JP5465311B2 - 有機発光表示装置及びその製造方法 - Google Patents
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- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78606—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device
- H01L29/78633—Thin film transistors, i.e. transistors with a channel being at least partly a thin film with supplementary region or layer in the thin film or in the insulated bulk substrate supporting it for controlling or increasing the safety of the device with a light shield
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- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
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- H10K50/865—Arrangements for improving contrast, e.g. preventing reflection of ambient light comprising light absorbing layers, e.g. light-blocking layers
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Description
110 遮光膜
110a 反射層
120 バッファー層
130 酸化物半導体層
140 ゲート絶縁膜
140a ゲート電極
150 層間絶縁膜
160a ソース電極
160b ドレイン電極
170 保護膜
180、280、380 第1の電極
200 第2の電極
210 機能層
210a 正孔注入層
210b 正孔輸送層
290、390 有機発光層
Claims (10)
- 基板と、
前記基板上に形成された遮光膜と、
前記遮光膜を覆うように前記基板の全面に形成されたバッファー層と、
前記バッファー層上に形成され、ソース領域、ドレイン領域および前記ソース領域と前記ドレイン領域の間にあるチャンネル領域を有する酸化物半導体層と、
前記バッファー層上に形成された第1の電極と、
前記酸化物半導体層の前記チャンネル領域上に形成されたゲート絶縁層と、
前記ゲート絶縁層上に形成されたゲート電極と、
前記ゲート絶縁層と前記ゲート電極を覆う層間絶縁膜と、
前記酸化物半導体層の前記ソース領域と接続されたソース電極と、
前記酸化物半導体層の前記ドレイン領域と接続され、前記第1の電極と接続されたドレイン電極と、
前記ソース電極および前記ドレイン電極を覆うように形成され、前記第1の電極の一部領域を露出させるように形成された保護膜と、を含むことを特徴とする有機発光表示装置。 - 前記酸化物半導体層は前記遮光膜と重畳され、前記遮光膜の幅が前記酸化物半導体層の幅より大きいことを特徴とする、請求項1に記載の有機発光表示装置。
- 前記保護膜を通して露出した前記第1の電極の仕事関数は前記酸化物半導体層の仕事関数より大きいことを特徴とする、請求項1または2に記載の有機発光表示装置。
- 前記第1の電極と重畳されるように前記基板と前記バッファー層との間に形成された反射層をさらに含むことを特徴とする、請求項1ないし3のいずれか1項に記載の有機発光表示装置。
- 基板を準備するステップと、
前記基板上に遮光膜を形成するステップと、
前記遮光膜を覆うように前記基板の全面にバッファー層を形成するステップと、
ソース領域、ドレイン領域および前記ソース領域と前記ドレイン領域の間にあるチャンネル領域を有するように酸化物半導体層を前記バッファー層上に形成するステップと、
前記バッファー層上に第1の電極を形成するステップと、
前記酸化物半導体層の前記チャンネル領域上にゲート絶縁層を、前記ゲート絶縁層上にゲート電極を形成するステップと、
前記ゲート絶縁層と前記ゲート電極を覆う層間絶縁膜を形成するステップと、
前記酸化物半導体層の前記ソース領域と接続されたソース電極を形成するステップと、
前記酸化物半導体層の前記ドレイン領域と接続され、前記第1の電極と接続されたドレイン電極を形成するステップと、
前記ソース電極および前記ドレイン電極を覆い、かつ、前記第1の電極の一部領域を露出させるように保護膜を形成するステップと、を含むことを特徴とする有機発光表示装置の製造方法。 - 前記ゲート絶縁膜および前記ゲート電極を形成するステップは、
前記基板の前記全面にゲート絶縁物質とゲート電極物質を順次形成するステップと、
前記チャンネル領域上に第1のフォトレジストパターンを形成し、前記第1の電極上に第2のフォトレジストパターンを形成し、前記第1のフォトレジストパターンを前記第2のフォトレジストパターンより高くするステップと、
前記第1および第2のフォトレジストパターンをマスクとして用いたエッチング工程で前記ゲート電極物質および前記ゲート絶縁物質をパターニングし、前記チャンネル領域および前記第1の電極上にゲート絶縁膜およびゲート電極を形成し、かつ、前記ソース領域および前記ドレイン領域を露出するステップと、
前記ソース領域および前記ドレイン領域をヘリウム(He)プラズマ、水素(H2)プラズマ及び窒素(N2)プラズマのうち少なくともいずれか1つでプラズマ処理するステップと、
前記第1のフォトレジストパターンを低くし、前記第2のフォトレジストパターンを除去するように、前記第1および第2のフォトレジストパターンをアッシングするステップと、
前記第1の電極上のゲート電極及びゲート絶縁膜を除去し、前記第1の電極を露出させるステップと、
前記チャンネル領域上の前記第1のフォトレジストパターンを除去するステップと、を含むことを特徴とする、請求項5に記載の有機発光表示装置の製造方法。 - 前記ゲート絶縁膜と前記ゲート電極を形成するステップは、
前記基板の前記全面にゲート絶縁物質とゲート電極物質を順次形成するステップと、
前記チャンネル領域上にフォトレジストパターンを形成するステップと、
前記フォトレジストパターンをマスクとして用いたエッチング工程で前記ゲート電極物質およびゲート絶縁物質をパターニングし、前記チャンネル領域上にゲート絶縁膜およびゲート電極を形成し、かつ、前記ソース領域、前記ドレイン領域および前記第1の電極を露出するステップと、
前記ソース領域、前記ドレイン領域および前記第1の電極をヘリウム(He)プラズマ、水素(H2)プラズマ及び窒素(N2)プラズマのうち少なくともいずれか1つでプラズマ処理するステップと、
前記チャンネル領域上の前記フォトレジストパターンを除去するステップと、を含むことを特徴とする、請求項5に記載の有機発光表示装置の製造方法。 - 前記保護膜を形成した後に、前記第1の電極を200℃〜300℃の温度で30分〜2時間熱処理し、前記第1の電極の仕事関数を前記酸化物半導体層の仕事関数より大きくするステップをさらに含むことを特徴とする、請求項5ないし7のいずれか1項に記載の有機発光表示装置の製造方法。
- 前記酸化物半導体層は前記バッファー層を挟んで前記遮光膜と重畳され、前記遮光膜の幅が前記酸化物半導体層の幅より大きいことを特徴とする、請求項5ないし8のいずれか1項に記載の有機発光表示装置の製造方法。
- 前記第1の電極と重畳されるように前記基板とバッファー層との間に反射層を形成することをさらに含むことを特徴とする、請求項5ないし9のいずれか1項に記載の有機発光表示装置の製造方法。
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KR1020120119615A KR101970560B1 (ko) | 2012-02-09 | 2012-10-26 | 유기 발광 표시 장치 및 이의 제조 방법 |
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US10861978B2 (en) | 2012-04-02 | 2020-12-08 | Samsung Display Co., Ltd. | Display device |
KR102002858B1 (ko) * | 2012-08-10 | 2019-10-02 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
KR20140061808A (ko) * | 2012-11-14 | 2014-05-22 | 삼성디스플레이 주식회사 | 유기물 증착 장치 |
KR102072800B1 (ko) * | 2012-11-29 | 2020-02-04 | 삼성디스플레이 주식회사 | 박막 트랜지스터의 제조 방법, 이를 포함하는 유기 발광 표시 장치의 제조 방법 및 이를 통해 제조된 박막 트랜지스터 |
KR20140081413A (ko) * | 2012-12-21 | 2014-07-01 | 삼성디스플레이 주식회사 | 박막 트랜지스터 표시판 및 그 제조 방법 |
CN103295962A (zh) * | 2013-05-29 | 2013-09-11 | 京东方科技集团股份有限公司 | 阵列基板及其制作方法,显示装置 |
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