JP5250147B1 - Sheet-type FPCB automatic vacuum adsorption / desorption device with a structure that can be in close contact with each other - Google Patents
Sheet-type FPCB automatic vacuum adsorption / desorption device with a structure that can be in close contact with each other Download PDFInfo
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- JP5250147B1 JP5250147B1 JP2012229084A JP2012229084A JP5250147B1 JP 5250147 B1 JP5250147 B1 JP 5250147B1 JP 2012229084 A JP2012229084 A JP 2012229084A JP 2012229084 A JP2012229084 A JP 2012229084A JP 5250147 B1 JP5250147 B1 JP 5250147B1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]
- G01R31/2806—Apparatus therefor, e.g. test stations, drivers, analysers, conveyors
- G01R31/2808—Holding, conveying or contacting devices, e.g. test adapters, edge connectors, extender boards
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
【課題】シート型ＦＰＣＢの検査前段階でＦＰＣＢが真空チャックに完全密着されるようにする順次密着できる構造を有する自動真空吸脱着装置を提供する。
【解決手段】真空チャックの下部側に設置され、複数のエアー孔に真空連通して安着溝上のエアーを吸入して、シート型ＦＰＣＢを安着溝の表面に吸着させるエアー吸入手段；真空チャックの下部側に設置され、複数のエアー孔に真空連通して安着溝上でエアーを排出して、ＦＰＣＢを安着溝の表面で脱着させるエアー排出手段；真空チャックの側部に設置される距離調節台に連結されて距離調節台上で移動する移動体；移動体に連結設置されて、真空チャックの上部に安着するＦＰＣＢの上部に位置され、複数のエアー排出孔が形成されて、ＦＰＣＢの上部でエアーを排出しながら順次移動しながら真空チャックの安着溝にＦＰＣＢを密着させるエアーブロワー；を含む自動真空吸脱着装置。
【選択図】図１The present invention provides an automatic vacuum adsorption / desorption device having a structure capable of sequentially contacting an FPCB so that the FPCB is completely adhered to a vacuum chuck in a pre-inspection stage of a sheet type FPCB.
An air suction means installed on the lower side of a vacuum chuck and sucking air on a seating groove through vacuum communication with a plurality of air holes to adsorb a sheet type FPCB to the surface of the seating groove; Air discharge means installed on the lower side of the vacuum chamber, communicates with a plurality of air holes in vacuum, discharges air on the seating groove, and desorbs the FPCB on the surface of the seating groove; distance installed on the side of the vacuum chuck A moving body connected to the adjusting table and moving on the distance adjusting table; connected to the moving object and positioned on the upper part of the FPCB which is seated on the upper part of the vacuum chuck, and a plurality of air discharge holes are formed. An automatic vacuum adsorbing / desorbing device including an air blower for bringing the FPCB into close contact with the seating groove of the vacuum chuck while sequentially moving while discharging air at the upper part of the vacuum chamber.
[Selection] Figure 1
Description
本発明は、ＰＣＢ自動真空吸脱着装置に関し、特にシート型ＦＰＣＢの検査前段階でシート型ＦＰＣＢが真空チャックに完全密着できるように順次密着させる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置に関する。 The present invention relates to a PCB automatic vacuum adsorption / desorption device, and more particularly, to a sheet type FPCB automatic vacuum adsorption / desorption device having a structure in which a sheet type FPCB is in close contact with a vacuum chuck in a pre-inspection stage of the sheet type FPCB.
一般にＰＣＢ（ｐｒｉｎｔｅｄ ｃｉｒｃｕｉｔ ｂｏａｒｄ）は、電気絶縁性基板に銅等の伝導性材料で回路ラインパターンを形成させたもので、電子部品を実装する直前の基板をいう。 In general, a PCB (printed circuit board) is a substrate in which a circuit line pattern is formed of a conductive material such as copper on an electrically insulating substrate, and is a substrate immediately before an electronic component is mounted.
ＰＣＢは、基板材料の種類によってフェノールとエポキシで製作されるリジッド（Ｒｉｇｉｄ）ＰＣＢとポリイミド（Ｐｏｌｙｉｍｉｄ）のように簡単に曲げられる材質で製作されるフレキシブル（Ｆｌｅｘｉｂｌｅ）ＰＣＢ(ＦＰＣＢ)に分かれる。 PCBs are divided into flexible PCBs (FPCB) manufactured with a material that can be bent easily, such as rigid PCBs made of phenol and epoxy and polyimides, depending on the type of substrate material.
最近、携帯電話、ＰＤＡ、デジタルカメラ等個人携帯用電子装置が大衆化すると共に、回路特性が安定化され小型及び軽量化されたＰＣＢが個人携帯用電子装置のメイン基板として用いられ、特にＦＰＣＢはフォルダ状の移動通信端末機等において屈曲部位の回路として主に用いられる。 Recently, personal portable electronic devices such as mobile phones, PDAs, and digital cameras have become popular, and PCBs with stabilized circuit characteristics and reduced size and weight have been used as main boards for personal portable electronic devices. It is mainly used as a circuit of a bent part in a folder-like mobile communication terminal or the like.
前記ＦＰＣＢに部品が実装されて電子装置に使われるためには、外見、マイクロセクション及び寸法検査、電気的性能検査、機械的性能検査等を要する。 In order for components to be mounted on the FPCB and used in an electronic device, appearance, microsection and dimension inspection, electrical performance inspection, mechanical performance inspection, and the like are required.
そのうち、電気的性能検査は、ＦＰＣＢに求められる電気的特性を検査するもので、ＦＰＣＢに実装された回路パターンの異常有無判断、電気回路の機能判断等を行う。 Among them, the electrical performance inspection is for inspecting the electrical characteristics required for the FPCB, and judges whether or not the circuit pattern mounted on the FPCB is abnormal, judges the function of the electric circuit, and the like.
前記ＦＰＣＢは、シート型とロール型に区分されるが、従来のシート型ＦＰＣＢを検査台に移動させる前に安着台にシート型ＦＰＣＢを密着させるためにローラ等で作業者が手作業で密着してきた。
前記従来工程でシート型ＦＰＣＢを密着すると、シート型ＦＰＣＢと安着台との間に完全密着状態を成すことが難しくなり、これにより、検査時不良が生じる問題があった。
The FPCB is classified into a sheet type and a roll type, and an operator manually touches the sheet type FPCB with a roller or the like in order to bring the sheet type FPCB into close contact with the seating base before moving the conventional sheet type FPCB to the inspection table. I have done it.
When the sheet-type FPCB is brought into close contact with the conventional process, it becomes difficult to form a complete contact state between the sheet-type FPCB and the seating platform, thereby causing a problem in that a defect occurs during inspection.
本発明の目的は、前記のような従来技術の問題を解決するために発明され、シート型ＦＰＣＢの検査前段階でシート型ＦＰＣＢが真空チャックに完全密着できるように順次密着させる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置を提供することである。 An object of the present invention is invented to solve the problems of the prior art as described above, and has a structure in which the sheet mold FPCB is sequentially brought into close contact with the vacuum chuck in a pre-inspection stage of the sheet mold FPCB. An FPCB automatic vacuum adsorption / desorption device is provided.
前記目的を実現するために、本発明はシート型ＦＰＣＢの電気的性能検査前段階として、シート型ＦＰＣＢを吸脱着させる真空吸脱着装置において、地面に設置される固定フレームの上部に備えられ、シート型ＦＰＣＢが安着するように上部に安着溝が形成され、安着溝の表面には複数のエアー孔が形成される真空チャック；前記真空チャックの下部側に設置され、複数のエアー孔に真空連通されて安着溝上のエアーを吸入して、シート型ＦＰＣＢを安着溝の表面に吸着させるエアー吸入手段；前記真空チャックの下部側に設置され、複数のエアー孔に真空連通して安着溝上でエアーを排出してシート型ＦＰＣＢを安着溝の表面で脱着させるエアー排出手段；前記真空チャックの側部に設置される距離調節台に連結されて距離調節台上で移動する移動体；前記移動体に連結設置されて真空チャックの上部に安着するシート型ＦＰＣＢの上部に位置され、複数のエアー排出孔が形成されてシート型ＦＰＣＢの上部でエアーを排出しながら順次移動しながら真空チャックの安着溝にシート型ＦＰＣＢを密着させるエアーブロワー；を含んで構成されることを特徴とする順次密着できる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置を提供する。 In order to achieve the above object, the present invention is a vacuum adsorption / desorption device for adsorbing and desorbing a sheet type FPCB as a stage before electrical performance inspection of the sheet type FPCB, and is provided on an upper part of a fixed frame installed on the ground. A vacuum chuck in which a seating groove is formed in the upper part so that the mold FPCB is seated, and a plurality of air holes are formed on the surface of the seating groove; installed on the lower side of the vacuum chuck, Air suction means for sucking air on the seating groove by vacuum communication and adsorbing the sheet type FPCB on the surface of the seating groove; installed on the lower side of the vacuum chuck and communicating with the plurality of air holes in vacuum. Air discharging means that discharges air on the groove and desorbs the sheet type FPCB on the surface of the seating groove; connected to the distance adjusting table installed on the side of the vacuum chuck and moved on the distance adjusting table A moving body connected to the moving body and positioned on the upper part of the sheet type FPCB that is seated on the upper part of the vacuum chuck. A plurality of air discharge holes are formed, and the air is discharged sequentially from the upper part of the sheet type FPCB. There is provided a sheet type FPCB automatic vacuum adsorbing / desorbing device having a structure capable of being in close contact with each other, characterized in that it includes an air blower for bringing the sheet type FPCB into close contact with a seating groove of a vacuum chuck while moving.
本発明に係る順次密着できる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置は、エアー吸入手段とエアー排出手段が形成された真空チャック及び真空チャックの上部にエアーを排出するエアーブロワーを順次移動するように設置することによって、シート型ＦＰＣＢの安着手段として用いられる真空チャックにシート型ＦＰＣＢをローラで押すように自動で完全密着するように吸着させることができ、脱着も容易なメリットがある。 The sheet-type FPCB automatic vacuum adsorption / desorption device according to the present invention, which has a structure that can be in close contact with each other, sequentially moves a vacuum chuck in which air suction means and air discharge means are formed, and an air blower that discharges air above the vacuum chuck. Therefore, the sheet type FPCB can be adsorbed to a vacuum chuck used as a seating means for the sheet type FPCB so that the sheet type FPCB is automatically and completely adhered so as to be pushed by a roller, and there is an advantage that it can be easily detached.
本発明を実施するための具体的な内容を添付図を参照してより詳細に説明する。 Specific contents for carrying out the present invention will be described in more detail with reference to the accompanying drawings.
図１乃至図５を参照すると、本発明に係る順次密着できる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置は、シート型ＦＰＣＢ２の電気的性能検査前段階として、シート型ＦＰＣＢを吸脱着させる真空吸脱着装置において、真空チャック１０、エアー吸入手段２０、エアー排出手段３０、移動体４０及びエアーブロワー５０で構成される。 Referring to FIGS. 1 to 5, a sheet type FPCB automatic vacuum adsorption / desorption device having a structure that can be brought into close contact with each other according to the present invention is a vacuum absorption / desorption method for pre-electrical inspection of the sheet type FPCB2. The detaching apparatus includes a vacuum chuck 10, an air suction unit 20, an air discharge unit 30, a moving body 40 and an air blower 50.
前記真空チャック１０は、シート型ＦＰＣＢ２を安着させるための構成であり、地面に設置される固定フレーム５上の上部に具備設置され、シート型ＦＰＣＢ２が安着するようにその上部に安着溝１２が形成され、安着溝１２の表面にはエアーが移動するエアー孔１４が縦横配列で複数形成される。 The vacuum chuck 10 is configured to seat the sheet-type FPCB 2, and is provided on the upper portion of the fixed frame 5 installed on the ground, so that the seat-type FPCB 2 is seated on the upper portion of the seat. 12 are formed, and a plurality of air holes 14 are formed on the surface of the seating groove 12 in a vertical and horizontal arrangement for air movement.
前記エアー孔１４を介して移動するエアーによってシート型ＦＰＣＢ２が真空チャック１０の表向きに脱付着されるようになるもので、前記エアー孔１４は微細孔で形成するのがよく、この時、微細孔の大きさは０．０１〜０．５ｍｍ程度で形成されるのが好ましい。 The sheet type FPCB 2 is detached from the surface of the vacuum chuck 10 by the air moving through the air holes 14, and the air holes 14 are preferably formed as fine holes. The size of is preferably about 0.01 to 0.5 mm.
前記微細孔の直径が０．０１ｍｍ以下の場合、エアーが移動し難く、直径が０．５ｍｍ以上の場合、エアーの移動断面積が広くて検査台の表面にシート型ＦＰＣＢ２の密着時シート型ＦＰＣＢ２の表面が微細孔に挿入されて検査時最適状態の平らな形態にならない恐れがある。 When the diameter of the fine hole is 0.01 mm or less, the air is difficult to move, and when the diameter is 0.5 mm or more, the air movement cross-sectional area is wide and the sheet type FPCB2 is in close contact with the surface of the inspection table. There is a risk that the surface of the metal will not be inserted into the fine holes and will not have a flat shape in an optimal state during inspection.
また、エアー孔１４が形成されている真空チャック１０は、通常金属材で形成されるが、本発明では、シート型ＦＰＣＢ２と脱付着し易くなるようにセラミック材で形成した。 The vacuum chuck 10 in which the air holes 14 are formed is usually formed of a metal material. In the present invention, the vacuum chuck 10 is formed of a ceramic material so as to be easily detached from the sheet type FPCB2.
前記真空チャック１０の下部側には前記エアー孔１４を介してエアーを吸入するエアー吸入手段２０を設置する。
エアー吸入手段２０は、真空チャック１０の下部側に設置されて真空チャック１０の安着溝１２表面周囲のエアーを吸入することによって、シート型ＦＰＣＢ２が安着溝１２に密着されるようにするものである。
Air suction means 20 for sucking air through the air holes 14 is installed on the lower side of the vacuum chuck 10.
The air suction means 20 is installed on the lower side of the vacuum chuck 10 and sucks air around the surface of the seating groove 12 of the vacuum chuck 10 so that the sheet type FPCB 2 is in close contact with the seating groove 12. It is.
この時、エアー吸入手段２０は、一つで設置するのではなく、縦横配列で形成されたエアー孔１４に相応するように複数で設置して、順次エアーを吸入するように構成する。 At this time, the air suction means 20 is not installed as a single unit, but is installed in a plurality so as to correspond to the air holes 14 formed in a vertical and horizontal arrangement, and is configured to sequentially suck in air.
その一実施形態として、図２及び図３のように本発明におけるエアー吸入手段２０は、１２個で形成され、複数のエアー孔１４に真空連通設置されて時間差を置いて作動させて順次安着溝１２上のエアーを吸入してシート型ＦＰＣＢ２を安着溝１２の表面上に密着するように吸着させることによって、従来ローラを用いて順次密着させた工程を自動化させながらも密着不良な完璧な密着状態になるようにした。 As one embodiment of the present invention, as shown in FIGS. 2 and 3, the air suction means 20 in the present invention is formed of twelve pieces, and is installed in a plurality of air holes 14 in a vacuum communication manner so as to be operated with a time difference to be sequentially seated. By sucking the air on the groove 12 and adsorbing the sheet type FPCB 2 so as to be in close contact with the surface of the seating groove 12, it is possible to achieve perfection with poor adhesion while automating the process of sequentially adhering using the conventional roller. It was in close contact.
前記エアー吸入手段２０を利用してシート型ＦＰＣＢ２を安着溝１２上に密着させた後、検査台(図示せず)に移動して検査工程が終わると、安着溝１２上でシート型ＦＰＣＢ２を脱着させるべきであるが、この時には逆に真空チャック１０の下部側に設置されたエアー排出手段３０を利用してエアーを排出させることによって、シート型ＦＰＣＢ２がスムーズかつ順次脱着できるようにする。 After the sheet-type FPCB 2 is brought into close contact with the seating groove 12 using the air suction means 20, the sheet-type FPCB 2 is moved on the seating groove 12 when the inspection process is completed after moving to the inspection table (not shown). However, at this time, the sheet type FPCB 2 can be smoothly and sequentially detached by discharging air using the air discharging means 30 installed on the lower side of the vacuum chuck 10.
前記エアー排出手段３０の構成は、前述したエアー吸入手段２０と同様である。但し、動作が逆に行われるように構成される。
再度説明すると、エアー排出手段３０は、複数のエアー孔１４に真空連通されて安着溝１２上でエアーを排出して、シート型ＦＰＣＢ２を安着溝１２の表面で脱着させることになる。
The configuration of the air discharge means 30 is the same as that of the air suction means 20 described above. However, the operation is configured to be performed in reverse.
To explain again, the air discharge means 30 is in vacuum communication with the plurality of air holes 14 and discharges air on the seating grooves 12, thereby detaching the sheet type FPCB 2 from the surface of the seating grooves 12.
前記エアー吸入手段２０とエアー排出手段３０は、図４のように一つの単一ホースに一体連結されて選択的に作動し、さらに、エアー吸入手段２０とエアー排出手段３０を個別に構成してもよいが、一つの装置で構成してもよい。 As shown in FIG. 4, the air suction means 20 and the air discharge means 30 are integrally connected to one single hose and selectively operate. Further, the air suction means 20 and the air discharge means 30 are individually configured. However, it may be configured by a single device.
一方、エアー吸入手段２０でシート型ＦＰＣＢ２を安着溝１２上に密着させる時、さらに確実な密着性を維持するために、シート型ＦＰＣＢ２の上部を順次通るように図１、図４及び図５のようにエアーブロワー５０を備える。 On the other hand, when the sheet type FPCB 2 is brought into close contact with the seating groove 12 by the air suction means 20, in order to maintain a more reliable adhesion, the upper part of the sheet type FPCB 2 is sequentially passed through FIGS. The air blower 50 is provided.
前記エアーブロワー５０は、前記真空チャック１０の側部に設置される距離調節台４２に連結されて距離調節台４２上で移動される移動体４０に連結設置され、真空チャック１０の上部に安着するシート型ＦＰＣＢ２の上部に位置され、複数のエアー排出孔５２が形成されてシート型ＦＰＣＢ２の上部でエアーを排出しながら順次移動しながらシート型ＦＰＣＢ２を真空チャック１０の安着溝１２に完全密着させるように構成される。 The air blower 50 is connected to a moving body 40 which is connected to a distance adjusting table 42 installed on the side of the vacuum chuck 10 and moved on the distance adjusting table 42, and is seated on the upper part of the vacuum chuck 10. A plurality of air discharge holes 52 are formed in the upper part of the sheet mold FPCB 2 to be moved, and the sheet mold FPCB 2 is moved to the upper part of the sheet mold FPCB 2 while being sequentially moved while being completely adhered to the seating groove 12 of the vacuum chuck 10. Configured to let
この時、未説明符号４５はモーター、５５はエアー供給手段である。 At this time, unexplained reference numeral 45 is a motor, and 55 is an air supply means.
２ シート型ＦＰＣＢ
５ 固定フレーム
１０ 真空チャック
１２ 安着溝
１４ エアー孔
２０ エアー吸入手段
３０ エアー排出手段
４０ 移動体
４２ 距離調節台
５０ エアーブロワー
５２ エアー排出孔
2 Sheet type FPCB
5 fixed frame 10 vacuum chuck 12 seating groove 14 air hole 20 air suction means 30 air discharge means 40 moving body 42 distance adjustment stand 50 air blower 52 air discharge hole
Claims (4)
地面に設置される固定フレーム５の上部に備えられ、シート型ＦＰＣＢ２が載置するようにシート型ＦＰＣＢ２の大きさに対応した載置溝１２が形成され、載置溝１２の表面には複数のエアー孔１４が形成される真空チャック１０と、
前記真空チャック１０の下部側に設置され、複数のエアー孔１４を介して載置溝１２上のエアーを吸入して、シート型ＦＰＣＢ２を載置溝１２の表面に吸着させるエアー吸入手段２０と、
前記真空チャック１０の下部側に設置され、複数のエアー孔１４を介して載置溝１２上でエアーを排出して、シート型ＦＰＣＢ２を載置溝１２の表面ではずさせるエアー排出手段３０と、
前記真空チャック１０の側部に設置される距離調節台４２に連結されて、距離調節台４２上で移動する移動体４０と、
前記移動体４０に連結設置されて、真空チャック１０の上部に載置するシート型ＦＰＣＢ２の上部に位置され、複数のエアー排出孔５２が形成されて、シート型ＦＰＣＢ２の上部でエアーを排出しながら順次移動しながらシート型ＦＰＣＢ２を真空チャック１０の載置溝１２に密着させるエアーブロワー５０を含んでなることを特徴とする順次密着できる構造を有するシート型ＦＰＣＢ自動真空吸脱着装置。 In the vacuum adsorption / desorption device that adsorbs the sheet type FPCB as a stage before the electrical performance inspection of the sheet type FPCB,
Provided in the upper portion of the fixed frame 5 to be installed on the ground, the sheet-type FPCB2 is placed grooves 12 formed corresponding to the size of the sheet-type FPCB2 as placing a plurality of the surface of the mounting groove 12 A vacuum chuck 10 in which air holes 14 are formed;
And the disposed on the lower side of the vacuum chuck 10, and suction air on the mounting groove 12 through a plurality of air holes 14, the air suction means 20 for adsorbing the sheet type FPCB2 the surface of the mounting groove 12,
And the disposed on the lower side of the vacuum chuck 10, and discharged air on placing groove 12 via a plurality of air holes 14, air discharge means 30 for removing the sheet-type FPCB2 the surface of the mounting groove 12,
A moving body 40 that is connected to a distance adjusting table 42 installed on a side of the vacuum chuck 10 and moves on the distance adjusting table 42;
A plurality of air discharge holes 52 are formed and connected to the moving body 40 and positioned on the upper part of the sheet type FPCB 2 placed on the upper part of the vacuum chuck 10, while discharging air at the upper part of the sheet type FPCB 2. sequentially while moving sheet FPCB2 sheet FPCB automatic vacuum adsorption and desorption apparatus having a sequential adhesion can structure, characterized in that it comprises an air blower 50 to come into close contact with the mounting groove 12 of the vacuum chuck 10 a.
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| CN107481964A (en) * | 2017-07-18 | 2017-12-15 | 罗博特科智能科技股份有限公司 | A kind of silicon chip batch suction means |
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| JP2013251524A (en) | 2013-12-12 |
| KR101345994B1 (en) | 2013-12-31 |
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