JP5401199B2 - 線形的誘電特性を示す誘電体薄膜組成物 - Google Patents
線形的誘電特性を示す誘電体薄膜組成物 Download PDFInfo
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- JP5401199B2 JP5401199B2 JP2009180554A JP2009180554A JP5401199B2 JP 5401199 B2 JP5401199 B2 JP 5401199B2 JP 2009180554 A JP2009180554 A JP 2009180554A JP 2009180554 A JP2009180554 A JP 2009180554A JP 5401199 B2 JP5401199 B2 JP 5401199B2
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- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Inorganic Insulating Materials (AREA)
- Semiconductor Memories (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Description
SnO2が添加されたBSTO薄膜の誘電特性を効果的に評価するために、下記の通り連続組成拡散法を用いて一つの基板上に全組成を連続的に蒸着させながら2,500個の電極を用いて2,500種類の組成を評価し、高い誘電定数を維持する反面、低い誘電損失とチューナビリティーを示す誘電体組成を開発した。
Claims (1)
- 下記組成式で表示される、高い誘電定数を維持しながら低い誘電損失とチューナビリティーを示す線形的な誘電特性を有する誘電体薄膜組成物であり、
Ba(1−x)SrxTi(1−y)SnyO3
(式中、モル分率xは0.35≦x≦0.39の範囲であり、モル分率yは0.15≦y≦0.18の範囲である)
オフアクシス反応性スパッタリング法によりBaTiO3、SrTiO3およびSnO2を同時にスパッタリングすることによって、(Ba、Sr)TiO3(BSTO)薄膜に錫酸化物(SnO2)をモル分率で15〜18%添加し製造された、位置に応じて連続的に異なる組成を有するものである、誘電体薄膜組成物。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080077784A KR100997379B1 (ko) | 2008-08-08 | 2008-08-08 | 선형적 유전특성을 나타내는 유전체 박막 조성물 |
KR10-2008-0077784 | 2008-08-08 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010045350A JP2010045350A (ja) | 2010-02-25 |
JP5401199B2 true JP5401199B2 (ja) | 2014-01-29 |
Family
ID=41382200
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Application Number | Title | Priority Date | Filing Date |
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JP2009180554A Expired - Fee Related JP5401199B2 (ja) | 2008-08-08 | 2009-08-03 | 線形的誘電特性を示す誘電体薄膜組成物 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8030237B2 (ja) |
EP (1) | EP2151831B1 (ja) |
JP (1) | JP5401199B2 (ja) |
KR (1) | KR100997379B1 (ja) |
AT (1) | ATE535918T1 (ja) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6921702B2 (en) * | 2002-07-30 | 2005-07-26 | Micron Technology Inc. | Atomic layer deposited nanolaminates of HfO2/ZrO2 films as gate dielectrics |
US7101813B2 (en) | 2002-12-04 | 2006-09-05 | Micron Technology Inc. | Atomic layer deposited Zr-Sn-Ti-O films |
US6958302B2 (en) * | 2002-12-04 | 2005-10-25 | Micron Technology, Inc. | Atomic layer deposited Zr-Sn-Ti-O films using TiI4 |
US7972974B2 (en) | 2006-01-10 | 2011-07-05 | Micron Technology, Inc. | Gallium lanthanide oxide films |
CN102208527B (zh) * | 2011-05-06 | 2013-06-19 | 四川大学 | 钛酸锶钡基功能薄膜低温制备方法 |
KR101434327B1 (ko) * | 2013-03-29 | 2014-08-27 | (주)알에프트론 | 투명 화합물 반도체 및 그의 p-타입 도핑 방법 |
JP2017109904A (ja) * | 2015-12-17 | 2017-06-22 | 株式会社村田製作所 | ペロブスカイト型磁器組成物、ペロブスカイト型磁器組成物を含む配合組成物、ペロブスカイト型磁器組成物の製造方法、および積層セラミックコンデンサの製造方法 |
KR101867378B1 (ko) | 2016-08-05 | 2018-06-15 | 한국과학기술연구원 | Bsto 유전체를 갖는 축전지의 제조 방법 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
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US55820A (en) * | 1866-06-26 | Improved ice-cream freezer | ||
DE1490659B2 (de) * | 1964-09-17 | 1972-01-13 | Siemens AG, 1000 Berlin u. 8000 München | Gesinterter elektrischer kaltleiterwiderstandskoerper und verfahren zu seiner herstellung |
JPS5674917A (en) * | 1979-11-26 | 1981-06-20 | Tdk Electronics Co Ltd | Nonnlinear dielectric element |
JPS57167617A (en) * | 1981-04-08 | 1982-10-15 | Murata Manufacturing Co | Grain boundary insulating type semiconductor porcelain composition |
JPS6019081B2 (ja) * | 1982-08-04 | 1985-05-14 | 株式会社村田製作所 | 高誘電率磁器組成物 |
JPS60264359A (ja) * | 1984-06-08 | 1985-12-27 | 住友特殊金属株式会社 | マイクロ波用誘電体磁器 |
JPH04357609A (ja) * | 1991-06-03 | 1992-12-10 | Matsushita Electric Ind Co Ltd | 誘電体磁器組成物 |
KR100325967B1 (ko) | 1992-04-20 | 2002-06-20 | 윌리엄 비. 켐플러 | 유전체 물질에의 전기 접속부 |
JPH0912357A (ja) * | 1995-04-25 | 1997-01-14 | Matsushita Electric Ind Co Ltd | 誘電体磁器組成物 |
US5604167A (en) * | 1995-10-16 | 1997-02-18 | Ferro Corporation | Y5V dielectric composition |
US6204525B1 (en) | 1997-09-22 | 2001-03-20 | Murata Manufacturing Co., Ltd. | Ferroelectric thin film device and method of producing the same |
KR100353863B1 (ko) * | 1998-09-10 | 2003-01-24 | 주식회사 케이티 | 마이크로파유전체세라믹조성물 |
US6444336B1 (en) | 2000-12-21 | 2002-09-03 | The Regents Of The University Of California | Thin film dielectric composite materials |
JP2005259393A (ja) * | 2004-03-09 | 2005-09-22 | Fuji Electric Advanced Technology Co Ltd | 誘電体の製造方法 |
JP5131595B2 (ja) * | 2006-07-07 | 2013-01-30 | 株式会社村田製作所 | 誘電体セラミック、及びセラミック電子部品、並びに積層セラミックコンデンサ |
-
2008
- 2008-08-08 KR KR1020080077784A patent/KR100997379B1/ko not_active IP Right Cessation
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2009
- 2009-08-03 JP JP2009180554A patent/JP5401199B2/ja not_active Expired - Fee Related
- 2009-08-06 US US12/537,198 patent/US8030237B2/en not_active Expired - Fee Related
- 2009-08-10 AT AT09010308T patent/ATE535918T1/de active
- 2009-08-10 EP EP09010308A patent/EP2151831B1/en not_active Not-in-force
Also Published As
Publication number | Publication date |
---|---|
US8030237B2 (en) | 2011-10-04 |
JP2010045350A (ja) | 2010-02-25 |
KR100997379B1 (ko) | 2010-11-30 |
KR20100018990A (ko) | 2010-02-18 |
ATE535918T1 (de) | 2011-12-15 |
EP2151831B1 (en) | 2011-11-30 |
EP2151831A2 (en) | 2010-02-10 |
US20100035749A1 (en) | 2010-02-11 |
EP2151831A3 (en) | 2010-09-15 |
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