JP5409033B2 - 半導体装置の作製方法 - Google Patents
半導体装置の作製方法 Download PDFInfo
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- JP5409033B2 JP5409033B2 JP2009028859A JP2009028859A JP5409033B2 JP 5409033 B2 JP5409033 B2 JP 5409033B2 JP 2009028859 A JP2009028859 A JP 2009028859A JP 2009028859 A JP2009028859 A JP 2009028859A JP 5409033 B2 JP5409033 B2 JP 5409033B2
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- crystal semiconductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/1262—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate
- H01L27/1266—Multistep manufacturing methods with a particular formation, treatment or coating of the substrate the substrate on which the devices are formed not being the final device substrate, e.g. using a temporary substrate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/66772—Monocristalline silicon transistors on insulating substrates, e.g. quartz substrates
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- Recrystallisation Techniques (AREA)
- Electroluminescent Light Sources (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Description
本実施の形態を、図1(A)〜図1(F)を用いて説明する。
本実施の形態を、図13(A)〜図13(D)及び図14を用いて説明する。
本実施の形態を、図2(A)〜図2(D)、図3(A)〜図3(D)を用いて説明する。
本実施の形態を図12(A)〜図12(E)を用いて説明する。本実施の形態では、実施の形態1とは異なる作製工程で、単結晶半導体層を得ることができる。
本実施の形態では、実施の形態1〜実施の形態4に基づいて得られた単結晶半導体層106を用いて半導体装置を作製する方法を、図4(A)〜図4(F)、図5(A)〜図5(D)を使用して説明する。
本実施の形態を、図6、図7、図8(A)〜図8(B)、図9(A)〜図9(B)、図10(A)〜図10(C)、図11(A)〜図11(C)を用いて説明する。本実施の形態では、実施の形態1〜実施の形態4に基づいて形成した単結晶半導体層を、実施の形態5に応用して得られたトランジスタやCMOS回路を、様々な半導体装置に応用した例について述べる。
102 イオンビーム
103 損傷領域
105 絶縁層
106 単結晶半導体層
108 空洞
111 容器
112 溶融スズ
113 液状ガラス
114 基板
115 接着材
116 基板
121 島状半導体膜
122 島状半導体膜
123 ゲート絶縁膜
125 ゲート電極
126 ゲート電極
126 ゲート電極
131 チャネル形成領域
132a 低濃度不純物領域
132b 低濃度不純物領域
133 チャネル形成領域
134a 高濃度不純物領域
134b 高濃度不純物領域
135a サイドウォール
135b サイドウォール
136a サイドウォール
136b サイドウォール
138 ゲート絶縁膜
139 ゲート絶縁膜
141a 高濃度不純物領域
141b 高濃度不純物領域
142 層間絶縁膜
143a 電極
143b 電極
144a 電極
144b 電極
145 nチャネル型トランジスタ
146 pチャネル型トランジスタ
147 層間絶縁膜
148 電極
149 CMOS回路
151 基板
200 マイクロプロセッサ
201 演算回路
202 演算回路制御部
203 命令解析部
204 割込制御部
205 タイミング制御部
206 レジスタ
207 レジスタ制御部
208 バスインターフェース
209 専用メモリ
210 メモリインターフェース
211 半導体装置
212 アナログ回路部
213 デジタル回路部
214 共振回路
215 整流回路
216 定電圧回路
217 リセット回路
218 発振回路
219 復調回路
220 変調回路
221 RFインターフェース
222 制御レジスタ
223 クロックコントローラ
224 インターフェース
225 中央処理ユニット
225 中央処理ユニット
226 ランダムアクセスメモリ
227 専用メモリ
228 アンテナ
229 容量部
230 電源管理回路
241 トランジスタ
242 チャネル形成領域
243 不純物領域
244 ゲート絶縁膜
245 走査線
246 層間絶縁膜
247 層間絶縁膜
248a 信号線
248b 電極
249 画素電極
251 柱状スペーサ
252 配向膜
253 液晶層
254 配向膜
255 対向電極
256 基板
259 島状半導体膜
261 表示制御用トランジスタ
262 チャネル形成領域
263a 不純物領域
263b 不純物領域
264 ゲート絶縁膜
265 ゲート電極
266 層間絶縁膜
267 層間絶縁膜
268a 電極
268b 電流供給線
269 画素電極
271 隔壁層
272 EL層
273 対向電極
274 樹脂層
275 基板
279 島状半導体膜
281 選択用トランジスタ
283a 不純物領域
283b 不純物領域
285 走査線
288a 信号線
288b 電極
289 島状半導体膜
301 携帯電話機
302 表示部
303 操作スイッチ
311 デジタルプレーヤ
312 表示部
313 操作部
314 イヤホン
321 電子ブック
322 表示部
323 操作スイッチ
351 筐体
352 筐体
358 イヤホン端子
361 表示部
362 スピーカ
363 マイクロフォン
364 操作キー
365 ポインティングデバイス
366 表面カメラ用レンズ
367 外部接続端子
371 キーボード
372 外部メモリスロット
373 裏面カメラ
374 ライト
Claims (10)
- 絶縁膜が形成された単結晶半導体基板に、前記絶縁膜を介してイオンビームを照射し、前記単結晶半導体基板中に損傷領域を形成し、
液状ガラスよりも密度の高い液体上に、前記液状ガラスを浮かべて板状にし、
前記板状の液状ガラス上に、前記単結晶半導体基板を、前記絶縁膜と前記液状ガラスが向き合うように配置し、
前記板状の液状ガラスと前記単結晶半導体基板を徐冷することにより、前記板状の液状ガラスからガラス基板を形成すると同時に、前記ガラス基板と前記単結晶半導体基板を接合させ、
前記損傷領域に沿って、前記単結晶半導体基板から単結晶半導体層を分離することを特徴とする半導体装置の作製方法。 - 絶縁膜が形成された単結晶半導体基板に、前記絶縁膜を介してイオンビームを照射し、前記単結晶半導体基板中に損傷領域を形成し、
液状ガラスよりも密度の高い液体上に、前記液状ガラスを浮かべて板状にし、
前記板状の液状ガラス上に、前記単結晶半導体基板を、前記絶縁膜と前記液状ガラスが向き合うように配置し、
前記板状の液状ガラスと前記単結晶半導体基板を徐冷することにより、前記板状の液状ガラスからガラス基板を形成すると同時に、前記ガラス基板と前記単結晶半導体基板を接合させ、
前記損傷領域に沿って、前記単結晶半導体基板から単結晶半導体層を分離し、
前記板状の液状ガラス上に、前記単結晶半導体基板を、前記絶縁膜と前記液状ガラスが向き合うように配置することによって、前記板状の液状ガラスと前記絶縁膜との間の異物を前記板状の液状ガラスの中に溶かし込むことを特徴とする半導体装置の作製方法。 - 絶縁膜が形成された単結晶半導体基板に、前記絶縁膜を介してイオンビームを照射し、前記単結晶半導体基板中に損傷領域を形成し、
液状ガラスよりも密度の高い液体上に、前記液状ガラスを浮かべて板状にし、
前記板状の液状ガラス上に、前記単結晶半導体基板を、前記絶縁膜と前記液状ガラスが向き合うように配置し、
前記単結晶半導体基板の、前記絶縁膜が形成されていない面に、基板支持部を接着し、
前記板状の液状ガラスと前記単結晶半導体基板を徐冷することにより、前記板状の液状ガラスからガラス基板を形成すると同時に、前記ガラス基板と前記単結晶半導体基板を接合させ、
前記損傷領域に沿って、前記基板支持部が接着された前記単結晶半導体基板から、単結晶半導体層を分離することを特徴とする半導体装置の作製方法。 - 絶縁膜が形成された単結晶半導体基板に、前記絶縁膜を介してイオンビームを照射し、前記単結晶半導体基板中に損傷領域を形成し、
固体材料上に、固体ガラスを設置し、
前記固体ガラス上に、前記単結晶半導体基板を、前記絶縁膜と前記固体ガラスが向き合うように配置し、
前記固体ガラスと前記固体材料を加熱して、前記固体ガラスを前記液状ガラスにし、かつ、前記固体材料を液体材料にし、
前記液状ガラスと前記単結晶半導体基板を徐冷することにより、前記液状ガラスからガラス基板を形成すると同時に、前記ガラス基板と前記単結晶半導体基板を接合させ、
前記損傷領域に沿って、前記単結晶半導体基板から単結晶半導体層を分離し、
前記液体材料は、前記液状ガラスよりも密度が高いことを特徴とする半導体装置の作製方法。 - 請求項1乃至請求項4のいずれか1項において、
前記絶縁膜は、酸化シリコン膜、窒化シリコン膜、酸化窒化シリコン膜、窒化酸化シリコン膜、酸化ゲルマニウム膜、窒化ゲルマニウム膜、酸化窒化ゲルマニウム膜、窒化酸化ゲルマニウム膜、酸化アルミニウム膜、酸化タンタル膜、酸化ハフニウム膜、窒化アルミニウム膜、酸化窒化アルミニウム膜、窒化酸化アルミニウム膜のいずれか1つ、あるいは、2つ以上を有することを特徴とする半導体装置の作製方法。 - 請求項1乃至請求項4のいずれか1項において、
前記絶縁膜は、前記単結晶半導体基板の表面を、塩素を含む気体中で酸化して形成される酸化膜であることを特徴とする半導体装置の作製方法。 - 請求項1乃至請求項6のいずれか1項において、
前記イオンビームは、水素イオンを含むビームであることを特徴とする半導体装置の作製方法。 - 単結晶半導体基板上に、ポーラス状の第1の単結晶半導体層を形成し、
前記第1の単結晶半導体層表面に、前記第1の単結晶半導体層よりも密度の高い第2の単結晶半導体層を形成し、
液状ガラスよりも密度の高い液体上に、前記液状ガラスを浮かべて板状にし、
前記板状の液状ガラス上に、前記第1及び第2の単結晶半導体層が形成された単結晶半導体基板を、前記第2の単結晶半導体層と前記液状ガラスが向き合うように配置し、
前記板状の液状ガラスと前記単結晶半導体基板を徐冷することにより、前記板状の液状ガラスからガラス基板を形成すると同時に、前記ガラス基板と前記単結晶半導体基板を接合させ、
前記第1の単結晶半導体層に沿って、前記単結晶半導体基板から前記第2の単結晶半導体層を分離することを特徴とする半導体装置の作製方法。 - 請求項8において、
前記第1の単結晶半導体層は、前記単結晶半導体基板を陽極酸化することによって形成することを特徴とする半導体装置の作製方法。 - 請求項1乃至請求項9のいずれか1項において、
前記単結晶半導体基板は、単結晶シリコン基板、単結晶ゲルマニウム基板、単結晶シリコンゲルマニウム基板、ガリウムヒ素を含む化合物半導体基板、インジウムリンを含む化合物半導体基板のいずれか1つであることを特徴とする半導体装置の作製方法。
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JP2001223175A (ja) | 2000-02-08 | 2001-08-17 | Toyota Central Res & Dev Lab Inc | レーザアニール装置およびレーザアニール方法 |
JP4807080B2 (ja) * | 2006-01-13 | 2011-11-02 | 株式会社デンソー | 半導体装置の製造方法 |
US7790565B2 (en) * | 2006-04-21 | 2010-09-07 | Corning Incorporated | Semiconductor on glass insulator made using improved thinning process |
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2009
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