JP5252543B2 - Measuring voltage and temperature at multiple points - Google Patents
Measuring voltage and temperature at multiple points Download PDFInfo
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- JP5252543B2 JP5252543B2 JP2008105161A JP2008105161A JP5252543B2 JP 5252543 B2 JP5252543 B2 JP 5252543B2 JP 2008105161 A JP2008105161 A JP 2008105161A JP 2008105161 A JP2008105161 A JP 2008105161A JP 5252543 B2 JP5252543 B2 JP 5252543B2
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本発明は、プローブ内の複数点の電圧と温度を精度よく計測するに関する。 The present invention relates to accurately measuring voltages and temperatures at a plurality of points in a probe.
プローブ内の電圧を計測する手法としては、一般的には４端子法で測定されることが多い。しかしながら、この手法では、プローブと電圧計測線との接触している２点間の電圧差しか計測することができない。 As a method for measuring the voltage in the probe, the measurement is generally performed by a four-terminal method. However, this method cannot measure only the voltage difference between two points where the probe and the voltage measurement line are in contact.
プローブ内の複数点の温度を計測する手法として、熱電対をプローブに直接接触させる方法がある（例えば、特許文献１参照）。しかしながら、この方法では、プローブの小型化に対応できない。 As a method for measuring temperatures at a plurality of points in the probe, there is a method in which a thermocouple is brought into direct contact with the probe (see, for example, Patent Document 1). However, this method cannot cope with downsizing of the probe.
そこで、小型化したプローブ内の複数点における電圧と温度を測定できる技術の開発が求められている。 Therefore, development of a technique capable of measuring voltage and temperature at a plurality of points in a miniaturized probe is required.
本発明の課題は、上述の従来技術の問題点を解決するものであり、プローブ内の複数点の電圧と温度を計測する手法を提供することにある。 An object of the present invention is to solve the above-mentioned problems of the prior art, and to provide a method for measuring voltages and temperatures at a plurality of points in a probe.
本発明者らは、プローブ内の複数点の電圧を計測する手法として、プローブと電圧計測線とを接続すれば熱電対として機能でき、接触点の電圧を測定することができることに気がつき、本発明を完成するに至った。 The present inventors have realized that, as a technique for measuring the voltage at a plurality of points in the probe, if the probe and the voltage measurement line are connected, it can function as a thermocouple and the voltage at the contact point can be measured. It came to complete.
本発明の電圧と温度の同時計測方法は、プローブと電圧計測線の接触点を熱電対の計測点とすることを特徴とする。 The simultaneous voltage and temperature measurement method of the present invention is characterized in that the contact point between the probe and the voltage measurement line is a measurement point of the thermocouple.
本発明の電圧計測方法は、プローブ内の複数点のそれぞれに一端を接触させた、プローブと異なった材質からなる電圧計測線のそれぞれの他端と、プローブに一端を接触させた、プローブと同じ材質からなるプローブ基準線の他端とを計測器で接続させて熱電対として機能させ、プローブと電圧計測線との複数の接触点の電圧を計測することを特徴とする。 The voltage measurement method of the present invention is the same as the probe in which one end is brought into contact with each of a plurality of points in the probe, each other end of a voltage measurement line made of a material different from the probe, and one end in contact with the probe. The other end of the probe reference line made of a material is connected with a measuring instrument so as to function as a thermocouple, and the voltage at a plurality of contact points between the probe and the voltage measurement line is measured.
プローブ内に複数の電圧計測線を接触させることにより、複数点の電圧計測を精度よく行うことができる。 By bringing a plurality of voltage measurement lines into contact with the probe, voltage measurement at a plurality of points can be performed with high accuracy.
前記プローブ内の複数点の電圧計測を上記電圧計測方法を用いて行い、プローブ及びプローブ基準線に使われている材料と電圧計測線の材料との間の起電圧差の温度依存性が既知である時に、プローブ基準線と電圧計測線とが接触している計測器の温度を計測することにより、プローブ内の複数点の温度を計測することを特徴とする。 The voltage measurement at a plurality of points in the probe is performed using the voltage measurement method, and the temperature dependence of the voltage difference between the material used for the probe and the probe reference line and the material of the voltage measurement line is known. At a certain time, the temperature of a plurality of points in the probe is measured by measuring the temperature of a measuring instrument in which the probe reference line and the voltage measurement line are in contact with each other.
プローブと同じ材質のプローブ基準線と、この材質と異なった材質の電圧計測線とを計測器で接続し、２つの材質の起電圧差の温度依存性と計測器の温度を基準としてプローブ内の温度計測を精度よく行うことができる。 A probe reference line made of the same material as the probe and a voltage measurement line made of a different material from this material are connected by a measuring instrument, and the temperature dependence of the voltage difference between the two materials and the temperature of the measuring instrument are used as a reference. Temperature measurement can be performed with high accuracy.
本発明の電圧及び温度の計測方法は、プローブ内の複数点のそれぞれに一端を接触させた、プローブと異なった材質からなる電圧計測線のそれぞれの他端と、プローブに一端を接触させた、プローブと同じ材質からなるプローブ基準線の他端とを計測器で接続させて熱電対として機能させ、プローブと電圧計測線との複数の接触点の電圧を計測し、次いでプローブ及びプローブ基準線に使われている材料と電圧計測線の材料との間の起電圧差の温度依存性が既知である時に、プローブ基準線と電圧計測線とが接触している計測器の温度を計測することにより、プローブ内の複数点の温度を計測することを特徴とする。 In the voltage and temperature measurement method of the present invention, one end is brought into contact with each of a plurality of points in the probe, each other end of a voltage measurement line made of a material different from the probe, and one end is brought into contact with the probe. Connect the other end of the probe reference line made of the same material as the probe with a measuring instrument to function as a thermocouple, measure the voltage at multiple contact points between the probe and the voltage measurement line, and then connect the probe and probe reference line By measuring the temperature of the measuring instrument where the probe reference line and the voltage measurement line are in contact when the temperature dependence of the voltage difference between the material being used and the material of the voltage measurement line is known The temperature of a plurality of points in the probe is measured.
かくして、プローブ内の複数点の電圧計測と温度計測とを精度よく同時に行うことができる。 Thus, voltage measurement and temperature measurement at a plurality of points in the probe can be simultaneously performed with high accuracy.
本発明によれば、プローブ内の複数点の電圧及び／又は温度を精度よく計測することができるという効果を奏する。プローブ内複数点の温度からプローブ先端部の温度評価をすることに役立ち、プローブ内の温度測定に基づいた装置の発展に寄与する。 According to the present invention, it is possible to accurately measure voltages and / or temperatures at a plurality of points in the probe. It helps to evaluate the temperature of the probe tip from the temperature of multiple points in the probe, and contributes to the development of the device based on the temperature measurement in the probe.
以下、本発明の実施の形態について図面を参照して説明する。 Hereinafter, embodiments of the present invention will be described with reference to the drawings.
プローブ内の電圧計測の様子を図１に示す。プローブ（材質Ａ、例：コンスタンタン）１と、複数の電圧計測線（材質Ｂ、例：クロメル）Ｐａ、Ｐｂ、Ｐｃ、Ｐｄ・・・Ｐｎの一端とを接触させる。プローブ１と接触させていない電圧計測線Ｐａ〜Ｐｎの他端は、計測器２でプローブ基準線（材質Ａ、例：コンスタンタン）１ａと接続させる。プローブ内の複数の接触点Ｐ１、Ｐ２、Ｐ３、Ｐ４・・・・Ｐｎの電圧を、計測器で測定できるように構成されている。
The state of voltage measurement in the probe is shown in FIG. A probe (material A, for example, constantan) 1 and one end of a plurality of voltage measurement lines (material B, for example, chromel) Pa, Pb, Pc, Pd. The other ends of the voltage measurement lines Pa to Pn that are not in contact with the probe 1 are connected to the probe reference line (material A, for example, constantan) 1 a by the
計測器２内の温度Ｔｊを計測すると、プローブ内の接触点Ｐ１〜Ｐｎの電圧は、計測器２の温度と接触点の温度との温度差による起電圧に対応する。プローブ基準線（材質Ａ、例：コンスタンタン）１ａと電圧計測線（材質Ｂ、例：クロメル）Ｐａ〜Ｐｎとの間の起電圧差の温度依存性を用いて接触点の温度に換算する。例の場合、プローブ内の接触点温度は、クロメルーコンスタンタンのＥ熱電対として計測する。
When the temperature T j in the
１ プローブ ２ 計測器
１ａ プローブ基準線 Ｐ１〜Ｐｎ 接触点
Ｐａ〜Ｐｎ 電圧計測線
1
1a probe reference line P 1 to P n contact point Pa~Pn voltage measurement line
Claims (3)
A probe reference made of the same material as the probe and having one end in contact with each of a plurality of points in the probe and the other end of a voltage measuring line made of a different material from the probe and one end in contact with the probe Connect the other end of the wire with a measuring instrument to function as a thermocouple, measure the voltage at a plurality of contact points between the probe and the voltage measuring line, and then use the material used for the probe and the probe reference line By measuring the temperature of the measuring instrument in which the probe reference line and the voltage measurement line are in contact with each other when the temperature dependence of the voltage difference between the voltage measurement line and the material is known, A voltage and temperature measuring method, characterized by measuring temperatures at a plurality of points.
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| JPS61147126A (en) * | 1984-12-20 | 1986-07-04 | Kawasaki Steel Corp | Measuring method of temperature of steel material by electromagnetic induction |
| JPH04105053A (en) * | 1990-08-24 | 1992-04-07 | Shimadzu Corp | Measuring method for thermal conductivity of molten resin |
| JP3925610B2 (en) * | 2001-02-13 | 2007-06-06 | 喜萬 中山 | Heat generation probe and heat generation probe device |
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