the displaceable contact mechanism portion is configured such that a plurality of parallel plate mechanism portions are arranged along the extending direction of the linear dividing line portion. .

第９の態様に係る板材分割方法は、板材に形成された直線状分割ライン部に沿って前記板材を分割する板材分割方法であって、前記板材のうち前記直線状分割ライン部の側方部分を固定支持する工程と、分割用の当接部材を、前記板材の固定支持部分から前記直線状分割ライン部を挟んで反対側で前記直線状分割ライン部の延在方向に沿って前記板材の主面に当接させることで、前記当接部材のうち前記板材との当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所で前記板材と略直交する方向に沿って変位させると共に、その当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所でそれぞれの変位量に応じた付勢力で付勢する工程と、前記当接部材を前記板材の主面に押し当てることで、前記板材を前記直線状分割ライン部で割って分割する工程とを備えたものである。   A plate material dividing method according to a ninth aspect is a plate material dividing method for dividing the plate material along a linear dividing line portion formed on the plate material, and a side portion of the linear dividing line portion of the plate material. And a step of fixing and supporting the dividing contact member along the extending direction of the linear dividing line portion on the opposite side across the linear dividing line portion from the fixing support portion of the plate material. By abutting against the main surface, the abutting portion of the abutting member with the plate material is displaced along a direction substantially orthogonal to the plate material at a plurality of locations along the extending direction of the linear dividing line portion. And a step of urging the abutting portion with a urging force according to each displacement amount at a plurality of locations along the extending direction of the linear dividing line portion, and the abutting member as a main surface of the plate member By pressing against the plate material, It is obtained by a step of dividing, divided by emission portion.

第１の態様に係る板材分割装置によると、分割力印加機構部の分割力を作用させると、直線状当接部分は、その延在方向に沿って複数箇所で、板材の平面度や、板材と板材当接部材との平行度等に応じて変位すると共に、その変位量に応じた付勢力で板材に向けて付勢される。このため、直線状当接部分と板材の一主面とを直線状当接部分の延在方向に沿ってなるべく均一な力で接触させることができる。これにより、直線状分割ライン部の延在方向に沿って分割荷重分布をなるべく均一にすることができ、より小さな力で板材を割って分割できる。   According to the plate material dividing apparatus according to the first aspect, when the dividing force of the dividing force application mechanism portion is applied, the linear contact portion has a plurality of locations along the extending direction, and the flatness of the plate material or the plate material And the plate material abutting member are displaced according to the parallelism and the like, and are urged toward the plate material by an urging force according to the amount of displacement. For this reason, a linear contact part and one main surface of a board | plate material can be contacted by the force as uniform as possible along the extension direction of a linear contact part. Thereby, the division load distribution can be made as uniform as possible along the extending direction of the linear division line portion, and the plate material can be divided and divided with a smaller force.

また、第２の態様によると、前記変位可能当接機構部の前記直線状当接部分は、板材の平面度や、板材と板材当接部材との平行度等に応じて、独立して変位し、また、独立して変位量に応じた付勢力で付勢される。従って、直線状当接部分と板材の主面とを直線状分割ライン部の延在方向に沿ってより均一な力で接触させることができる。これにより、より小さな力で板材を割って分割できる。   According to the second aspect, the linear contact portion of the displaceable contact mechanism portion is independently displaced according to the flatness of the plate material, the parallelism between the plate material and the plate material contact member, or the like. In addition, the power is independently biased with a biasing force corresponding to the amount of displacement. Therefore, the linear contact portion and the main surface of the plate material can be brought into contact with each other with a more uniform force along the extending direction of the linear dividing line portion. Thereby, a board | plate material can be broken and divided | segmented with a smaller force.

また、第３の態様によると、前記変位可能当接機構部は、前記直線状当接部分の延在方向に沿って複数箇所で、その直線状当接部分の変位量に応じた物理量を検出する検出部を有するため、板材を分割する際の状況等を検出することができる。   Further, according to the third aspect, the displaceable contact mechanism section detects a physical quantity corresponding to the displacement amount of the linear contact portion at a plurality of locations along the extending direction of the linear contact portion. Since it has the detection part which performs, the condition at the time of dividing | segmenting a board | plate material etc. is detectable.

第４の態様によると、前記変位可能当接機構部は、前記直線状分割ライン部の延在方向に沿って分割された複数の分割当接部と、前記各分割当接部を前記板材と略直交する方向に沿って変位可能に支持する分割支持部と、前記各分割当接部を前記板材に向けて付勢する複数のバネ部材を有しているので、各分割当接部を独立して変位させて独立して付勢することができる。また、各分割当接部が変位する方向及び付勢される方向を、板材と略直交する方向になるべく一致させることができる。   According to a fourth aspect, the displaceable contact mechanism portion includes a plurality of divided contact portions divided along the extending direction of the linear divided line portion, and the divided contact portions as the plate material. Since each of the divided contact portions is supported in such a manner as to be displaceable along a substantially orthogonal direction and a plurality of spring members that urge each of the divided contact portions toward the plate member, And can be biased independently. In addition, the direction in which each divided contact portion is displaced and the direction in which it is urged can be matched as much as possible in a direction substantially orthogonal to the plate material.

第６の態様によると、固定端部と当接端部との間に形成した凹部形成部分で、前記当接端部を前記固定端部に対して変位可能かつ付勢可能に支持した一体型分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設しているため、その製造を容易に行える。   According to the sixth aspect, the recessed portion forming portion formed between the fixed end portion and the contact end portion supports the contact end portion so as to be displaceable and biasable with respect to the fixed end portion. Since a plurality of the division contact portions are arranged along the extending direction of the linear division line portion, the manufacture thereof can be easily performed.

第７の態様によると、前記変位可能当接機構部は、弾性変形可能な弾性分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設した構成であるため、その製造を容易に行える。   According to the seventh aspect, the displaceable contact mechanism portion has a configuration in which a plurality of elastically split contact portions that can be elastically deformed are disposed along the extending direction of the linear split line portion. Easy to manufacture.

第８の態様によれば、複数の平行平板機構部を、前記直線状分割ライン部の延在方向に沿って配設した構成であるため、板材との当接部分を板材に対して略直交する方向に比較的正確に変位させることができる。   According to the eighth aspect, since the plurality of parallel flat plate mechanism portions are arranged along the extending direction of the linear dividing line portion, the contact portion with the plate material is substantially orthogonal to the plate material. It can be displaced relatively accurately in the direction of movement.

第９の態様に係る板材分割方法によると、分割用の当接部材を前記直線状分割ライン部の延在方向に沿って前記板材の主面に当接させることで、前記当接部材のうち前記板材との当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所で前記板材と略直交する方向に沿って変位させると共に、その当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所でそれぞれの変位量に応じた付勢力で付勢している。そして、前記当接部材を前記板材の主面に押し当てることで、前記板材を前記直線状分割ライン部で割って分割するため、直線状当接部分と板材の一主面とを直線状当接部分の延在方向に沿ってなるべく均一な力で接触させることができる。これにより、直線状分割ライン部の延在方向に沿って分割荷重分布をなるべく均一にすることができ、より小さな力で板材を割って分割できる。   According to the plate member dividing method according to the ninth aspect, by bringing the dividing contact member into contact with the main surface of the plate member along the extending direction of the linear dividing line portion, The contact portion with the plate material is displaced along a direction substantially orthogonal to the plate material at a plurality of locations along the extending direction of the linear division line portion, and the contact portion is moved along the linear division line portion. The urging force is applied at a plurality of locations along the extending direction with an urging force corresponding to each displacement amount. Then, by pressing the contact member against the main surface of the plate material, the plate material is divided by the linear dividing line portion, so that the linear contact portion and one main surface of the plate material are linearly applied. Contact can be made with as uniform force as possible along the extending direction of the contact portion. Thereby, the division load distribution can be made as uniform as possible along the extending direction of the linear division line portion, and the plate material can be divided and divided with a smaller force.

第１実施形態に係る板材分割装置を示す説明図である。It is explanatory drawing which shows the board | plate material division | segmentation apparatus which concerns on 1st Embodiment. 板材を分割する際における変位可能当接機構部と板材との当接部分を示す説明図である。It is explanatory drawing which shows the contact part of the displaceable contact mechanism part at the time of dividing | segmenting a board | plate material, and a board | plate material. 第２実施形態に係る板材分割装置の全体構成を示す説明図である。It is explanatory drawing which shows the whole structure of the board | plate material division | segmentation apparatus which concerns on 2nd Embodiment. 同上の板材分割装置の要部を示す概略斜視図である。It is a schematic perspective view which shows the principal part of a board | plate material division | segmentation apparatus same as the above. 同上の要部を示す概略側面図である。It is a schematic side view which shows the principal part same as the above. 同上の要部を示す概略正面図である。It is a schematic front view which shows the principal part same as the above. 第１変形例を示す概略斜視図である。It is a schematic perspective view which shows a 1st modification. 第２変形例を示す概略正面図である。It is a schematic front view which shows a 2nd modification. 第３変形例を示す概略正面図である。It is a schematic front view which shows a 3rd modification. 第４変形例を示す概略正面図である。It is a schematic front view which shows a 4th modification. 第５変形例を示す概略斜視図である。It is a schematic perspective view which shows a 5th modification. 第６変形例を示す概略斜視図である。It is a schematic perspective view which shows a 6th modification. 第７変形例を示す概略斜視図である。It is a schematic perspective view which shows a 7th modification. 第２実施形態に係る板材分割装置及び従来タイプの板材分割装置で板材を分割した場合の分割負荷を示す図である。It is a figure which shows the division | segmentation load at the time of dividing | segmenting a board | plate material with the board | plate material division | segmentation apparatus concerning 2nd Embodiment, and the conventional board | plate material division | segmentation apparatus. 第２実施形態に係る板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the board | plate material division | segmentation apparatus which concerns on 2nd Embodiment. 第２実施形態に係る板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the board | plate material division | segmentation apparatus which concerns on 2nd Embodiment. 第２実施形態に係る板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the board | plate material division | segmentation apparatus which concerns on 2nd Embodiment. 従来タイプの板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the conventional board | plate material division | segmentation apparatus. 従来タイプの板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the conventional board | plate material division | segmentation apparatus. 従来タイプの板材分割装置による板材の分割縁部の真直度を示す図である。It is a figure which shows the straightness of the division | segmentation edge part of the board | plate material by the conventional board | plate material division | segmentation apparatus.

｛第１実施形態｝
以下、第１実施形態に係る板材分割装置及び板材分割方法について説明する。本実施形態では、板材を分割する基本的構成について説明する。図１は板材分割装置を示す説明図であり、図２は板材を分割する際における変位可能当接機構部と板材との当接部分を示す説明図である。 {First embodiment}
Hereinafter, the plate material dividing device and the plate material dividing method according to the first embodiment will be described. In the present embodiment, a basic configuration for dividing a plate material will be described. FIG. 1 is an explanatory view showing a plate material dividing apparatus, and FIG. 2 is an explanatory view showing a contact portion between a displaceable contact mechanism portion and a plate material when the plate material is divided.

この板材分割装置２０及び板材分割方法は、板材１０に形成された直線状分割ライン部に沿って当該板材１０を割って分割するものである。   The plate material dividing device 20 and the plate material dividing method divide and divide the plate material 10 along a linear dividing line portion formed on the plate material 10.

分割対象となる板材１０は、脆性を有する板材であることが好ましい。具体的には、板材１０は、単結晶サファイア基板や単結晶ＳｉＣ基板等の単結晶基板、その他、多結晶基板を含む高脆な基板、さらには、これらの基板上に半導体でデバイスを形成した積層体であってもよい。また、形状は、略方形板状であっても、略円板状であってもよく、特に限定されない。   It is preferable that the board | plate material 10 used as a division | segmentation object is a board | plate material which has brittleness. Specifically, the plate member 10 is a single crystal substrate such as a single crystal sapphire substrate or a single crystal SiC substrate, a highly brittle substrate including a polycrystalline substrate, and a device formed of a semiconductor on these substrates. A laminated body may be sufficient. Further, the shape may be a substantially square plate shape or a substantially disk shape, and is not particularly limited.

この板材１０には、少なくとも１本の直線状分割ライン部１２が形成されている。直線状分割ライン部１２は、板材１０における他の部分よりも強度的に弱い直線状部分であり、板材１０に後述する分割力を作用させると、板材１０は、当該直線状分割ライン部１２をきっかけとして直線状に割れて分割するようになっている。このような直線状分割ライン部１２は、例えば、板材１０の主面にレーザー光を照射等することで形成された所定深さの溝であってもよく、或は、板材１０の主面に溝を形成しない程度の比較的弱い強度のレーザー光を照射等することで形成された所定深さの直線状変質部分であってもよい。   The plate member 10 is formed with at least one linear dividing line portion 12. The linear dividing line portion 12 is a linear portion that is weaker in strength than the other portions of the plate material 10, and when the dividing force described later is applied to the plate material 10, the plate material 10 causes the linear dividing line portion 12 to As a trigger, it is divided into straight lines. Such a linear dividing line portion 12 may be, for example, a groove having a predetermined depth formed by irradiating the main surface of the plate material 10 with a laser beam, or the main surface of the plate material 10. It may be a linearly altered portion having a predetermined depth formed by irradiating laser light having a relatively weak intensity that does not form a groove.

なお、板材１０に対して上記直線状分割ライン部１２が平行状に複数本或は縦横に複数本形成されていてもよい。ここでは、説明の便宜上、１本の直線状分割ライン部１２が形成されている例で説明する。   Note that a plurality of the linear dividing line portions 12 may be formed in parallel to the plate member 10 or a plurality of vertical and horizontal portions. Here, for convenience of explanation, an example in which one linear dividing line portion 12 is formed will be described.

板材分割装置２０は、変位可能当接機構部３０と、分割力印加機構部５０とを備えている。   The plate material dividing device 20 includes a displaceable contact mechanism portion 30 and a dividing force application mechanism portion 50.

変位可能当接機構部３０は、直線状分割ライン部１２の延在方向に沿って板材１０のいずれか一方の主面に当接可能な直線状当接部分３２を有している。そして、その直線状当接部分３２がその延在方向に沿って複数箇所で、板材１０と略直交する方向（板材１０の主面に対する法線方向）に沿って変位可能で、かつ、その板材１０に向けてその変位量に応じた付勢力、好ましくは、変位量に比例した付勢力でされるようになっている。この変位可能当接機構部３０のより具体的な構成については、後述する実施形態で説明する。   The displaceable contact mechanism 30 has a linear contact portion 32 that can contact any one main surface of the plate 10 along the extending direction of the linear dividing line portion 12. And the linear contact part 32 is displaceable along the direction (normal direction with respect to the main surface of the board | plate material 10) substantially orthogonal to the board | plate material 10 in several places along the extension direction, and the board | plate material An urging force corresponding to the amount of displacement, preferably an urging force proportional to the amount of displacement, is applied toward the position 10. A more specific configuration of the displaceable contact mechanism 30 will be described in an embodiment described later.

また、分割力印加機構部５０は、板材１０を分割する力として、上記直線状当接部分３２を板材１０の主面に押付ける力を作用させる。この際、分割力印加機構部５０は、変位可能当接機構部３０側を移動させても、板材１０側を移動させても、それらの双方を移動させてもよい。要するに、直線状当接部分３２を板材１０の主面に押付ける力が作用すればよい。また、電動モータ等のアクチュエータの力を受けて前記力を作用させるものであっても、人力を受けて前記力を作用させるものであってもよい。   Further, the dividing force application mechanism unit 50 applies a force for pressing the linear contact portion 32 against the main surface of the plate member 10 as a force for dividing the plate member 10. At this time, the dividing force application mechanism unit 50 may move the displaceable contact mechanism unit 30 side, move the plate member 10 side, or move both of them. In short, a force for pressing the linear contact portion 32 against the main surface of the plate material 10 may be applied. Moreover, even if it receives the force of actuators, such as an electric motor, and applies the said force, it may receive the human power and apply the said force.

この板材分割装置２０の基本的な動作を説明する。まず、上記分割力印加機構部５０により、上記分割用の当接部材である変位可能当接機構部３０の直線状当接部分３２を、直線状分割ライン部１２に沿って板材１０の主面に当接させる。この際、直線状当接部分３２は、直線状分割ライン部１２が形成された位置で板材１０に当接しても、直線状分割ライン部１２の側方位置で、板材１０に当接してもよい。要するに、板材１０のうち直線状分割ライン部１２部分で当該板材１０を割って分割する力が作用する態様であればよい。図１では前者の態様を示している。   The basic operation of the plate material dividing apparatus 20 will be described. First, the linear contact portion 32 of the displaceable contact mechanism portion 30 that is the contact member for splitting is moved along the linear split line portion 12 by the split force application mechanism portion 50. Abut. At this time, the linear contact portion 32 may contact the plate material 10 at a position where the linear division line portion 12 is formed, or may contact the plate material 10 at a side position of the linear division line portion 12. Good. In short, what is necessary is just the aspect in which the force which divides | segments and divides | segments the said board | plate material 10 in the linear division | segmentation line part 12 part among the board | plate materials 10 acts. FIG. 1 shows the former mode.

この際、板材１０の主面が理想的な平面ではなく、多少湾曲等していると、図２に示すように、直線状当接部分３２が、その延在方向に沿った複数箇所で、当該板材１０の主面の平面度に応じて、板材１０に略直交する方向で変位する。また、直線状当接部分３２のそれぞれの変位部分で、その変位量に応じた付勢力で板材１０の主面に向けて付勢される。なお、図２では理解を容易にするために２箇所での変位のみ図示している。   At this time, if the main surface of the plate member 10 is not an ideal flat surface and is somewhat curved or the like, as shown in FIG. 2, the linear contact portions 32 are at a plurality of locations along the extending direction. The plate member 10 is displaced in a direction substantially orthogonal to the plate member 10 according to the flatness of the main surface of the plate member 10. Further, each of the displacement portions of the linear contact portion 32 is urged toward the main surface of the plate member 10 with an urging force corresponding to the displacement amount. In FIG. 2, only the displacement at two locations is shown for easy understanding.

また、板材１０と直線状当接部分３２とが理想的な平行配置関係に無い場合も同様に、直線状当接部分３２は、その延在方向に沿った複数箇所で、前記平行度に応じて、板材１０に略直交する方向で変位すると共に、その変位量に応じた付勢力で板材１０の主面に向けて付勢される。   Similarly, when the plate member 10 and the linear contact portion 32 are not in an ideal parallel arrangement relationship, the linear contact portion 32 is also at a plurality of locations along the extending direction according to the parallelism. The plate member 10 is displaced in a direction substantially orthogonal to the plate member 10 and is biased toward the main surface of the plate member 10 with an urging force corresponding to the displacement amount.

すると、直線状当接部分３２と板材１０の主面とが、直線状当接部分３２の延在方向に沿ってなるべく均一な力Ｆ１で接触して、板材１０を押圧する。   Then, the linear contact portion 32 and the main surface of the plate material 10 come into contact with each other with a force F1 as uniform as possible along the extending direction of the linear contact portion 32 to press the plate material 10.

そして、直線状当接部分３２を板材１０の主面により強く押し当てることで、板材１０が直線状分割ライン部１２に沿って分割される。   Then, the plate material 10 is divided along the linear dividing line portion 12 by strongly pressing the linear contact portion 32 against the main surface of the plate material 10.

このように構成された板材分割装置２０及び板材分割方法によると、直線状当接部分３２は、その延在方向に沿った複数箇所で、板材１０の平面度や板材１０と直線状当接部分３２との平行度等に応じて、板材１０に略直交する方向で変位すると共に、その変位量に応じた付勢力で板材１０の主面に向けて付勢される。このため、直線状分割ライン部１２の延在方向に沿って分割荷重分布をなるべく均一にすることができるので、板材１０を分割するのに必要な力を可及的に小さくすることができる。   According to the plate material dividing apparatus 20 and the plate material dividing method configured as described above, the linear contact portion 32 is a plurality of locations along the extending direction, and the flatness of the plate material 10 and the linear contact portion with the plate material 10 are arranged. In accordance with the degree of parallelism with the plate 32, the plate member 10 is displaced in a direction substantially orthogonal to the plate member 10, and is biased toward the main surface of the plate member 10 with an urging force corresponding to the amount of displacement. For this reason, since the divided load distribution can be made as uniform as possible along the extending direction of the linear dividing line portion 12, the force necessary to divide the plate member 10 can be made as small as possible.

また、直線状分割ライン部１２の延在方向に沿って分割荷重分布をなるべく均一にすることができることから、分割後における板材１０の割れ線の真直度も向上させることができると期待できる。さらに、直線状当接部分３２に対する局所的な力の作用を解消できることから、変位可能当接機構部３０の塑性変形によるダメージも少なくすることができ、変位可能当接機構部３０の耐久性向上も期待できる。   Further, since the divided load distribution can be made as uniform as possible along the extending direction of the linear dividing line portion 12, it can be expected that the straightness of the crack line of the plate 10 after the division can be improved. Furthermore, since the action of the local force on the linear contact portion 32 can be eliminated, damage due to plastic deformation of the displaceable contact mechanism portion 30 can be reduced, and the durability of the displaceable contact mechanism portion 30 is improved. Can also be expected.

ちなみに、図２において、延在方向に沿った複数箇所で変位しない直線状当接部分３２Ｂ（２点鎖線参照）を想定すると、板材１０の最も突出した局所に大きな力Ｆ１が集中して作用し、他の凹んだ部分には力が作用し難い。このため、直線状分割ライン部１２の延在方向に沿って分割荷重分布が部分的に偏在してしまい、結果として、板材１０を分割するのに必要な力が大きくなってしまう。   Incidentally, in FIG. 2, assuming a linear contact portion 32 </ b> B (refer to a two-dot chain line) that does not displace at a plurality of locations along the extending direction, a large force F <b> 1 concentrates on the most projecting local area of the plate material 10. The force is hard to act on the other concave part. For this reason, the divided load distribution is partially unevenly distributed along the extending direction of the linear dividing line portion 12, and as a result, a force required to divide the plate member 10 is increased.

また、局所的な力の作用により、分割後における板材１０の割れ線の真直度が悪くなる恐れがある。さらに、同局所的な力の作用により、変位可能当接機構部３０の塑性変形によるダメージも大きくなってしまう恐れがある。   Further, the straightness of the crack line of the plate material 10 after the division may be deteriorated by the action of local force. Furthermore, there is a possibility that damage due to plastic deformation of the displaceable contact mechanism 30 may be increased by the action of the local force.

｛第２実施形態｝
第２実施形態に係る板材分割装置について説明する。本実施形態では、板材を分割するためのより具体的な構成について説明する。図３は第２実施形態に係る板材分割装置の全体構成を示す説明図であり、図４は同板材分割装置の要部を示す概略斜視図であり、図５は同要部を示す概略側面図であり、図６は同要部を示す概略正面図である。 {Second Embodiment}
A plate material dividing apparatus according to the second embodiment will be described. In the present embodiment, a more specific configuration for dividing the plate material will be described. FIG. 3 is an explanatory view showing the overall configuration of the plate material dividing apparatus according to the second embodiment, FIG. 4 is a schematic perspective view showing the main part of the plate material dividing apparatus, and FIG. 5 is a schematic side view showing the main part. FIG. 6 is a schematic front view showing the main part.

この板材分割装置１２０も、板材１０を割って分割するための装置である。板材１０自体については、上記第１実施形態で説明したものと同様であるので、ここではその説明を省略する。   The plate material dividing device 120 is also a device for dividing the plate material 10 and dividing it. Since the plate 10 itself is the same as that described in the first embodiment, the description thereof is omitted here.

この板材分割装置１２０は、２つのベースダイ１３０と、分割刃１４０と、分割力印加機構部１５０とを備えている。さらに、任意付加的な構成として、板材分割装置１２０は、撮像部１６０と、モータ駆動部１６２と、制御部１６４と、モニタ１６６とを備えている。   The plate material dividing device 120 includes two base dies 130, a dividing blade 140, and a dividing force applying mechanism 150. Further, as an optional configuration, the plate material dividing device 120 includes an imaging unit 160, a motor driving unit 162, a control unit 164, and a monitor 166.

２つのベースダイ１３０は、所定間隔離れて所定位置に固定設置されている。２つのベースダイ１３０の上部であってそれぞれの内向き側の端縁部に、それらの離間方向に対して略直交する方向に延在する直線状当接部分１３２が設けられている。そして、直線状分割ライン部１２を下向きにして２つのベースダイ１３０間に配設するようにして、板材１０を２つのベースダイ１３０上に載置すると、２つの直線状当接部分１３２が、直線状分割ライン部１２を挟む各位置で、当該直線状分割ライン部１２の延在方向に沿って板材１０の一方の主面（ここでは下側の主面）に当接するようになっている。   The two base dies 130 are fixedly installed at predetermined positions at predetermined intervals. A linear contact portion 132 extending in a direction substantially orthogonal to the separating direction is provided at the upper edge of each of the two base dies 130 and at the respective inward edge portions. Then, when the plate member 10 is placed on the two base dies 130 so as to be disposed between the two base dies 130 with the linear dividing line portion 12 facing downward, the two linear contact portions 132 are linear. At each position sandwiching the dividing line portion 12, it is in contact with one main surface (here, the lower main surface) of the plate member 10 along the extending direction of the linear dividing line portion 12.

これら２つのベースダイ１３０の各直線状当接部分１３２は、上記第１実施形態で説明した変位可能当接機構部３０として機能する。   Each linear contact portion 132 of these two base dies 130 functions as the displaceable contact mechanism portion 30 described in the first embodiment.

より具体的には、各ベースダイ１３０は、直線状分割ライン部１２の延在方向に沿って配設された複数の一体型分割当接部１３４を有している。各一体型分割当接部１３４は、略直角三角形の板状部材であり、その直角と１つの鋭角とを結ぶ辺側の側面を上方に向けた姿勢で配設されている。なお、ここでは、一体型分割当接部１３４の１つの鋭角を切り落してある（図４参照）。そして、各一体型分割当接部１３４の直角側の部分が固定端部１３５として固定部材１３８に固定されると共に、前記１つの鋭角側の部分が当接端部１３６として内向き、つまり、各ベースダイ１３０間を向くように配設されている。また、各一体型分割当接部１３４の固定端部１３５と当接端部１３６との間に、凹部１３７ｈ、ここでは、略環状の凹部１３７ｈが形成されている。この凹部１３７ｈの形成部分は他の部分よりも弾性変形容易な部分であり、これによって、各一体型分割当接部１３４における固定端部１３５と当接端部１３６との間に、当接端部１３６を固定端部１３５に対して変位可能かつ付勢可能に支持する弾性支持部１３７が形成されている。   More specifically, each base die 130 has a plurality of integral division contact portions 134 disposed along the extending direction of the linear division line portion 12. Each of the integrated divided contact portions 134 is a plate member having a substantially right triangle, and is disposed in such a posture that the side surface connecting the right angle and one acute angle faces upward. Here, one acute angle of the integrated split contact portion 134 is cut off (see FIG. 4). Then, a right-angle portion of each integral split contact portion 134 is fixed to the fixing member 138 as a fixed end portion 135, and the one acute angle side portion is inward as the contact end portion 136, that is, each It is arranged so as to face between the base dies 130. Further, a recessed portion 137 h, here, a substantially annular recessed portion 137 h is formed between the fixed end portion 135 and the contact end portion 136 of each integrated split contact portion 134. The portion where the concave portion 137h is formed is a portion that is more easily elastically deformed than the other portions, and thus, the contact end between the fixed end portion 135 and the contact end portion 136 in each integrated split contact portion 134. An elastic support portion 137 that supports the portion 136 so as to be displaceable and biasable with respect to the fixed end portion 135 is formed.

各ベースダイ１３０では、上記一体型分割当接部１３４が直線状分割ライン部１２に沿って間隔をあけて配設されることで、各当接端部１３６、特に、その上面が、板材１０の主面の平面度や各ベースダイ１３０や分割刃１４０、板材の平行度等に応じて、独立して変位する。また、その変位量に応じて弾性支持部１３７が各当接端部１３６を板材１０に向けて付勢するようになっている。   In each base die 130, the above-described integrated split contact portion 134 is disposed at intervals along the linear split line portion 12, so that each contact end portion 136, particularly the upper surface thereof, is the plate material 10. It is displaced independently according to the flatness of the main surface, the base die 130, the dividing blade 140, the parallelism of the plate material, and the like. Further, the elastic support portion 137 biases each contact end portion 136 toward the plate member 10 in accordance with the amount of displacement.

つまり、上記各ベースダイ１３０の各当接端部１３６の上面を全体として直線状当接部分１３２であると捉えることができ、また、個々の各当接端部１３６の上面を、独立して変位可能でかつ独立して変位量に応じた付勢力で付勢される分割当接部分として捉えることができる。   That is, the upper surface of each contact end portion 136 of each base die 130 can be regarded as a linear contact portion 132 as a whole, and the upper surface of each contact end portion 136 is independently displaced. It can be considered as a divided contact portion that is possible and independently urged by an urging force corresponding to the amount of displacement.

なお、一体型分割当接部１３４は、数Ｎ〜数十Ｎの力で上記各当接端部１３６を微小変位できる程度の剛性ないし強度を有していることが好ましい。また、上記各ベースダイ１３０の直線状当接部分１３２の端縁部は鋭利に尖っている必要はなく、高寿命化のため数十〜数百μｍの幅を有していてもよい。   The integral divided contact portion 134 preferably has rigidity or strength enough to allow the contact end portions 136 to be slightly displaced by a force of several N to several tens N. Moreover, the edge part of the linear contact part 132 of each said base die 130 does not need to be sharply sharp, and may have a width | variety of several dozen-several hundreds of micrometers for lifetime improvement.

また、分割刃１４０は、直線状分割ライン部１２に対応する位置で、その直線状分割ライン部１２の延在方向に沿って板材１０の他方の主面（ここでは上側の主面）に当接可能に形成されている。   Further, the dividing blade 140 contacts the other main surface (here, the upper main surface) of the plate member 10 along the extending direction of the linear dividing line portion 12 at a position corresponding to the linear dividing line portion 12. It is formed so that it can touch.

より具体的には、分割刃１４０は、板状に形成されており、その下縁部が下方に向けて順次薄肉となり、かつ、直線状分割ライン部１２と略同じ長さ又はそれよりも長いエッジ部１４２に形成されている。そして、当該エッジ部１４２が板材１０の他方の主面に当接されるようになっている。   More specifically, the dividing blade 140 is formed in a plate shape, and its lower edge portion is gradually thinned downward, and is substantially the same length or longer than the linear dividing line portion 12. An edge portion 142 is formed. The edge 142 is brought into contact with the other main surface of the plate 10.

なお、分割刃１４０のエッジ部１４２先端部は必ずしも鋭利に尖っている必要はなく、高寿命化のため、エッジ部１４２の幅が数十μｍ程度であってもよい。   In addition, the edge part 142 edge part of the division | segmentation blade 140 does not necessarily need to be sharply sharp, and the width | variety of the edge part 142 may be about several tens of micrometers for lifetime improvement.

分割力印加機構部１５０は、上記２つのベースダイ１３０と分割刃１４０のうち少なくとも１つを、板材１０と略直交する方向に沿って相対的に近接する方向に移動させる機構部である。   The dividing force applying mechanism 150 is a mechanism that moves at least one of the two base dies 130 and the dividing blade 140 in a direction relatively close to the plate material 10 along a direction substantially orthogonal thereto.

ここでは、分割力印加機構部１５０は、分割刃１４０を板材１０と略直交する方向に沿って下方に移動させる機構部である。より具体的には、分割力印加機構部１５０は、モータで発生させた回転運動をボールネジ機構等を介して直線運動に変換する機構やリニアモータ等で構成されており、分割刃１４０の上方の所定位置に固定設置されている。そして、分割力印加機構部１５０の駆動によって、分割刃１４０を、両ベースダイ１３０間の上方の待機位置から両ベースダイ１３０間の分割加工位置に向けて、所定速度で加工駆動させるようになっている。   Here, the dividing force applying mechanism 150 is a mechanism that moves the dividing blade 140 downward along a direction substantially orthogonal to the plate 10. More specifically, the split force application mechanism 150 is configured by a mechanism, a linear motor, or the like that converts a rotational motion generated by the motor into a linear motion via a ball screw mechanism or the like. It is fixedly installed in place. Then, by driving the dividing force application mechanism 150, the dividing blade 140 is driven to be driven at a predetermined speed from the upper standby position between the two base dies 130 toward the divided processing position between the two base dies 130. .

なお、本実施形態では、分割力印加機構部１５０が分割刃１４０を移動させる例で説明したが、両ベースダイ１３０又は一方のベースダイ１３０を上方に移動させる構成であってもよく、また、分割刃１４０及び両ベースダイ１３０の全てを移動させる構成であってもよい。また、モータ等のアクチュエータによる駆動力を分割力として作用させる構成に限らず、人力を分割力として作用させる構成であってもよい。   In the present embodiment, the example in which the dividing force applying mechanism unit 150 moves the dividing blade 140 has been described. However, the base die 130 or one of the base dies 130 may be moved upward, and the dividing blade may be used. 140 and both base dies 130 may be moved. Further, the configuration is not limited to a configuration in which a driving force by an actuator such as a motor is applied as a splitting force, and a configuration in which human power is applied as a splitting force may be used.

また、上記両ベースダイ１３０の下方には、ＣＣＤ等の撮像素子を有する撮像ユニット１６１ａと、当該撮像ユニット１６１ａを直線状分割ライン部１２の延在方向に沿って移動させる撮像ステージ１６１ｂとを有する撮像部１６０が配設されている。撮像部１６０は、ベースダイ１３０間で、板材１０の直線状分割ライン部１２の分割の様子を撮像可能に構成されている。   Further, below both the base dies 130, an image pickup unit 161a having an image pickup device such as a CCD, and an image pickup stage 161b for moving the image pickup unit 161a along the extending direction of the linear dividing line portion 12 are provided. A portion 160 is provided. The imaging unit 160 is configured to be able to capture an image of the division of the linear dividing line portion 12 of the plate member 10 between the base dies 130.

制御部１６４は、本装置全体の動作制御等を行うものであり、モータ駆動部１６２を介して、上記分割力印加機構部１５０や撮像部１６０の撮像ステージ１６１ｂの動作を制御する。また、上記撮像ユニット１６１ａからの撮像信号が制御部１６４に入力されると、制御部１６４はその撮像信号に応じた映像をモニタ１６６に表示する。   The control unit 164 controls the operation of the entire apparatus and controls the operations of the splitting force application mechanism unit 150 and the imaging stage 161b of the imaging unit 160 via the motor driving unit 162. Further, when an imaging signal from the imaging unit 161a is input to the control unit 164, the control unit 164 displays an image corresponding to the imaging signal on the monitor 166.

なお、本板材分割装置１２０に、直線状分割ライン部１２が両ベースダイ１３０間でかつ分割刃１４０の真下位置に配設されるように、板材１０の位置を変更したり、板材１０を回転させる板材移動ユニットが設けられていてもよい。   Note that the position of the plate material 10 is changed or the plate material 10 is rotated so that the linear dividing line portion 12 is disposed between the base dies 130 and directly below the dividing blade 140 in the plate material dividing apparatus 120. A plate material moving unit may be provided.

このように構成された板材分割装置１２０の動作について説明する。   The operation of the plate material dividing apparatus 120 configured as described above will be described.

まず、上記２つのベースダイ１３０の上に板材１０を載置する。この際、直線状分割ライン部１２が下向きでかつ２つのベースダイ１３０間であって分割刃１４０の真下の位置に配設されるようにする。   First, the plate material 10 is placed on the two base dies 130. At this time, the linear dividing line portion 12 is disposed downward and between the two base dies 130 at a position directly below the dividing blade 140.

この状態で、分割力印加機構部１５０の駆動により分割刃１４０を下降させる。すると、分割刃１４０のエッジ部１４２が、直線状分割ライン部１２の真上で板材１０の他方の主面（上面）に当接する。   In this state, the dividing blade 140 is lowered by driving the dividing force applying mechanism 150. Then, the edge portion 142 of the dividing blade 140 abuts on the other main surface (upper surface) of the plate member 10 immediately above the linear dividing line portion 12.

この際、板材１０の平面度や、各ベースダイ１３０と板材１０と分割刃１４０の平行度に応じて、各ベースダイ１３０において、各一体型分割当接部１３４の当接端部１３６が板材１０に対して略直交する方向に変位すると共に、その変位量に応じた付勢力で板材１０に向けて付勢される。   At this time, depending on the flatness of the plate material 10 and the parallelism of each base die 130, the plate material 10, and the dividing blade 140, the contact end portion 136 of each integrated split contact portion 134 is formed on the plate material 10 in each base die 130. On the other hand, it is displaced in a direction substantially perpendicular to it, and is urged toward the plate member 10 with an urging force corresponding to the amount of displacement.

すると、各ベースダイ１３０において、各一体型分割当接部１３４の当接端部１３６の上面と板材１０の主面とが、直線状分割ライン部１２の延在方向に沿ってなるべく均一な力で接触して、板材１０を押圧する。   Then, in each base die 130, the upper surface of the contact end portion 136 of each integrated split contact portion 134 and the main surface of the plate member 10 are as uniform as possible along the extending direction of the linear split line portion 12. Contact and press the plate 10.

そして、分割刃１４０を板材１０により強い力で押付けると、板材１０の直線状分割ライン部１２に分割応力が作用し、やがて板材１０が直線状分割ライン部１２に沿って分割される。この際、一体型分割当接部１３４の当接端部１３６の上面と板材１０の主面とが、直線状分割ライン部１２の延在方向に沿ってなるべく均一な力で接触しているので、板材１０の直線状分割ライン部１２における分割荷重分布もほぼ均一となる。これにより、板材１０を分割するのに必要な力を可及的に小さくすることができる。   When the dividing blade 140 is pressed against the plate member 10 with a strong force, a dividing stress acts on the linear dividing line portion 12 of the plate member 10 and eventually the plate member 10 is divided along the linear dividing line portion 12. At this time, the upper surface of the contact end portion 136 of the integrated split contact portion 134 and the main surface of the plate member 10 are in contact with each other with as uniform force as possible along the extending direction of the linear split line portion 12. Also, the divided load distribution in the linear dividing line portion 12 of the plate material 10 becomes substantially uniform. Thereby, the force required to divide the plate member 10 can be made as small as possible.

しかも、上記各当接端部１３６は、独立して変位し、かつ、独立して変位量に応じた付勢力で付勢されるため、変位の相互影響を排除して、直線状分割ライン部１２の延在方向に沿って各当接端部１３６と板材１０とをより均一な力で接触させることができる。これにより、より小さな力で板材１０を割って分割できる。   In addition, since each of the contact end portions 136 is independently displaced and is urged by an urging force according to the amount of displacement independently, the mutual influence of the displacement is eliminated, and the linear divided line portion The contact end portions 136 and the plate member 10 can be brought into contact with each other with a more uniform force along the 12 extending directions. Thereby, it can divide | segment and divide the board | plate material 10 with smaller force.

また、第１実施形態で述べたのと同様の理由から、分割後における板材１０の割れ線の真直度を向上させること、及び、分割刃１４０やベースダイ１３０の耐久性向上も期待できる。   Further, for the same reason as described in the first embodiment, it is possible to improve the straightness of the crack line of the plate 10 after the division and to improve the durability of the division blade 140 and the base die 130.

また、各一体型分割当接部１３４は、固定端部１３５と当接端部１３６との間に凹部１３７ｈを形成することで、それら固定端部１３５と当接端部１３６と弾性支持部１３７とを一体形成した構成であるため、当該各一体型分割当接部１３４を容易に製造することができる。   Further, each of the integrated divided contact portions 134 is formed with a recess 137 h between the fixed end portion 135 and the contact end portion 136, so that the fixed end portion 135, the contact end portion 136, and the elastic support portion 137. Therefore, each of the integrated split contact portions 134 can be easily manufactured.

もっとも、固定端部１３５と当接端部１３６とを板バネ部材等で連結して、当接端部１３６を変位自在かつ変位量に応じて付勢可能に支持した構成であってもよい。   However, the fixed end portion 135 and the abutting end portion 136 may be connected by a leaf spring member or the like, and the abutting end portion 136 may be supported to be displaceable and urged according to the amount of displacement.

｛変形例｝
以下では、各種変形例について説明する。なお、上記第２実施形態と同様構成部分については同一符号を付してその説明を省略する。 {Modifications}
Hereinafter, various modifications will be described. In addition, the same code | symbol is attached | subjected about the component similar to the said 2nd Embodiment, and the description is abbreviate | omitted.

図７は第１変形例を示す概略斜視図である。この第１変形例では、上記各一体型分割当接部１３４に代えて、弾性分割当接部２３４を有している。この弾性分割当接部２３４は、上記各一体型分割当接部１３４の凹部１３７ｈを省略した構成と同様形状を有しており、全体が弾性変形可能な材料で形成されている。弾性変形可能な材料としては、上記板材１０の分割時に大きく変位することなく微小変位可能な程度の剛性を持つ弾性材料であることが好ましく、例えば、ポーラス構造等を持つ焼結金属等を用いることができる。   FIG. 7 is a schematic perspective view showing a first modification. In the first modification, instead of each of the integrated split contact portions 134, an elastic split contact portion 234 is provided. The elastic division contact portion 234 has the same shape as that of the configuration in which the concave portion 137h of each integrated division contact portion 134 is omitted, and is formed of a material that can be elastically deformed as a whole. The elastically deformable material is preferably an elastic material having such a rigidity that it can be finely displaced without being largely displaced when the plate member 10 is divided. For example, a sintered metal having a porous structure or the like is used. Can do.

この変形例によると、各弾性分割当接部２３４が、板材１０の平面度や、各ベースダイ１３０と板材１０と分割刃１４０の平行度に応じて、弾性変形して変位すると共に、その変位量に応じた付勢力で板材１０に向けて付勢される。   According to this modification, each elastic division contact portion 234 is elastically deformed and displaced according to the flatness of the plate material 10 and the parallelism of each base die 130, the plate material 10 and the division blade 140, and the amount of displacement Is urged toward the plate member 10 by the urging force according to the above.

このため、上記実施形態と同様の作用効果を奏することができる。また、弾性分割当接部２３４自体が弾性変形するので、凹部１３７ｈ等を形成する必要もなく、従って、その製造を容易に行える。   For this reason, there can exist an effect similar to the said embodiment. Further, since the elastic division contact portion 234 itself is elastically deformed, it is not necessary to form the concave portion 137h or the like, and therefore the manufacture thereof can be performed easily.

図８は第２変形例を示す概略正面図であり、図９は第３変形例を示す概略正面図であり、図１０は第４変形例を示す概略正面図である。これらの第２変形例〜第４変形例は、板材１０との当接部分を変位可能に支持する部分と、付勢する部分とを別部材によって構成した例であり、特に、第２及び第３変形例は、バネによって付勢した構成、第４変形例は圧縮剛性を呈する部材によって付勢した構成である。各変形例について説明する。   FIG. 8 is a schematic front view showing a second modification, FIG. 9 is a schematic front view showing a third modification, and FIG. 10 is a schematic front view showing a fourth modification. These 2nd modification-4th modification are the examples which comprised the part which supports the contact | abutting part with the board | plate material 10 so that a displacement is possible, and the part to urge | bias by a separate member, Especially 2nd and 2nd The third modified example has a configuration in which it is urged by a spring, and the fourth modified example has a configuration in which it is urged by a member exhibiting compression rigidity. Each modification will be described.

図８に示す第２変形例は、第２実施形態における一体型分割当接部１３４に代えて、直線状分割ライン部１２の延在方向に沿って配設された複数の分割当接部３３４と、各分割当接部３３４を支持する分割支持部３３５と、各分割当接部３３４を付勢する分割付勢部としてコイルバネ３３６を有している。   In the second modified example shown in FIG. 8, a plurality of divided contact portions 334 arranged along the extending direction of the linear divided line portion 12 instead of the integrated divided contact portion 134 in the second embodiment. And a split support portion 335 that supports each split contact portion 334 and a coil spring 336 as a split biasing portion that biases each split contact portion 334.

各分割当接部３３４は、略台形状板状に形成されており、直線状分割ライン部１２の延在方向に略直交する姿勢で、かつ、その１つの鋭角を上方の内向きに配設した姿勢で配設されている。そして、板材１０が、分割当接部３３４の当該鋭角部分に載置するようにして支持されるようになっている。   Each of the divided contact portions 334 is formed in a substantially trapezoidal plate shape, and is arranged in a posture substantially orthogonal to the extending direction of the linear divided line portion 12, and one acute angle thereof is disposed inward upward. It is arranged with the posture. The plate member 10 is supported so as to be placed on the acute angle portion of the divided contact portion 334.

また、各分割支持部３３５は、上記各分割当接部３３４の下部から下方に向けて延びるガイドピン部３３５ａと、当該ガイドピン部３３５ａを挿入可能なガイド孔３３８ａを有する固定部材３３８とを有している。ガイド孔３３８ａは、載置される板材１０に対して略直交する方向に延びるように形成されている。そして、上記ガイドピン部３３５ａがガイド孔３３８ａ内に移動自在に挿入されることで、分割当接部３３４が板材１０と略直交する方向に沿って変位可能に支持されている。   Each divided support portion 335 includes a guide pin portion 335a extending downward from the lower portion of each divided contact portion 334 and a fixing member 338 having a guide hole 338a into which the guide pin portion 335a can be inserted. doing. The guide hole 338a is formed to extend in a direction substantially orthogonal to the plate material 10 to be placed. The guide pin portion 335a is movably inserted into the guide hole 338a, so that the divided contact portion 334 is supported so as to be displaceable along a direction substantially orthogonal to the plate member 10.

なお、分割当接部３３４の外側の面が、上記固定部材３３８のガイド面３３８ｂに当接しており、これにより、分割当接部３３４の回り止が図られている。   The outer surface of the divided contact portion 334 is in contact with the guide surface 338b of the fixing member 338, thereby preventing the divided contact portion 334 from rotating.

また、コイルバネ３３６は、ガイドピン部３３５ａに外嵌めされ、分割当接部３３４の下部とガイド孔３３８ａの底面との間に介在している。そして、分割当接部３３４が下方に変位すると、分割当接部３３４の変位量に応じた付勢力で分割当接部３３４を上方に向けて、つまり、板材１０に向けて付勢するようになっている。   The coil spring 336 is externally fitted to the guide pin portion 335a, and is interposed between the lower portion of the divided contact portion 334 and the bottom surface of the guide hole 338a. When the split contact portion 334 is displaced downward, the split contact portion 334 is biased upward by the biasing force corresponding to the displacement amount of the split contact portion 334, that is, toward the plate member 10. It has become.

なお、分割刃１４０の押圧力を除去した場合等に、コイルバネ３３６の付勢力で分割当接部３３４が上方に飛出してしまわないように、分割当接部３３４の上方への移動を規制する規制部材等を設けることが好ましい。   In addition, when the pressing force of the split blade 140 is removed, the upward movement of the split contact portion 334 is restricted so that the split contact portion 334 does not jump upward due to the biasing force of the coil spring 336. It is preferable to provide a regulating member or the like.

図９に示す第３変形例は、第２実施形態における一体型分割当接部１３４に代えて、直線状分割ライン部１２の延在方向に沿って配設された複数の分割当接部４３４と、各分割当接部４３４を支持する分割支持部４３５と、各分割当接部４３４を付勢する分割付勢部としてぜんまいバネ４３６と有している。   In the third modified example shown in FIG. 9, a plurality of divided contact portions 434 arranged along the extending direction of the linear divided line portion 12 instead of the integrated divided contact portion 134 in the second embodiment. A split support portion 435 that supports each split contact portion 434, and a mainspring spring 436 as a split biasing portion that biases each split contact portion 434.

各分割当接部４３４は、長方形板状部分に台形板状部分を連設した形状に形成されており、直線状分割ライン部１２の延在方向に略直交する姿勢で、かつ、台形板状部分の１つの鋭角を上方の内向きに配設した姿勢で配設されている。そして、板材１０が、分割当接部４３４の当該鋭角部分に載置するようにして支持されるようになっている。   Each divided contact portion 434 is formed in a shape in which a trapezoidal plate-like portion is connected to a rectangular plate-like portion, has a posture substantially orthogonal to the extending direction of the linear divided line portion 12, and has a trapezoidal plate shape. It is arranged in a posture in which one acute angle of the portion is arranged inward upward. The plate member 10 is supported so as to be placed on the acute angle portion of the divided contact portion 434.

また、各分割支持部４３５は、上記各分割当接部４３４の外側部分の下部から下方に向けて延びるガイドピン部４３５ａと、当該ガイドピン部４３５ａを挿入可能なガイド孔４３８ｈを有する固定部材４３８とを有している。ガイド孔４３８ｈは、載置される板材１０に対して略直交する方向に延びるように形成されている。そして、上記ガイドピン部４３５ａがガイド孔４３８ｈ内に移動自在に挿入されることで、分割当接部４３４が板材１０と略直交する方向に沿って変位可能に支持されている。   Each divided support portion 435 includes a guide pin portion 435a extending downward from a lower portion of the outer portion of each divided contact portion 434, and a fixing member 438 having a guide hole 438h into which the guide pin portion 435a can be inserted. And have. The guide hole 438h is formed to extend in a direction substantially orthogonal to the plate material 10 to be placed. The guide pin portion 435a is movably inserted into the guide hole 438h, so that the divided contact portion 434 is supported so as to be displaceable along a direction substantially orthogonal to the plate member 10.

なお、固定部材４３８に立設された回り止ガイド４３８ａが分割当接部４３４に形成されたガイド凹部４３４ａに移動自在に挿入されており、これにより、分割当接部４３４の回り止が図られている。   A detent guide 438a erected on the fixing member 438 is movably inserted into a guide recess 434a formed in the divided contact portion 434, thereby preventing the divided contact portion 434 from rotating. ing.

また、ぜんまいバネ４３６は、分割当接部４３４の下部と固定部材４３８の上向き面との間で縮径するように弾性変形可能に配設されている。そして、分割当接部４３４が下方に変位すると、分割当接部４３４の変位量に応じた付勢力で分割当接部４３４を上方に向けて、つまり、板材１０に向けて付勢するようになっている。   The mainspring spring 436 is disposed so as to be elastically deformable so as to reduce the diameter between the lower portion of the divided contact portion 434 and the upward surface of the fixing member 438. When the split contact portion 434 is displaced downward, the split contact portion 434 is biased upward, that is, toward the plate member 10 by an urging force corresponding to the displacement amount of the split contact portion 434. It has become.

図１０に示す第４変形例は、上記第３変形例におけるぜんまいバネ４３６に代えて、圧縮剛性を呈する部材、ここでは、エアシリンダ５３６を配設している。その他の構成は、上記第３変形例と同様である。   In the fourth modified example shown in FIG. 10, a member exhibiting compression rigidity, here, an air cylinder 536 is provided instead of the mainspring spring 436 in the third modified example. Other configurations are the same as those of the third modified example.

エアシリンダ５３６は、加圧圧縮した状態で、分割当接部４３４の下部と固定部材４３８の上向き面との間に配設されており、分割作業時に、分割当接部４３４を微小変位させるようになっている。   The air cylinder 536 is disposed between the lower portion of the split contact portion 434 and the upward surface of the fixing member 438 in a compressed state, so that the split contact portion 434 is slightly displaced during the split operation. It has become.

このエアシリンダ５３６も、分割当接部４３４が下方に変位すると、分割当接部４３４の変位量に応じた付勢力で分割当接部４３４を上方に向けて、つまり、板材１０に向けて付勢するようになっている。   The air cylinder 536 is also attached to the divided contact portion 434 upward, that is, toward the plate member 10 by an urging force corresponding to the displacement amount of the divided contact portion 434 when the divided contact portion 434 is displaced downward. It has come to force.

なお、圧縮剛性を呈する部材としては、上記エアシリンダ５３６の他、オイルシリンダ等の液体シリンダ、変位に応じた付勢力を上記分割当接部４３４に作用させるように配設したダイヤフラム等を用いることができる。   In addition to the air cylinder 536, a liquid cylinder such as an oil cylinder, a diaphragm arranged so as to apply an urging force corresponding to displacement to the divided contact portion 434, and the like are used as members exhibiting compression rigidity. Can do.

これらの第２〜第４変形例によると、分割当接部３３４，４３４を変位可能に支持する部分３３５，４３５と、分割当接部３３４，４３４をその変位量に応じて付勢する部分３３６，４３６，５３６とを別々に構成しているため、分割当接部３３４，４３４が変位する方向及び付勢される方向を、板材１０と略直交する方向になるべく一致させることができる。これにより、板材１０の平面度や、各ベースダイ１３０と板材１０と分割刃１４０の平行度に応じて、より正確に分割当接部３３４，４３４を変位させることができ、また、より正確に当該変位量に応じた付勢力で付勢することができる。   According to these second to fourth modifications, the portions 335 and 435 that support the divided contact portions 334 and 434 so as to be displaceable, and the portion 336 that biases the divided contact portions 334 and 434 according to the amount of displacement. , 436 and 536 are configured separately, the direction in which the divided contact portions 334 and 434 are displaced and the direction in which they are urged can be made to coincide with each other as much as possible in a direction substantially perpendicular to the plate material 10. Thereby, according to the flatness of the board | plate material 10 and the parallelism of each base die | dye 130, the board | plate material 10, and the division | segmentation blade 140, the division | segmentation contact part 334,434 can be displaced more correctly, and the said said more correctly The biasing force can be biased according to the amount of displacement.

図１１は第５変形例を示す概略斜視図である。この変形例では、上記第２実施形態における各一体型分割当接部１３４に代えて、平行平板機構部６３４を用いた例を示している。平行平板機構部６３４は、４つのアーム、即ち、２つの略水平アーム６３４ａと、２つの略鉛直アーム６３４ｂとを略方形枠状に連結すると共に、それぞれの連結部分に略円弧状のくりぬき部分６３４ｈを形成することで、一種の平行平板機構を構成している。この平行平板機構部６３４は、例えば、金属等のブロック体を適宜切削加工等することで形成することができ、比較的簡易に製造できる。そして、一方側の略鉛直アーム６３４ｂを内側に向けて分割刃１４０近傍に配設した姿勢で、他方側の略鉛直アーム６３４ｂが固定部材６３８に固定されている。そして、上側の略水平アーム６３４ａ上に板材１０を載置した状態で、上記分割刃１４０を下降させることにより、上記複数の一体型分割当接部１３４が配設されたのと同様態様で配設された複数の平行平板機構部６３４の一方側の略鉛直アーム６３４ｂが、板材１０の平面度や、各ベースダイ１３０と板材１０と分割刃１４０の平行度に応じて、板材１０に対して略直交する方向に変位すると共に、その変位量に応じた付勢力で板材１０に向けて付勢される。   FIG. 11 is a schematic perspective view showing a fifth modification. In this modified example, an example in which a parallel plate mechanism portion 634 is used in place of each integral divided contact portion 134 in the second embodiment is shown. The parallel plate mechanism 634 connects four arms, that is, two substantially horizontal arms 634a and two substantially vertical arms 634b, in a substantially rectangular frame shape, and a substantially arc-shaped hollow portion 634h at each connection portion. By forming, a kind of parallel plate mechanism is configured. The parallel plate mechanism 634 can be formed, for example, by appropriately cutting a block body such as metal, and can be manufactured relatively easily. The substantially vertical arm 634 b on the other side is fixed to the fixing member 638 in a posture in which the substantially vertical arm 634 b on one side is disposed in the vicinity of the split blade 140 with the inner side facing inward. Then, in a state where the plate material 10 is placed on the upper substantially horizontal arm 634a, the split blade 140 is lowered to arrange in the same manner as the plurality of integral split contact portions 134 are provided. The substantially vertical arm 634b on one side of the plurality of parallel flat plate mechanism portions 634 provided is substantially in relation to the plate material 10 according to the flatness of the plate material 10 and the parallelism of each base die 130, the plate material 10 and the dividing blade 140. While displacing in the orthogonal direction, it is urged toward the plate member 10 with an urging force corresponding to the amount of displacement.

この際、平行平板機構の動作により、一方側の略鉛直アーム６３４ｂは、板材１０に対して略直交する方向に沿って比較的正確に変位できるので、板材１０の平面度等に応じた変位量を比較的正確にでき、また、比較的正確に当該変位量に応じた付勢力で付勢することができる。   At this time, the operation of the parallel plate mechanism allows the substantially vertical arm 634b on one side to be displaced relatively accurately along the direction substantially orthogonal to the plate member 10, and therefore, the amount of displacement corresponding to the flatness of the plate member 10 and the like Can be made relatively accurate, and can be biased with a biasing force corresponding to the amount of displacement relatively accurately.

図１２は、第６変形例を示す概略斜視図である。この変形例では、変位量に応じた物理量を検出する検出部を設けた例を示している。   FIG. 12 is a schematic perspective view showing a sixth modification. In this modification, an example is shown in which a detection unit that detects a physical quantity according to the displacement amount is provided.

すなわち、この変形例では、上記第２実施形態における一体型分割当接部１３４に代えて、検出部付一体型分割当接部７３３を有している。検出部付一体型分割当接部７３３は、一体型分割当接部７３４と検出部７３４ａとを有している。一体型分割当接部７３４は、上記一体型分割当接部１３４と同様に、略直角三角形の板状部材であり、固定端部７３５と当接端部７３６との間に凹部７３７ｈを形成した形状とされている。一体型分割当接部７３４が一体型分割当接部１３４と異なる点は、固定端部７３５と当接端部７３６との間にさらにスリット状の凹部７３７ｈａを形成した点である。つまり、この一体型分割当接部７３４では、凹部７３７ｈと凹部７３７ｈａを形成することで、固定端部７３５と当接端部７３６との間に弾性変形容易な弾性支持部７３７が形成されている。この一体型分割当接部７３４自体は、上記一体型分割当接部１３４と同様に動作するものである。   That is, in this modified example, instead of the integrated split contact portion 134 in the second embodiment, an integrated split contact portion with detection portion 733 is provided. The integrated divided contact portion 733 with a detection unit includes an integrated divided contact portion 734 and a detection portion 734a. The integrated split contact portion 734 is a substantially right-angled triangular plate-like member similar to the integrated split contact portion 134 described above, and a concave portion 737 h is formed between the fixed end portion 735 and the contact end portion 736. It is made into a shape. The difference between the integrated split contact portion 734 and the integrated split contact portion 134 is that a slit-shaped recess 737 ha is further formed between the fixed end portion 735 and the contact end portion 736. In other words, in the integrated split contact portion 734, the recess 737h and the recess 737ha are formed, so that the elastic support portion 737 that is easily elastically deformed is formed between the fixed end portion 735 and the contact end portion 736. . The integrated split contact portion 734 itself operates in the same manner as the integrated split contact portion 134.

また、検出部７３４ａは、一体型分割当接部７３４の当接端部７３６の変位量に応じた物理量を検出する。ここでは、検出部７３４ａは、圧電素子又は歪みゲージ等の応力検知部であり、上記一体型分割当接部７３４のうち凹部７３７ｈａの開口部分に取付けられている。そして、当接端部７３６が変位に応じて弾性支持部７３７が歪むと、その歪み量に応じた歪み検知信号を出力するようになっている。   The detection unit 734a detects a physical quantity corresponding to the displacement amount of the contact end portion 736 of the integrated split contact portion 734. Here, the detection unit 734a is a stress detection unit such as a piezoelectric element or a strain gauge, and is attached to the opening portion of the recess 737ha in the integrated split contact portion 734. When the elastic support portion 737 is distorted according to the displacement of the contact end portion 736, a distortion detection signal corresponding to the amount of distortion is output.

この変形例によると、直線状分割ライン部１２の延在方向に沿って複数箇所で、直線状当接部分を構成する各当接端部７３６の歪み量を検出することができる。このため、板材１０を分割する際における各当接端部７３６への応力の加わり方等の状況を検出して、観察することができる。また、応力分布等から、直線状分割ライン部１２の深さや形状等をも推測することができる。   According to this modification, it is possible to detect the amount of distortion of each contact end portion 736 constituting the linear contact portion at a plurality of locations along the extending direction of the linear dividing line portion 12. For this reason, it is possible to detect and observe a situation such as how stress is applied to each contact end 736 when the plate member 10 is divided. In addition, the depth, shape, and the like of the linear dividing line portion 12 can be estimated from the stress distribution and the like.

なお、上記検出部７３４ａは、応力検知部であると説明したが、必ずしもその必要はなく、例えば、当接端部７３６の変位量を検出する変位量検知部であってもよい。例えば、検出部７３４ａの歪み検知信号は、当接端部７３６の変位量に応じた信号でもあるので、当接端部７３６の変位量を示す信号としても解釈できる。また、検出部７３４ａとして、当接端部７３６の変位量を直接的に検出する位置検出装置、例えば、テコ式やトランス式の位置検出装置（マイクロメーターともいう）や、レーザー光等による光学式測長器、静電容量式変位計等を用いてもよい。要するに、検出部７３４ａとしては、変位量に応じた物理量を検出する全ての検出部を含む。また、このような検出部は、上記実施形態や各変形例に適用されてもよい。   In addition, although the said detection part 734a was demonstrated that it was a stress detection part, it is not necessarily required, for example, the displacement amount detection part which detects the displacement amount of the contact edge part 736 may be sufficient. For example, the distortion detection signal of the detection unit 734a is also a signal corresponding to the amount of displacement of the contact end 736, and therefore can be interpreted as a signal indicating the amount of displacement of the contact end 736. Further, as the detection unit 734a, a position detection device that directly detects the amount of displacement of the contact end portion 736, for example, a lever type or transformer type position detection device (also referred to as a micrometer), an optical type using a laser beam or the like. A length measuring device, a capacitance displacement meter, or the like may be used. In short, the detection unit 734a includes all detection units that detect a physical quantity according to the amount of displacement. Moreover, such a detection part may be applied to the said embodiment and each modification.

なお、上記第２実施形態及び上記各変形例は、ベースダイ１３０が第１実施形態で説明した変位可能当接機構部３０として機能する例で説明しているが、必ずしもその必要はない。例えば、分割刃１４０に、図８〜図１０の変形例に係る構成を適用して、直線状分割ライン部１２の延在方向に沿って複数箇所で変位可能かつ変位量に応じて付勢可能にして、変位可能当接機構部３０として機能させてもよい。この場合、ベースダイ１３０を変位可能な構成にしなくともよい。また、２つのベースダイ１３０のうち一方だけを、変位可能当接機構部３０として機能させるようにしてもよい。要するに、２つのベースダイ１３０と分割刃１４０のうち少なくとも１つが、変位可能当接機構部３０として機能すればよい。   In addition, although the said 2nd Embodiment and each said modification are demonstrated in the example which the base die | dye 130 functions as the displaceable contact mechanism part 30 demonstrated in 1st Embodiment, it is not necessarily required. For example, by applying the configuration according to the modified example of FIGS. 8 to 10 to the dividing blade 140, it can be displaced at a plurality of locations along the extending direction of the linear dividing line portion 12 and can be biased according to the amount of displacement. Thus, it may function as the displaceable contact mechanism 30. In this case, the base die 130 may not be configured to be displaceable. Further, only one of the two base dies 130 may function as the displaceable contact mechanism 30. In short, it is sufficient that at least one of the two base dies 130 and the split blade 140 functions as the displaceable contact mechanism 30.

図１３は第７変形例を示す概略斜視図である。この変形例では、いわゆる片持ち梁の態様で、板材を支持した例を示している。   FIG. 13 is a schematic perspective view showing a seventh modification. In this modification, an example in which a plate material is supported in a so-called cantilever mode is shown.

すなわち、この変形例にかかる板材分割装置８２０は、板材固定部８４０と、変位可能当接機構部８３０と、分割力印加機構部８５０とを有している。   That is, the plate material dividing device 820 according to this modification includes a plate material fixing portion 840, a displaceable contact mechanism portion 830, and a dividing force application mechanism portion 850.

板材固定部８４０は、板材１０のうち直線状分割ライン部１２の側方部分を挟込むようにして支持可能に構成されている。   The plate material fixing portion 840 is configured to be supported so as to sandwich a side portion of the linear dividing line portion 12 in the plate material 10.

また、変位可能当接機構部８３０は、板材固定部８４０による固定支持部分から直線状分割ライン部１２を挟んで反対側で、板材１０の一方側の主面に当接可能に構成されている。この変位可能当接機構部８３０は、上記第２実施形態や各変形例に係る構成等によって、その延在方向に沿って複数箇所で、板材１０と略直交する方向に沿って変位可能で、かつ、板材１０に向けてその変位量に応じた付勢力で付勢可能に構成されている。   Further, the displaceable contact mechanism portion 830 is configured to be able to contact the main surface on one side of the plate member 10 on the opposite side of the linear dividing line portion 12 from the fixed support portion by the plate member fixing portion 840. . The displaceable contact mechanism 830 is displaceable along a direction substantially orthogonal to the plate member 10 at a plurality of locations along the extending direction by the configuration according to the second embodiment or each modification. And it is comprised so that the urging | biasing force according to the displacement amount toward the board | plate material 10 is possible.

また、分割力印加機構部８５０は、上記変位可能当接機構部８３０を板材１０の前記主面に押付ける方向に移動させる。なお、分割力印加機構部８５０は、板材固定部８４０を上方に移動させることで、上記変位可能当接機構部８３０を板材１０の前記主面に押付けるようにしてもよい。   In addition, the dividing force application mechanism 850 moves the displaceable contact mechanism 830 in a direction in which it is pressed against the main surface of the plate member 10. The dividing force applying mechanism 850 may press the displaceable contact mechanism 830 against the main surface of the plate 10 by moving the plate fixing portion 840 upward.

この板材分割装置８２０では、分割力印加機構部８５０の駆動により変位可能当接機構部８３０を移動させると、板材１０の直線状分割ライン部１２に分割力が作用し、板材１０は当該直線状分割ライン部１２に沿って割れるように分割される。この際、変位可能当接機構部８３０は、直線状分割ライン部１２に沿った複数箇所で、板材１０の平面度や、１０板材と変位可能当接機構部８３０との平行度等に応じて、変位すると共に、その変位量に応じた付勢力で板材１０に向けて付勢される。このため、変位可能当接機構部８３０を直線状分割ライン部１２の延在方向に沿ってなるべく均一な力で接触させることができる。これにより、直線状分割ライン部１２の延在方向に沿って分割荷重分布をなるべく均一にすることができ、より小さな力で板材１０を割って分割できる。その他、上記第１実施形態や第２実施形態と同様の効果を奏する。   In this plate material dividing device 820, when the displaceable contact mechanism portion 830 is moved by driving the dividing force application mechanism portion 850, a dividing force acts on the linear dividing line portion 12 of the plate material 10, and the plate material 10 has the linear shape. It divides | segments so that it may break along the division | segmentation line part 12. FIG. At this time, the displaceable contact mechanism portion 830 is provided at a plurality of locations along the linear dividing line portion 12 according to the flatness of the plate material 10, the parallelism between the 10 plate material and the displaceable contact mechanism portion 830, and the like. , And is urged toward the plate member 10 with an urging force corresponding to the amount of displacement. For this reason, the displaceable contact mechanism portion 830 can be brought into contact with the linear dividing line portion 12 in the extending direction with as uniform force as possible. Thereby, the division load distribution can be made as uniform as possible along the extending direction of the linear division line portion 12, and the plate material 10 can be divided and divided with a smaller force. In addition, the same effects as those of the first embodiment and the second embodiment are obtained.

実際に、上記第２実施形態に係る板材分割装置２０によって、板材１０を分割し、分割に必要な分割負荷を測定した。その測定結果を図１４に示す。なお、測定条件は、次の通りである。まず、板材１０としては、サファイア基板を用いた。サファイア基板の板厚は８０μｍであり、これに、直線状分割ライン部１２として、長さ（基板の幅）２３ｍｍで、かつ、深さ約２０μｍの溝を形成した。また、２つのベースダイ１３０の間隔を２７０μｍに設定した。さらに、負荷条件として、１．３Ｎ／ｓｅｃで力を加えた。そして、３回の測定を行った（変位可能ベースＮｏ．１〜Ｎｏ．３）。   Actually, the plate material 10 was divided by the plate material dividing apparatus 20 according to the second embodiment, and the division load necessary for the division was measured. The measurement results are shown in FIG. Measurement conditions are as follows. First, a sapphire substrate was used as the plate material 10. The thickness of the sapphire substrate is 80 μm, and a groove having a length (substrate width) of 23 mm and a depth of about 20 μm is formed as the linear dividing line portion 12. Further, the interval between the two base dies 130 was set to 270 μm. Furthermore, force was applied at 1.3 N / sec as a load condition. And 3 times of measurement was performed (displaceable base No.1-No.3).

また、比較例として、上記と同様条件にて、変位可能当接機構部を有さない従来タイプの板材分割装置で板材１０を分割して、分割負荷を測定した（従来Ｎｏ．１〜Ｎｏ．３）。   In addition, as a comparative example, under the same conditions as described above, the plate material 10 was divided by a conventional type plate material dividing apparatus that does not have a displaceable contact mechanism, and the divided load was measured (conventional No. 1 to No. 1). 3).

この場合、比較例では、分割負荷が７２．３Ｎ、８７Ｎ、７４Ｎであり、平均は７７．７６６６７であり、比較的大きな分割負荷が必要となる。   In this case, in the comparative example, the divided loads are 72.3N, 87N, and 74N, and the average is 77.76667, which requires a relatively large divided load.

これに対し、本第２実施形態に係る板材分割装置２０では、分割負荷が６２．５Ｎ、６３Ｎ、６１．５Ｎであり、個々の値で見ても平均値で見ても、分割負荷が小さくなることがわかる。また、分割負荷のばらつきも小さく、比較的安定した分割負荷にすることもできると予測できる。   On the other hand, in the plate material dividing apparatus 20 according to the second embodiment, the division loads are 62.5N, 63N, and 61.5N, and the division load is small in terms of individual values and average values. I understand that Moreover, it can be predicted that the variation of the divided load is small and that a relatively stable divided load can be obtained.

また、同様の条件で板材１０を分割し、分割後の板材１０の分割縁部の真直度を測定した。図１５〜図１７は、第２実施形態に係る板材分割装置２０によって板材１０を分割した場合において、板材１０の分割縁部に関して、その一端からの位置と理想的な直線からのばらつき量との関係を示している。   Moreover, the board | plate material 10 was divided | segmented on the same conditions, and the straightness of the division | segmentation edge part of the board | plate material 10 after a division | segmentation was measured. 15 to 17, when the plate material 10 is divided by the plate material dividing device 20 according to the second embodiment, regarding the division edge portion of the plate material 10, the position from one end and the variation amount from the ideal straight line are as follows. Showing the relationship.

図１８〜図２０は、変位可能当接機構部を有さない従来タイプの板材分割装置で板材１０を分割した比較例において、上記と同様の関係を示している。   18 to 20 show the same relationship as described above in a comparative example in which the plate member 10 is divided by a conventional plate member dividing apparatus that does not have a displaceable contact mechanism.

これらの図から、比較例ではばらつきが大きくかつばらつきの最小値、最大値の差が大きいのに対し、第２実施形態に係る板材分割装置２０によって分割した例では、ばらつきが小さくかつばらつきの最小値、最大値の差も比較的小さく、真直度が良好であることがわかる。   From these figures, in the comparative example, the variation is large and the difference between the minimum value and the maximum value is large, whereas in the example divided by the plate material dividing apparatus 20 according to the second embodiment, the variation is small and the variation is minimum. It can be seen that the difference between the value and the maximum value is relatively small, and the straightness is good.

１０ 板材
１２ 直線状分割ライン部
２０，１２０ 板材分割装置
３０ 変位可能当接機構部
３２，１３２ 直線状当接部分
５０ 分割力印加機構部
１３０ ベースダイ
１３４ 一体型分割当接部
１３５ 固定端部
１３６ 当接端部
１３７ 弾性支持部
１３７ｈ 凹部
１４０ 分割刃
１４２ エッジ部
１５０ 分割力印加機構部
２３４ 弾性分割当接部
３３４，４３４ 分割当接部
３３５，４３５ 分割支持部
３３６ コイルバネ
４３６ バネ
５３６ エアシリンダ
６３４ 平行平板機構部
７３３ 検出部付一体型分割当接部
７３４ 一体型分割当接部
７３４ａ 検出部
８２０ 板材分割装置
８３０ 変位可能当接機構部
８４０ 板材固定部
８５０ 分割力印加機構部 DESCRIPTION OF SYMBOLS 10 Board | plate material 12 Linear division | segmentation line part 20,120 Board | plate material division | segmentation apparatus 30 Displaceable contact mechanism part 32,132 Linear contact part 50 Dividing force application mechanism part 130 Base die 134 Integrated division | segmentation contact part 135 Fixed end part 136 Contact end portion 137 Elastic support portion 137h Concavity 140 Split blade 142 Edge portion 150 Split force application mechanism portion 234 Elastic split contact portion 334, 434 Split contact portion 335, 435 Split support portion 336 Coil spring 436 Spring 536 Air cylinder 634 Parallel flat plate Mechanism part 733 Integrated split contact part with detection part 734 Integrated split contact part 734a Detection part 820 Plate material dividing device 830 Displaceable contact mechanism part 840 Plate material fixing part 850 Split force application mechanism part

Claims (9)

板材に形成された直線状分割ライン部に沿って前記板材を分割する板材分割装置であって、
前記直線状分割ライン部の延在方向に沿って前記板材の主面に当接可能な直線状当接部分を有し、前記直線状当接部分がその延在方向に沿って複数箇所で、前記板材と略直交する方向に沿って変位可能で、かつ、前記板材に向けてその変位量に応じた付勢力で付勢される変位可能当接機構部と、
前記板材を分割する力として、前記直線状当接部分を前記板材の主面に押付ける力を作用させる分割力印加機構部と、
を備え、
前記板材のうち前記直線状分割ライン部の側方部分を固定支持する板材固定部をさらに備え、
前記変位可能当接機構部は、前記板材固定部による固定支持部分から前記直線状分割ライン部を挟んで反対側で前記板材の主面に当接可能に配設され、
前記分割力印加機構部は、前記板材固定部及び前記変位可能当接機構部のうち少なくとも一方を、前記変位可能当接機構部を前記板材に押付ける方向に移動させる、板材分割装置。 A plate material dividing device for dividing the plate material along a linear dividing line portion formed on the plate material,
It has a linear contact portion that can contact the main surface of the plate along the extending direction of the linear dividing line portion, the linear contact portion at a plurality of locations along the extending direction, A displaceable contact mechanism that is displaceable along a direction substantially orthogonal to the plate material and is urged toward the plate material by an urging force corresponding to the amount of displacement;
As a force for dividing the plate material, a dividing force application mechanism that applies a force for pressing the linear contact portion against the main surface of the plate material;
With
A plate material fixing portion for fixing and supporting a side portion of the linear dividing line portion of the plate material;
The displaceable contact mechanism portion is disposed so as to be able to contact the main surface of the plate material on the opposite side across the linear dividing line portion from the fixed support portion by the plate material fixing portion,
The dividing force application mechanism unit moves at least one of the plate material fixing unit and the displaceable contact mechanism unit in a direction in which the displaceable contact mechanism unit is pressed against the plate material. 請求項１記載の板材分割装置であって、
前記変位可能当接機構部の前記直線状当接部分は、その延在方向に沿って設けられた複数の分割当接部分を有し、前記各分割当接部分がそれぞれ独立して前記板材と略直交する方向に変位可能で、かつ、独立して変位量に応じた付勢力で付勢される、板材分割装置。 The plate material splitting device according to claim 1,
The linear contact portion of the displaceable contact mechanism portion has a plurality of divided contact portions provided along an extending direction thereof, and each of the divided contact portions is independent of the plate material. A plate material splitting device that is displaceable in a substantially orthogonal direction and is independently biased by a biasing force according to a displacement amount. 請求項１又は請求項２記載の板材分割装置であって、
前記変位可能当接機構部は、前記直線状当接部分の延在方向に沿って複数箇所で、その直線状当接部分の変位量に応じた物理量を検出する検出部を有する、板材分割装置。 The plate material dividing device according to claim 1 or 2,
The displaceable contact mechanism section has a detection unit for detecting a physical quantity corresponding to the amount of displacement of the linear contact portion at a plurality of locations along the extending direction of the linear contact portion. . 請求項１〜請求項３のいずれかに記載の板材分割装置であって、
前記変位可能当接機構部は、
前記直線状分割ライン部の延在方向に沿って配設された複数の分割当接部と、
前記各分割当接部を前記板材と略直交する方向に沿って変位可能に支持する分割支持部と、
前記各分割当接部を前記板材に向けて付勢する複数の分割付勢部を有する、板材分割装置。 It is a board | plate material division | segmentation apparatus in any one of Claims 1-3,
The displaceable contact mechanism is
A plurality of split contact portions disposed along the extending direction of the linear split line portion;
A split support portion that supports each split contact portion so as to be displaceable along a direction substantially orthogonal to the plate member;
A plate material dividing device having a plurality of divided urging portions for urging the divided contact portions toward the plate material. 請求項４記載の板材分割装置であって、
前記各分割付勢部は、バネ又は圧縮剛性を呈する部材である、板材分割装置。 The plate material splitting device according to claim 4,
Each said division | segmentation biasing part is a board | plate material division | segmentation apparatus which is a member which exhibits a spring or compression rigidity. 請求項１〜請求項３のいずれかに記載の板材分割装置であって、
前記変位可能当接機構部は、
固定端部と当接端部との間に形成した凹部形成部分で前記当接端部を前記固定端部に対して変位可能かつ付勢可能に支持した一体型分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設した構成である、板材分割装置。 It is a board | plate material division | segmentation apparatus in any one of Claims 1-3,
The displaceable contact mechanism is
A plurality of integral-type split contact portions that support the contact end portion so as to be displaceable and biasable with respect to the fixed end portion at a recessed portion forming portion formed between the fixed end portion and the contact end portion, A plate material dividing device having a configuration arranged along the extending direction of the linear dividing line portion. 請求項１〜請求項３のいずれかに記載の板材分割装置であって、
前記変位可能当接機構部は、
弾性変形可能な材料で形成された弾性分割当接部を複数、前記直線状分割ライン部の延在方向に沿って配設した構成である、板材分割装置。 It is a board | plate material division | segmentation apparatus in any one of Claims 1-3,
The displaceable contact mechanism is
A plate material dividing device having a configuration in which a plurality of elastic division contact portions formed of an elastically deformable material are disposed along an extending direction of the linear division line portion. 請求項１〜請求項３のいずれかに記載の板材分割装置であって、
前記変位可能当接機構部は、
複数の平行平板機構部を、前記直線状分割ライン部の延在方向に沿って配設した構成である、板材分割装置。 It is a board | plate material division | segmentation apparatus in any one of Claims 1-3,
The displaceable contact mechanism is
A plate material dividing device having a configuration in which a plurality of parallel plate mechanism portions are arranged along the extending direction of the linear dividing line portion. 板材に形成された直線状分割ライン部に沿って前記板材を分割する板材分割方法であって、
前記板材のうち前記直線状分割ライン部の側方部分を固定支持する工程と、
分割用の当接部材を、前記板材の固定支持部分から前記直線状分割ライン部を挟んで反対側で前記直線状分割ライン部の延在方向に沿って前記板材の主面に当接させることで、前記当接部材のうち前記板材との当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所で前記板材と略直交する方向に沿って変位させると共に、その当接部分を前記直線状分割ライン部の延在方向に沿った複数箇所でそれぞれの変位量に応じた付勢力で付勢する工程と、
前記当接部材を前記板材の主面に押し当てることで、前記板材を前記直線状分割ライン部で割って分割する工程と、
を備えた板材分割方法。 A plate material dividing method for dividing the plate material along a linear dividing line portion formed on the plate material,
A step of fixing and supporting a side portion of the linear dividing line portion of the plate material;
The abutting member for division is brought into contact with the main surface of the plate material along the extending direction of the linear dividing line portion on the opposite side across the linear dividing line portion from the fixed support portion of the plate material. In the contact member, the contact portion with the plate material is displaced along a direction substantially orthogonal to the plate material at a plurality of locations along the extending direction of the linear dividing line portion, and the contact portion. Energizing with an urging force according to the amount of displacement at a plurality of locations along the extending direction of the linear dividing line part,
Dividing the plate material by dividing the plate material by the linear dividing line portion by pressing the contact member against the main surface of the plate material;
The board | substrate material dividing method provided with.

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