JP5407748B2 - 半導体ウェーハの研磨方法 - Google Patents
半導体ウェーハの研磨方法 Download PDFInfo
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- JP5407748B2 JP5407748B2 JP2009245243A JP2009245243A JP5407748B2 JP 5407748 B2 JP5407748 B2 JP 5407748B2 JP 2009245243 A JP2009245243 A JP 2009245243A JP 2009245243 A JP2009245243 A JP 2009245243A JP 5407748 B2 JP5407748 B2 JP 5407748B2
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- Prior art keywords
- polishing
- work carrier
- wafer
- semiconductor wafer
- acceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000005498 polishing Methods 0.000 title claims description 112
- 239000004065 semiconductor Substances 0.000 title claims description 44
- 238000000034 method Methods 0.000 title claims description 24
- 230000001133 acceleration Effects 0.000 claims description 39
- 239000004744 fabric Substances 0.000 claims description 37
- 238000003825 pressing Methods 0.000 claims description 11
- 238000007517 polishing process Methods 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 description 20
- 230000000052 comparative effect Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000009434 installation Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 238000005336 cracking Methods 0.000 description 2
- 238000013016 damping Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
A<B ・・・(1)
ただし、前記テーブル加速度をA(mm/s2)、前記ワークキャリア加速度をB(mm/s2)とする。
A<B ・・・(1)
ただし、テーブル加速度をA(mm/s2)、ワークキャリア加速度をB(mm/s2)とする。
前記図1に示す構成の研磨装置を用いて半導体ウェーハを研磨し、振動の発生状況を調査した。研磨を開始する際は、研磨クロスと半導体ウェーハを押し付けた状態で、静止したワークキャリアとテーブルを回転させ、所定の回転数とした。研磨開始の操作において、ワークキャリアに押し付け力を加重することなく、ワークキャリアの自重により、ウェーハと研磨クロスを押し付けた。
図3は、経過時間(秒)とテーブルおよびワークキャリアの回転数(rpm)の関係を示す図である。同図に示すグラフにより、本発明例および比較例ともに設定された時間の経過通りに、テーブルおよびワークキャリアが所定の回転数となっていることが確認できた。同図に示す回転数(rpm)から、各経過時間でのテーブルおよびワークキャリアの最大周速度を算出した。
5:半導体ウェーハ、 X:最大周速度点
Claims (3)
- ワークキャリアにより保持された半導体ウェーハと、テーブルが備える研磨クロスとを押し付けつつ、前記ワークキャリアと前記テーブルとを回転させて前記半導体ウェーハを研磨する方法であって、
前記研磨クロスと前記半導体ウェーハを押し付けた状態で、静止した前記テーブルと前記ワークキャリアを所定の回転数として研磨を開始する際に、テーブル加速度とワークキャリア加速度が、下記(1)式を満たすことを特徴とする半導体ウェーハの研磨方法。
A<B ・・・(1)
ただし、前記テーブル加速度をA(mm/s2)、前記ワークキャリア加速度をB(mm/s2)とする。 - 前記半導体ウェーハの直径が、前記テーブルの直径の30%以上であることを特徴とする請求項1に記載の半導体ウェーハの研磨方法。
- 前記所定の回転数が、前記ワークキャリアと前記テーブルで等しいことを特徴とする請求項1または2に記載の半導体ウェーハの研磨方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009245243A JP5407748B2 (ja) | 2009-10-26 | 2009-10-26 | 半導体ウェーハの研磨方法 |
DE112010004142.3T DE112010004142B4 (de) | 2009-10-26 | 2010-09-28 | Verfahren zum polieren eines halbleiter-wafers |
PCT/JP2010/005812 WO2011052132A1 (ja) | 2009-10-26 | 2010-09-28 | 半導体ウェーハの研磨方法 |
KR1020127011044A KR101329070B1 (ko) | 2009-10-26 | 2010-09-28 | 반도체 웨이퍼의 연마 방법 |
CN201080048462.0A CN102574266B (zh) | 2009-10-26 | 2010-09-28 | 半导体晶片的研磨方法 |
US13/502,879 US8784159B2 (en) | 2009-10-26 | 2010-09-28 | Method for polishing semiconductor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009245243A JP5407748B2 (ja) | 2009-10-26 | 2009-10-26 | 半導体ウェーハの研磨方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011091296A JP2011091296A (ja) | 2011-05-06 |
JP5407748B2 true JP5407748B2 (ja) | 2014-02-05 |
Family
ID=43921570
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009245243A Active JP5407748B2 (ja) | 2009-10-26 | 2009-10-26 | 半導体ウェーハの研磨方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8784159B2 (ja) |
JP (1) | JP5407748B2 (ja) |
KR (1) | KR101329070B1 (ja) |
CN (1) | CN102574266B (ja) |
DE (1) | DE112010004142B4 (ja) |
WO (1) | WO2011052132A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5407748B2 (ja) * | 2009-10-26 | 2014-02-05 | 株式会社Sumco | 半導体ウェーハの研磨方法 |
BR112013033536A2 (pt) | 2011-07-05 | 2017-12-19 | Dexerials Corp | composição de resina formadora de folha de fósforo |
CN105983899A (zh) * | 2015-02-11 | 2016-10-05 | 中芯国际集成电路制造(上海)有限公司 | 化学机械研磨方法 |
JP6298430B2 (ja) * | 2015-09-18 | 2018-03-20 | 東芝テック株式会社 | 情報端末装置、情報処理装置、情報処理システムおよびプログラム |
CN108807228B (zh) * | 2018-06-05 | 2020-10-16 | 安徽省华腾农业科技有限公司经开区分公司 | 一种半导体芯片生产工艺 |
Family Cites Families (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5234867A (en) * | 1992-05-27 | 1993-08-10 | Micron Technology, Inc. | Method for planarizing semiconductor wafers with a non-circular polishing pad |
KR100241537B1 (ko) * | 1996-06-21 | 2000-02-01 | 김영환 | 반도체 소자의 층간 절연막 평탄화 방법 |
JPH1071571A (ja) * | 1996-06-27 | 1998-03-17 | Fujitsu Ltd | 研磨布、研磨布の表面処理方法、及び研磨布の洗浄方法 |
JPH10329011A (ja) * | 1997-03-21 | 1998-12-15 | Canon Inc | 精密研磨装置及び方法 |
JP2000000756A (ja) * | 1998-06-16 | 2000-01-07 | Ebara Corp | 研磨装置 |
JP2000006013A (ja) * | 1998-06-18 | 2000-01-11 | Ebara Corp | ポリッシング装置 |
JP2000308960A (ja) * | 1999-02-26 | 2000-11-07 | Fujikoshi Mach Corp | ポリシング装置 |
EP1307319A2 (en) * | 2000-08-11 | 2003-05-07 | Rodel Holdings, Inc. | Chemical mechanical planarization of metal substrates |
US6790768B2 (en) * | 2001-07-11 | 2004-09-14 | Applied Materials Inc. | Methods and apparatus for polishing substrates comprising conductive and dielectric materials with reduced topographical defects |
US6660637B2 (en) * | 2001-09-28 | 2003-12-09 | Infineon Technologies Ag | Process for chemical mechanical polishing |
TWI295950B (en) * | 2002-10-03 | 2008-04-21 | Applied Materials Inc | Method for reducing delamination during chemical mechanical polishing |
US8348720B1 (en) * | 2007-06-19 | 2013-01-08 | Rubicon Technology, Inc. | Ultra-flat, high throughput wafer lapping process |
JP5336799B2 (ja) | 2008-09-24 | 2013-11-06 | 東京エレクトロン株式会社 | 化学的機械研磨装置、化学的機械研磨方法及び制御プログラム |
JP5407748B2 (ja) * | 2009-10-26 | 2014-02-05 | 株式会社Sumco | 半導体ウェーハの研磨方法 |
-
2009
- 2009-10-26 JP JP2009245243A patent/JP5407748B2/ja active Active
-
2010
- 2010-09-28 WO PCT/JP2010/005812 patent/WO2011052132A1/ja active Application Filing
- 2010-09-28 DE DE112010004142.3T patent/DE112010004142B4/de active Active
- 2010-09-28 KR KR1020127011044A patent/KR101329070B1/ko active IP Right Grant
- 2010-09-28 US US13/502,879 patent/US8784159B2/en active Active
- 2010-09-28 CN CN201080048462.0A patent/CN102574266B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
CN102574266B (zh) | 2015-07-22 |
KR101329070B1 (ko) | 2013-11-14 |
JP2011091296A (ja) | 2011-05-06 |
KR20120060910A (ko) | 2012-06-12 |
DE112010004142T5 (de) | 2012-12-06 |
CN102574266A (zh) | 2012-07-11 |
US20120208439A1 (en) | 2012-08-16 |
DE112010004142B4 (de) | 2019-01-24 |
US8784159B2 (en) | 2014-07-22 |
WO2011052132A1 (ja) | 2011-05-05 |
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