JP5370776B2 - Glass substrate transfer apparatus and glass substrate transfer method - Google Patents

Glass substrate transfer apparatus and glass substrate transfer method Download PDF

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JP5370776B2
JP5370776B2 JP2010057362A JP2010057362A JP5370776B2 JP 5370776 B2 JP5370776 B2 JP 5370776B2 JP 2010057362 A JP2010057362 A JP 2010057362A JP 2010057362 A JP2010057362 A JP 2010057362A JP 5370776 B2 JP5370776 B2 JP 5370776B2
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glass substrate
traveling
traveling unit
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travel
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JP2011190039A (en
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光 冨田
剛夫 谷田
和幸 天山
憲明 折田
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Nippon Electric Glass Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To enhance the working efficiency by suppressing occurrence of cracks or the like attributable to the effect of the wind pressure on a front side of a glass substrate as much as possible, and realizing the conveyance at high speed when conveying the glass substrate hanged and supported by a gripping means (holding means) in the direction orthogonal to the surface of the glass substrate. <P>SOLUTION: A glass substrate conveying apparatus includes a plurality of gripping means 3 which grip a plurality of parts in the width direction at an upper end of a glass substrate 2, and hang and support the glass substrate 2, a traveling unit 4 arranged above the glass substrate 2 to convey the glass substrate 2 hanged and supported by the plurality of gripping means 3 in the direction orthogonal to the surface of the glass substrate 2, and a travel-driving means 5 for traveling and driving the traveling unit 4 in the conveying direction. The plurality of gripping means 3 are attached to the traveling unit 4, and rockably held together with the glass substrate 2 in the direction orthogonal to the surface of the glass substrate 2. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

本発明は、ガラス基板を吊り下げ支持した状態で、該ガラス基板を面と直交する方向に搬送させるガラス基板搬送装置及びガラス基板搬送方法に関する。   The present invention relates to a glass substrate transport apparatus and a glass substrate transport method for transporting a glass substrate in a direction orthogonal to the surface in a state where the glass substrate is suspended and supported.

周知のように、液晶ディスプレイ、プラズマディスプレイ、フィールドエミッションディスプレイ（サーフェイスエミッションディスプレイを含む）およびエレクトロルミネッセンスディスプレイ等のフラットパネルディスプレイ（ＦＰＤ）用に代表される各種のガラス基板は、近年、大型化が推進されているのが実情である。また、これと並行して、ＦＰＤ用（特に、液晶ディスプレイ用）のガラス基板においては、薄肉化が伴うに至っている。このように大型化及び薄肉化が推進されているガラス基板は、破損が生じ易いことから、工場内などにおいて搬送する際の取り扱いが極めて困難化され、特に搬送形態が重要視されているのが現状である。   As is well known, various glass substrates represented by flat panel displays (FPD) such as liquid crystal displays, plasma displays, field emission displays (including surface emission displays), and electroluminescence displays have recently been increasing in size. It is the actual situation. In parallel with this, the glass substrate for FPD (especially for liquid crystal display) has been accompanied by thinning. Since glass substrates that are being increased in size and thickness are prone to breakage, handling when transporting in a factory or the like is extremely difficult, and the transport mode is particularly important. Currently.

この種のガラス基板の搬送形態の一種として、ガラス基板の上端部を一対の爪部材等からなる挟持手段により挟持して、該ガラス基板を吊り下げ支持した状態で、目標位置となるガラス基板の受け渡し位置まで搬送することが行われている。このようなガラス基板の搬送は、省スペース化等の要請から、吊り下げ支持されたガラス基板を垂直姿勢に維持しつつ該ガラス基板の面と平行な方向に移送するのが通例とされている。   As a kind of conveyance form of this type of glass substrate, the upper end portion of the glass substrate is sandwiched by a sandwiching means composed of a pair of claw members, etc., and the glass substrate is suspended and supported. Transporting to the delivery position is performed. In order to transport such a glass substrate, it is customary to transfer the glass substrate in a direction parallel to the surface of the glass substrate while maintaining the suspended and supported glass substrate in a vertical posture in order to save space. .

その一例として、特許文献１によれば、上部にハンガーのフックを有し且つ下部にガラス板等の上端部を挟持する挟持部を有する吊りクランパーを用いて、例えば、縦１ｍ、横１．８〜２ｍのガラス板等を垂直姿勢で、熱処理用の炉に連通したコンベアに吊るして連結する構成が開示されている（特に同文献の段落０００１参照）。この吊りクランパーは、ガラス板等が適切な熱処理を受けつつ熱処理炉内を通過していくことを誘導する必要があるため、上述のガラス板等の大きさ（特に幅方向寸法）や表裏面に対して均一な熱処理を施すためのガラス板等の方向性を考慮すれば、ガラス板等を面と平行な方向に搬送する必要性が必然的に生じる。従って、同公報に開示された搬送装置は、コンベアに引っ掛けられた吊りクランパーがガラス板等を垂直姿勢で面と平行な方向に搬送するものと認定することができる。   As an example, according to Patent Document 1, for example, a suspension clamper having a hook of a hanger at the upper part and a holding part for holding an upper end part of a glass plate or the like at the lower part is used. A configuration is disclosed in which a glass plate or the like of ˜2 m is suspended in a vertical posture and connected to a conveyor communicated with a furnace for heat treatment (particularly, refer to paragraph 0001 of the same document). This suspension clamper needs to induce the glass plate and the like to pass through the heat treatment furnace while receiving an appropriate heat treatment. In consideration of the directionality of the glass plate or the like for performing uniform heat treatment, the necessity of conveying the glass plate or the like in a direction parallel to the surface inevitably arises. Therefore, the conveying device disclosed in the publication can be recognized as a suspension clamper hooked on a conveyor conveying a glass plate or the like in a vertical posture in a direction parallel to the surface.

しかしながら、実情としては、作業目的や作業性等の観点から、ガラス基板を吊り下げ支持した状態で該ガラス基板の面と直交する方向に搬送しなければならない場合がある。然るに、上記の特許文献１に開示された搬送装置では、各構成要素がそれに見合う構造及び組み合わせとなっていないため、当然の事ながら、このような要請に応じることができない。   However, as a practical matter, from the viewpoint of work purpose, workability, and the like, there is a case where the glass substrate must be transported in a direction orthogonal to the surface of the glass substrate in a suspended and supported state. However, in the transport apparatus disclosed in the above-mentioned Patent Document 1, each component does not have a structure and combination suitable for it, and therefore, naturally, such a request cannot be met.

そこで、特許文献２（同文献の段落００４０及び図１（Ｃ）参照）によれば、平行に配列された二本のレールに沿って走行可能な把持アームに、ガラス基板の上端部の幅方向二箇所を把持させて吊り下げ支持する搬送装置が開示されている。詳述すると、この搬送装置は、レールの始端位置で受け取ったガラス基板を、把持アームが垂直姿勢に維持した状態でガラス基板の面と直交する方向に搬送し、レールの終端位置で他の後工程に搬出するように構成したものである。   Therefore, according to Patent Document 2 (see Paragraph 0040 of FIG. 1 and FIG. 1C), the width direction of the upper end portion of the glass substrate is set on the gripping arm that can travel along the two rails arranged in parallel. A conveying device that holds and supports two places is disclosed. More specifically, this transport device transports the glass substrate received at the start position of the rail in a direction perpendicular to the surface of the glass substrate while the gripping arm is maintained in a vertical posture, and the other rear end at the end position of the rail. It is configured to be carried out to the process.

特開２０００−３９０１３号公報JP 2000-39013 A 特開２００５−１６２６０４号公報JP 2005-162604 A

ところで、上述の特許文献２に開示された搬送装置は、一対の把持アームがそれぞれ二本のレールに沿って単にスライド可能に保持されているだけであって、その一対の把持アームにガラス基板の上端の幅方向二箇所が把持された構成であるため、特に上述の大型化及び薄肉化が図られたＦＰＤ用等のガラス基板を搬送する場合には、以下に示すような問題が生じる。   By the way, in the transfer device disclosed in Patent Document 2 described above, the pair of gripping arms is simply slidably held along the two rails, respectively. Since the upper end is held at two locations in the width direction, the following problems arise particularly when the above-mentioned glass substrates for FPDs that have been increased in size and thickness are transported.

すなわち、当該ガラス基板を面と直交する方向に搬送させたならば、ガラス基板の前面に風圧が作用することにより該ガラス基板の搬送方向前方への移動を阻止しようとするが、当該ガラス基板の上端部は、把持アームにより固定されているため、風圧に逆らって強制的に搬送方向前方に移動することになる。そのため、ガラス基板の上端部における把持アームによる把持部周辺に応力集中等が発生して割れやクラック進展等が生じ、ガラス基板を破損に至らしめるという問題を有している。   That is, if the glass substrate is transported in a direction perpendicular to the surface, the wind pressure acts on the front surface of the glass substrate to prevent the glass substrate from moving forward in the transport direction. Since the upper end is fixed by the gripping arm, it is forcibly moved forward in the conveying direction against the wind pressure. For this reason, there is a problem that stress concentration or the like occurs in the vicinity of the gripping portion by the gripping arm at the upper end portion of the glass substrate, causing cracks or crack progress, and the glass substrate is damaged.

特に、ガラス基板の搬送速度を高速にした場合には、風圧によりガラス基板の下部側が搬送方向後方側で浮上して該ガラス基板が弓形に大きく撓むため、ガラス基板の上端部に不当に大きな曲げ応力等が発生する。そのため、上述の割れ等によるガラス基板の破損の問題が顕著となるばかりでなく、搬送速度の高速化が阻害されることに起因して、作業能率の大幅な低下を余儀なくされる。   In particular, when the conveyance speed of the glass substrate is increased, the lower side of the glass substrate floats on the rear side in the conveyance direction due to the wind pressure, and the glass substrate is greatly bent into an arcuate shape. Bending stress is generated. For this reason, not only the problem of breakage of the glass substrate due to the above-described cracking or the like becomes significant, but also the work efficiency is significantly reduced due to the hindering of the increase in the conveyance speed.

本発明は、上記事情に鑑み、挟持手段（把持手段）により吊り下げ支持されたガラス基板を面と直交する方向に搬送するに際して、ガラス基板の前面への風圧の作用に起因する割れ等の発生を可及的に抑止すると共に、高速度での搬送を可能にして作業能率の大幅な向上を図ることを技術的課題とする。   In view of the above circumstances, the present invention generates cracks or the like due to the action of wind pressure on the front surface of the glass substrate when the glass substrate suspended and supported by the clamping means (gripping means) is conveyed in a direction perpendicular to the surface. It is a technical problem to prevent the above-described problems as much as possible and to improve the work efficiency by enabling the conveyance at a high speed.

上記技術的課題を解決するために創案された本発明に係るガラス基板搬送装置は、ガラス基板の上端部における幅方向の複数箇所をそれぞれ挟持して該ガラス基板を吊り下げ支持する複数の挟持手段と、ガラス基板の上方に配設され且つ前記複数の挟持手段により吊り下げ支持されたガラス基板を該ガラス基板の面と直交する方向に搬送させる走行ユニットと、該走行ユニットを搬送方向に走行駆動させる走行駆動手段とを備えると共に、前記複数の挟持手段が、前記走行ユニットに装着され且つガラス基板と共に該ガラス基板の面と直交する方向に揺動可能に保持されていることに特徴づけられる。   The glass substrate transport apparatus according to the present invention, which has been created to solve the above technical problem, includes a plurality of clamping means for holding the glass substrate by suspending the glass substrate by sandwiching a plurality of portions in the width direction at the upper end of the glass substrate. A traveling unit that transports the glass substrate disposed above the glass substrate and supported by being suspended by the plurality of clamping means in a direction perpendicular to the surface of the glass substrate, and driving the traveling unit in the transport direction. And a plurality of clamping means mounted on the traveling unit and held together with the glass substrate so as to be swingable in a direction perpendicular to the surface of the glass substrate.

このような構成によれば、ガラス基板を吊り下げ支持する複数の挟持手段が、ガラス基板と共に該ガラス基板の面と直交する方向に揺動可能となるように走行ユニットに装着されているので、走行ユニットの走行に伴ってガラス基板の前面に風圧が作用しても、複数の挟持手段がガラス基板と共になびくことにより、当該ガラス基板の上端部が風圧に逆らって強制的に搬送方向前方に移動するという事態は生じなくなる。これにより、ガラス基板の上端部における挟持手段周辺に応力集中等が生じ難くなり、当該ガラス基板の上端部での割れやクラック進展等の発生が抑止される。しかも、走行ユニットがガラス基板を高速度で搬送させても、ガラス基板が従来のように弓形に大きく撓むという事態は生じず、ガラス基板を破損等に至らしめる要因がなくなるため、搬送速度を高速にして作業能率の大幅な向上を図ることが可能となる。   According to such a configuration, the plurality of holding means for hanging and supporting the glass substrate are mounted on the traveling unit so as to be swingable in a direction orthogonal to the surface of the glass substrate together with the glass substrate. Even if wind pressure acts on the front surface of the glass substrate as the traveling unit travels, the upper end of the glass substrate is forcibly moved forward in the conveying direction against the wind pressure by the plurality of clamping means flying together with the glass substrate. The situation of doing will not occur. As a result, stress concentration or the like hardly occurs around the clamping means at the upper end portion of the glass substrate, and the occurrence of cracks or crack progress at the upper end portion of the glass substrate is suppressed. In addition, even if the traveling unit transports the glass substrate at a high speed, the glass substrate does not bend to a large bow shape as in the past, and there is no cause for damage to the glass substrate. It is possible to achieve a significant improvement in work efficiency at high speed.

この場合、前記走行ユニットが走行を開始して最初に停止するまでの間は、ガラス基板の下部側が搬送方向後方側で浮上して該ガラス基板が傾斜姿勢に維持されるように前記走行ユニットの走行速度を設定することが好ましい。尚、この場合におけるガラス基板の傾斜姿勢の角度は、垂直姿勢を基準として、５°〜４０°、さらには１０°〜３０°に維持される程度であればよい。また、「傾斜姿勢」とは、ガラス基板が上端部から下端部に亘って不当に撓むことなく傾斜している姿勢、好ましくは略一直線上に沿うように傾斜している姿勢をいう（以下、同様）。   In this case, until the traveling unit starts traveling and stops for the first time, the lower side of the glass substrate floats on the rear side in the transport direction so that the glass substrate is maintained in an inclined posture. It is preferable to set the traveling speed. In this case, the angle of the tilting posture of the glass substrate is not limited as long as it is maintained at 5 ° to 40 °, more preferably 10 ° to 30 °, based on the vertical posture. In addition, the “tilt posture” refers to a posture in which the glass substrate is tilted without being unduly bent from the upper end portion to the lower end portion, and preferably is tilted so as to be substantially in a straight line (hereinafter referred to as “inclined posture”). The same).

このようにすれば、走行ユニットが高速度でガラス基板を搬送させても既述のように割れ等が生じないことを有効利用して、走行ユニットの走行開始から最初に停止するまでの間の走行速度を、風圧によりガラス基板の下部側が走行方向後方側で浮上して該ガラス基板が傾斜姿勢に維持されるような極めて高い速度に設定することができる。すなわち、走行ユニットが走行を開始して最初に停止するまでの間に、ガラス基板が当該傾斜姿勢に維持された場合には、複数の挟持手段もこれと同等の傾斜姿勢に維持されるため、ガラス基板に不当な曲げ応力等が生じることはなく、これに伴って極めて短時間でガラス基板を搬送することが可能となる。   In this way, even when the traveling unit transports the glass substrate at a high speed, it is effective to use the fact that no cracks or the like occur as described above. The traveling speed can be set to an extremely high speed such that the lower side of the glass substrate is floated on the rear side in the traveling direction by the wind pressure and the glass substrate is maintained in the inclined posture. That is, when the glass substrate is maintained in the inclined posture before the traveling unit starts traveling and stops for the first time, the plurality of clamping means are also maintained in the inclined posture equivalent to this, An unreasonable bending stress or the like does not occur on the glass substrate, and accordingly, the glass substrate can be transported in an extremely short time.

このような構成において、前記走行ユニットが走行始端位置で走行を開始してから走行終端位置の近辺の手前位置までガラス基板を前記傾斜姿勢で搬送し、該手前位置で前記走行ユニットを停止させてガラス基板に前記傾斜姿勢からからの揺れ戻りを生じさせ、その揺れ戻りの途中で走行ユニットを同方向に再走行させることにより前記走行終端位置でガラス基板を実質的に揺れが生じていない垂直姿勢で停止させるように構成することが好ましい。   In such a configuration, after the traveling unit starts traveling at the traveling start position, the glass substrate is conveyed in the inclined posture to a near position near the traveling end position, and the traveling unit is stopped at the near position. A vertical posture in which the glass substrate is not substantially shaken at the travel end position by causing the glass substrate to swing back from the tilted posture and rerunning the traveling unit in the same direction during the swing back. It is preferable to be configured so as to stop at.

このようにすれば、走行ユニットを手前位置で一旦停止させた後にガラス基板の揺れ戻りの途中で走行終端位置まで再走行させることにより、ガラス基板の高速度での搬送後において、走行終端位置でガラス基板の揺れを迅速に減衰させて垂直姿勢に維持することができる。すなわち、走行ユニットを手前位置で一旦停止させることを行わなければ、走行終端位置でガラス基板の搬送方向前後の揺れが収まるまで待っていなければならず、その待ち時間が長くなり過ぎて作業能率の低下を余儀なくされるが、一旦停止の後に再走行させることによってそのような不具合が回避される。更に、ガラス基板の揺れ戻りの途中（例えば垂直姿勢またはその手前まで揺れ戻った時点）で走行ユニットを同方向に再走行させるようにしたことにより、ガラス基板が慣性により今度は搬送方向前方に揺れ始めることを防止できるため、搬送方向前方（ガラス基板の正面側）に例えば梱包用パレットやそれに積載されている縦姿勢のガラス基板などが対面して存在していても、これらに搬送停止時のガラス基板が衝突することを効果的に抑止し得る。これにより、梱包用パレット等にできるだけ近い位置まで高速度でガラス基板を搬送させることができ、更なる作業能率の向上が図られる。   In this way, after the traveling unit is temporarily stopped at the front position and then re-traveled to the traveling end position in the middle of the swing back of the glass substrate, after the glass substrate is conveyed at a high speed, The shaking of the glass substrate can be quickly attenuated and maintained in a vertical posture. In other words, unless the traveling unit is temporarily stopped at the front position, the traveling end position must wait until the shaking in the front and rear direction of the glass substrate is settled, and the waiting time becomes too long and the work efficiency is increased. Although the reduction is unavoidable, such a problem can be avoided by re-running after stopping. Furthermore, since the traveling unit is re-traveled in the same direction during the swing-back of the glass substrate (for example, when it is swung back to the vertical position or just before it), the glass substrate is now swung forward in the transport direction due to inertia. Since it can be prevented from starting, even if, for example, a packing pallet or a vertical glass substrate loaded on the front side of the conveyance direction (front side of the glass substrate) is faced to these, It is possible to effectively prevent the glass substrate from colliding. Thereby, a glass substrate can be conveyed at high speed to the position as close as possible to the pallet for packing etc., and the improvement of the further work efficiency is achieved.

この場合、前記走行ユニットを停止させる前記手前位置が、前記走行終端位置の１００〜３００ｍｍ手前の位置であることが好ましい。   In this case, it is preferable that the near position for stopping the traveling unit is a position 100 to 300 mm before the traveling end position.

このようにすれば、走行ユニットが走行を開始してから停止するまでの間に、十分な高速化に伴う作業能率の向上を図った上で、再走行によるガラス基板の揺れ防止を適切に行うための必要な距離を確保することができ、有効な距離配分が実現することになる。このような観点から、前記手前位置は、前記走行終端位置の１５０〜２００ｍｍ手前の位置であることがより好ましい。   If it does in this way, after the traveling unit starts traveling and stops, it will improve the work efficiency with sufficient speedup and appropriately prevent the glass substrate from shaking due to re-traveling. Therefore, the necessary distance can be secured, and effective distance distribution is realized. From this point of view, the front position is more preferably a position 150 to 200 mm before the travel end position.

このような構成において、前記複数の挟持手段の揺動角度を検出する角度検出手段を備え、該角度検出手段は、前記手前位置での走行ユニットの停止時に、ガラス基板が前記走行ユニットを再走行させるために必要な姿勢に揺れ戻ったことを検出するように構成することが好ましい。   In such a configuration, an angle detection unit that detects a swing angle of the plurality of clamping units is provided, and the angle detection unit reruns the traveling unit when the traveling unit stops at the front position. It is preferable to be configured so as to detect that the posture has been returned to the posture necessary for the movement.

このようにすれば、ガラス基板が常に適正な姿勢となった時点で走行ユニットを再走行させることが可能となり、当該再走行を行った後のガラス基板の揺れを可及的に抑止することが可能となる。   In this way, it becomes possible to re-run the traveling unit when the glass substrate is always in an appropriate posture, and to suppress the shaking of the glass substrate after performing the re-run as much as possible. It becomes possible.

以上の構成において、前記複数の挟持手段の揺動を規制する規制手段を備え、該規制手段は、前記走行ユニットの走行開始前におけるガラス基板の受け取り時と、前記走行ユニットの走行終了後におけるガラス基板の受け渡し時に、前記複数の挟持手段の揺動を規制するように構成することが好ましい。   In the above-described configuration, there is provided a restricting means for restricting the swinging of the plurality of clamping means, the restricting means being configured to receive the glass substrate before starting the travel of the travel unit and after the travel of the travel unit is finished. It is preferable that the swinging of the plurality of clamping means is restricted when the substrate is delivered.

すなわち、複数の挟持手段を常に揺動可能としたならば、ガラス基板の受け取り時と受け渡し時に、挟持手段が自由に揺動して円滑な作業を阻害する要因となるが、それらの時に規制手段が挟持手段の揺動を規制しておくことにより、ガラス基板の受け取り作業及び受け渡し作業が円滑に行えることになる。   In other words, if a plurality of clamping means can always be swung, the clamping means can freely swing during reception and delivery of the glass substrate, which may hinder smooth work. However, by restricting the swinging of the clamping means, the glass substrate receiving operation and the transferring operation can be performed smoothly.

以上の構成において、前記走行ユニットを上下昇降させる昇降手段を備え、該昇降手段は、前記走行ユニットの走行終了後におけるガラス基板の受け渡し時に、該走行ユニットを上下昇降させるように構成することが好ましい。   In the above configuration, it is preferable that the traveling unit includes an elevating unit that moves the traveling unit up and down, and the elevating unit is configured to elevate the traveling unit when the glass substrate is delivered after the traveling of the traveling unit is completed. .

このようにすれば、走行終了後にガラス基板とその受け渡し位置との間に高低差があっても、昇降手段が走行ユニットを上下昇降させることにより、ガラス基板を受け渡し位置に正確に受け渡すことが可能となる。   In this way, even if there is a height difference between the glass substrate and its delivery position after the end of travel, the lifting means can move the travel unit up and down to accurately deliver the glass substrate to the delivery position. It becomes possible.

以上の構成において、前記走行ユニットが、ガラス基板の面と直交する方向に揺動不能とされた基部材と、該基部材にガラス基板の面と直交する方向に揺動可能に支持された揺動部材とを備え、前記複数の挟持手段の全てが、前記揺動部材に装着され且つ該揺動部材と共に揺動可能に保持されていることが好ましい。   In the above configuration, the traveling unit is configured to be swingable in a direction orthogonal to the surface of the glass substrate, and to a base member that is swingable in a direction orthogonal to the surface of the glass substrate. Preferably, all of the plurality of clamping means are mounted on the swinging member and are held swingably together with the swinging member.

このようにすれば、複数の挟持手段の揺動角度が全て同一になるため、個々の挟持手段の揺動角度にばらつきが生じることによるガラス基板の上端部の幅方向に沿う不当な変形が生じ難くなり、割れ等の発生をより一層確実に抑止することができる。   In this case, since the swinging angles of the plurality of clamping means are all the same, unjust deformation along the width direction of the upper end portion of the glass substrate occurs due to variations in the swinging angles of the individual clamping means. It becomes difficult and generation | occurrence | production of a crack etc. can be suppressed still more reliably.

以上の構成において、前記基部材と前記揺動部材との何れか一方に幅方向に沿う支軸が取付けられ、且つ他方に前記支軸を回動自在に保持する軸受が取付けられることにより、前記基部材に前記揺動部材が揺動可能に支持されていることが好ましい。   In the above configuration, a support shaft extending in the width direction is attached to either one of the base member or the swing member, and a bearing that rotatably holds the support shaft is attached to the other. It is preferable that the swing member is supported by the base member so as to be swingable.

このようにすれば、基部材に対して揺動部材を揺動可能に取付けるための構造が強固なものとなるばかりでなく、揺動部材の揺動動作が円滑化され、揺動部材の機能の適正化が図られる。   In this way, not only the structure for swingably mounting the swinging member to the base member is strengthened, but also the swinging operation of the swinging member is facilitated, and the function of the swinging member is improved. Is optimized.

この場合、前記角度検出手段は、前記基部材と前記揺動部材との相互間に配設されていることが好ましい。   In this case, it is preferable that the angle detection means is disposed between the base member and the swing member.

このようにすれば、角度検出手段の設置箇所として基部材と揺動部材との間のスペースが有効利用され、走行ユニットのコンパクト化が図られる。   In this way, the space between the base member and the swinging member is effectively used as the installation location of the angle detection means, and the travel unit can be made compact.

また、前記規制手段は、前記基部材と前記揺動部材との相互間に配設されていることが好ましい。   Further, it is preferable that the restricting means is disposed between the base member and the swing member.

このようにした場合にも、規制手段の設置箇所として基部材と揺動部材との間のスペースが有効利用され、走行ユニットのコンパクト化が図られる。   Even in this case, the space between the base member and the swinging member is effectively used as the installation location of the restricting means, and the travel unit can be made compact.

尚、前記走行ユニットが、基部材を備え、前記複数の挟持手段が該基部材にそれぞれ個別に揺動可能に保持されていてもよい。   The traveling unit may include a base member, and the plurality of clamping means may be individually swingably held by the base member.

このようにした場合であっても、走行ユニットの走行時におけるガラス基板の揺れや傾斜に起因する割れ等の発生に対する抑止効果を十分に得ることができ、搬送速度の高速化ひいては作業能率の向上を図り得る。   Even in such a case, it is possible to sufficiently obtain a deterrent effect against the occurrence of cracks and the like caused by the shaking or tilting of the glass substrate during traveling of the traveling unit, increasing the transport speed and consequently improving the work efficiency. Can be planned.

上記技術的課題を解決するために創案された本発明に係るガラス基板搬送方法は、複数の挟持手段によりガラス基板の上端部における幅方向の複数箇所を挟持して該ガラス基板を吊り下げ支持した状態で、ガラス基板の上方に配設され且つ走行駆動手段の動作により走行する走行ユニットが、前記ガラス基板を該ガラス基板の面と直交する方向に搬送するに際して、前記走行ユニットに装着された前記複数の挟持手段が、ガラス基板と共に該ガラス基板の面と直交する方向に揺動することに特徴づけられる。   The glass substrate transport method according to the present invention, which was created to solve the above technical problem, supported the suspension of the glass substrate by sandwiching a plurality of positions in the width direction at the upper end of the glass substrate by a plurality of clamping means. In the state, when the traveling unit disposed above the glass substrate and traveling by the operation of the traveling driving means conveys the glass substrate in a direction orthogonal to the surface of the glass substrate, the traveling unit mounted on the traveling unit A plurality of clamping means is characterized in that it swings in a direction orthogonal to the surface of the glass substrate together with the glass substrate.

この構成を備えたガラス基板搬送方法についての作用効果は、この方法と本質的に構成が同一である上述の本発明に係るガラス基板搬送装置について説明した事項と実質的に同一である。   The effects of the glass substrate transport method having this configuration are substantially the same as the matters described for the glass substrate transport device according to the present invention described above, which is essentially the same in configuration as this method.

以上のように本発明によれば、走行ユニットの走行に伴ってガラス基板の前面に風圧が作用しても、複数の挟持手段がガラス基板と共になびくことにより、当該ガラス基板の上端部が風圧に逆らって強制的に搬送方向前方に移動するという事態は生じなくなる。これにより、ガラス基板の上端部における挟持手段周辺に応力集中等が生じ難くなり、当該ガラス基板の上端部での割れやクラック進展等の発生が抑止されると共に、当該ガラス基板の搬送速度の高速化ひいては作業能率の大幅な向上が図られる。   As described above, according to the present invention, even if wind pressure acts on the front surface of the glass substrate as the traveling unit travels, the upper end portion of the glass substrate becomes the wind pressure by the plurality of clamping means fluttering together with the glass substrate. The situation of forcibly moving forward in the conveyance direction does not occur. As a result, stress concentration or the like hardly occurs around the clamping means at the upper end of the glass substrate, and the occurrence of cracks and crack propagation at the upper end of the glass substrate is suppressed, and the conveyance speed of the glass substrate is increased. As a result, work efficiency can be greatly improved.

本発明の第一実施形態に係るガラス基板搬送装置の全体構成を示す斜視図である。It is a perspective view which shows the whole structure of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス基板搬送装置の要部（走行ユニットの周辺部）を示す斜視図である。It is a perspective view which shows the principal part (peripheral part of a travel unit) of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス基板搬送装置の要部（角度検出手段の周辺部）を示す拡大斜視図である。It is an expansion perspective view which shows the principal part (peripheral part of an angle detection means) of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. （ａ）、（ｂ）は何れも、本発明の第一実施形態に係るガラス基板搬送装置の要部（規制手段の周辺部）を示す拡大斜視図である。(A), (b) is an enlarged perspective view which shows the principal part (peripheral part of a control means) of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス基板搬送装置の作用を示す概略図である。It is the schematic which shows the effect | action of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス基板搬送装置の作用を示すフローチャートである。It is a flowchart which shows the effect | action of the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第一実施形態に係るガラス基板搬送装置における走行ユニットの搬送速度と時間との関係を概略的に示すグラフである。It is a graph which shows roughly the relationship between the conveyance speed and time of the travel unit in the glass substrate conveying apparatus which concerns on 1st embodiment of this invention. 本発明の第二実施形態に係るガラス基板搬送装置の要部を示す概略側面図である。It is a schematic side view which shows the principal part of the glass substrate conveying apparatus which concerns on 2nd embodiment of this invention. 本発明の第三実施形態に係るガラス基板搬送装置の要部を示す概略側面図である。It is a schematic side view which shows the principal part of the glass substrate conveying apparatus which concerns on 3rd embodiment of this invention. 本発明の第四実施形態に係るガラス基板搬送装置の要部を示す概略側面図である。It is a schematic side view which shows the principal part of the glass substrate conveying apparatus which concerns on 4th embodiment of this invention.

以下、本発明の実施形態を添付図面に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

図１は、本発明の第一実施形態に係るガラス基板搬送装置１の全体構成を例示している。この搬送装置１により搬送されるガラス基板２は、例えば液晶ディスプレイに使用されるものであって、幅方向寸法が１１００〜４０００ｍｍ、上下方向寸法が１１００〜３５００ｍｍ、厚みが０．５〜１．８ｍｍである。   FIG. 1 illustrates the overall configuration of a glass substrate transfer apparatus 1 according to the first embodiment of the present invention. The glass substrate 2 transported by the transport device 1 is used for, for example, a liquid crystal display, and has a width direction dimension of 1100 to 4000 mm, a vertical dimension of 1100 to 3500 mm, and a thickness of 0.5 to 1.8 mm. It is.

同図に示すように、ガラス基板搬送装置１は、ガラス基板２の上端部を幅方向の二箇所で挟持（把持）する挟持手段３と、これらの挟持手段３が下部に取付けられた走行ユニット４と、この走行ユニット４を搬送方向（矢印ａ方向）及びその逆方向に走行駆動させる走行駆動手段５とを備える。そして、走行ユニット４に挟持手段３を介して吊り下げ支持されているガラス基板２は、その面と直交する方向に搬送されて、該ガラス基板２と対向配置されている梱包用パレット６に縦姿勢のままで一枚ずつ積載されていくように構成されている。   As shown in the figure, the glass substrate transport apparatus 1 includes a clamping means 3 that clamps (grips) the upper end of the glass substrate 2 at two locations in the width direction, and a traveling unit in which these clamping means 3 are attached to the lower part. 4 and travel drive means 5 for driving the travel unit 4 in the transport direction (arrow a direction) and in the opposite direction. Then, the glass substrate 2 suspended and supported by the traveling unit 4 via the clamping means 3 is transported in a direction orthogonal to the surface thereof, and is vertically applied to the packing pallet 6 disposed opposite to the glass substrate 2. It is configured to be loaded one by one in the posture.

図２に示すように、各挟持手段３は、下部に開閉可能な一対の爪部材３ａをそれぞれ有し、且つ上部にカバー部材３ｂをそれぞれ有すると共に、各一対の爪部材３ａによってガラス基板２の上端部が挟持される。走行ユニット４は、ガラス基板２の面と直交する方向に揺動不能とされた基部材８と、ガラス基板２の面と直交する方向に揺動可能とされた揺動部材９とを備え、且つ揺動部材９の下面に各挟持手段３のカバー部材３ｂの上端がそれぞれ固定されている。   As shown in FIG. 2, each clamping means 3 has a pair of claw members 3a that can be opened and closed at the lower part and a cover member 3b at the upper part. The upper end is clamped. The traveling unit 4 includes a base member 8 that is not allowed to swing in a direction orthogonal to the surface of the glass substrate 2, and a swing member 9 that is swingable in a direction orthogonal to the surface of the glass substrate 2. And the upper end of the cover member 3b of each clamping means 3 is being fixed to the lower surface of the rocking | swiveling member 9, respectively.

揺動部材９の上面における幅方向の両側にはそれぞれ一対のブラケット１０が立設固定され、各一対のブラケット１０に跨って幅方向に沿う支軸１１がそれぞれ固定されると共に、基部材８の下面における幅方向両側に垂下固定されたブラケット１２に軸受１３がそれぞれ嵌合保持されている。そして、これらの軸受１３に各支軸１１が回動自在に保持されることによって、基部材８に揺動部材９が揺動可能に支持されている（図３及び図４参照）。尚、本実施形態では、揺動部材９の揺動は、搬送方向後方に４０°、搬送方向前方に１０°の角度に制限されるように設計されている。換言すれば、そのような角度範囲で揺動部材９が揺動できれば十分とされている。   A pair of brackets 10 are erected and fixed on both sides of the upper surface of the swing member 9 in the width direction, and the support shafts 11 are fixed along the width direction across the pair of brackets 10. Bearings 13 are fitted and held on brackets 12 that are suspended and fixed on both sides in the width direction on the lower surface. The supporting shafts 11 are rotatably held by these bearings 13, so that the swing member 9 is swingably supported by the base member 8 (see FIGS. 3 and 4). In this embodiment, the swing of the swing member 9 is designed to be limited to an angle of 40 ° rearward in the transport direction and 10 ° forward of the transport direction. In other words, it is sufficient that the swing member 9 can swing within such an angle range.

図１及び図２に示すように、走行駆動手段５は、搬送方向に平行に延びる二本のレール１４上に走行可能に保持された走行架台１５と、該走行架台１５を走行駆動させる駆動源である直動アクチュエータ１６と、走行ユニット４の基部材８と走行架台１５とを一体走行可能に連結する一対の連結軸１７とを備える。本実施形態では、直動アクチュエータ１６は、走行架台１５の下面に固定されたナット部材１８と、該ナット部材１８に螺合する走行用ねじ軸１９と、該走行用ねじ軸１９を回転させるサーボモータ等の電動機２０とからなるボールねじ機構で構成されている。尚、直動アクチュエータ１６としては、電動機の回転を歯付き無端ベルトやラックアンドピニオンなどの動力伝達手段を介して直線運動に変換させる機構を採用してもよい。また、本実施形態では、一対の連結軸１７は、後述する昇降手段２７の構成要素である昇降用ねじ軸からなる。   As shown in FIGS. 1 and 2, the travel drive means 5 includes a travel base 15 movably held on two rails 14 extending in parallel with the transport direction, and a drive source that drives the travel base 15 to travel. And a pair of connecting shafts 17 that connect the base member 8 of the traveling unit 4 and the traveling base 15 so as to be able to travel integrally. In the present embodiment, the linear actuator 16 includes a nut member 18 fixed to the lower surface of the travel base 15, a travel screw shaft 19 that is screwed to the nut member 18, and a servo that rotates the travel screw shaft 19. It is comprised with the ball screw mechanism which consists of electric motors 20, such as a motor. The linear motion actuator 16 may be a mechanism that converts the rotation of the electric motor into linear motion via a power transmission means such as a toothed endless belt or a rack and pinion. Moreover, in this embodiment, a pair of connecting shaft 17 consists of the raising / lowering screw shaft which is a component of the raising / lowering means 27 mentioned later.

図１及び図３に示すように、走行ユニット４の基部材８と揺動部材９との相互間における幅方向中央部には、揺動部材９ひいては挟持手段３の揺動角度を検出する角度検出手段２１が配設されている。この角度検出手段２１は、揺動部材９の上面に搬送方向に広がるように固定された扇形板状体からなる検出体２１ａと、基部材８の下面に固定され且つ検出体２１ａが遊びを持って嵌入された検出器２１ｂとから構成され、検出器２１ｂに対して検出体２１ａがガラス基板２の面と直交する方向に揺動することにより、ガラス基板２の揺れ姿勢（揺れ角度）を検出するように構成されている。   As shown in FIGS. 1 and 3, at the center in the width direction between the base member 8 and the swinging member 9 of the traveling unit 4, an angle for detecting the swinging angle of the swinging member 9 and thus the clamping means 3. Detection means 21 is provided. The angle detection means 21 includes a detection body 21a composed of a fan-shaped plate fixed to the upper surface of the swing member 9 so as to spread in the conveying direction, and is fixed to the lower surface of the base member 8 and the detection body 21a has play. The detection body 21a swings in a direction perpendicular to the surface of the glass substrate 2 with respect to the detector 21b, thereby detecting the swinging posture (swing angle) of the glass substrate 2. Is configured to do.

また、図１及び図４（ａ）に示すように、走行ユニット４の基部材８と揺動部材９との相互間における幅方向一端部には、揺動部材９ひいては挟持手段３の揺動をガラス基板２が垂直姿勢となる角度で規制する規制手段２２が配設されている。この規制手段２２は、揺動部材９に固定支持されている上述の支軸１１に嵌合固定された楔部材２３と、基部材８に固定設置されたエアシリンダ等からなる流体圧シリンダ２４の出退ロッド２５に取付けられて上下動可能な二個のローラ２６とから構成されている。そして、図４（ｂ）に示すように、流体圧シリンダ２４の出退ロッド２５が下動して、楔部材２３の上部両側に相対称的に形成された楔用斜面に二個のローラ２６がそれぞれ圧接することにより、揺動部材９の揺動を規制する構成とされている。   Further, as shown in FIGS. 1 and 4 (a), the swinging member 9 and the sandwiching means 3 swing at one end in the width direction between the base member 8 and the swinging member 9 of the traveling unit 4. A restricting means 22 is disposed to restrict the glass substrate 2 at an angle at which the glass substrate 2 is in a vertical posture. The restricting means 22 includes a wedge member 23 fitted and fixed to the support shaft 11 fixedly supported by the swing member 9, and a fluid pressure cylinder 24 including an air cylinder fixedly installed on the base member 8. It is composed of two rollers 26 which are attached to the retracting rod 25 and can move up and down. Then, as shown in FIG. 4B, the retracting rod 25 of the fluid pressure cylinder 24 moves downward, and two rollers 26 are provided on the wedge slope formed symmetrically on both sides of the upper portion of the wedge member 23. Are configured to restrict the swinging of the swinging member 9 by being in pressure contact with each other.

更に、このガラス基板搬送装置１には、図１及び図２に示すように、走行ユニット４を上下昇降させる昇降手段２７が設置されている。この昇降手段２７は、本実施形態では、走行架台１５の上面に固定された一対のナット部材２８と、下端が走行架台１５の上面に回動自在に保持され且つ一対のナット部材２８にそれぞれ螺合されて上下方向に延びる昇降用ねじ軸１７と、走行架台１５の上面に固定された外枠（図示略）に装着されて一対の昇降用ねじ軸１７をそれぞれ回転させるサーボモータ等の電動機（図示略）とから構成されている。従って、昇降手段２７は、走行ユニット４と共にレール１４に沿って走行するように構成されている。尚、昇降手段２７としては、エアシリンダ等からなる流体圧シリンダなどで構成することができ、その場合には、ナット部材２８に代えてガイド孔形成部材を揺動部材９の上面に固定し、ガイド孔形成部材のガイド孔に流体圧シリンダの出退ロッドを挿通し且つ出退ロッドの下端を揺動部材９の上面に固定する構成とされる。   Furthermore, as shown in FIGS. 1 and 2, the glass substrate transport apparatus 1 is provided with lifting means 27 that moves the traveling unit 4 up and down. In the present embodiment, the elevating means 27 includes a pair of nut members 28 fixed to the upper surface of the traveling gantry 15 and a lower end rotatably held on the upper surface of the traveling gantry 15 and screwed to the pair of nut members 28. A lifting screw shaft 17 that extends in the up and down direction, and an electric motor such as a servo motor that is mounted on an outer frame (not shown) fixed to the upper surface of the traveling frame 15 and rotates the pair of lifting screw shafts 17. (Not shown). Therefore, the elevating means 27 is configured to travel along the rail 14 together with the traveling unit 4. The elevating means 27 can be constituted by a fluid pressure cylinder such as an air cylinder. In this case, a guide hole forming member is fixed to the upper surface of the swinging member 9 instead of the nut member 28. The guide rod of the fluid pressure cylinder is inserted into the guide hole of the guide hole forming member, and the lower end of the rod is fixed to the upper surface of the swing member 9.

この場合、走行ユニット４は、図５に示す走行始端位置Ｌ１から走行終端位置Ｌ３までの全走行距離に対して、走行終端位置Ｌ１の手前１００〜３００ｍｍ（より好ましくは１５０〜２００ｍｍ）の一時停止位置Ｌ２で一旦停止し、ガラス基板２の揺れ戻りの途中で同方向に再走行するように構成されている。この場合、走行ユニット４が走行始端位置Ｌ１から走行終端位置Ｌ３に達するまでの間においては、一時停止位置Ｌ２に到達したこと及び走行終端位置Ｌ３に到達したことを位置検知手段（図示略）によって検出する構成とされている。   In this case, the travel unit 4 temporarily stops 100 to 300 mm (more preferably 150 to 200 mm) before the travel end position L1 with respect to the total travel distance from the travel start end position L1 to the travel end position L3 shown in FIG. It is configured to temporarily stop at the position L2 and re-travel in the same direction during the swinging back of the glass substrate 2. In this case, until the travel unit 4 reaches the travel end position L3 from the travel start end position L1, the position detection means (not shown) indicates that it has reached the temporary stop position L2 and the travel end position L3. It is configured to detect.

次に、上記の構成を備えたガラス基板搬送装置１の作用を、図５に示す概略図及び図６に示すフローチャートのステップＳ１〜Ｓ１６を参照して説明する。   Next, the operation of the glass substrate transport apparatus 1 having the above configuration will be described with reference to the schematic diagram shown in FIG. 5 and steps S1 to S16 of the flowchart shown in FIG.

先ず、走行ユニット４が走行始端位置Ｌ１にある時には、規制手段２２が揺動部材９の揺動を規制した状態で、挟持手段３の開閉によりガラス基板２を垂直姿勢で受け取って走行ユニット４に吊り下げ支持させる（ステップＳ１）。この後、規制手段２２による揺動部材９の揺動規制を解除し、然る後、走行駆動手段５が走行ユニット４を第一の速度（相対的に高速度、例えば１０００ｍｍ／秒〜２０００ｍｍ／秒）で搬送方向に前進走行させる（ステップＳ２、Ｓ３）。これにより、図５に符号Ａで示すように、ガラス基板２は、挟持手段３と共に下部側が搬送方向後方側に浮上して傾斜姿勢（垂直姿勢を基準として例えば１０°〜３０°の傾斜姿勢）に維持されつつ前進走行する。   First, when the traveling unit 4 is at the traveling start position L1, the glass substrate 2 is received in a vertical posture by opening and closing the clamping unit 3 in a state in which the restricting means 22 restricts the swing of the swinging member 9. The suspension is supported (step S1). Thereafter, the swinging restriction of the swinging member 9 by the restricting means 22 is released, and then the travel driving means 5 moves the travel unit 4 to the first speed (relatively high speed, for example, 1000 mm / second to 2000 mm / second). Second) in the transport direction (steps S2, S3). As a result, as indicated by symbol A in FIG. 5, the glass substrate 2 is tilted with the sandwiching means 3 and the lower side floating on the rear side in the transport direction (inclined posture of, for example, 10 ° to 30 ° based on the vertical posture) While driving forward.

そして、走行ユニット４が一時停止位置Ｌ２に達したことを位置検知手段が検出した時点で、走行ユニット４が停止する（ステップＳ４、Ｓ５）。この時点で、図５に符号Ｂで示すように、ガラス基板２が垂直姿勢またはその僅か手前まで揺れ戻ったことを角度検出手段２１が検出し、タイマーによる０．１〜０．３秒の設定時間の経過後に、走行ユニット４が第二の速度（相対的に低速度、例えば１００ｍｍ／秒〜２００ｍｍ／秒）で再度前進走行する（ステップＳ６〜Ｓ８）。従って、角度検出手段２１は、走行ユニット４が再度前進走行をしてガラス基板２の揺れを減衰させるために必要な基準位置までガラス基板２が揺れ戻ったことを検出していることになる。そして、走行ユニット４が走行終端位置Ｌ３に到達したことを位置検知手段が検出した時点で、走行ユニット４が再度停止する（ステップＳ９、Ｓ１０）。   Then, when the position detecting means detects that the traveling unit 4 has reached the temporary stop position L2, the traveling unit 4 stops (steps S4 and S5). At this time, as indicated by reference numeral B in FIG. 5, the angle detection means 21 detects that the glass substrate 2 has returned to the vertical posture or just before it, and is set to 0.1 to 0.3 seconds by the timer. After the elapse of time, the traveling unit 4 travels forward again at the second speed (relatively low speed, for example, 100 mm / second to 200 mm / second) (steps S6 to S8). Therefore, the angle detection means 21 detects that the glass substrate 2 has returned to the reference position necessary for the traveling unit 4 to travel forward again to attenuate the shaking of the glass substrate 2. Then, when the position detection unit detects that the traveling unit 4 has reached the traveling end position L3, the traveling unit 4 stops again (steps S9 and S10).

この結果、ガラス基板２は、走行終端位置Ｌ３では実質的に揺れが生じていない状態で垂直姿勢に維持される。従って、ガラス基板２が揺れ戻り過ぎて前方正面の梱包用パレット６或いはそれに積載されているガラス基板積層体２９に衝突するという不具合が生じなくなるため、走行終端位置Ｌ３を、梱包用パレット６にできるだけ近い位置にすることが可能となる。この後に、規制手段２２が揺動部材９の揺動を規制した状態で、昇降手段２７が走行ユニット４を所定高さ位置まで下降させる（ステップＳ１１、Ｓ１２）。尚、走行ユニット４が下降した後に、規制手段２２が揺動部材９の揺動を規制するようにしてもよい。このような状態で、図５に符号Ｃで示すように、梱包用パレット６の載置面上にガラス基板２を載せて撓ませつつ既に積載されているガラス基板積層体２９に徐々に接触させていく。然る後、挟持手段３を開作動させることにより、ガラス基板２の吊り下げ支持を開放させて、当該ガラス基板２をガラス基板積層体２９の最前列に受け渡した状態とする（ステップＳ１３）。尚、この受け渡し時には、必要に応じて走行ユニット４を最も低速度で前進走行させてもよい。   As a result, the glass substrate 2 is maintained in the vertical posture in a state where there is substantially no shaking at the travel end position L3. Therefore, since the glass substrate 2 does not shake back and collides with the front-front packaging pallet 6 or the glass substrate laminate 29 loaded thereon, the traveling end position L3 is set as much as possible on the packaging pallet 6. It becomes possible to make it close. Thereafter, with the restricting means 22 restricting the swinging of the swinging member 9, the elevating means 27 lowers the traveling unit 4 to a predetermined height position (steps S11 and S12). In addition, after the traveling unit 4 is lowered, the regulating means 22 may regulate the swing of the swing member 9. In this state, as indicated by reference numeral C in FIG. 5, the glass substrate 2 is placed on the placement surface of the packing pallet 6 and bent and gradually brought into contact with the already stacked glass substrate laminate 29. To go. Thereafter, the holding means 3 is opened to release the suspension support of the glass substrate 2, and the glass substrate 2 is transferred to the front row of the glass substrate laminate 29 (step S13). At the time of delivery, the traveling unit 4 may travel forward at the lowest speed as necessary.

この後は、昇降手段２７により走行ユニット４を当初の高さ位置まで上昇させ、第三の速度（第一、第二の速度よりも高速度）で走行ユニット４をレール１４に沿って搬送方向と逆方向に後退移動させる（ステップＳ１４、Ｓ１５）。そして、走行ユニット４が走行始端位置Ｌ１に到達した時点で停止させて待機し（ステップＳ１６）、後続のガラス基板２を同様の手順で梱包用パレット６まで搬送する。このような動作を繰り返し実行することにより、梱包用パレット６に所定枚数のガラス基板２が積層された時点で、新たな梱包用パレット６に対して同様の動作を実行する。   Thereafter, the traveling unit 4 is raised to the initial height position by the lifting means 27, and the traveling unit 4 is moved along the rail 14 at the third speed (higher than the first and second speeds). And move backward in the opposite direction (steps S14 and S15). Then, when the traveling unit 4 reaches the traveling start position L1, the traveling unit 4 stops and waits (step S16), and the subsequent glass substrate 2 is transported to the packing pallet 6 in the same procedure. By repeatedly executing such an operation, the same operation is performed on a new packing pallet 6 when a predetermined number of glass substrates 2 are stacked on the packing pallet 6.

ここで、図７に基づいて、上記のガラス基板２の一回の搬送動作と、走行ユニット４の時間経過に伴う走行速度とを対比すると、走行ユニット４が走行始端位置Ｌ１から一時停止位置Ｌ２までガラス基板２を搬送する際には、同図に符号Ｄで示すように、高速度で加速した後に減速して停止する。そして、この停止からガラス基板２が適正な揺れ戻り位置に達するために必要な時間Ｔ１だけ待機した後、さらにタイマーによる設定時間Ｔ２の経過後に、走行ユニット４が一時停止位置Ｌ２から走行終端位置Ｌ３まで、同図に符号Ｅで示すように、低速度で加速した後に減速して停止する。これにより、ガラス基板２は垂直姿勢で揺れが実質的に生じていない状態で停止する。そして、走行ユニット４は、基本的には、このような時間経過に伴う速度でガラス基板２を一枚ずつ搬送していくことになる。   Here, based on FIG. 7, when the one-time transport operation of the glass substrate 2 is compared with the traveling speed of the traveling unit 4 over time, the traveling unit 4 is moved from the traveling start position L1 to the temporary stop position L2. When the glass substrate 2 is transported to the end, as indicated by the symbol D in the drawing, the glass substrate 2 is accelerated at a high speed and then decelerated and stopped. Then, after waiting for a time T1 necessary for the glass substrate 2 to reach an appropriate swing back position from this stop, the traveling unit 4 moves from the temporary stop position L2 to the travel end position L3 after a set time T2 by the timer has elapsed. Up to this point, as shown by symbol E in FIG. As a result, the glass substrate 2 stops in a vertical posture with substantially no shaking. The traveling unit 4 basically transports the glass substrates 2 one by one at such a speed as time elapses.

以上のように、本実施形態に係るガラス基板搬送装置１によれば、ガラス基板２を吊り下げ支持する揺動部材９及び一対の挟持手段３が、ガラス基板２と共にその面と直交する方向に揺動可能とされているので、走行ユニット４の走行に伴ってガラス基板２の前面に風圧が作用しても、ガラス基板２の上端部のみが風圧に逆らって強制的に搬送方向に移動するという事態が生じなくなる。これにより、ガラス基板２の挟持手段３周辺での応力集中及びこれに起因する割れやクラック進展等の発生が抑止されると共に、走行ユニット４がガラス基板２を高速度で搬送させても、ガラス基板２が弓形に大きく撓むという事態が回避されるため、搬送速度を高速にして作業能率の大幅な向上を図ることが可能となる。   As described above, according to the glass substrate transport apparatus 1 according to the present embodiment, the swing member 9 and the pair of clamping means 3 that suspend and support the glass substrate 2 are disposed in a direction orthogonal to the surface together with the glass substrate 2. Since it can swing, even if wind pressure acts on the front surface of the glass substrate 2 as the traveling unit 4 travels, only the upper end of the glass substrate 2 is forced to move in the transport direction against the wind pressure. The situation will not occur. This suppresses the occurrence of stress concentration around the sandwiching means 3 of the glass substrate 2 and the occurrence of cracks and crack growth due to this, and even if the traveling unit 4 transports the glass substrate 2 at high speed, Since the situation in which the substrate 2 is greatly bent into an arcuate shape is avoided, it is possible to achieve a significant improvement in work efficiency by increasing the conveyance speed.

しかも、走行ユニット４が走行始端位置Ｌ１から一時停止位置Ｌ２に到達するまでの間は、ガラス基板２の下部側が搬送方向後方側で浮上して該ガラス基板２が傾斜姿勢に維持されるような高速度走行が行われると共に、揺動部材９及び一対の挟持手段３もガラス基板２と同等の傾斜姿勢に維持されるため、ガラス基板２に不当な曲げ応力等を生じさせることなく、極めて短時間でガラス基板を搬送することが可能となる。   In addition, until the traveling unit 4 reaches the temporary stop position L2 from the traveling start position L1, the lower side of the glass substrate 2 floats on the rear side in the transport direction so that the glass substrate 2 is maintained in an inclined posture. Since the high-speed running is performed and the swinging member 9 and the pair of holding means 3 are also maintained in the inclined posture equivalent to that of the glass substrate 2, it is extremely short without causing an undue bending stress or the like on the glass substrate 2. It becomes possible to transport the glass substrate in time.

加えて、走行ユニット４が一時停止位置Ｌ２で停止した後は、ガラス基板２に傾斜姿勢からの揺れ戻りを生じさせ、その揺れ戻りの途中で走行ユニット４を再走行させることにより走行終端位置Ｌ３でガラス基板２に実質的な揺れが生じないように構成しているので、ガラス基板２の高速度での搬送後に、走行終端位置Ｌ３でガラス基板２の搬送方向前後の揺れが収まるまで待つ必要がなくなる。そして、走行ユニット４の一時停止及びその後の再走行により、ガラス基板２が慣性により搬送方向前方に揺れ戻り過ぎることを抑制できるため、搬送方向前方の梱包用パレット６やそれに積載されている縦姿勢のガラス基板積層体２９が対面して存在しているにも拘わらず、走行終端位置Ｌ３に到達したガラス基板２がそれらに衝突するという不具合が的確に回避される。これにより、梱包用パレット６にできるだけ近い位置まで高速度でガラス基板２を搬送させることができ、更なる作業能率の向上が図られることになる。因みに、ガラス基板２の平均搬送速度は、従来においては２００〜３００ｍｍ／秒であったが、本実施形態では６００ｍｍ／秒以上となった。また、ガラス基板２の搬送枚数は、従来においては１分間に３〜４枚であったが、本実施形態では１分間に６〜８枚となった。   In addition, after the traveling unit 4 stops at the temporary stop position L2, the glass substrate 2 is caused to swing back from the inclined posture, and the traveling unit 4 is re-traveled in the middle of the swinging back, thereby causing the traveling end position L3. Therefore, after the glass substrate 2 is transported at a high speed, it is necessary to wait until the front and rear shaking of the glass substrate 2 in the transport direction is settled after the glass substrate 2 is transported at a high speed. Disappears. And since it can suppress that glass substrate 2 shakes back too much forward in a conveyance direction by inertia by temporary stop of traveling unit 4 and subsequent re-running, it is the vertical posture currently loaded on packing pallet 6 in the conveyance direction forward In spite of the presence of the glass substrate laminate 29 facing each other, the problem that the glass substrate 2 that has reached the travel end position L3 collides with them is accurately avoided. Thereby, the glass substrate 2 can be conveyed at a high speed to a position as close as possible to the pallet 6 for packing, and the work efficiency can be further improved. Incidentally, although the average conveyance speed of the glass substrate 2 was 200-300 mm / second conventionally, it became 600 mm / second or more in this embodiment. In addition, the number of glass substrates 2 transported is conventionally 3 to 4 per minute, but in the present embodiment, it is 6 to 8 per minute.

図８は、本発明の第二実施形態に係るガラス基板搬送装置１の要部を示す概略側面図である。この第二実施形態に係る搬送装置１が上述の第一実施形態に係る搬送装置１と相違するところは、基部材８の下面に垂下固定された二対のブラケット３０の相互間にそれぞれ支軸１１が取付けられると共に、揺動部材９の上面に立設固定された一対のブラケット３１に軸受１３が嵌合保持され、且つそれらの軸受１３にそれらの支軸１１が回動自在に支持されている点にある。その他の構成は、上述の第一実施形態に係る搬送装置１と同一であるので、両実施形態に共通の構成要素については、図８に同一符号を付し、その説明を省略する。この第二実施形態に係る搬送装置１によれば、揺動部材９に固定されるブラケットが一対のみとなるため、揺動する部分の軽量化、ひいては揺動する部分のイナーシャ低減を図ることができる。   FIG. 8 is a schematic side view showing the main part of the glass substrate transport apparatus 1 according to the second embodiment of the present invention. The conveyance device 1 according to the second embodiment is different from the conveyance device 1 according to the first embodiment described above in that a support shaft is provided between two pairs of brackets 30 fixed to the lower surface of the base member 8. 11 are attached, bearings 13 are fitted and held by a pair of brackets 31 that are erected and fixed on the upper surface of the swinging member 9, and the support shafts 11 are rotatably supported by the bearings 13. There is in point. Since other configurations are the same as those of the transport apparatus 1 according to the first embodiment described above, components common to both embodiments are denoted by the same reference numerals in FIG. 8 and description thereof is omitted. According to the transport device 1 according to the second embodiment, since there is only one pair of brackets fixed to the swinging member 9, it is possible to reduce the weight of the swinging part and to reduce the inertia of the swinging part. it can.

図９は、本発明の第三実施形態に係るガラス基板搬送装置１の要部を示す概略側面図である。この第三実施形態に係る搬送装置１が上述の第二実施形態に係る搬送装置１と相違するところは、基部材８が揺動部材９の上方から右側方を経由して下方に断面コ字形に折曲形成されている点と、基部材９の下方端から左側方に向かって延出形成された二対のブラケット３２の相互間にそれぞれ支軸１１が取付けられている点と、揺動部材９の下面に垂下固定された一対のブラケット３３に軸受１３が嵌合保持され且つ支軸１１が軸受１３に回動自在に支持されている点とである。その他の構成は、上述の第二実施形態に係る搬送装置１と同一であるので、両実施形態に共通の構成要素については、図９に同一符号を付し、その説明を省略する。この第三実施形態に係る搬送装置１によれば、挟持手段３に、例えばガラス基板２の厚みに応じて爪部材３ａの厚みを調整するための機構を設ける場合や、梱包用パレット６にガラス基板２を降ろす時に当該パレット６の寸法誤差を吸収するためにガラス基板２を挟んだ爪部材３ａが上方にスライドできる機構を設ける場合など、挟持手段３の重量が比較的大きくなる場合においては、揺動する部分全体のイナーシャを最小にすることができる。   FIG. 9 is a schematic side view showing the main part of the glass substrate transport apparatus 1 according to the third embodiment of the present invention. The conveyance device 1 according to the third embodiment is different from the conveyance device 1 according to the second embodiment described above in that the base member 8 has a U-shaped cross section downward from the upper side of the swinging member 9 via the right side. And a point where the support shaft 11 is attached between the two pairs of brackets 32 extending from the lower end of the base member 9 toward the left side. The bearing 13 is fitted and held by a pair of brackets 33 suspended and fixed to the lower surface of the member 9, and the support shaft 11 is rotatably supported by the bearing 13. Since other configurations are the same as those of the transport apparatus 1 according to the second embodiment described above, components common to both embodiments are denoted by the same reference numerals in FIG. 9 and description thereof is omitted. According to the transport device 1 according to the third embodiment, when the holding means 3 is provided with a mechanism for adjusting the thickness of the claw member 3a according to the thickness of the glass substrate 2, for example, the packing pallet 6 is provided with glass. In the case where the weight of the clamping means 3 is relatively large, such as when a mechanism is provided in which the claw member 3a sandwiching the glass substrate 2 is slid upward in order to absorb the dimensional error of the pallet 6 when the substrate 2 is lowered, The inertia of the entire swinging part can be minimized.

図１０は、本発明の第四実施形態に係るガラス基板搬送装置１の要部を示す概略側面図である。この第四実施形態に係る搬送装置１が上述の第一実施形態に係る搬送装置１と相違するところは、走行ユニット４が揺動部材を備えていない点と、基部材８に二個の挟持手段３が個別に揺動可能に保持されている点とである。詳述すると、各挟持手段３の上部に取付けられたブラケット３４にそれぞれ軸受１３が嵌合保持されると共に、基部材８の下面に垂下固定された二対のブラケット３５の相互間にそれぞれ支軸１１が取付けられ、且つそれらの軸受１３にそれらの支軸１１が回動自在に支持されている。その他の構成は、上述の第一実施形態に係る搬送装置１と同一であるので、両実施形態に共通の構成要素については、図１０に同一符号を付し、その説明を省略する。この第四実施形態に係る搬送装置１によれば、ガラス基板２の大きさがその厚みに比して比較的小さく、二個の挟持手段３を個別に揺動させても問題がない場合に、揺動する部分のイナーシャを最小にすることができる。   FIG. 10 is a schematic side view showing the main part of the glass substrate transport apparatus 1 according to the fourth embodiment of the present invention. The conveyance device 1 according to the fourth embodiment is different from the conveyance device 1 according to the first embodiment described above in that the traveling unit 4 does not include a swinging member and that the base member 8 has two clamps. The means 3 is individually held so as to be swingable. More specifically, the bearings 13 are fitted and held on the brackets 34 attached to the upper portions of the clamping means 3, and the support shafts are provided between the two pairs of brackets 35 that are suspended and fixed to the lower surface of the base member 8. 11 are attached, and the support shafts 11 are rotatably supported by the bearings 13. Since other configurations are the same as those of the transport apparatus 1 according to the first embodiment described above, components common to both embodiments are denoted by the same reference numerals in FIG. 10 and description thereof is omitted. According to the transport device 1 according to the fourth embodiment, when the size of the glass substrate 2 is relatively small compared to its thickness, and there is no problem even if the two clamping means 3 are individually swung. The inertia of the swinging portion can be minimized.

尚、上述の第二、第三実施形態では、角度検出手段２１及び規制手段２２が基部材８と揺動部材９との相互間に配設されるが、揺動部材９側の軽量化が図られるような配設状態とすることが好ましい。また、第四実施形態においても、角度検出手段２１及び規制手段２２が基部材８と挟持手段３との相互間に配設される。   In the second and third embodiments described above, the angle detection means 21 and the restriction means 22 are disposed between the base member 8 and the swing member 9, but the weight of the swing member 9 is reduced. It is preferable to have an arrangement state as illustrated. Also in the fourth embodiment, the angle detection means 21 and the restriction means 22 are disposed between the base member 8 and the clamping means 3.

以上の実施形態では、挟持手段３を幅方向の二箇所に配設する構成としたが、挟持手段３は、幅方向の一箇所または三箇所以上に配設されていてもよい。   In the above embodiment, the clamping means 3 is arranged at two places in the width direction. However, the clamping means 3 may be arranged at one place or three or more places in the width direction.

また、上述の第一、第二、第三実施形態では、揺動部材９と基部材８との相互間における幅方向両端部にそれぞれ規制手段２２を配設し、幅方向中央部に角度検出手段２１を配設したが、これに代えて、幅方向中央部に規制手段２２を配設し、幅方向一端部に角度検出手段２１を配設するようにしてもよい。   In the first, second, and third embodiments described above, the regulating means 22 is disposed at both ends in the width direction between the swing member 9 and the base member 8, and the angle is detected at the center in the width direction. Although the means 21 is disposed, instead of this, the restricting means 22 may be disposed at the center in the width direction, and the angle detecting means 21 may be disposed at one end in the width direction.

１ ガラス基板搬送装置
２ ガラス基板
３ 挟持手段
４ 走行ユニット
５ 走行駆動手段
６ 梱包用パレット
８ 基部材
９ 揺動手段
１１ 支軸
１３ 軸受
１４ レール
２１ 角度検出手段
２２ 規制手段
２７ 昇降手段
Ｌ１ 走行始端位置
Ｌ２ 一時停止位置（手前位置）
Ｌ３ 走行終端位置 DESCRIPTION OF SYMBOLS 1 Glass substrate conveying apparatus 2 Glass substrate 3 Clamping means 4 Traveling unit 5 Traveling drive means 6 Packing pallet 8 Base member 9 Oscillating means 11 Support shaft 13 Bearing 14 Rail 21 Angle detection means 22 Restricting means 27 Lifting means L1 Traveling start position L2 Pause position (front position)
L3 Travel end position

Claims (13)

ガラス基板の上端部における幅方向の複数箇所をそれぞれ挟持して該ガラス基板を吊り下げ支持する複数の挟持手段と、ガラス基板の上方に配設され且つ前記複数の挟持手段により吊り下げ支持されたガラス基板を該ガラス基板の面と直交する方向に搬送させる走行ユニットと、該走行ユニットを搬送方向に走行駆動させる走行駆動手段とを備えると共に、
前記複数の挟持手段が、前記走行ユニットに装着され且つガラス基板と共に該ガラス基板の面と直交する方向に揺動可能に保持されていることを特徴とするガラス基板搬送装置。 A plurality of sandwiching means for sandwiching and supporting the glass substrate at a plurality of positions in the width direction at the upper end portion of the glass substrate, and a suspension support disposed above the glass substrate and supported by the plurality of sandwiching means. A travel unit that transports the glass substrate in a direction orthogonal to the surface of the glass substrate, and travel drive means that travels the travel unit in the transport direction;
The glass substrate transport apparatus, wherein the plurality of clamping means are attached to the traveling unit and held so as to be swingable together with the glass substrate in a direction perpendicular to the surface of the glass substrate. 前記走行ユニットが走行を開始して最初に停止するまでの間は、ガラス基板の下部側が搬送方向後方側で浮上して該ガラス基板が傾斜姿勢に維持されるように前記走行ユニットの走行速度を設定したことを特徴とする請求項１に記載のガラス基板搬送装置。   Until the traveling unit starts traveling and stops for the first time, the traveling speed of the traveling unit is set so that the lower side of the glass substrate floats on the rear side in the transport direction and the glass substrate is maintained in an inclined posture. The glass substrate transport apparatus according to claim 1, which is set. 前記走行ユニットが走行始端位置で走行を開始してから走行終端位置の近辺の手前位置までガラス基板を前記傾斜姿勢で搬送し、該手前位置で前記走行ユニットを停止させてガラス基板に前記傾斜姿勢からからの揺れ戻りを生じさせ、その揺れ戻りの途中で走行ユニットを同方向に再走行させることにより前記走行終端位置でガラス基板を実質的に揺れが生じていない垂直姿勢で停止させるように構成したことを特徴とする請求項２に記載のガラス基板搬送装置。   After the traveling unit starts traveling at the traveling start end position, the glass substrate is transported in the inclined posture to a near position near the traveling end position, and the traveling unit is stopped at the near position to stop the traveling position on the glass substrate. The glass substrate is configured to stop in a vertical posture in which substantially no shaking is generated at the travel end position by causing the travel unit to re-run and re-run the traveling unit in the same direction during the swing back. The glass substrate transport apparatus according to claim 2, wherein 前記走行ユニットを停止させる前記手前位置が、前記走行終端位置の１００〜３００ｍｍ手前の位置であることを特徴とする請求項３に記載のガラス基板搬送装置。   The glass substrate transport apparatus according to claim 3, wherein the front position where the traveling unit is stopped is a position 100 to 300 mm before the traveling end position. 前記複数の挟持手段の揺動角度を検出する角度検出手段を備え、該角度検出手段は、前記手前位置での走行ユニットの停止時に、ガラス基板が前記走行ユニットを再走行させるために必要な姿勢に揺れ戻ったことを検出するように構成したことを特徴とする請求項４に記載のガラス基板搬送装置。   An angle detection means for detecting a swing angle of the plurality of clamping means, the angle detection means being a posture required for the glass substrate to re-run the travel unit when the travel unit is stopped at the near position; The glass substrate transport device according to claim 4, wherein the glass substrate transport device is configured to detect that it has returned to the back. 前記複数の挟持手段の揺動を規制する規制手段を備え、該規制手段は、前記走行ユニットの走行開始前におけるガラス基板の受け取り時と、前記走行ユニットの走行終了後におけるガラス基板の受け渡し時に、前記複数の挟持手段の揺動を規制するように構成したことを特徴とする請求項１〜５の何れかに記載のガラス基板搬送装置。   The regulation means comprising regulation means for regulating the swing of the plurality of clamping means, the regulation means at the time of receiving the glass substrate before the traveling of the traveling unit, and at the time of delivery of the glass substrate after the traveling of the traveling unit, The glass substrate transport apparatus according to claim 1, wherein swinging of the plurality of clamping means is restricted. 前記走行ユニットを上下昇降させる昇降手段を備え、該昇降手段は、前記走行ユニットの走行終了後におけるガラス基板の受け渡し時に、該走行ユニットを上下昇降させることを特徴とする請求項１〜６に記載のガラス基板搬送装置。   The lift unit for moving the traveling unit up and down is provided, and the lifting unit moves the traveling unit up and down when the glass substrate is delivered after the traveling of the traveling unit is completed. Glass substrate transfer device. 前記走行ユニットが、ガラス基板の面と直交する方向に揺動不能とされた基部材と、該基部材にガラス基板の面と直交する方向に揺動可能に支持された揺動部材とを備え、前記複数の挟持手段の全てが、前記揺動部材に装着され且つ該揺動部材と共に揺動可能に保持されていることを特徴とする請求項１〜７の何れかに記載のガラス基板搬送装置。   The travel unit includes a base member that is not allowed to swing in a direction orthogonal to the surface of the glass substrate, and a swing member that is supported by the base member so as to be swingable in a direction orthogonal to the surface of the glass substrate. The glass substrate transport according to any one of claims 1 to 7, wherein all of the plurality of clamping means are mounted on the swinging member and are swingably held together with the swinging member. apparatus. 前記基部材と前記揺動部材との何れか一方に幅方向に沿う支軸が取付けられ、且つ他方に前記支軸を回動自在に保持する軸受が取付けられることにより、前記基部材に前記揺動部材が揺動可能に支持されていることを特徴とする請求項８に記載のガラス基板搬送装置。   A support shaft extending in the width direction is attached to one of the base member and the swing member, and a bearing for rotatably holding the support shaft is attached to the other, so that the swing is attached to the base member. The glass substrate transport apparatus according to claim 8, wherein the moving member is swingably supported. 前記角度検出手段が、前記基部材と前記揺動部材との相互間に配設されていることを特徴とする請求項８または９に記載のガラス基板搬送装置。   The glass substrate transport apparatus according to claim 8 or 9, wherein the angle detection means is disposed between the base member and the swing member. 前記規制手段が、前記基部材と前記揺動部材との相互間に配設されていることを特徴とする請求項８〜１０の何れかに記載のガラス基板搬送装置。   The glass substrate transport apparatus according to any one of claims 8 to 10, wherein the restricting means is disposed between the base member and the swinging member. 前記走行ユニットが、基部材を備え、前記複数の挟持手段が該基部材にそれぞれ個別に揺動可能に保持されていることを特徴とする請求項１〜７の何れかに記載のガラス基板搬送装置。   The glass substrate transport according to any one of claims 1 to 7, wherein the traveling unit includes a base member, and the plurality of holding means are individually swingably held by the base member. apparatus. 複数の挟持手段によりガラス基板の上端部における幅方向の複数箇所を挟持して該ガラス基板を吊り下げ支持した状態で、ガラス基板の上方に配設され且つ走行駆動手段の動作により走行する走行ユニットが、前記ガラス基板を該ガラス基板の面と直交する方向に搬送するに際して、
前記走行ユニットに装着された前記複数の挟持手段が、ガラス基板と共に該ガラス基板の面と直交する方向に揺動することを特徴とするガラス基板搬送方法。 A traveling unit that is disposed above the glass substrate and travels by the operation of the traveling drive means in a state where the glass substrate is suspended and supported by sandwiching a plurality of positions in the width direction at the upper end portion of the glass substrate by a plurality of sandwiching means. However, when transporting the glass substrate in a direction perpendicular to the surface of the glass substrate,
The glass substrate transport method, wherein the plurality of clamping means attached to the traveling unit swing together with the glass substrate in a direction perpendicular to the surface of the glass substrate.
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