JP5329739B2 - 適応光学装置で使用するための傾斜またはピストン運動を有するmemsミラー - Google Patents
適応光学装置で使用するための傾斜またはピストン運動を有するmemsミラー Download PDFInfo
- Publication number
- JP5329739B2 JP5329739B2 JP2005279275A JP2005279275A JP5329739B2 JP 5329739 B2 JP5329739 B2 JP 5329739B2 JP 2005279275 A JP2005279275 A JP 2005279275A JP 2005279275 A JP2005279275 A JP 2005279275A JP 5329739 B2 JP5329739 B2 JP 5329739B2
- Authority
- JP
- Japan
- Prior art keywords
- drive
- plate
- comb
- deformable
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Spectrometry And Color Measurement (AREA)
Description
表1の式における変数は、以下の通りである。
Vは印加された電圧であり、
zはミラーの垂直方向変位であり、
θはミラーの回転角度であり、
wsはスプリング・ビームの幅であり、
hsはスプリング・ビームの厚みであり、
lsはミラー取り付け点に対して測定されたスプリング・ビームの長さであり、
heは駆動装置の垂直方向厚みであり、
goはかみ合うコム歯間の間隔であり、
ntはコム駆動装置の一方側での歯の数である。
Claims (9)
- マイクロ電子機械システム(MEMS)デバイスは、
少なくとも1つの変形可能なスプリング・バーを含む、変形可能な支持手段と、
前記変形可能な支持手段の一表面に結合される駆動手段であって、前記変形可能な支持手段と該駆動手段の結合場所近くの場所で前記変形可能な支持手段に回転力を与える、駆動手段と、
を備える、マイクロ電子機械システムデバイス。 - 前記一表面と反対側表面上で前記変形可能な支持手段に結合されるプレートをさらに備える、請求項1に記載のマイクロ電子機械システムデバイス。
- さらに、前記変形可能な支持手段の変形が、前記プレートによってピストン運動を引き起こす、請求項2に記載のマイクロ電子機械システムデバイス。
- さらに、前記変形可能な支持手段の変形が、前記プレートによって傾斜運動を引き起こす、請求項2に記載のマイクロ電子機械システムデバイス。
- 前記変形可能な支持手段が、基板上に搭載された少なくとも1つの壁から支持される、請求項1に記載のマイクロ電子機械システムデバイス。
- 前記変形可能な支持手段が、複数の変形可能なスプリング・バーである、請求項1に記載のマイクロ電子機械システムデバイス。
- 前記駆動手段が静電駆動装置である、請求項1に記載のマイクロ電子機械システムデバイス。
- 前記静電駆動装置がコム駆動装置である、請求項7に記載のマイクロ電子機械システムデバイス。
- 前記静電駆動装置が平坦なプレート駆動装置である、請求項7に記載のマイクロ電子機械システムデバイス。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/953960 | 2004-09-29 | ||
US10/953,960 US7344262B2 (en) | 2004-09-29 | 2004-09-29 | MEMS mirror with tip or piston motion for use in adaptive optics |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006102934A JP2006102934A (ja) | 2006-04-20 |
JP5329739B2 true JP5329739B2 (ja) | 2013-10-30 |
Family
ID=36098753
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005279275A Expired - Fee Related JP5329739B2 (ja) | 2004-09-29 | 2005-09-27 | 適応光学装置で使用するための傾斜またはピストン運動を有するmemsミラー |
Country Status (4)
Country | Link |
---|---|
US (1) | US7344262B2 (ja) |
JP (1) | JP5329739B2 (ja) |
KR (1) | KR101288214B1 (ja) |
TW (1) | TWI437295B (ja) |
Families Citing this family (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20070068308A1 (en) * | 2005-09-22 | 2007-03-29 | Greywall Dennis S | MEMS actuator |
US7516661B2 (en) * | 2006-02-23 | 2009-04-14 | Honeywell International Inc. | Z offset MEMS device |
JP5282883B2 (ja) * | 2006-07-06 | 2013-09-04 | 株式会社ニコン | 光学デバイス及び露光装置、並びにデバイス製造方法 |
US7440158B2 (en) | 2007-03-02 | 2008-10-21 | Lucent Technologies Inc. | Direct optical image projectors |
US9778477B2 (en) * | 2007-03-02 | 2017-10-03 | Alcatel-Lucent Usa Inc. | Holographic MEMS operated optical projectors |
US20080219303A1 (en) * | 2007-03-02 | 2008-09-11 | Lucent Technologies Inc. | Color mixing light source and color control data system |
US7502160B2 (en) * | 2007-03-02 | 2009-03-10 | Alcatel-Lucent Usa Inc. | Speckle reduction in laser-projector images |
US7750286B2 (en) * | 2007-06-19 | 2010-07-06 | Alcatel-Lucent Usa Inc. | Compact image projector having a mirror for reflecting a beam received from a polarization beam splitter back to the polarization beam splitter |
TWI418850B (zh) * | 2007-11-09 | 2013-12-11 | 尼康股份有限公司 | 微致動器、光學設備、顯示裝置、曝光裝置及設備製造方法 |
US20090141336A1 (en) * | 2007-11-30 | 2009-06-04 | Lumination Llc | Projection display devices employing frustrated total internal reflection |
WO2009079460A1 (en) * | 2007-12-14 | 2009-06-25 | University Of Florida Research Foundation, Inc. | Electrothermal microactuator for large vertical displacement without tilt or lateral shift |
US8129669B2 (en) * | 2008-01-22 | 2012-03-06 | Alcatel Lucent | System and method generating multi-color light for image display having a controller for temporally interleaving the first and second time intervals of directed first and second light beams |
US8109638B2 (en) * | 2008-01-22 | 2012-02-07 | Alcatel Lucent | Diffuser configuration for an image projector |
US8247999B2 (en) * | 2008-01-22 | 2012-08-21 | Alcatel Lucent | Time division multiplexing a DC-to-DC voltage converter |
US20090184976A1 (en) * | 2008-01-22 | 2009-07-23 | Alcatel-Lucent | System and Method for Color-Compensating a Video Signal Having Reduced Computational Requirements |
DE102008001071B4 (de) * | 2008-04-09 | 2017-05-24 | Robert Bosch Gmbh | Mikromechanische Aktuatorstruktur und entsprechendes Betätigungsverfahren |
SE533992C2 (sv) | 2008-12-23 | 2011-03-22 | Silex Microsystems Ab | Elektrisk anslutning i en struktur med isolerande och ledande lager |
JP5444746B2 (ja) * | 2009-02-13 | 2014-03-19 | 富士通株式会社 | マイクロ可動素子および光干渉計 |
US8226241B2 (en) * | 2009-05-15 | 2012-07-24 | Alcatel Lucent | Image projector employing a speckle-reducing laser source |
US20110234985A1 (en) * | 2010-03-26 | 2011-09-29 | Alcatel-Lucent Usa Inc. | Despeckling laser-image-projection system |
DE102012206612A1 (de) * | 2012-04-23 | 2013-10-24 | Carl Zeiss Smt Gmbh | Optisches Bauelement zur Führung eines Strahlungsbündels |
DE102013212095B4 (de) * | 2013-06-25 | 2024-06-27 | Robert Bosch Gmbh | Mikro-elektromechanischer Reflektor und Verfahren zum Herstellen eines mikro-elektromechanischen Reflektors |
DE102013222836B4 (de) | 2013-11-11 | 2023-06-07 | Robert Bosch Gmbh | 1Mikroelektromechanisches Bauelement und entsprechendes Herstellungsverfahren |
CN105196300B (zh) * | 2015-11-11 | 2020-03-13 | 山东理工大学 | 自协调驱动型二转动微操作机器人 |
US9813602B2 (en) * | 2015-12-22 | 2017-11-07 | Faez Ba-Tis | Autofocus camera using MEMS actuation of image sensor |
JP6679044B2 (ja) * | 2016-05-24 | 2020-04-15 | 新日本無線株式会社 | Mems素子 |
JP6778134B2 (ja) * | 2017-03-14 | 2020-10-28 | 浜松ホトニクス株式会社 | 光モジュール及びその実装方法 |
CN110418994B (zh) * | 2017-03-14 | 2022-04-19 | 浜松光子学株式会社 | 光模块 |
US11561388B2 (en) * | 2017-03-14 | 2023-01-24 | Hamamatsu Photonics K.K. | Light module |
US11513339B2 (en) | 2017-03-14 | 2022-11-29 | Hamamatsu Photonics K.K. | Optical module |
JP6814076B2 (ja) * | 2017-03-14 | 2021-01-13 | 浜松ホトニクス株式会社 | 光モジュール |
JP6793066B2 (ja) * | 2017-03-14 | 2020-12-02 | 浜松ホトニクス株式会社 | 光モジュール |
US11535511B2 (en) | 2017-08-02 | 2022-12-27 | United States Of America As Represented By The Secretary Of The Air Force | Post-processing techniques on mems foundry fabricated devices for large angle beamsteering |
US11279613B2 (en) | 2017-08-02 | 2022-03-22 | Government Of The United States, As Represented By The Secretary Of The Air Force | MEMS device for large angle beamsteering |
US11803043B2 (en) | 2019-12-17 | 2023-10-31 | University Of Washington | System and apparatus for dynamically shaped focal surface with a scanning microscope |
CN111552072B (zh) * | 2020-04-28 | 2022-07-12 | 安徽中科米微电子技术有限公司 | 大尺寸mems垂直梳齿微镜及其制备方法 |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6680792B2 (en) * | 1994-05-05 | 2004-01-20 | Iridigm Display Corporation | Interferometric modulation of radiation |
JP3011144B2 (ja) * | 1997-07-31 | 2000-02-21 | 日本電気株式会社 | 光スキャナとその駆動方法 |
KR100313851B1 (ko) * | 1998-04-10 | 2001-12-12 | 윤종용 | 화상표시장치용마이크로미러디바이스 |
KR100708077B1 (ko) * | 2000-05-01 | 2007-04-16 | 삼성전자주식회사 | 화상표시장치용 마이크로미러 디바이스 |
JP2002040354A (ja) * | 2000-07-27 | 2002-02-06 | Olympus Optical Co Ltd | 光スキャナ |
KR100389865B1 (ko) * | 2001-03-02 | 2003-07-04 | 삼성전자주식회사 | 마이크로미러 디바이스 및 이를 채용한 프로젝터 |
US20020164111A1 (en) * | 2001-05-03 | 2002-11-07 | Mirza Amir Raza | MEMS assemblies having moving members and methods of manufacturing the same |
JP2003075738A (ja) * | 2001-08-31 | 2003-03-12 | Hitachi Ltd | 光スイッチ |
JP2003344788A (ja) * | 2002-05-28 | 2003-12-03 | Matsushita Electric Works Ltd | 光スイッチ及びその製造方法 |
JP2003344787A (ja) * | 2002-05-28 | 2003-12-03 | Matsushita Electric Works Ltd | 光スイッチ及びその製造方法 |
JP4025990B2 (ja) * | 2002-09-26 | 2007-12-26 | セイコーエプソン株式会社 | ミラーデバイス、光スイッチ、電子機器およびミラーデバイス駆動方法 |
JP4244649B2 (ja) * | 2003-02-10 | 2009-03-25 | 株式会社デンソー | 光学素子 |
US6906848B2 (en) * | 2003-02-24 | 2005-06-14 | Exajoule, Llc | Micromirror systems with concealed multi-piece hinge structures |
US6998758B2 (en) * | 2003-06-05 | 2006-02-14 | Lucent Technologies Inc. | Deformable MEMS mirror with membrane actuated by application of torque |
JPWO2005102909A1 (ja) * | 2004-04-22 | 2008-03-13 | 松下電器産業株式会社 | アクチュエータ |
-
2004
- 2004-09-29 US US10/953,960 patent/US7344262B2/en active Active
-
2005
- 2005-09-22 TW TW094132857A patent/TWI437295B/zh not_active IP Right Cessation
- 2005-09-27 JP JP2005279275A patent/JP5329739B2/ja not_active Expired - Fee Related
- 2005-09-28 KR KR1020050090669A patent/KR101288214B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
JP2006102934A (ja) | 2006-04-20 |
KR20060051771A (ko) | 2006-05-19 |
US7344262B2 (en) | 2008-03-18 |
KR101288214B1 (ko) | 2013-07-19 |
TWI437295B (zh) | 2014-05-11 |
TW200624895A (en) | 2006-07-16 |
US20060066964A1 (en) | 2006-03-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5329739B2 (ja) | 適応光学装置で使用するための傾斜またはピストン運動を有するmemsミラー | |
JP6093788B2 (ja) | デバイスを作る方法、半導体デバイス及び前駆構造物 | |
US6528887B2 (en) | Conductive equipotential landing pads formed on the underside of a MEMS device | |
JP5759494B2 (ja) | 高フィルファクターアレイ用の微小電気機械システムマイクロミラーおよびこの方法 | |
US20060267449A1 (en) | Torsional electrostatic actuator | |
JP4388221B2 (ja) | マイクロ電気機械式光学装置 | |
US8630033B2 (en) | Via structure and method thereof | |
Takahashi et al. | Switched-layer design for SOI bulk micromachined XYZ stage using stiction bar for interlayer electrical connection | |
CN118176453A (zh) | 用于防止微镜的大的平面外位移的竖直机械止动部及其制造方法 | |
US8729713B2 (en) | Via structure and method thereof | |
CN115236849A (zh) | 二维mems扫描微镜及其制备方法 | |
JP4979027B2 (ja) | Mems素子の製造方法およびmems素子 | |
KR100404195B1 (ko) | 마이크로 미러 및 그 제조방법 | |
JP3825388B2 (ja) | 光スイッチ装置 | |
CN220105416U (zh) | 一种采用活动支撑的微镜结构 | |
US20050062138A1 (en) | Semiconductor structure with electrically isolated sidewall electrodes and method for fabricating the structure | |
KR100396664B1 (ko) | 마이크로 미러 및 그 제조방법 | |
CN116679443A (zh) | 一种采用活动支撑的微镜结构及制造方法 | |
KR101075688B1 (ko) | 광학식 손 떨림 보정장치 및 이의 제조 방법 | |
KR100451465B1 (ko) | 반도체 능동 미러와 그 제조방법 및 그를 이용한 조리개겸 셔터 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080912 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110620 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110920 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110926 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20111215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120528 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120828 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20130305 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130605 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130627 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130725 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 5329739 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |