JP5274828B2 - Field emission lamp with cold cathode electron source - Google Patents

Field emission lamp with cold cathode electron source Download PDF

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JP5274828B2
JP5274828B2 JP2007324905A JP2007324905A JP5274828B2 JP 5274828 B2 JP5274828 B2 JP 5274828B2 JP 2007324905 A JP2007324905 A JP 2007324905A JP 2007324905 A JP2007324905 A JP 2007324905A JP 5274828 B2 JP5274828 B2 JP 5274828B2
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electrode
electron source
field emission
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cold cathode
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JP2009146816A (en
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範行 中岡
博久 平木
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Pureron Japan Co Ltd
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本発明は、冷陰極電子源を備えたフィールドエミッションランプに関する。 The present invention relates to a field emission lamp having a cold cathode electron source.

図5を参照して、内部真空10の図示略のランプ管内に蛍光体11付きアノード電極12に平行に配置した基板14上にカソード電極16を配置すると共に、このカソード電極16上に断面長方形状の絶縁層18と断面三角形状の電子エミッタ(エミッタ電極)20とを配置し、電子エミッタ20とカソード電極16とは直接接続で相互の電気的導通をとる一方で絶縁層18上に断面長方形状のゲート電極22を配置した構成のフィールドエミッションランプ24が従来から提案されている(例えば特許文献1参照)。このようなフィールドエミッションランプ24では、アノード電極12とカソード電極16との間に高電位を印加すると共にゲート電極22の電位制御で電子エミッタ20の頂点から電子放出を制御しつつ電界放射により電子を引き出して蛍光体11に加速衝突させて蛍光体11を励起発光させることができるようになっている。    Referring to FIG. 5, a cathode electrode 16 is disposed on a substrate 14 disposed in parallel with the anode electrode 12 with the phosphor 11 in a lamp tube (not shown) of the internal vacuum 10, and a rectangular cross section is formed on the cathode electrode 16. Insulating layer 18 and electron emitter (emitter electrode) 20 having a triangular cross section are arranged. Electron emitter 20 and cathode electrode 16 are directly connected to each other to be electrically connected to each other, while rectangular shape is formed on insulating layer 18. A field emission lamp 24 having a configuration in which the gate electrode 22 is arranged has been proposed (see, for example, Patent Document 1). In such a field emission lamp 24, a high potential is applied between the anode electrode 12 and the cathode electrode 16 and electrons are emitted by field emission while controlling the electron emission from the apex of the electron emitter 20 by controlling the potential of the gate electrode 22. The phosphor 11 can be excited to emit light by being pulled out and acceleratedly collided with the phosphor 11.

上記フィールドエミッションランプ24では、ゲート電極22とカソード電極16との位置関係は、電子エミッタ20からの電子引き出し特性に影響を与える。従ってこれら相互の絶縁距離は予め一定に設定できることが望ましい。   In the field emission lamp 24, the positional relationship between the gate electrode 22 and the cathode electrode 16 affects the electron extraction characteristics from the electron emitter 20. Therefore, it is desirable that the mutual insulation distance can be set to be constant in advance.

しかし、上記従来構造の冷陰極電子源26ではゲート電極22とカソード電極16との絶縁距離関係を高精度に設定するには精密な製造プロセスを要求されるものであり、製造歩留まりが必ずしもよくない。また、1つの電子放出サイトには単一の電子エミッタ20が連続使用されるようになっているので、早期に電子エミッタ20の電子放出寿命が到来し、ひいてはフィールドエミッションランプ24のランプ寿命特性が低い。
特開2001−184020号公報
However, the cold cathode electron source 26 having the above-described conventional structure requires a precise manufacturing process to set the insulation distance relationship between the gate electrode 22 and the cathode electrode 16 with high accuracy, and the manufacturing yield is not necessarily good. . In addition, since a single electron emitter 20 is continuously used at one electron emission site, the electron emission life of the electron emitter 20 comes early, and consequently the lamp life characteristics of the field emission lamp 24 are improved. Low.
JP 2001-184020 A

本発明では、製造歩留まりに優れ、かつ、電子放出寿命特性に優れた冷陰極電子源を提供するものである。本発明ではランプ寿命が長いフィールドエミッションランプを提供するものである。   The present invention provides a cold cathode electron source having excellent manufacturing yield and excellent electron emission lifetime characteristics. The present invention provides a field emission lamp having a long lamp life.

本発明に係る冷陰極電子源を備えたフィールドエミッションランプは、陰極電子源と、この冷陰極電子源に対向配置される蛍光体付きアノード電極とを備えたフィールドエミッションランプにおいて、上記冷陰極電子源は、カソード電極とゲート電極とを交互に絶縁材を挟んで基板上に配置して一体化し、上記カソード電極とゲート電極とのうち少なくとも一方は上記交互に配置される並設方向で複数配置されるとともに、上記カソード電極とゲート電極とのうち少なくとも上記カソード電極の上記アノード電極と対向する側の端面に炭素膜を設けたことを特徴とするものである。 A field emission lamp comprising a cold cathode electron source according to the present invention is a field emission lamp comprising a cold cathode electron source and an anode electrode with a phosphor disposed opposite to the cold cathode electron source. The source is formed by alternately arranging the cathode electrode and the gate electrode on the substrate with the insulating material interposed therebetween, and at least one of the cathode electrode and the gate electrode is arranged in a plurality in the parallel arrangement direction. In addition, a carbon film is provided on an end face of the cathode electrode and the gate electrode on the side facing the anode electrode of at least the cathode electrode .

本発明では、冷陰極電子源の構成が複数の電極と複数の絶縁材が交互に配置されて一体化されているので、絶縁材の板厚調整で電極間の絶縁距離が一定化する。また、各電極に炭素膜を設けておくことにより、各電極を切り替えてカソード電極とすることができ、そのカソード電極とすることができ、そのカソード電極上の炭素膜を電子エミッタとして用いることにより、電子放出寿命が長い冷陰極電子源を得ることができる。このように、電子放出寿命が長い冷陰極電子源を用いるので、フィールドエミッションランプとしてランプ寿命が長い。 In the present invention, the structure of the cold cathode electron source is integrated by alternately arranging a plurality of electrodes and a plurality of insulating materials, so that the insulation distance between the electrodes is made constant by adjusting the plate thickness of the insulating material. In addition, by providing a carbon film on each electrode, each electrode can be switched to become a cathode electrode, which can be used as the cathode electrode, and by using the carbon film on the cathode electrode as an electron emitter. A cold cathode electron source having a long electron emission lifetime can be obtained. Thus, since the cold cathode electron source having a long electron emission lifetime is used, the lamp lifetime is long as a field emission lamp.

本発明において、好ましい態様の1つは、上記基板がフラットな形状であり、当該基板上にカソード電極とゲート電極とを交互に絶縁材を挟んで配置することである。 In the present invention, one preferred embodiment, the substrate is a flat shape, is to place across the insulating material alternately a cathode electrode and a gate electrode on the substrate.

本発明において、好ましい態様の1つは、上記基板が線状であり、当該基板の周方向にカソード電極とゲート電極とを交互に絶縁材を挟んで配置することである。 In the present invention, one preferred embodiment, the substrate is linear, is to place across the insulating material in the circumferential direction of the substrate alternately a cathode electrode and a gate electrode.

本発明によれば、製造歩留まりないしは電子放出寿命特性に優れた冷陰極電子源を用いたフィールドエミッションランプとなりランプ寿命が長いランプとなる。 According to the present invention, a field emission lamp using a cold cathode electron source excellent in manufacturing yield or electron emission lifetime characteristics is obtained , and the lamp has a long lamp lifetime.

以下、添付した図面を参照して、本発明の実施の形態に係る冷陰極電子源を備えるフィールドエミッションランプを説明する。なお、図1は参考例を示すものであり、図2、図3、図4は、それぞれ、本発明の実施の形態を示す。 Hereinafter, a field emission lamp including a cold cathode electron source according to an embodiment of the present invention will be described with reference to the accompanying drawings. FIG. 1 shows a reference example, and FIGS. 2, 3, and 4 each show an embodiment of the present invention.

図1(a)(b)を参照して参考例の冷陰極電子源を備えたフィールドエミッションランプを説明する。図1(a)は冷陰極電子源の断面を示し、図1(b)は図1(a)の円Aで囲む部分を拡大して示す。 A field emission lamp equipped with a cold cathode electron source of a reference example will be described with reference to FIGS. FIG. 1A shows a cross section of the cold cathode electron source, and FIG. 1B shows an enlarged portion surrounded by a circle A in FIG.

実施の形態の冷陰極電子源26は、基板14上において、絶縁材28の両側面に電極32a,32bを積層一体化して構成している。   The cold cathode electron source 26 according to the embodiment is configured by stacking and integrating electrodes 32 a and 32 b on both sides of an insulating material 28 on the substrate 14.

実施の形態の冷陰極電子源26において、図1(b)で拡大して示すように、一方の電極32aがゲート電極、他方の電極32bがカソード電極となって、ゲート電極32a表面には炭素膜は形成されていないが、カソード電極32bには電子エミッタとして電子放出作用がある炭素膜30bが形成されている。   In the cold cathode electron source 26 of the embodiment, as shown in an enlarged view in FIG. 1B, one electrode 32a serves as a gate electrode, the other electrode 32b serves as a cathode electrode, and carbon is formed on the surface of the gate electrode 32a. Although no film is formed, a carbon film 30b having an electron emission function as an electron emitter is formed on the cathode electrode 32b.

この炭素膜30bは、カーボンナノチューブ、カーボンナノウォール、黒鉛、等の電界放射により電子放出することができる多数のnmサイズの鋭端を備えた炭素膜である。この構造では、カソード電極32b上の炭素膜30bからは、電子e−がゲート電極32aで引き出されて図1(b)の矢印で示すように放出される。   The carbon film 30b is a carbon film having a number of nm-sized sharp ends capable of emitting electrons by electric field radiation such as carbon nanotubes, carbon nanowalls, and graphite. In this structure, from the carbon film 30b on the cathode electrode 32b, electrons e− are extracted by the gate electrode 32a and emitted as shown by the arrow in FIG.

なお、実施の形態ではカソード電極32bの表面にのみ炭素膜30bを形成することに限定するものではなく、図1(c)で示すように、両電極32a,32bの電極表面に炭素膜30a、30bを形成してもよい。図1(c)の構造では、電極32a,32bをカソード電極、ゲート電極として切り替えて用いる。すなわち、電極30aをカソード電極とし電極30bをゲート電極とする場合では実線矢印で示すように電子e−を放出させ、電極30aをゲート電極とし電極30bをカソード電極とする場合では点線矢印で示すように電子e−を放出させる。この切り替えは、ある周期で交互に切り替えて、使うこともでき、あるいは、片方の電極表面の炭素膜に電子エミッタとしての寿命が来るときに、切り替えを行っても良い。このように、双方の電極表面の炭素膜を電子放出に使用することができ、冷陰極電子源26の寿命を向上させることができる。   In the embodiment, the carbon film 30b is not limited to be formed only on the surface of the cathode electrode 32b. As shown in FIG. 1C, the carbon film 30a is formed on the electrode surfaces of both the electrodes 32a and 32b. 30b may be formed. In the structure of FIG. 1C, the electrodes 32a and 32b are switched and used as a cathode electrode and a gate electrode. That is, when the electrode 30a is a cathode electrode and the electrode 30b is a gate electrode, the electron e− is emitted as shown by a solid arrow, and when the electrode 30a is a gate electrode and the electrode 30b is a cathode electrode, it is shown by a dotted arrow. To emit electrons e-. This switching can be used by alternately switching at a certain period, or may be performed when the carbon film on the surface of one of the electrodes has a lifetime as an electron emitter. Thus, the carbon films on both electrode surfaces can be used for electron emission, and the lifetime of the cold cathode electron source 26 can be improved.

図2(a)に本発明の実施の形態の冷陰極電子源を備えたフィールドエミッションランプの部分断面、図2(b)にその冷陰極電子源の電子放出状態を模式的に示す。これらの図において図5と対応する部分には同一の符号を付している。図2(a)の円Bで囲む部分を拡大して示している。 FIGS. 2 (a) to implementation in the form of a cold-cathode electron source field emission lamp part cross-section with the present invention, showing the electron emitting state of the cold-cathode electron source schematically in FIG. 2 (b). In these drawings, portions corresponding to those in FIG. The part enclosed with the circle | round | yen B of Fig.2 (a) is expanded and shown.

図2(a)を参照して図示略の内部真空10のフラットパネル内に共にフラット形状の蛍光体11付きアノード電極12と、基板14と、が平行に対向配置されている。基板14上には、アノード電極12に対向して、図2(a)の紙面を垂直に貫通する方向に線状に延びる冷陰極電子源26が配置されている。なお、冷陰極電子源26は模式的に図示したものであり、その断面直径等の各部寸法等は特に限定しない。冷陰極電子源26は説明の都合で基板14上に単一配置の形態で示されているが、基板14上に複数配置の形態であってもよいことは勿論である。   Referring to FIG. 2A, a flat anode electrode 12 with a phosphor 11 and a substrate 14 are arranged in parallel to face each other in a flat panel of an internal vacuum 10 (not shown). On the substrate 14, a cold cathode electron source 26 is disposed so as to face the anode electrode 12 and extend linearly in a direction perpendicularly penetrating the paper surface of FIG. The cold cathode electron source 26 is schematically illustrated, and the dimensions of each part such as the cross-sectional diameter are not particularly limited. Although the cold cathode electron source 26 is shown in a single arrangement on the substrate 14 for convenience of explanation, it is needless to say that a plurality of cold cathode electron sources 26 may be arranged on the substrate 14.

冷陰極電子源26は、ゲート電極22、絶縁材28、カソード電極16がアノード電極12に対して交互に配置されている。換言すれば、ゲート電極22とカソード電極16は絶縁材28の両側面に一体構造化されている。この一体構造は、図5で示すような従来とは異なって絶縁材28の両側面に電極22,16を設けた構造になっている。絶縁材28の図1上での左右方向幅は図解の都合で示すものであり、フィルム、膜、基板状、等でもよく、その材質は両電極22,16を電気的に絶縁できればよい。   In the cold cathode electron source 26, the gate electrode 22, the insulating material 28, and the cathode electrode 16 are alternately arranged with respect to the anode electrode 12. In other words, the gate electrode 22 and the cathode electrode 16 are integrally formed on both side surfaces of the insulating material 28. This integrated structure is different from the conventional structure as shown in FIG. 5 in that the electrodes 22 and 16 are provided on both side surfaces of the insulating material 28. The width of the insulating material 28 in the left-right direction on FIG. 1 is shown for convenience of illustration, and may be a film, a film, a substrate, or the like, and the material only needs to be able to electrically insulate both electrodes 22 and 16.

カソード電極16に対してはアノード電極12に対向する側の端面16aに電界電子放出機能を有する炭素膜30が成膜されている。この場合、炭素膜30はゲート電極22に成膜されてもよい。また、炭素膜30は図2では上記端面16aに成膜されたが、両電極22,16の側面に成膜されてもよいことは勿論である。   For the cathode electrode 16, a carbon film 30 having a field electron emission function is formed on the end face 16 a on the side facing the anode electrode 12. In this case, the carbon film 30 may be formed on the gate electrode 22. Further, although the carbon film 30 is formed on the end face 16 a in FIG. 2, it is needless to say that the carbon film 30 may be formed on the side surfaces of both the electrodes 22 and 16.

以上の構成の冷陰極電子源26を備えたフィールドエミッションランプ32においては、アノード電極12とカソード電極16との間に図示略の高電圧電源から高電圧(アノード・カソード間電圧)が印加され、また、ゲート電極22に図示略の電圧電源から電子引出しに必要なゲート電圧が印加されたとき、図2(b)で示すように、炭素膜30は電子エミッタとして電界放射により電子放出するが、この電子放出に際しゲート電極22で電子引き出しが行われると共にアノード電極12に向けて電子e−が放出され、該電子e−が蛍光体11に加速衝突して当該蛍光体11が励起発光する。   In the field emission lamp 32 having the cold cathode electron source 26 having the above configuration, a high voltage (anode-cathode voltage) is applied between the anode electrode 12 and the cathode electrode 16 from a high voltage power supply (not shown), When a gate voltage necessary for extracting electrons is applied to the gate electrode 22 from a voltage power supply (not shown), as shown in FIG. 2B, the carbon film 30 emits electrons by field emission as an electron emitter. At the time of this electron emission, electrons are extracted at the gate electrode 22 and electrons e− are emitted toward the anode electrode 12. The electrons e− collide with the phosphor 11 at an accelerated speed, and the phosphor 11 emits light by excitation.

上記実施の形態の冷陰極電子源26は、絶縁材28の両側面にゲート、カソード両電極22,16を一体化して設け、少なくともカソード電極16に炭素膜30を設けたので、ゲート、カソード両電極22,16の絶縁距離や互いの相対高さの寸法関係等は絶縁材28で一定化されるので、これらの製造プロセスにはそれらの寸法関係を高精度に維持する精密プロセスをそれほど要求されずに済み、製造歩留まりが向上する。   In the cold cathode electron source 26 of the above embodiment, the gate and cathode electrodes 22 and 16 are integrally provided on both side surfaces of the insulating material 28, and the carbon film 30 is provided on at least the cathode electrode 16, so both the gate and cathode are provided. Since the insulating distance of the electrodes 22 and 16 and the dimensional relationship between the relative heights of the electrodes 22 and 16 are fixed by the insulating material 28, these manufacturing processes are required to have a precision process for maintaining the dimensional relationship with high accuracy. The manufacturing yield is improved.

また、カソード電極16に炭素膜30を成膜するだけでなくその両側に位置するゲート電極22にも炭素膜30を設けた場合では、カソード電極16上の炭素膜30に電子エミッタとしての寿命が来るときは、カソード電極16をゲート電極とし、ゲート電極22をカソード電極とし、ゲート電極22上の炭素膜30を電子エミッタとして用いることができ、冷陰極電子源の電子放出寿命が向上する。   Further, when the carbon film 30 is provided not only on the cathode electrode 16 but also on the gate electrodes 22 located on both sides thereof, the carbon film 30 on the cathode electrode 16 has a life as an electron emitter. When coming, the cathode electrode 16 can be used as a gate electrode, the gate electrode 22 can be used as a cathode electrode, and the carbon film 30 on the gate electrode 22 can be used as an electron emitter, which improves the electron emission lifetime of the cold cathode electron source.

図3を参照して本発明の他の実施の形態にかかる冷陰極電子源を備えたフィールドエミッションランプを説明する。図3(a)の円Cで囲む部分を拡大して示している。この実施の形態の冷陰極電子源26は、図3(a)で示すように基板14上において、高さがh1の電極34a、高さがh2(>h1)の電極34bが絶縁材28を介して並設一体化されている。各電極34a,34bそれぞれの端面には炭素膜30a,30bが成膜されている。 A field emission lamp including a cold cathode electron source according to another embodiment of the present invention will be described with reference to FIG. The part enclosed by the circle C of Fig.3 (a) is expanded and shown. In the cold cathode electron source 26 of this embodiment, as shown in FIG. 3A, an electrode 34a having a height h1 and an electrode 34b having a height h2 (> h1) on the substrate 14 provide the insulating material 28. Are integrated in parallel. Carbon films 30a and 30b are formed on the end faces of the electrodes 34a and 34b, respectively.

この実施の形態の冷陰極電子源26を備えたフィールドエミッションランプ32においては、図3(b)で示すように、高さh2の電極34bをゲート電極、高さh1の電極34aをカソード電極とすると、ゲート電極がカソード電極より高いので、オーバーゲートタイプの冷陰極電子源26として、また、高さh1の電極34aをゲート電極とする場合、高さh2の電極34bはカソード電極となり、ゲート電極がカソード電極より低いので、アンダーゲートタイプの冷陰極電子源26として、用いることができる。いずれのタイプの冷陰極電子源26にするかをユーザは選択することができるようになる。   In the field emission lamp 32 having the cold cathode electron source 26 of this embodiment, as shown in FIG. 3B, the electrode 34b having a height h2 is a gate electrode, and the electrode 34a having a height h1 is a cathode electrode. Then, since the gate electrode is higher than the cathode electrode, as the over-gate type cold cathode electron source 26, and when the electrode 34a having the height h1 is used as the gate electrode, the electrode 34b having the height h2 becomes the cathode electrode. Can be used as the under-gate type cold cathode electron source 26. The user can select which type of cold cathode electron source 26 is used.

図4を参照して本発明のさらに他の実施の形態にかかる冷陰極電子源を備えたフィールドエミッションランプを説明する。図4(b)の円Dで囲む部分を拡大して示している。   A field emission lamp including a cold cathode electron source according to still another embodiment of the present invention will be described with reference to FIG. The part enclosed with the circle | round | yen D of FIG.4 (b) is expanded and shown.

図4(a)で示すフィールドエミッションランプ32はフラットパネルタイプであり、その冷陰極電子源26は平坦なアノード電極12に対して電極36aと、絶縁材28と,電極36bとをこの順序で並設したフラットな構成になっている。例えば電極36aをゲート電極、電極36bをカソード電極とし、カソード電極36b表面にのみ図示略の炭素膜を形成したり、あるいはゲート電極36a、カソード電極36bの両表面共に図示略の炭素膜を形成することができる。   The field emission lamp 32 shown in FIG. 4A is a flat panel type, and the cold cathode electron source 26 has an electrode 36a, an insulating material 28, and an electrode 36b arranged in this order with respect to the flat anode electrode 12. It has a flat configuration. For example, the electrode 36a is a gate electrode and the electrode 36b is a cathode electrode, and a carbon film (not shown) is formed only on the surface of the cathode electrode 36b, or a carbon film (not shown) is formed on both surfaces of the gate electrode 36a and the cathode electrode 36b. be able to.

図4(b)で示すフィールドエミッションランプ32はランプ管形状であり、その冷陰極電子源26は、この断面円形の蛍光体11付きのアノード電極12に対して断面円形になっていて、紙面を垂直方向線状に延びる断面円形の基板14上に円周方向に電極38aと、絶縁材28と、電極38bとをこの順序で設けると共に電極38aをゲート電極とし、電極38bをカソード電極とし、電極38bのアノード電極12に対向する側の端面に炭素膜30を設けた構成になっている。この場合、両電極38a,38bに共に炭素膜を設けてもよい。また、基板36は断面円形に限定されず断面多角形であってもよい。電極38a,38bと絶縁材28は図4(b)の紙面を垂直に貫通する方向に線状に延びた形状になっている。なお、ゲート電極となる電極38aやカソード電極となる電極38bに対する電圧の印加の説明は略する。   The field emission lamp 32 shown in FIG. 4B has a lamp tube shape, and its cold cathode electron source 26 has a circular cross section with respect to the anode electrode 12 with the fluorescent substance 11 having a circular cross section. An electrode 38a, an insulating material 28, and an electrode 38b are provided in this order on a substrate 14 having a circular cross section extending in a vertical line shape, and the electrode 38a is a gate electrode, the electrode 38b is a cathode electrode, The carbon film 30 is provided on the end surface on the side facing the anode electrode 12 of 38b. In this case, both electrodes 38a and 38b may be provided with a carbon film. The substrate 36 is not limited to a circular cross section, and may be a polygonal cross section. The electrodes 38a, 38b and the insulating material 28 have a shape extending linearly in a direction perpendicularly penetrating the paper surface of FIG. Note that description of voltage application to the electrode 38a serving as the gate electrode and the electrode 38b serving as the cathode electrode is omitted.

図1(a)は参考例の実施形態に係る冷陰極電子源を備えたフィールドエミッションランプの部分断面を示す図、図1(b)は図1(a)の冷陰極電子源においてカソード電極表面にのみ炭素膜が形成されている場合の電子放出状態を示す図、図、図1(c)は図1(a)の冷陰極電子源においてゲート電極とカソード電極両表面に炭素膜が形成されている場合の電子放出状態を示す図である。1A is a diagram showing a partial cross section of a field emission lamp provided with a cold cathode electron source according to an embodiment of a reference example , and FIG. 1B is a surface of a cathode electrode in the cold cathode electron source of FIG. FIG. 1 (c) shows a state of electron emission when a carbon film is formed only on the surface of the cold cathode electron source of FIG. 1 (a). Carbon films are formed on both surfaces of the gate electrode and the cathode electrode. It is a figure which shows the electron emission state in the case of being. 図2(a)は本発明の実施形態に係る冷陰極電子源を備えたフィールドエミッションランプの部分断面を示す図、図2(b)は図2(a)の冷陰極電子源の電子放出状態を示す図である。2A is a diagram showing a partial cross section of a field emission lamp provided with a cold cathode electron source according to an embodiment of the present invention, and FIG. 2B is an electron emission state of the cold cathode electron source of FIG. FIG. 図3(a)は本発明のさらに他の実施形態に係る冷陰極電子源を備えたフィールドエミッションランプの部分断面を示す図、図3(b)は各電極がゲート電極となった場合のオーバーゲートタイプとアンダーゲートタイプとを示す図である。FIG. 3A is a diagram showing a partial cross section of a field emission lamp having a cold cathode electron source according to still another embodiment of the present invention, and FIG. 3B is an overshoot when each electrode is a gate electrode. It is a figure which shows a gate type and an under gate type. 図4(a)はアノード電極がフラットな場合の冷陰極電子源の断面、図4(b)はアノード電極が断面円形の場合の冷陰極電子源の断面を示すである。4A is a cross-sectional view of the cold cathode electron source when the anode electrode is flat, and FIG. 4B is a view showing a cross-section of the cold cathode electron source when the anode electrode is circular in cross section. 従来の冷陰極電子源を備えたフィールドエミッションランプの部分断面を示す図である。It is a figure which shows the partial cross section of the field emission lamp provided with the conventional cold cathode electron source.

符号の説明Explanation of symbols

10 真空
11 蛍光体
12 アノード電極
14 基板
16 カソード電極
22 ゲート電極
28 絶縁材
30 炭素膜
30a,30b 炭素膜
32a,32b 電極
34a,34b 電極
36a,36b 電極
38a,38b 電極
DESCRIPTION OF SYMBOLS 10 Vacuum 11 Phosphor 12 Anode electrode 14 Substrate 16 Cathode electrode 22 Gate electrode 28 Insulating material 30 Carbon film 30a, 30b Carbon film 32a, 32b Electrode 34a, 34b Electrode 36a, 36b Electrode 38a, 38b Electrode

Claims (3)

陰極電子源と、この冷陰極電子源に対向配置される蛍光体付きアノード電極とを備えたフィールドエミッションランプにおいて、上記冷陰極電子源は、カソード電極とゲート電極とを交互に絶縁材を挟んで基板上に配置して一体化し、上記カソード電極とゲート電極とのうち少なくとも一方は上記交互に配置される並設方向で複数配置されるとともに、上記カソード電極とゲート電極とのうち少なくとも上記カソード電極の上記アノード電極と対向する側の端面に炭素膜を設けた、フィールドエミッションランプ。 In a field emission lamp comprising a cold cathode electron source and an anode electrode with a phosphor disposed opposite to the cold cathode electron source, the cold cathode electron source has an insulating material alternately sandwiched between the cathode electrode and the gate electrode. And at least one of the cathode electrode and the gate electrode is arranged in the alternately arranged direction, and at least the cathode of the cathode electrode and the gate electrode. A field emission lamp in which a carbon film is provided on an end face of the electrode facing the anode electrode . 請求項1に記載のフィールドエミッションランプにおいて、上記基板がフラットな形状であり、当該基板上にカソード電極とゲート電極とを交互に絶縁材を挟んで配置した、フィールドエミッションランプ。 In field emission lamp according to claim 1, said substrate is a flat shape, alternately a cathode electrode and a gate electrode on the substrate and arranged across the insulating material, full I over field emission lamp. 請求項1に記載のフィールドエミッションランプにおいて、上記基板が線状であり、当該基板の周方向にカソード電極とゲート電極とを交互に絶縁材を挟んで配置した、フィールドエミッションランプ。 In field emission lamp according to claim 1, said substrate is a linear, alternating with the cathode electrode and the gate electrode in the circumferential direction of the substrate was placed across the insulation, full I over field emission lamp.
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