JP5372515B2 - 横方向に成長したナノチューブの形成方法 - Google Patents
横方向に成長したナノチューブの形成方法 Download PDFInfo
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- JP5372515B2 JP5372515B2 JP2008542309A JP2008542309A JP5372515B2 JP 5372515 B2 JP5372515 B2 JP 5372515B2 JP 2008542309 A JP2008542309 A JP 2008542309A JP 2008542309 A JP2008542309 A JP 2008542309A JP 5372515 B2 JP5372515 B2 JP 5372515B2
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- nanotubes
- lateral opening
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82B—NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS, MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES AS DISCRETE UNITS; MANUFACTURE OR TREATMENT THEREOF
- B82B3/00—Manufacture or treatment of nanostructures by manipulation of individual atoms or molecules, or limited collections of atoms or molecules as discrete units
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
- H01L23/53276—Conductive materials containing carbon, e.g. fullerenes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/10—Applying interconnections to be used for carrying current between separate components within a device
- H01L2221/1068—Formation and after-treatment of conductors
- H01L2221/1094—Conducting structures comprising nanotubes or nanowires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/70—Nanostructure
- Y10S977/734—Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
- Y10S977/742—Carbon nanotubes, CNTs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/89—Deposition of materials, e.g. coating, cvd, or ald
- Y10S977/891—Vapor phase deposition
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/939—Electron emitter, e.g. spindt emitter tip coated with nanoparticles
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Nanotechnology (AREA)
- Carbon And Carbon Compounds (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Memories (AREA)
- Electrodes Of Semiconductors (AREA)
Description
Claims (5)
- ナノチューブを横方向に成長させる方法であって、
二つの金属性触媒の間に延びる横方向開口を形成するステップであって、前記横方向開口は首部分と空洞部分とを備えるステップと、
前記二つの金属性触媒の間に連続性横方向電気導体を形成すべく、前記各金属性触媒から半径方向にナノチューブを成長させる制約スペースとして、前記横方向開口の前記空洞部分を用いるステップと、
前記横方向開口の前記首部分の上方にプラズマを形成することにより、前記二つの金属性触媒の間の閉塞された直線路内だけに前記ナノチューブを成長させるステップと、
前記連続性横方向電気導体と電気的に接触するビアを形成すべく、導電材料を前記首部分に充填するステップと
備える方法。 - ナノチューブを横方向に成長させる方法であって、
基板を形成するステップと、
前記基板の上方に犠牲層を形成するステップと、
前記犠牲層の上方に誘電体層を形成するステップと、
二つの金属性触媒柱の間に位置する前記誘電体層の一部と前記犠牲層の全てとを除去して横方向開口を形成するステップであって、前記横方向開口は、除去される前記誘電体層から形成された首部分と、除去される前記犠牲層から形成された空洞部分とを備えるステップと、
前記二つの金属性触媒柱の間に連続性横方向電気導体を形成すべく、二つの前記金属性触媒柱の各々から半径方向にナノチューブを成長させる制約スペースとして、前記横方向開口の前記空洞部分を用いるステップと、
前記横方向開口の前記首部分の上方にプラズマを形成することにより、前記二つの金属性触媒柱の間の閉塞された直線路内だけに前記ナノチューブを成長させるステップとを備え、
前記プラズマは、前記ナノチューブの成長方向を制御する横方向開口の空洞部分内に径方向電場を誘導すべく、前記横方向開口の前記首部分に沿う部分と、前記首部分の下方の前記空洞部分の下面とに電荷を堆積させる方法。 - 請求項2記載の方法は、更に、
前記連続性横方向電気導体と電気的に接触するビアを形成すべく、導電材料を前記首部分に充填するステップを備える方法。 - 請求項2記載の方法は、更に、
前記横方向開口の実質的に中心に前記横方向開口の前記首部分を形成するステップを備える方法。 - 請求項2記載の方法は、更に、
前記ナノチューブとしてカーボン・ナノチューブを形成するステップを備え、
二つの前記金属性触媒柱は、鉄、コバルト、白金、ニッケル又はモリブデンのうちの一つを含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/240,241 | 2005-09-30 | ||
US11/240,241 US7371677B2 (en) | 2005-09-30 | 2005-09-30 | Laterally grown nanotubes and method of formation |
PCT/US2006/037897 WO2008054374A2 (en) | 2005-09-30 | 2006-09-27 | Laterally grown nanotubes and method of formation |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009510800A JP2009510800A (ja) | 2009-03-12 |
JP5372515B2 true JP5372515B2 (ja) | 2013-12-18 |
Family
ID=38559644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008542309A Expired - Fee Related JP5372515B2 (ja) | 2005-09-30 | 2006-09-27 | 横方向に成長したナノチューブの形成方法 |
Country Status (7)
Country | Link |
---|---|
US (2) | US7371677B2 (ja) |
EP (1) | EP1952454A2 (ja) |
JP (1) | JP5372515B2 (ja) |
KR (1) | KR101354747B1 (ja) |
CN (1) | CN101512769B (ja) |
TW (2) | TWI402888B (ja) |
WO (1) | WO2008054374A2 (ja) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
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US7459013B2 (en) * | 2004-11-19 | 2008-12-02 | International Business Machines Corporation | Chemical and particulate filters containing chemically modified carbon nanotube structures |
FR2925764B1 (fr) * | 2007-12-20 | 2010-05-28 | Commissariat Energie Atomique | Procede de croissance horizontale de nanotubes/nanofibres. |
US8796822B2 (en) | 2011-10-07 | 2014-08-05 | Freescale Semiconductor, Inc. | Stacked semiconductor devices |
US9076664B2 (en) | 2011-10-07 | 2015-07-07 | Freescale Semiconductor, Inc. | Stacked semiconductor die with continuous conductive vias |
US20130181352A1 (en) * | 2012-01-16 | 2013-07-18 | Industry-Academic Cooperation Foundation at NamSeoul Unversity | Method of Growing Carbon Nanotubes Laterally, and Lateral Interconnections and Effect Transistor Using the Same |
JP6031948B2 (ja) * | 2012-10-31 | 2016-11-24 | 株式会社デンソー | 半導体素子の製造方法 |
US9082757B2 (en) | 2013-10-31 | 2015-07-14 | Freescale Semiconductor, Inc. | Stacked semiconductor devices |
US9246112B2 (en) | 2014-01-08 | 2016-01-26 | International Business Machines Corporation | Semiconductor device with ballistic gate length structure |
US10002653B2 (en) | 2014-10-28 | 2018-06-19 | Nxp Usa, Inc. | Die stack address bus having a programmable width |
US10665799B2 (en) * | 2016-07-14 | 2020-05-26 | International Business Machines Corporation | N-type end-bonded metal contacts for carbon nanotube transistors |
US10665798B2 (en) * | 2016-07-14 | 2020-05-26 | International Business Machines Corporation | Carbon nanotube transistor and logic with end-bonded metal contacts |
US10170304B1 (en) | 2017-10-25 | 2019-01-01 | Globalfoundries Inc. | Self-aligned nanotube structures |
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US5227013A (en) * | 1991-07-25 | 1993-07-13 | Microelectronics And Computer Technology Corporation | Forming via holes in a multilevel substrate in a single step |
US6346189B1 (en) * | 1998-08-14 | 2002-02-12 | The Board Of Trustees Of The Leland Stanford Junior University | Carbon nanotube structures made using catalyst islands |
US6420092B1 (en) | 1999-07-14 | 2002-07-16 | Cheng-Jer Yang | Low dielectric constant nanotube |
US6297063B1 (en) * | 1999-10-25 | 2001-10-02 | Agere Systems Guardian Corp. | In-situ nano-interconnected circuit devices and method for making the same |
US6590322B2 (en) * | 2000-01-07 | 2003-07-08 | The United States Of America As Represented By The Secretary Of The Navy | Low gate current field emitter cell and array with vertical thin-film-edge emitter |
JP2002025638A (ja) * | 2000-07-11 | 2002-01-25 | Nec Corp | 電 池 |
GB2364933B (en) * | 2000-07-18 | 2002-12-31 | Lg Electronics Inc | Method of horizontally growing carbon nanotubes |
WO2002080360A1 (en) * | 2001-03-30 | 2002-10-10 | California Institute Of Technology | Pattern-aligned carbon nanotube growth and tunable resonator apparatus |
DE10123876A1 (de) * | 2001-05-16 | 2002-11-28 | Infineon Technologies Ag | Nanoröhren-Anordnung und Verfahren zum Herstellen einer Nanoröhren-Anordnung |
GB0201600D0 (en) * | 2002-01-24 | 2002-03-13 | Univ Cambridge Tech | Large- scale plasma synthesis of hollow nanostructures |
US6891227B2 (en) * | 2002-03-20 | 2005-05-10 | International Business Machines Corporation | Self-aligned nanotube field effect transistor and method of fabricating same |
US6620724B1 (en) * | 2002-05-09 | 2003-09-16 | Infineon Technologies Ag | Low resistivity deep trench fill for DRAM and EDRAM applications |
JP3782373B2 (ja) * | 2002-06-19 | 2006-06-07 | 富士通株式会社 | カーボンナノチューブ及びその製造方法並びにカーボンナノチューブ製造用触媒 |
US6720267B1 (en) * | 2003-03-19 | 2004-04-13 | United Microelectronics Corp. | Method for forming a cantilever beam model micro-electromechanical system |
US6680521B1 (en) * | 2003-04-09 | 2004-01-20 | Newport Fab, Llc | High density composite MIM capacitor with reduced voltage dependence in semiconductor dies |
US7208094B2 (en) * | 2003-12-17 | 2007-04-24 | Hewlett-Packard Development Company, L.P. | Methods of bridging lateral nanowires and device using same |
KR100695124B1 (ko) * | 2004-02-25 | 2007-03-14 | 삼성전자주식회사 | 카본나노튜브의 수평성장방법 |
KR100539268B1 (ko) * | 2004-06-24 | 2005-12-27 | 삼성전자주식회사 | 반도체 메모리 소자의 제조 방법 |
-
2005
- 2005-09-30 US US11/240,241 patent/US7371677B2/en active Active
-
2006
- 2006-09-14 TW TW095133961A patent/TWI402888B/zh not_active IP Right Cessation
- 2006-09-27 EP EP06851891A patent/EP1952454A2/en not_active Withdrawn
- 2006-09-27 JP JP2008542309A patent/JP5372515B2/ja not_active Expired - Fee Related
- 2006-09-27 WO PCT/US2006/037897 patent/WO2008054374A2/en active Application Filing
- 2006-09-27 KR KR1020087010294A patent/KR101354747B1/ko not_active IP Right Cessation
- 2006-09-27 CN CN2006800433092A patent/CN101512769B/zh not_active Expired - Fee Related
-
2008
- 2008-04-08 US US12/099,557 patent/US7772584B2/en active Active
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2009
- 2009-03-27 TW TW098110309A patent/TWI412139B/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
WO2008054374A3 (en) | 2008-11-06 |
TW200717597A (en) | 2007-05-01 |
KR20080065996A (ko) | 2008-07-15 |
US7772584B2 (en) | 2010-08-10 |
US7371677B2 (en) | 2008-05-13 |
US20080211102A1 (en) | 2008-09-04 |
TWI402888B (zh) | 2013-07-21 |
KR101354747B1 (ko) | 2014-01-22 |
WO2008054374A2 (en) | 2008-05-08 |
CN101512769A (zh) | 2009-08-19 |
JP2009510800A (ja) | 2009-03-12 |
US20070231946A1 (en) | 2007-10-04 |
TWI412139B (zh) | 2013-10-11 |
TW200947715A (en) | 2009-11-16 |
CN101512769B (zh) | 2010-11-17 |
EP1952454A2 (en) | 2008-08-06 |
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