JP5352073B2 - Inkjet head device - Google Patents

Inkjet head device Download PDF

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Publication number
JP5352073B2
JP5352073B2 JP2007266722A JP2007266722A JP5352073B2 JP 5352073 B2 JP5352073 B2 JP 5352073B2 JP 2007266722 A JP2007266722 A JP 2007266722A JP 2007266722 A JP2007266722 A JP 2007266722A JP 5352073 B2 JP5352073 B2 JP 5352073B2
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head
camera
inkjet head
substrate
nozzle
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JP2009095690A (en
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量介 水鳥
英明 山本
一哉 片田
良紀 徳安
直樹 渡瀬
中村　　秀男
圭 引地
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Hitachi Ltd
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Hitachi Ltd
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Priority to JP2007266722A priority Critical patent/JP5352073B2/en
Priority to TW097138553A priority patent/TW200924984A/en
Priority to CN200810166449XA priority patent/CN101407131B/en
Priority to KR1020080099426A priority patent/KR101000422B1/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/07—Ink jet characterised by jet control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/21—Ink jet for multi-colour printing
    • B41J2/2132—Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
    • B41J2/2139—Compensation for malfunctioning nozzles creating dot place or dot size errors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J29/00—Details of, or accessories for, typewriters or selective printing mechanisms not otherwise provided for
    • B41J29/38—Drives, motors, controls or automatic cut-off devices for the entire printing mechanism

Abstract

The technical problem the invention object to resolve is to measure the bias starting from the target location from the initial installation, and to manufacture product substrates with high yield after effective and high precision correction, in an apparatus of using an ink jet head with a plurality of nozzles to coat the material on the substrate. In the invention, a nozzle camera is used to process position correction to all the heads beforehand by taking the central head as a benchmark in the a plurality of ink jet heads provided on the apparatus and measuring the position of the two terminal nozzles (a space d) of the head 1. Furthermore, the material pattern is coated on a substrate for modulation, the bias (a space D) from the target location is measured by observing the position of the coating points, and then XYtheta direction position correction of the nozzle between heads is performed by calculating the moving quantity from the bias.

Description

本発明は、液滴を吐出する液滴吐出装置に関し、更に詳細には、ヘッド移動フレーム移動型のマルチヘッドのインクジェット液滴塗布装置に関する。   The present invention relates to a droplet discharge device that discharges droplets, and more particularly, to a multi-head inkjet droplet coating apparatus that is a head moving frame moving type.

インクジェットヘッドとは気泡又は圧電素子を利用して、少量の液滴を高精度に吐出するための装置であり、インクジェット塗布装置はそれを使用して高精度・高機密な液滴塗布を実現すること目的とした装置として近年注目を集めており、さまざまな分野での適用が期待されている。   An inkjet head is a device that uses bubbles or piezoelectric elements to eject a small amount of droplets with high accuracy, and an inkjet coating device uses it to realize highly accurate and highly confidential droplet application. In recent years, it has attracted attention as a special purpose device, and is expected to be applied in various fields.

特許文献１に記載のように、塗布対象となる基板に大型化に伴い、装置実装されるインクジェットヘッドも増加しており、基板への高精度塗布において、それらインクジェットヘッドの取付け時のズレによるノズル位置のばらつきが、塗布性能に大きな影響を及ぼす。そこで治具を使用してのヘッド取付けや、ノズル観測による位置補正のなどで、ノズル位置精度の向上を図る必要がある。   As described in Patent Document 1, with the increase in size of a substrate to be coated, the number of inkjet heads mounted on the apparatus is also increasing. In high-precision coating on a substrate, nozzles caused by misalignment at the time of mounting these inkjet heads The variation in position has a great influence on the coating performance. Therefore, it is necessary to improve the nozzle position accuracy by mounting the head using a jig or correcting the position by observing the nozzle.

特開２００４−１４８１８０号公報（図１）Japanese Patent Laying-Open No. 2004-148180 (FIG. 1)

特許文献１の方法では、ヘッド部に設けたカメラにより、基板に吐出された液滴状態を観測して、取り付けの基準位置からのズレ量を計算し、ヘッドを移動することにより補正を行っていた。また、固定カメラにより塗布液の飛翔状況から塗布量を観測するようにしていた。   In the method of Patent Document 1, the state of droplets discharged to the substrate is observed by a camera provided in the head unit, the amount of deviation from the reference position of attachment is calculated, and correction is performed by moving the head. It was. In addition, the application amount is observed from the flying state of the application liquid with a fixed camera.

しかし、この方法ではヘッド毎の射出速度・射出角度の違いにより、実際に塗布した場合、各ヘッド間での塗布状態に差が発生し、膜にスジムラが発生してしまう可能性がある。また、試験用に基板を準備する必要があり、試験用の吐出も行う必要があり塗布液の無駄も生じる。   However, in this method, due to the difference in the injection speed and the injection angle for each head, when actually applied, there is a possibility that a difference occurs in the application state between the heads and the film is uneven. In addition, it is necessary to prepare a substrate for testing, it is necessary to perform ejection for testing, and the coating liquid is wasted.

本発明の目的は、従来のノズル位置の検出結果に基づくノズル位置の補正の他に、塗布後の基板上の各ドット位置をドット位置検出カメラで観測して、塗布ずれ量を求めて、ノズル位置を補正すると共に、実際の吐液滴の飛翔状態を観測して、その観測結果に基づいて吐出制御することで、高精度の塗布を実現した塗布装置を提供することにある。   In addition to correcting the nozzle position based on the detection result of the conventional nozzle position, the object of the present invention is to observe each dot position on the substrate after coating with a dot position detection camera to obtain a coating deviation amount, and An object of the present invention is to provide a coating apparatus that realizes highly accurate coating by correcting the position and observing the actual flying state of the ejected droplets and controlling the ejection based on the observation result.

ヘッドの射出状態の違いによる影響をなくす為、基板にパターン塗布を行い、その塗布ドットの位置ズレをカメラにて計測し移動量を計算し、ヘッドをＸＹθ方向に移動することで、位置補正を行う。   In order to eliminate the influence of the difference in the ejection state of the head, pattern application is performed on the substrate, the positional deviation of the application dots is measured by the camera, the movement amount is calculated, and the head is moved in the XYθ direction, thereby correcting the position. Do.

本発明では、インクジェットヘッドの射出速度、射出角度等のバラツキは、単一ヘッドにおいては比較的小さいものであるが、配列した各ヘッドのノズル間では、製造時に生じる初期特性バラツキによるものが非常に大きいこと、装置設置の際の取付け誤差が生じること、又は塗布を行う際の環境変化、即ち、例えば気温変化、使用材料の粘度変化、目詰まり等による前記インクジェットヘッドの経時特性変化の影響が大きいことに着目し、塗布を行う直前に、各ヘッド毎の射出特性を測定し、前記測定結果に基づき塗布制御することによって、塗布ドット毎の位置バラツキを軽減し、均一でムラのない高品質なパネルを製造できる。   In the present invention, the variation in the ejection speed, ejection angle, etc. of the inkjet head is relatively small in a single head, but the initial characteristic variation that occurs during manufacturing is very large between the nozzles of each arrayed head. It is large, causes an installation error when installing the apparatus, or changes in the environment during application, i.e., temperature change, viscosity change of the material used, clogging, etc. Paying attention to this, immediately before coating, the ejection characteristics of each head are measured, and by controlling the coating based on the measurement results, the position variation for each coating dot is reduced, and the quality is uniform and uniform. Panels can be manufactured.

インクジェット塗布装置を例に、本発明の実施例を説明する。   An embodiment of the present invention will be described by taking an inkjet coating apparatus as an example.

図１〜２にはインクジェット塗布装置として６個のインクジェットヘッドを装着したものの概観図を示す。   FIG. 1 and FIG. 2 show an outline view of an ink jet coating apparatus equipped with six ink jet heads.

本インクジェット装置では、塗布対象物である基板２１を載置し、図示していない吸引吸着機構にてステージ面上に固定する基板ステージ２０が設けてある。この基板ステージ２０を跨ぐように構成され、前後方向に移動可能な移動フレーム２が設けてある。この移動フレーム２にはフレームの長手方向（左右方向）に移動可能に前方側に３個のインクジェットヘッド１（以下ヘッドと略称する）が、同じく後方側に３個のヘッド１が設けてある。移動フレーム２の両足の部分にはリニアモータを設けた移動ステージ１７が設けてあり、架台側に設けたリニアレール１８上を、リニアモータを駆動することで前後方向に移動する。また、図示していないが移動ステージ１７には移動フレーム２を上下動させる機構も備えている。各ヘッド１はヘッド移動機構３に連結されており、ヘッド移動機構３は移動フレーム２に固定されている。   In this ink jet apparatus, a substrate stage 20 is provided on which a substrate 21 as an application target is placed and fixed on a stage surface by a suction suction mechanism (not shown). A moving frame 2 configured to straddle the substrate stage 20 and movable in the front-rear direction is provided. The moving frame 2 is provided with three inkjet heads 1 (hereinafter abbreviated as heads) on the front side and three heads 1 on the rear side so as to be movable in the longitudinal direction (left-right direction) of the frame. A moving stage 17 provided with a linear motor is provided on both feet of the moving frame 2, and moves in the front-rear direction by driving the linear motor on a linear rail 18 provided on the gantry side. Although not shown, the moving stage 17 is also provided with a mechanism for moving the moving frame 2 up and down. Each head 1 is connected to a head moving mechanism 3, and the head moving mechanism 3 is fixed to a moving frame 2.

ヘッド移動機構３には取付けブラケット４を介してヘッド１が装着されており、基板ステージ２０に対してヘッド１の吐出口（ノズル９）が間隔をあけて平行になるように配置されている。それらヘッド移動機構３、取付けブラケット４及びヘッド１の組合せが前列に３個、後列３個の計６個が移動フレーム２に千鳥状に設置されている。また、装置（基板ステージ２０）前方（又は後方）にはノズルカメラ６及び飛滴検査カメラ７が設置されている。ノズルカメラ６はヘッド１のノズルを観測できるように、上方に向けて設置され、飛滴検査カメラ７はノズル９から吐出された液滴の状態を観測するために水平方向に向けて設置されている。また、図２に示すように移動フレーム２の後方（又は前方）側には移動フレーム２の後方側ヘッドを覆うカバーが設けてあり、そのカバー部分に塗布ドット検査カメラ８が取付けられている。この塗布ドット検査カメラ８は基板面上に塗布された液滴の状態を観測するために、下向きに設置してある。この塗布ドット検査カメラ８はカバー部に設けたリニアレール２２に沿ってフレーム２の長手方向に移動できるようにリニアモータを備えている。   A head 1 is mounted on the head moving mechanism 3 via a mounting bracket 4, and an ejection port (nozzle 9) of the head 1 is arranged parallel to the substrate stage 20 with a gap. A total of six combinations of the head moving mechanism 3, the mounting bracket 4, and the head 1 are arranged in a staggered manner on the moving frame 2, with three in the front row and three in the rear row. A nozzle camera 6 and a droplet inspection camera 7 are installed in front of (or behind) the apparatus (substrate stage 20). The nozzle camera 6 is installed upward so that the nozzle of the head 1 can be observed, and the droplet inspection camera 7 is installed in the horizontal direction in order to observe the state of the liquid droplets ejected from the nozzle 9. Yes. As shown in FIG. 2, a cover that covers the rear head of the moving frame 2 is provided on the rear (or front) side of the moving frame 2, and a coating dot inspection camera 8 is attached to the cover portion. This application dot inspection camera 8 is installed downward in order to observe the state of the liquid droplets applied on the substrate surface. The application dot inspection camera 8 is provided with a linear motor so that it can move in the longitudinal direction of the frame 2 along a linear rail 22 provided in the cover portion.

次に、装置の各部分の機能及び動きについて説明する。   Next, the function and movement of each part of the apparatus will be described.

図３に示すように、各ヘッド１は底面に液材料を吐出するための複数のノズル９が二次元で複数列配置されている。また、各ヘッド１にはノズル９から液滴材料を吐出するためのピエゾ駆動機構を内蔵している。また、ノズル９は等間隔で配置されている。本実施例ではノズル９を２列に千鳥配列しているが、これに限らず、１列でもよく、さらに列を増やしたものでもよい。   As shown in FIG. 3, each head 1 has a plurality of nozzles 9 for two-dimensionally arranging a plurality of nozzles 9 for discharging a liquid material on the bottom surface. Each head 1 incorporates a piezo drive mechanism for discharging droplet material from the nozzle 9. The nozzles 9 are arranged at equal intervals. In this embodiment, the nozzles 9 are arranged in a zigzag pattern in two rows, but this is not a limitation, and there may be one row, or a further increased row.

図４に示すように、ヘッド移動機構３は３個のクラッチ１０，１１，１２及びシャフト１３，１４，１５及び駆動力伝達ボックス３５を備えている。クラッチ１０はヘッド１をシャフト１３に連結解除するもので、クラッチ１０をＯＮすることで、ヘッドをＸ軸方向に移動できるものである。クラッチ１１はシャフト１４とヘッド１を連結解除するためのもので、クラッチ１１をＯＮすることでヘッド１をＹ軸方向に移動させるものである。クラッチ１２はヘッド１をシャフト１に連結解除するためのもので、クラッチ１２をＯＮすることでヘッド１をθ方に回転させるためのものである。各シャフト１３，１４，１５は連結部１６に内蔵されたヘッド駆動用モータで回転される。そのため、各クラッチをＯＮ/ＯＦＦすることで、各取付けブラケットとそれに装着されたヘッドを選択して、任意にＸ・Ｙ・θ方向に移動することができる。   As shown in FIG. 4, the head moving mechanism 3 includes three clutches 10, 11, 12, shafts 13, 14, 15 and a driving force transmission box 35. The clutch 10 releases the connection of the head 1 to the shaft 13, and the head can be moved in the X-axis direction by turning on the clutch 10. The clutch 11 is for releasing the connection between the shaft 14 and the head 1, and moves the head 1 in the Y-axis direction by turning on the clutch 11. The clutch 12 is for releasing the connection of the head 1 to the shaft 1 and for turning the head 12 in the θ direction by turning on the clutch 12. Each shaft 13, 14, 15 is rotated by a head driving motor built in the connecting portion 16. Therefore, by turning on / off each clutch, it is possible to select each mounting bracket and the head mounted thereon and arbitrarily move in the X, Y, and θ directions.

先に説明したように、移動フレーム２は移動ステージ１７を介してリニアレール１８に設置されており、移動フレーム２は移動ステージ１７に対し垂直方向に上下に移動するための駆動機構と、リニアレール１８に沿って前後方向に移動する駆動機構を有している。   As described above, the moving frame 2 is installed on the linear rail 18 via the moving stage 17, and the moving frame 2 moves up and down in the vertical direction with respect to the moving stage 17, and the linear rail. And a drive mechanism that moves in the front-rear direction along 18.

また、各ヘッド１のノズルの状態を観測して、各ノズルの詰りを検出して、ノズルの清掃やヘッドの交換を行うためのノズルカメラ６が設けてある。さらに、ノズルから吐出された液滴の飛翔状態を観測するための飛滴検査カメラ７が設けてある。図５にはノズルカメラの観測状況を、図６には複数のヘッドの吐出口の配置状態を示している。ノズルカメラで観測した結果や、これまでのノズルの使用来歴等を用いて図示していない制御部で清掃すべきか、あるいはヘッドを交換すべきかの判断を行い、この判断結果に基づいた処理を行うようになっている。   Further, a nozzle camera 6 is provided for observing the state of the nozzles of each head 1 to detect clogging of each nozzle and cleaning the nozzles or replacing the heads. Further, a droplet inspection camera 7 for observing the flight state of the droplets ejected from the nozzle is provided. FIG. 5 shows an observation state of the nozzle camera, and FIG. 6 shows an arrangement state of the discharge ports of a plurality of heads. Using the results observed with the nozzle camera and the history of nozzle use so far, it is determined whether the control unit (not shown) should be cleaned or the head should be replaced, and processing based on this determination result is performed. It is like that.

前述の、ノズルカメラ６および飛滴検査カメラ７は、基板ステージ２０の前方側に設けた、同軸の移動レール１９に左右方向に移動可能に設置されている。まず、移動フレーム２が上昇した（各ヘッドが上方の）状態で、移動フレーム２に設けてあるヘッド１のノズル位置がノズルカメラ６の位置（移動レール位置）になるように、リニアレール１８に沿って移動フレーム２が移動する。次に、観測するヘッド１のノズルの位置までノズルカメラ６を移動することで、各ヘッド１のノズルの状態を下側から観測できる。また、飛滴検査カメラ７は、各ヘッドから射出される飛滴を観測できる位置に移動し、飛滴に標準を合わせて、ノズル面と平行に移動しながら飛滴の観測をする。この飛滴を観測することで、ヘッド１のずれノズル９の詰り等を予測できると共に、ヘッド１の駆動制御のための情報として使用する構成になっている。この飛滴の観測時には、できれば、真空吸着などにより、基板ステージ２０上に調整用基板２１を設置し、移動フレーム２を上下方向に移動することで各ヘッドと基板２１とのギャップを制御し、移動フレーム２の前後方向の移動速度（即ち塗布速度）を制御して基板２１への材料塗布を実施する。この際、移動速度と各ヘッドの射出のタイミングを制御することで、さまざまなパターンの塗布が可能である。なお、調整用基板を用いずに実際の塗布状態で上記制御を行うようにしても良い。   The nozzle camera 6 and the droplet inspection camera 7 described above are installed on a coaxial moving rail 19 provided in front of the substrate stage 20 so as to be movable in the left-right direction. First, the linear rail 18 is set so that the nozzle position of the head 1 provided on the moving frame 2 becomes the position of the nozzle camera 6 (moving rail position) with the moving frame 2 raised (each head is upward). The moving frame 2 moves along. Next, by moving the nozzle camera 6 to the position of the nozzle of the head 1 to be observed, the state of the nozzle of each head 1 can be observed from the lower side. The flying droplet inspection camera 7 moves to a position where the flying droplets ejected from each head can be observed, aligns the standard with the flying droplets, and observes the flying droplets while moving in parallel with the nozzle surface. By observing the flying droplets, it is possible to predict clogging of the misaligned nozzle 9 of the head 1 and to use it as information for driving control of the head 1. When observing the droplets, if possible, an adjustment substrate 21 is installed on the substrate stage 20 by vacuum suction or the like, and the gap between each head and the substrate 21 is controlled by moving the moving frame 2 in the vertical direction. The material is applied to the substrate 21 by controlling the moving speed of the moving frame 2 in the front-rear direction (that is, the coating speed). At this time, various patterns can be applied by controlling the moving speed and the ejection timing of each head. Note that the above control may be performed in the actual application state without using the adjustment substrate.

図７に塗布ドット検査カメラの観測状況を示す。図８に塗布ドットの拡大図を示す。この塗布ドット検査カメラ８は図２で示したように、移動フレーム２の後部側に移動フレーム２の長手方向に移動可能に設けてある。すなわち、塗布ドット検査カメラ８は、移動フレーム２に設けたリニアレール２２に設けてあり、このリニアレール上を塗布ドット検査カメラ８が移動（左右方向）し、かつ移動フレーム２を上下前後に移動することで、基板２１に塗布された塗布ドット２６を観測することができる。この塗布ドット検査カメラ８で基板２１を捉えた画像から、基板上に塗布された塗液滴の位置を求めて、ノズルの位置補正を行うものである。   FIG. 7 shows the observation status of the application dot inspection camera. FIG. 8 shows an enlarged view of the application dots. As shown in FIG. 2, the coating dot inspection camera 8 is provided on the rear side of the moving frame 2 so as to be movable in the longitudinal direction of the moving frame 2. That is, the application dot inspection camera 8 is provided on the linear rail 22 provided on the moving frame 2, the application dot inspection camera 8 moves (left and right direction) on the linear rail, and the movement frame 2 moves up and down and forward and backward. As a result, the application dots 26 applied to the substrate 21 can be observed. The position of the coating liquid applied on the substrate is obtained from the image obtained by capturing the substrate 21 with the application dot inspection camera 8 and the position of the nozzle is corrected.

次に、ノズル位置補正（キャリブレーション）方法について図９を用いて説明する。図９にノズル位置調整方法のフローチャートを示す。
まず、第一段階としてノズルカメラ６による検査結果に基づいて各ノズルの位置補正（従来方法）を実施する。手順としては、まず、基板ステージ２０、及び移動フレーム２を動作させてノズルカメラ６の位置にヘッドを移動する。次に、
（１）前列中央のヘッド１を基準とし、ヘッド１の両端ノズル２３、２４の位置をノズルカメラ６で観測し、座標をＸ１，Ｙ１とする。
（２）ノズルカメラ６と塗布ドット検査カメラ８の座標補正を実施する
（３）移動フレーム２と塗布ドット検査カメラ８の座標補正を実施する
（４）ヘッド１の端部のノズル２３と隣接ヘッド３０のヘッド１側のノズル２５とのズレ量ｄｘ、ｄｙ、ｄθを算出し、ヘッドの位置調整を実施する（図６参照）。
（５）同様に全ヘッド間で調整した後、ノズルカメラ６で両端ノズルの位置を算出する。続いて第二段階として塗布ドット検査カメラを用いて、基板上の塗布ドット２６を観測し、観測結果からドットの位置ずれ量を求め、ヘッドの吐出位置の補正を実施する。
（６）全ヘッドにて調整用基板２１にパターン塗布を実施する
（７）塗布ドット２６の位置を位塗布ドット検査８カメラで観測する
（８）ノズルカメラと塗布ドット検査カメラの座標補正を実施する
（９）移動フレームと塗布ドット検査カメラの座標補正を実施する
（１０）ヘッド１の塗布ドット２７と隣接ヘッド３０の塗布ドット２９とのズレ量Ｄｘ、Ｄｙ、Ｄθを算出し、ヘッドの位置調整を実施する（図８参照）
（１１）同様に全ヘッド間で調整した後、ノズルカメラ６で両端ノズルの位置を算出
（１２）以上でキャリブレーションを終了する
また、基板とのギャップを基板の撓みに合わせて校正するためのセンサを搭載することで、更に塗布精度を向上することが可能である。 Next, a nozzle position correction (calibration) method will be described with reference to FIG. FIG. 9 shows a flowchart of the nozzle position adjusting method.
First, as a first step, position correction of each nozzle (conventional method) is performed based on the inspection result by the nozzle camera 6. As a procedure, first, the substrate stage 20 and the moving frame 2 are operated to move the head to the position of the nozzle camera 6. next,
(1) Using the head 1 at the center of the front row as a reference, the positions of the nozzles 23 and 24 at both ends of the head 1 are observed with the nozzle camera 6 and the coordinates are X1 and Y1.
(2) Coordinate correction of nozzle camera 6 and application dot inspection camera 8 is performed. (3) Coordinate correction of moving frame 2 and application dot inspection camera 8 is performed. (4) Nozzle 23 at the end of head 1 and adjacent head. The amount of deviation dx, dy, dθ with respect to the nozzle 25 on the head 1 side of 30 is calculated, and the head position is adjusted (see FIG. 6).
(5) Similarly, after adjusting between all heads, the nozzle camera 6 calculates the positions of the nozzles at both ends. Subsequently, as a second step, the application dot inspection camera is used to observe the application dot 26 on the substrate, the dot displacement amount is obtained from the observation result, and the ejection position of the head is corrected.
(6) Apply pattern to adjustment substrate 21 with all heads (7) Observe position of application dot 26 with position application dot inspection 8 camera (8) Perform coordinate correction of nozzle camera and application dot inspection camera (9) Coordinate correction of moving frame and application dot inspection camera is performed. (10) Deviation amounts Dx, Dy, Dθ between the application dot 27 of the head 1 and the application dot 29 of the adjacent head 30 are calculated, and the position of the head Make adjustments (see Figure 8)
(11) Similarly, after adjusting between all the heads, calculate the positions of the nozzles at both ends with the nozzle camera 6 (12) End the calibration. Also, calibrate the gap with the substrate according to the deflection of the substrate. By mounting the sensor, it is possible to further improve the coating accuracy.

インクジェット塗布装置の全体構造を示す図である。It is a figure which shows the whole structure of an inkjet coating device. 塗布装置の後方を示す図である。It is a figure which shows the back of a coating device. インクジェットヘッドのノズル配列を示す図である。It is a figure which shows the nozzle arrangement | sequence of an inkjet head. ヘッド移動機構の詳細を示す図である。It is a figure which shows the detail of a head moving mechanism. ノズルの観測方法を示した図である。It is the figure which showed the observation method of a nozzle. ノズル観測による位置補正方法を示した図である。It is the figure which showed the position correction method by nozzle observation. 塗布ドットの観測方法を示した図である。It is the figure which showed the observation method of the application | coating dot. 図７の塗布ドットの部分拡大図であるIt is the elements on larger scale of the application | coating dot of FIG. ノズル位置調整方法のフローチャートである。It is a flowchart of a nozzle position adjustment method.

符号の説明Explanation of symbols

１…インクジェットヘッド、２…移動フレーム、３…ヘッド移動機構、４…ブラケット、６…ノズルカメラ、７…飛滴検査カメラ、８…塗布ドット検査カメラ、９…ノズル、１７…移動ステージ、１８…リニアレール、２０…基板ステージ。   DESCRIPTION OF SYMBOLS 1 ... Inkjet head, 2 ... Moving frame, 3 ... Head moving mechanism, 4 ... Bracket, 6 ... Nozzle camera, 7 ... Droplet inspection camera, 8 ... Application dot inspection camera, 9 ... Nozzle, 17 ... Moving stage, 18 ... Linear rail, 20 ... substrate stage.

Claims (3)

複数のノズルを、二次元で直線状に数列配置したインクジェットヘッドと、前記インクジェットヘッドを複数設置可能な移動フレームと、各種基板が設置可能な基板ステージと、を備えたフレーム移動型液材料塗布装置において、
前記インクジェットヘッドを装着するための取付けブラケットと、
前記取付けブラケットをＸＹθ方向に任意に駆動する機能を有するヘッド移動機構と、
各部分の状態を観測するためのカメラとを備え、
前記カメラは、
前記基板ステージの前方側に移動可能に設置され、前記インクジェットヘッドのノズルを観測するノズルカメラと、
前記基板ステージの前方側に移動可能に設置され、前記基板ステージに設置された基板に前記インクジェットヘッドより吐出される微小液滴を観測できる位置に移動して微小液滴の飛翔状態を観測する飛滴検査カメラと、
前記移動フレームの後方側に移動可能に設置され、前記インクジェットヘッドにより前記基板ステージ上の基板に塗布された液滴の状態を観測する塗布ドットカメラで構成され、
前記ノズルカメラと塗布ドットカメラの観測結果に基いて前記ヘッド移動機構により前記インクジェットヘッドをＸＹθ方向に位置調整すると共に、前記飛滴検査カメラの観測結果に基いて前記インクジェットヘッドの吐出制御を行うことを特徴とするインクジェットヘッド装置。 A frame-movable liquid material application device comprising: an inkjet head in which a plurality of nozzles are arranged in several rows in a two-dimensional line; a movable frame on which a plurality of inkjet heads can be installed; and a substrate stage on which various substrates can be installed. In
A mounting bracket for mounting the inkjet head;
A head moving mechanism having a function of arbitrarily driving the mounting bracket in the XYθ direction;
With a camera for observing the state of each part,
The camera
A nozzle camera that is movably installed on the front side of the substrate stage and observes the nozzles of the inkjet head;
A flying device that is movably installed on the front side of the substrate stage and moves to a position where the droplets discharged from the inkjet head can be observed on the substrate placed on the substrate stage to observe the flying state of the droplets. A drop inspection camera,
It is movably installed on the rear side of the moving frame, and is composed of a coating dot camera that observes the state of liquid droplets coated on the substrate on the substrate stage by the inkjet head.
Adjusting the position of the inkjet head in the XYθ direction by the head moving mechanism based on the observation results of the nozzle camera and the application dot camera, and controlling the ejection of the inkjet head based on the observation results of the droplet inspection camera. An ink jet head device. 請求項１に記載のインクジェットヘッド装置において、
前記インクジェットヘッドと前記ヘッド移動フレームを支持する移動ステージに、前記移動フレームを上下方向に移動するための駆動機構を有することを、特徴とするインクジェットヘッド装置。 The inkjet head device according to claim 1,
An ink jet head device comprising: a moving stage that supports the ink jet head and the head moving frame; and a drive mechanism for moving the moving frame in a vertical direction. 請求項１に記載のインクジェットヘッド装置において、
真空吸着により基板を固定するための吸着ホールと、真空引きを行うための機構を有することを、特徴とするインクジェットヘッド装置。 The inkjet head device according to claim 1,
An inkjet head device comprising: a suction hole for fixing a substrate by vacuum suction; and a mechanism for performing vacuuming.
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