JP5244366B2 - Liquid material dripping method, program and apparatus - Google Patents
Liquid material dripping method, program and apparatus Download PDFInfo
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- JP5244366B2 JP5244366B2 JP2007281865A JP2007281865A JP5244366B2 JP 5244366 B2 JP5244366 B2 JP 5244366B2 JP 2007281865 A JP2007281865 A JP 2007281865A JP 2007281865 A JP2007281865 A JP 2007281865A JP 5244366 B2 JP5244366 B2 JP 5244366B2
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- 239000011344 liquid material Substances 0.000 title claims description 58
- 238000000034 method Methods 0.000 title claims description 50
- 239000000758 substrate Substances 0.000 claims description 70
- 238000007599 discharging Methods 0.000 claims description 8
- 239000007788 liquid Substances 0.000 description 14
- 238000002347 injection Methods 0.000 description 8
- 239000007924 injection Substances 0.000 description 8
- 238000003860 storage Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000000903 blocking effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005303 weighing Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001548 drop coating Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J13/00—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets
- B41J13/0009—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets control of the transport of the copy material
- B41J13/0027—Devices or arrangements of selective printing mechanisms, e.g. ink-jet printers or thermal printers, specially adapted for supporting or handling copy material in short lengths, e.g. sheets control of the transport of the copy material in the printing section of automatic paper handling systems
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J3/00—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed
- B41J3/28—Typewriters or selective printing or marking mechanisms characterised by the purpose for which they are constructed for printing downwardly on flat surfaces, e.g. of books, drawings, boxes, envelopes, e.g. flat-bed ink-jet printers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1341—Filling or closing of cells
- G02F1/13415—Drop filling process
Landscapes
- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Liquid Crystal (AREA)
Description
本発明は、液体材料を滴下する方法およびプログラム並びに装置に関し、より詳細には、複数個の同じパネル（ワークと呼ぶこともある）が規則的に配列された一枚の基板に対し、基板の被滴下面に対向する面内で滴下装置を平行移動して、各パネル間に存在する非滴下対象領域を横切って基板の端から端までを途中で停止することなく滴下装置を直線経路で移動しながら滴下対象領域にのみ液体材料を滴下する方法およびプログラム並びに装置に関する。 The present invention relates to a method, a program, and an apparatus for dropping a liquid material. More specifically, the present invention relates to a substrate in which a plurality of the same panels (sometimes referred to as workpieces) are regularly arranged. Move the dropping device in a straight path without stopping from one end of the substrate across the non-dropping target area between the panels by translating the dropping device in a plane facing the surface to be dropped. The present invention relates to a method, a program, and an apparatus for dropping a liquid material only on a dropping target area.
従来、二枚の対向する基板を貼り合わせ、その間に液晶層を形成するパネル（セル）工程では、二枚の基板を貼り合わせた後に真空槽を用いて液晶を注入する方法（真空注入法）が用いられてきた。
しかし、大型のパネルでは注入時間だけで１日以上掛かってしまうこともあった。そこで、近年、パネルの大型化に伴う生産性の向上への要求などから、貼り合わせる前の一方の基板に液晶を滴下してから貼り合わせる方法（滴下注入法）が注目されている。この方法では、真空注入法において必要な注入口が不要であるので、注入口を塞ぐ封止工程を省くことができ、かつ注入時間を短縮することもできるので、生産性が格段に向上する。
Conventionally, in a panel (cell) process in which two opposing substrates are bonded and a liquid crystal layer is formed between them, a method of injecting liquid crystals using a vacuum chamber after bonding the two substrates (vacuum injection method) Has been used.
However, in the case of a large panel, the injection time alone may take more than one day. Therefore, in recent years, attention has been focused on a method of dropping a liquid crystal on one substrate before being bonded (dropping injection method) due to a demand for improvement in productivity accompanying an increase in the size of the panel. In this method, since the injection port required in the vacuum injection method is unnecessary, a sealing step for closing the injection port can be omitted, and the injection time can be shortened, so that the productivity is remarkably improved.
一枚の基板に複数のパネルを配列される場合には、複数の吐出ヘッドでの滴下が行われる。一枚の基板に複数行、複数列のパネルが配列される場合には、制御上の観点などから、行（または列）と同じ数または約数となる数の滴下ヘッドを行（または列）と平行な一つの直線上に配設し、一列ごと（または一行ごと）に列方向（または行方向）に動作させて滴下を行うのが一般的である。 When a plurality of panels are arranged on a single substrate, dropping is performed by a plurality of ejection heads. When panels with multiple rows and multiple columns are arranged on a single substrate, the number of drip heads that are the same number or divisor as the number of rows (or columns) from the viewpoint of control, etc. In general, the liquid droplets are disposed on one straight line parallel to each other, and dropped by operating in the column direction (or row direction) for each column (or for each row).
この滴下注入法は数十インチサイズの大型パネルだけでなく、数インチサイズの小型のパネルを製造する工程でも用いられるようになった。
液状物質滴下装置としては、例えば特許文献１に、液状物質供給手段と基板との相対的な位置を検出する手段と、検出した位置情報に基づき液状物質の吐出タイミングを制御する制御手段とを備え、制御手段による吐出タイミングの制御は、液状物質供給手段と基板とを相対的に移動させている期間中に行われること、また、滴下位置間隔に基づいて決定される液状物質供給手段と基板との相対的な移動速度と、吐出時間間隔とで、液状物質供給手段と基板とを相対的に移動させること、さらに、液状物質供給手段は、備蓄室を複数有するとともに液状物質の取出しと吐出とを並行して動作させる手段を備えることが開示されている。
This dripping injection method has come to be used not only for manufacturing large panels of several tens of inches but also for manufacturing small panels of several inches.
As the liquid substance dropping device, for example, Patent Document 1 includes means for detecting a relative position between the liquid substance supply means and the substrate, and control means for controlling the discharge timing of the liquid substance based on the detected position information. The control of the discharge timing by the control means is performed during a period in which the liquid substance supply means and the substrate are relatively moved, and the liquid substance supply means and the substrate determined based on the dropping position interval. The liquid material supply means and the substrate are relatively moved at the relative movement speed and the discharge time interval. Further, the liquid material supply means has a plurality of storage chambers and takes out and discharges the liquid material. It is disclosed that the apparatus includes means for operating in parallel.
特許文献１のようにノズルと基板を相対移動しながら滴下のための動作を行う場合、ノズルの移動速度は吐出サイクルタイム（１滴の吐出を行うのに要する時間）と滴下点間距離とにより制約されるという課題がある。例えば、吐出サイクルタイム（ｆ０）が０．２秒であり、最小滴下点間距離（Ｌ０）が１０ｍｍの場合には、ノズルの最大移動速度は、５０ｍｍ／秒（＝Ｌ０／ｆ０）となる。
つまり、滴下点間距離に長短がある滴下パターンの場合、ノズルの移動速度を最小滴下距離Ｌ０（滴下点間距離のうち最も短い距離）に基づいて算出すると、滴下点間距離が長い箇所での移動時間がネックとなり、生産性が低下するという課題があった。基板上でのノズルの移動速度を可変とすることもできなくはないが、液体材料の落下点を制御することは極めて困難であるため、基板上でのノズルの移動速度を一定に維持する必要があるからである。例えば、滴下点間距離Ｌ１が１０ｍｍであり、滴下点間距離Ｌ２が２０ｍｍである滴下パターンの場合、最小滴下距離は１０ｍｍとなるのでノズルを５０ｍｍ／秒で移動させる必要がある。このように、滴下点間距離Ｌ２がＬ１より一定程度以上大きい場合には、生産性への影響は大きかった。
When the operation for dropping is performed while the nozzle and the substrate are moved relative to each other as in Patent Document 1, the moving speed of the nozzle depends on the discharge cycle time (the time required to discharge one drop) and the distance between the dropping points. There is a problem of being restricted. For example, when the discharge cycle time (f 0 ) is 0.2 seconds and the minimum drop point distance (L 0 ) is 10 mm, the maximum moving speed of the nozzle is 50 mm / second (= L 0 / f 0). )
In other words, in the case of a drip pattern with long and short distances between the dropping points, if the moving speed of the nozzle is calculated based on the minimum dropping distance L 0 (the shortest distance among the dropping point distances), the distance between the dropping points is long. The movement time becomes a bottleneck and there is a problem that productivity is lowered. Although it is not impossible to change the moving speed of the nozzle on the substrate, it is extremely difficult to control the drop point of the liquid material, so it is necessary to keep the moving speed of the nozzle on the substrate constant. Because there is. For example, in the case of a dropping pattern in which the distance L1 between the dropping points is 10 mm and the distance L2 between the dropping points is 20 mm, the minimum dropping distance is 10 mm, so the nozzle needs to be moved at 50 mm / second. As described above, when the distance L2 between the dropping points is larger than L1 by a certain degree or more, the influence on the productivity is large.
特に、小型パネルのように一枚の基板に多数のパネルが配列される場合には、必然的に滴下数は多くなり、各滴下点間の間隔は狭くなるが、かかる場合には生産性の低下は顕著である。一枚の基板へ無駄なくパネルを配列する場合も、パネル間の距離は狭くなり、滴下点間隔が狭くなるので同様である。 In particular, when a large number of panels are arranged on a single substrate, such as a small panel, the number of drops is inevitably increased, and the interval between each drop point is narrowed. The decline is significant. The same applies to the case where the panels are arranged without waste on a single substrate because the distance between the panels is reduced and the distance between the dropping points is reduced.
上記課題を解決するために、本発明は、ノズルと基板とを一定速度で相対移動させながら液体材料の滴下を行う技術において、ノズルの移動速度を高速化し、生産性を向上することができる液体材料の滴下方法およびプログラム並びに装置を提供することを目的とする。 In order to solve the above-described problems, the present invention provides a liquid that can increase the moving speed of the nozzle and improve the productivity in the technique of dropping the liquid material while relatively moving the nozzle and the substrate at a constant speed. It is an object of the present invention to provide a material dripping method, a program, and an apparatus.
第１の発明は、滴下点を有するワークを基板上に複数配列し、複数のワーク上を吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下する方法であって、直線経路毎に滴下点間の最短距離（Ｌ０）が異なる場合に、一の直線経路における滴下点間の最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づき直線経路毎にノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下方法である。
第２の発明は、第１の発明において、ワークが複数の滴下点を有する場合に、ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）に基づきノズルと基板の相対移動速度を設定することを特徴とする。
第３の発明は、複数の滴下点を有するワークを基板上に複数配列し、複数のワーク上を吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下する方法であって、ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づきノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下方法である。
第４の発明は、第２または第３の発明において、ノズルが一行または一列の滴下点上を直線経路で移動するに際し、一のワークにおける一行または一列の滴下点の数と同じ回数だけ、ノズルが一行または一列を直線経路で移動するよう滴下順序を設定することを特徴とする。
第５の発明は、第１ないし４のいずれかの発明において、基板上を縦方向に直線経路で移動するのに要する時間と、基板上を横方向に直線経路で移動するのに要する時間とを算出し、それに基づき直線経路での移動方向を決定することを特徴とする。
In the first invention, a plurality of workpieces having dropping points are arranged on the substrate, and the nozzle and the substrate are relatively moved at a constant speed so that the nozzles of the discharge device vertically cross or traverse the plurality of workpieces in a straight path. a method of dropping a liquid material while, when the shortest distance between the drop point for each linear path (L 0) is different, the shortest distance between drop point in one straight path (L 0), the ejection device The time required to perform one discharge (f 0 ) is calculated, and the relative movement speed of the nozzle and the substrate is set for each linear path based on L 0 / f 0. It is.
In a second aspect of the present invention, in the first aspect, when the work has a plurality of dropping points, the dropping order is set so that one discharge is performed on one work in the movement of the nozzle along one linear path. The relative movement speed of the nozzle and the substrate is set based on the shortest distance (L 0 ) in the dropping order.
According to a third aspect of the present invention, a plurality of workpieces having a plurality of dropping points are arranged on a substrate, and the nozzle and the substrate are moved at a constant speed so that the nozzles of the discharge device vertically cross or traverse the plurality of workpieces in a straight path. A method of dropping a liquid material while relatively moving, in a movement of one linear path of a nozzle, a dropping order is set so that one discharge is performed on one workpiece, and the shortest distance in the dropping order ( L 0 ) and a time (f 0 ) required for the ejection device to perform one ejection, and a relative moving speed between the nozzle and the substrate is set based on L 0 / f 0 This is a dripping method.
According to a fourth aspect, in the second or third aspect, when the nozzle moves along a straight line or line on the dropping point in one row or column, the nozzle has the same number of times as the number of dropping points in one line or row on one work. Is characterized in that the dropping order is set so as to move along one line or one column along a straight path.
According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the time required to move on the substrate in a vertical direction along a straight path and the time required to move on the substrate in a horizontal direction on a straight path And the moving direction in the straight line route is determined based on the calculation.
第６の発明は、第１ないし５のいずれかの発明に係る液体材料の滴下方法を液体材料の滴下装置に実施させるためのプログラムである。 A sixth invention is a program for causing a liquid material dropping device to perform the liquid material dropping method according to any one of the first to fifth inventions.
第７の発明は、液体材料を吐出するノズルを備えた吐出装置と、基板を載置するテーブルと、吐出装置とテーブルを相対移動させる駆動手段と、これらの動作を制御する制御手段と、を備える液体材料の滴下装置であって、前記制御部は、基板上に複数配列された滴下点を有するワーク上を、吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下するに際し、直線経路毎に滴下点間の最短距離（Ｌ０）が異なる場合に、一の直線経路における滴下点間の最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づき直線経路毎にノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下装置である。
第８の発明は、第７の発明において、前記制御部は、ワークが複数の滴下点を有する場合に、ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）に基づきノズルと基板の相対移動速度を設定することを特徴とする。
第９の発明は、液体材料を吐出するノズルを備えた吐出装置と、基板を載置するテーブルと、吐出装置とテーブルを相対移動させる駆動手段と、これらの動作を制御する制御手段と、を備える液体材料の滴下装置であって、前記制御部は、基板上に複数配列された複数の滴下点を有するワーク上を、吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下するに際し、ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づきノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下装置である。
第１０の発明は、第８または９の発明において、前記制御部は、ノズルが一行または一列の滴下点上を直線経路で移動するに際し、一のワークにおける一行または一列の滴下点の数と同じ回数だけ、ノズルが一行または一列を直線経路で移動するよう滴下順序を設定することを特徴とする。
第１１の発明は、第７ないし１０のいずれかの発明において、前記制御部は、基板上を縦方向に直線経路で移動するのに要する時間と、基板上を横方向に直線経路で移動するのに要する時間とを算出し、それに基づき直線経路での移動方向を決定することを特徴とする。
第１２の発明は、第７ないし１１のいずれかの発明において、前記吐出装置は、吐出口を備えるノズルと連通する計量部内面に密接摺動するプランジャーを所望量移動して液体材料を吐出することを特徴とする。
According to a seventh aspect of the present invention, there is provided a discharge device including a nozzle for discharging a liquid material, a table on which a substrate is placed, a drive unit that relatively moves the discharge device and the table, and a control unit that controls these operations. The liquid material dripping device includes a nozzle and a substrate so that the nozzle of the discharge device vertically or crosses the workpiece having a plurality of dropping points arranged on the substrate a plurality of times in a straight path. upon dropwise addition of liquid material while relatively moving at a constant speed, when the shortest distance between the drop point for each linear path (L 0) are different, the shortest distance between drop point in one of the straight path and (L 0) A liquid material characterized by calculating a time (f 0 ) required for the ejection device to perform one ejection and setting a relative movement speed of the nozzle and the substrate for each linear path based on L 0 / f 0 The dripping device .
In an eighth aspect based on the seventh aspect, when the work has a plurality of dropping points, the control section performs one discharge for one work in the movement of the nozzle along one linear path. The dropping order is set, and the relative movement speed of the nozzle and the substrate is set based on the shortest distance (L 0 ) in the dropping order.
According to a ninth aspect of the present invention, there is provided a discharge device including a nozzle for discharging a liquid material, a table on which a substrate is placed, a drive unit that relatively moves the discharge device and the table, and a control unit that controls these operations. A liquid material dropping device comprising: a nozzle configured to cause the nozzle of the discharge device to vertically cross or traverse a workpiece having a plurality of dropping points arranged on a substrate a plurality of times in a straight path; When the liquid material is dropped while moving relative to the substrate at a constant speed, in the movement of the nozzle in one linear path, the dropping order is set so that one discharge is performed on one workpiece, and in the dropping order. The shortest distance (L 0 ) and the time (f 0 ) required for the ejection device to perform one ejection are calculated, and the relative movement speed of the nozzle and the substrate is set based on L 0 / f 0. Liquid This is a body material dropping device.
According to a tenth aspect, in the eighth or ninth aspect, the control unit has the same number of dripping points as one row or one column in one work when the nozzle moves along a linear path on one row or one column. The dropping order is set so that the nozzle moves in one line or one column in a straight path by the number of times.
In an eleventh aspect based on any one of the seventh to tenth aspects, the control unit moves on the substrate in the vertical direction along the straight path and on the substrate in the horizontal direction along the straight path. It is characterized in that a time required for the movement is calculated, and a moving direction in a straight path is determined based on the calculated time.
In a twelfth aspect of the invention according to any one of the seventh to eleventh aspects, the discharge device discharges a liquid material by moving a plunger that slides in close contact with an inner surface of a measuring unit communicating with a nozzle having a discharge port. It is characterized by doing.
本発明によれば、ノズルの移動速度を増大させることで、滴下塗布における生産性を向上させることが可能である。 According to the present invention, it is possible to improve the productivity in the drop coating by increasing the moving speed of the nozzle.
本発明を実施するための最良の形態を、図１に示すような３つのパターンが一列に並んだ例で説明する。
（滴下対象）
図１においては、滴下点１０３の位置をＰ１〜Ｐ１２で表している。
基板１０１には、複数のパネル１０２が配列されており、一つのパネルにつき縦横それぞれにＬ２の間隔をおいて四点の滴下点１０３が設けられている。各パネル１０２は、ピッチＬ３ずつ離れた場所に位置するよう配置されている。なお、縦方向に隣接する２枚のパネル１０２の滴下点１０３の最短滴下距離Ｌ０はＬ１（Ｌ１＜Ｌ２）である。
The best mode for carrying out the present invention will be described using an example in which three patterns as shown in FIG. 1 are arranged in a line.
(Drip target)
In FIG. 1, the positions of the dropping points 103 are represented by P1 to P12.
A plurality of panels 102 are arranged on the substrate 101, and four dropping points 103 are provided at intervals of L2 in the vertical and horizontal directions for each panel. Each panel 102 is arrange | positioned so that it may be located in the place spaced apart by the pitch L3. Incidentally, the shortest dropwise distance L 0 of the drop point 103 of the two panels 102 adjacent in the longitudinal direction is L1 (L1 <L2).
（滴下経路）
（ア）従来の方法によりパネル１０２Ａ〜１０２Ｃに滴下を行う場合、ノズルは図２の矢印のとおりの経路で移動される。図２中、実線は滴下動作、点線は移動のみの動作を表している。ここで、最小滴下距離Ｌ０はＬ２である。
図２に示す方法では、パネル１０２ごとに滴下動作を行っている。すなわち、初めに、一つ目のパネル１０２ＡをＰ１からＰ２、Ｐ１１、Ｐ１２へと滴下する。そして、パネル１０２Ａについて滴下を終えると、終了点Ｐ１２から二つ目のパネル１０２Ｂの開始点Ｐ３へ移動する。次に、二つ目のパネル１０２ＢをＰ３からＰ４、Ｐ９、Ｐ１０へと滴下する。パネル１０２Ｂについて滴下を終えると、終了点Ｐ１０から三つ目のパネル１０２Ｃの開始点Ｐ５へ移動する。最後に、三つ目のパネル１０２ＣをＰ５からＰ６、Ｐ７、Ｐ８へと滴下を行い、動作を終了する。
この方法では、一つのパネル上に設けられた４つの滴下点１０３の全てにおいて、ノズルの移動方向を変える必要があり、滴下点１０３ごとにノズルの移動が一瞬止まるため、ノズルの加速・減速による時間のロスも大きく、全体の滴下にかかる時間（タクトタイム）を短縮することは困難である。
(Drip route)
(A) When dripping on the panels 102A to 102C by a conventional method, the nozzle is moved along the path shown by the arrow in FIG. In FIG. 2, the solid line represents the dropping operation, and the dotted line represents the movement-only operation. Here, the minimum dropping distance L 0 is a L2.
In the method shown in FIG. 2, the dropping operation is performed for each panel 102. That is, first, the first panel 102A is dropped from P1 to P2, P11, and P12. And when dripping is finished about the panel 102A, it moves from the end point P12 to the start point P3 of the second panel 102B. Next, the second panel 102B is dropped from P3 to P4, P9, and P10. When dropping is finished for the panel 102B, the panel 102B moves from the end point P10 to the start point P5 of the third panel 102C. Finally, the third panel 102C is dropped from P5 to P6, P7, and P8, and the operation ends.
In this method, it is necessary to change the moving direction of the nozzles at all four dropping points 103 provided on one panel, and the movement of the nozzles stops for each dropping point 103. The loss of time is also large, and it is difficult to shorten the time (tact time) required for the entire dripping.
（イ）本発明の第一態様により、図２と同じ滴下点に対して滴下を行う場合の滴下経路は図３のとおりとなる。ここで、最小滴下距離Ｌ０はＬ１である。
本発明の第一態様では、パネル１０２Ａとパネル１０２Ｂとの間、或いは、パネル１０２Ｂとパネル１０２Ｃの間にある非滴下領域１０５を横切るように、基板１０１の端から端までを直線経路で移動させる。開始点のＰ１からＰ２、Ｐ３、Ｐ４、Ｐ５、Ｐ６へとノズルを移動させながら滴下を行う。引き続き、Ｐ７から反対方向へＰ８、Ｐ９、Ｐ１０、Ｐ１１、Ｐ１２へとノズルを移動させながら滴下を行う。第一態様では、Ｐ１〜Ｐ６間およびＰ７〜Ｐ１２間でノズルの移動速度を一定にすることができ、しかもノズルの移動経路の全長も（ア）と比べ短いため、上記（ア）の方法に比べて全体の滴下にかかる時間（タクトタイム）を短縮することができる。
第一態様が特に有利な効果を奏するのは、列毎に（または行毎に）最小滴下距離Ｌ０が異なる場合である。例えば、第一列（図３のＰ１〜Ｐ６に対応）の最小滴下距離Ｌ０が１０ｍｍであり、第二列（図３のＰ７〜Ｐ１０に対応）の最小滴下距離Ｌ０が３０ｍｍである場合には、第二列におけるノズルの移動速度を第一列におけるノズルの移動速度の理論上３倍とすることができる。この際、列方向に直線経路で移動した場合における最小滴下距離Ｌ０の差と比べ、行方向に直線経路で移動した場合における最小滴下距離Ｌ０の差が大きい場合には、行方向に直線経路での移動を行うことで、ノズルの移動速度を上げるようにしてもよい。
(A) According to the first aspect of the present invention, the dropping route when dropping is performed on the same dropping point as in FIG. 2 is as shown in FIG. Here, the minimum dropping distance L 0 is a L1.
In the first aspect of the present invention, the substrate 101 is moved from end to end in a straight path so as to cross the non-dropping region 105 between the panels 102A and 102B or between the panels 102B and 102C. . Dropping is performed while moving the nozzle from the starting point P1 to P2, P3, P4, P5, P6. Subsequently, dropping is performed while moving the nozzle from P7 to P8, P9, P10, P11, and P12 in the opposite direction. In the first aspect, the nozzle moving speed can be made constant between P1 and P6 and between P7 and P12, and the total length of the moving path of the nozzle is shorter than (a). In comparison, the time (tact time) required for the entire dripping can be shortened.
The first aspect has a particularly advantageous effect when the minimum drop distance L 0 is different for each column (or for each row). For example, the minimum dropping distance L 0 of the first row (corresponding to P1~P6 in Figure 3) is 10 mm, if the minimum dropping distance L 0 of the second row (corresponding to P7~P10 in FIG. 3) is 30mm In this case, the moving speed of the nozzles in the second row can theoretically be three times the moving speed of the nozzles in the first row. In this case, compared with the difference between the minimum dropping distance L 0 in the case of moving in a straight line path in the column direction, if the difference between the minimum dropping distance L 0 in the case of moving in a straight line path in the row direction is large, the straight line in the row direction You may make it raise the moving speed of a nozzle by performing the movement by a path | route.
（ウ）本発明の第二態様により、図２と同じ滴下点に対して滴下を行う場合の滴下経路は図４のとおりとなる。ここで、最小滴下距離Ｌ０はＬ３である。
上記（イ）の態様では、最小滴下距離Ｌ０が図１の距離Ｌ１であるため、ノズルの移動速度の高速化に限界があった。そこで、第二態様では、基板の端から端まで直線経路で移動させる一方向への移動の中で、一つのパネル１０２に一滴ずつの滴下を行うことで最小滴下距離Ｌ０を長くすることとした。すなわち、一回目の直線経路での移動でＰ１、Ｐ３、Ｐ５の順で滴下を行い、二回目の直線経路での移動でＰ６、Ｐ４、Ｐ２の順で滴下を行う。つまり、ノズルが基板上の縦方向を一往復することで縦方向に並ぶ滴下点（一列上の滴下点）の滴下が完了する。引き続き、ノズルを隣の列へ移動し、Ｐ１２、Ｐ１０、Ｐ８の順で滴下を行い、折り返してＰ７、Ｐ９、Ｐ１１の順で滴下を行う。
第二態様の効果を具体例で説明する。例えば、図１においてＬ１が１０ｍｍであり、Ｌ２が２０ｍｍであるとする。そうすると、ノズルの移動速度は理論上、３倍（＝Ｌ３／Ｌ１）とすることができる。一方、直線経路での移動回数は２倍となるため、折り返しに要する時間を考慮しなければ、時間短縮の効果は１．５倍になると言うことができる。
一の直線経路上において、各パネルに２つの滴下点がある滴下パターンにおいては、折り返し時間を考慮すると、Ｌ３／Ｌ０比が直線経路での移動回数の１．２倍以上である場合、好ましくは１．５倍以上である場合、更に好ましくは２．０倍以上である場合、に第二態様が有利な効果を奏すると言うことができる。
一の直線経路上において、各パネルに３以上の滴下点がある滴下パターンにおいても同様に考えることができる。一の直線経路上において滴下点数が１０以上あるときは、Ｌ３／Ｌ０比が直線経路での移動回数の１．６倍以上である場合、好ましくは２．４倍以上である場合、更に好ましくは３．２倍以上である場合、に第二態様が有利な効果を奏すると言うことができる。
(C) According to the second aspect of the present invention, the dropping route when dropping is performed on the same dropping point as in FIG. 2 is as shown in FIG. Here, the minimum dropping distance L 0 is a L3.
In embodiments of the above (i), since the minimum dropping distance L 0 is a distance L1 of FIG. 1, there is a limit to the speed of movement of the nozzle. Therefore, in the second aspect, the minimum drop distance L 0 is increased by dropping one panel at a time during the movement in one direction that moves along the straight path from end to end of the substrate. did. That is, dropping is performed in the order of P1, P3, and P5 in the movement along the first straight path, and dropping is performed in the order of P6, P4, and P2 in the movement along the second straight path. That is, the dropping of the dropping points arranged in the vertical direction (dropping points on one line) is completed by the nozzle reciprocating once in the vertical direction on the substrate. Subsequently, the nozzle is moved to the adjacent row, and dropping is performed in the order of P12, P10, and P8, and the dropping is performed in the order of P7, P9, and P11.
The effect of the second aspect will be described with a specific example. For example, in FIG. 1, it is assumed that L1 is 10 mm and L2 is 20 mm. Then, the moving speed of the nozzle can theoretically be tripled (= L3 / L1). On the other hand, since the number of times of movement on the straight path is doubled, it can be said that the time reduction effect is 1.5 times if the time required for the return is not taken into consideration.
In a drip pattern in which there are two drip points on each panel on one straight path, it is preferable if the L3 / L 0 ratio is 1.2 times or more of the number of movements on the straight path, considering the turnaround time. Is 1.5 times or more, more preferably 2.0 times or more, it can be said that the second aspect has an advantageous effect.
The same applies to a drip pattern in which three or more drip points are present on each panel on one straight path. When the number of dropping points is 10 or more on one straight path, the L3 / L 0 ratio is 1.6 times or more of the number of movements on the straight path, preferably 2.4 times or more, more preferably When the ratio is 3.2 times or more, it can be said that the second aspect has an advantageous effect.
以下では、本発明の詳細を実施例により説明するが、本発明は何ら実施例により限定されるものではない。 Hereinafter, details of the present invention will be described with reference to examples, but the present invention is not limited to the examples.
（滴下装置）
図５は、本実施例に係る方法を実施するための滴下装置５０１の概略斜視図である。
本実施例の滴下装置５０１は、液体材料を滴下する複数の吐出装置６０１と、液体材料が滴下される基板１０１を載置するテーブル５０２と、吐出装置６０１が配設されテーブル５０２上をＸＹＺ方向へ相対移動させるＸＹＺ駆動手段５０３と、を備えている。本実施例では、吐出装置６０１を三つ設けているが、その取り付け数は、基板１０１の大きさやパネル１０２の数などにより変更することができ、例えば、二つ以下であってもよいし、四つ以上であってもよい。
(Drip device)
FIG. 5 is a schematic perspective view of a dropping device 501 for carrying out the method according to the present embodiment.
The dropping device 501 of the present embodiment includes a plurality of discharging devices 601 for dropping a liquid material, a table 502 on which a substrate 101 to which the liquid material is dropped, and a discharging device 601 are provided. XYZ driving means 503 for relative movement. In the present embodiment, three ejection devices 601 are provided, but the number of attachments can be changed depending on the size of the substrate 101, the number of the panels 102, and the like. There may be four or more.
本実施例の吐出装置６０１は、計量管内を密接して進退移動するプランジャーを高速に進出移動させて液材を吐出口より飛滴させるプランジャータイプの吐出装置である。
図６に示すように、吐出装置６０１は、管形状の計量部６０２と、計量部６０２に内接するプランジャー６０３と、吐出口６１１を備えるノズル６０４と、計量部６０２とノズル６０４とを連通・遮断する吐出バルブ６０５と、液体材料を貯留する貯留容器６０６と、貯留容器６０６と計量部６０２とを連通・遮断する液供給バルブ６０７と、ネジ軸６０８を駆動することでプランジャー６０３を駆動するモーター６０９と、を備える。
The discharge device 601 according to the present embodiment is a plunger type discharge device that causes a plunger that moves forward and backward in close contact within the measuring tube to advance and move at a high speed so that liquid material is ejected from the discharge port.
As shown in FIG. 6, the discharge device 601 communicates a tube-shaped measuring unit 602, a plunger 603 inscribed in the measuring unit 602, a nozzle 604 having a discharge port 611, a measuring unit 602 and the nozzle 604. The plunger 603 is driven by driving a discharge valve 605 for blocking, a storage container 606 for storing a liquid material, a liquid supply valve 607 for connecting / blocking the storage container 606 and the measuring unit 602, and a screw shaft 608. A motor 609.
（吐出工程）
吐出装置６０１による吐出工程では、初めに液体材料の充填を行う。まず、液供給バルブ６０７と計量部６０２とが接続する孔６１０の近傍且つそれを越えない位置（図６では孔６１０より少し上方の位置）へプランジャー６０３を移動する。そして、液供給バルブ６０７を開き、貯留容器６０６と計量部６０２とを連通させ、プランジャー６０３を後退移動させる。すると貯留容器６０６内の液体材料は液供給バルブ６０７を通じて計量部６０２へ流入し、プランジャー６０３が最上端まで後退すると充填が終了する。
(Discharge process)
In the discharge process by the discharge device 601, the liquid material is first filled. First, the plunger 603 is moved to a position in the vicinity of the hole 610 where the liquid supply valve 607 and the measuring unit 602 are connected and a position not exceeding the hole 610 (a position slightly above the hole 610 in FIG. 6). Then, the liquid supply valve 607 is opened, the storage container 606 and the measuring unit 602 are communicated, and the plunger 603 is moved backward. Then, the liquid material in the storage container 606 flows into the measuring unit 602 through the liquid supply valve 607, and the filling ends when the plunger 603 is retracted to the uppermost end.
次に、充填した液体材料の吐出は、吐出バルブ６０５を開け、プランジャー６０３を所望とする吐出量に応じて進出移動させることで行う。プランジャー６０３の進出動作による吐出は、急速に加速した後に、モーター６０９を急激に停止させることにより、プランジャー６０３を急速に停止させることで行う。計量部６０２内の液体材料は、プランジャー６０３の急速移動および急速停止により与えられた慣性力によってノズル６０４先端より吐出される。プランジャー６０３が最下端まで移動した後には、吐出バルブ６０５を閉じ、液供給バルブ６０７を開け、プランジャー６０３を後退移動させて液体材料を充填する。
このように、貯留容器６０６から計量部６０２へ液体材料を充填し、計量部６０２内の液体材料をノズル６０４より吐出することを繰り返して滴下作業を行う。
計量部６０２内へは複数回にわたって吐出できる量の液体材料を充填することができるので、計量部６０２内に充填する液体材料の量を、例えば一つのパネル分としたり、或いは、一つの基板分とするなど用途に応じて決定する。
Next, the filled liquid material is discharged by opening the discharge valve 605 and moving the plunger 603 forward according to a desired discharge amount. Discharge by the advance operation of the plunger 603 is performed by rapidly stopping the plunger 603 by rapidly stopping the motor 609 after rapidly accelerating. The liquid material in the measuring unit 602 is discharged from the tip of the nozzle 604 by the inertial force given by the rapid movement and rapid stop of the plunger 603. After the plunger 603 has moved to the lowest end, the discharge valve 605 is closed, the liquid supply valve 607 is opened, and the plunger 603 is moved backward to fill the liquid material.
In this manner, the liquid material is filled from the storage container 606 into the measuring unit 602, and the liquid material in the measuring unit 602 is repeatedly discharged from the nozzle 604 to perform the dropping operation.
The weighing unit 602 can be filled with an amount of liquid material that can be discharged a plurality of times. Therefore, the amount of liquid material filled in the weighing unit 602 can be, for example, one panel or one substrate. It is determined according to the usage.
（滴下パターンの例）
図７および８に具体的数値を記した滴下パターンの一例を示す。図７は基板１０１の全体を示した図で、図８はその一部を拡大した図である。
図７に示す滴下パターンは、横７５０ｍｍ、縦６２０ｍｍの大きさの基板１０１に、１．５インチサイズのパネル１０２を縦２０行、横１７列配置している。一つのパネル１０２には縦横それぞれに１０ｍｍずつの間隔をあけて５点の滴下点１０３が設定されている。パネル１０２が配列される間隔は、縦方向へ約３１ｍｍ、横方向へ約４４ｍｍとなっている。
(Example of dripping pattern)
7 and 8 show examples of dripping patterns with specific numerical values. FIG. 7 is a view showing the entire substrate 101, and FIG. 8 is an enlarged view of a part thereof.
In the dropping pattern shown in FIG. 7, a 1.5-inch panel 102 is arranged in 20 rows and 17 columns in a substrate 101 having a size of 750 mm in width and 620 mm in length. One panel 102 is provided with five dropping points 103 at intervals of 10 mm vertically and horizontally. The intervals at which the panels 102 are arranged are about 31 mm in the vertical direction and about 44 mm in the horizontal direction.
《ノズルの移動速度》
一つの吐出装置６０１で一列のパネル１０２へ滴下動作する場合を考えると、図２〜図４で説明したそれぞれの方法（上記（ア）〜（ウ）の方法）において、滴下動作中のノズルの移動速度は次に示すとおりとなる。なお、吐出サイクルｆ０は、１回の吐出あたり０．２秒とする。
図２に例示される上記（ア）の方法では、最小滴下距離Ｌ０は１０ｍｍとなるので、最大速度は５０ｍｍ／ｓｅｃ（＝Ｌ０／ｆ０）となる。
図３に例示される上記（イ）の方法では、ｎ１列目およびｎ３列目は最小滴下距離Ｌ０が１０ｍｍとなるのでノズルの最大移動速度は５０ｍｍ／ｓｅｃとなり、ｎ２列目は最小滴下距離Ｌ０が３１ｍｍとなるのでノズルの滴下時移動速度は１５５ｍｍ／ｓｅｃとなる。
図４に例示される上記（ウ）の方法では、ｎ１〜ｎ３のすべての列で滴下点間隔が３１ｍｍとなるのでノズルの滴下時移動速度は１５５ｍｍ／ｓｅｃとなる。
なお、基板１０１上でのノズル６０４の移動速度を一定とするため、ノズル６０４は始点の少し手前から移動し、折り返し地点ではノズル６０４は基板１０１上からはみ出して折り返し行っている。
<Nozzle moving speed>
Considering a case where a single discharge device 601 performs a drop operation on a row of panels 102, in each of the methods described in FIGS. 2 to 4 (methods (A) to (C) above), The moving speed is as follows. Incidentally, the discharge cycle f 0 is 0.2 seconds per one ejection.
In the method (a) illustrated in FIG. 2, the minimum drop distance L 0 is 10 mm, and thus the maximum speed is 50 mm / sec (= L 0 / f 0 ).
In the method (a) illustrated in FIG. 3, the minimum drop distance L 0 is 10 mm in the n1 and n3 rows, so the maximum moving speed of the nozzle is 50 mm / sec, and the minimum drop distance is in the n2 row. Since L 0 is 31 mm, the moving speed when the nozzle is dropped is 155 mm / sec.
In the method (c) illustrated in FIG. 4, the dropping point interval is 31 mm in all the rows n1 to n3, so the moving speed of the nozzle when dropping is 155 mm / sec.
In order to make the moving speed of the nozzle 604 on the substrate 101 constant, the nozzle 604 moves slightly before the starting point, and the nozzle 604 protrudes from the substrate 101 at the turning point.
《タクトタイム》
上記（ア）〜（ウ）の方法により２０パネルを塗布した場合において、上記速度から計算した滴下動作開始から終了までにかかる時間（タクトタイム）は次に示すとおりとなる。
上記（ア）の方法では、２０パネルのタクトタイム（折り返し部分の移動含まず）は２７．０２秒である。
この方法においては、ａ１１→ａ１２→ａ２１→ａ３１→ａ３２→ａ１３の順に滴下が行われる。ａ１１〜ａ３２間の各点の移動がそれぞれ約０．２秒とすると、１つのパネルでの塗布時間は約０．８秒となる。パネル間の移動にかかる時間は、例えば、ａ３２とａ１３との距離が約２９ｍｍであることから約０．５８秒となる。よって、２０パネルのタクトタイム（折り返し部分の移動含まず）は、（０．８秒×２０）＋（０．５８秒×１９）＝２７．０２秒となる。
上記（イ）の方法では、２０パネルのタクトタイム（折り返し部分の移動含まず）は２７．８秒となる。
この方法においては、ａ１１→ａ１２→ａ１３→ａ１４→・・・→ａ２２→ａ２１→ａ３１→ａ３２の順に滴下が行われる。ａ１列とａ３列の塗布に係るタクトタイムは、（（１０［ｍｍ］×２０）＋２１［ｍｍ］×１９）／５０［ｍｍ／ｓｅｃ］×２列≒２４秒である。ａ２列の塗布にかかるタクトタイムは、（３１［ｍｍ］×１９）／１５５［ｍｍ／ｓｅｃ］≒３．８秒である。よって、２０パネルのタクトタイム（折り返し部分の移動含まず）は、２４＋３．８秒＝２７．８秒となる。なお、折り返し部分の移動に約０．６秒かかるとすると、折り返し部分の移動を含む２０パネルのタクトタイムは２７．８秒＋０．６秒×２＝２９秒となる。
上記（ウ）の方法では、２０パネルのタクトタイム（折り返し部分の移動含まず）は、１９．０秒となる。
この方法においては、ａ１１→ａ１３→ａ１５→・・・→ａ１４０→ａ１３８→・・・→ａ１２→ａ２１→ａ２２→・・・→ａ２２０→ａ３３９→ａ３３７→・・・→ａ３３８→ａ３４０の順に滴下が行われる。一の直線経路での移動にかかるタクトタイムは、（３１［ｍｍ］×１９）／１５５［ｍｍ／ｓｅｃ］≒３．８秒である。ａ１列とａ３列は二の直線経路での移動、ａ２列は一の直線経路での移動であるので、直線経路での移動回数は五回となる。よって、合計のタクトタイム（折り返し部分の移動含まず）は３．８秒×５＝１９．０秒となる。なお、ａ１列、ａ３列での折り返し部分の移動に約０．４秒、ａ２列での折り返しに約０．６秒かかるとすると、折り返し部分の移動を含む２０パネルのタクトタイムは１９．０秒＋２．０秒＝２１．０秒となる。
以上の結果から、本実施例の滴下方法上記（イ）および（ウ）によれば、滴下方法（ア）と比べ、タクトタイムを短縮できることが確認できた。
なお、ノズル６０４による直線経路での移動を横方向に行ってもタクトタイムを短縮できることは言うまでもない。
"Tact time"
When 20 panels are applied by the above methods (a) to (c), the time (tact time) required from the start to the end of the dropping operation calculated from the speed is as follows.
In the method (a), the tact time of 20 panels (not including the movement of the folded portion) is 27.02 seconds.
In this method, dropping is performed in the order of a11 → a12 → a21 → a31 → a32 → a13. When the movement of each point between A11～ a32 each be about 0.2 seconds, the coating time in one panel is about 0.8 seconds. The time required for movement between the panels is, for example, about 0.58 seconds because the distance between a32 and a13 is about 29 mm. Therefore, the tact time of 20 panels (not including the movement of the folded portion) is ( 0.8 seconds × 20) + ( 0.58 seconds × 19) = 27.02 seconds.
In the above method (a), the tact time of 20 panels (not including the movement of the folded portion) is 27.8 seconds.
In this method, dropping is performed in the order of a11 → a12 → a13 → a14 →... → a22 → a21 → a31 → a32. The tact time relating to the application of the a1 and a3 rows is ( (10 [mm] × 20) +21 [mm] × 19 ) / 50 [mm / sec] × 2 rows≈24 seconds. The tact time required for application in the a2 row is (31 [mm] × 19) / 155 [mm / sec] ≈3.8 seconds. Therefore, the tact time of 20 panels (not including the movement of the folded portion) is 24 + 3.8 seconds = 27.8 seconds. If it takes about 0.6 seconds to move the folded portion, the tact time of the 20 panels including the folded portion is 27.8 seconds + 0.6 seconds × 2 = 29 seconds.
In the above method (c), the tact time of 20 panels (not including the movement of the folded portion) is 19.0 seconds.
In this method, a11 → a13 → a15 → ・ ・ ・ → a140 → a138 → ・ ・ ・ → a12 → a21 → a22 → ・ ・ ・ → a220 → a339 → a337 → ... → a338 → a340 in this order. Done. The tact time required for movement along one straight path is (31 [mm] × 19) / 155 [mm / sec] ≈3.8 seconds. Since the a1 row and the a3 row are movements along two straight paths, and the a2 row is movement along one straight path, the number of movements along the straight path is five. Therefore, the total tact time (not including the movement of the folded portion) is 3.8 seconds × 5 = 19.0 seconds. If it takes about 0.4 seconds to move the folded portion in the a1 and a3 rows and about 0.6 seconds to turn in the a2 row, the tact time of the 20 panel including the movement of the folded portion is 19.0. Second + 2.0 seconds = 21.0 seconds.
From the above results, it was confirmed that according to the dropping method (A) and (C) of this example, the tact time could be shortened as compared with the dropping method (A).
Needless to say, the tact time can be shortened by moving the nozzle 604 along a straight path in the horizontal direction.
以上で説明した滴下方法は一つの例であって、これに限定されるものではない。例えば、所望とする液体材料の量によっては滴下点数が変わる場合もある。また、滴下点数やパネル内への液体材料の広がり具合などから滴下点の配置が変わる場合もある。当然のことながら、基板やパネルのサイズが変われば上述した数値も変わることになる。 The dropping method described above is an example, and the present invention is not limited to this. For example, the number of dropping points may vary depending on the amount of liquid material desired. Also, the arrangement of the dropping points may change depending on the number of dropping points and the extent of the liquid material spreading into the panel. Of course, if the size of the substrate or panel changes, the above numerical values will also change.
本発明は、液体材料が吐出装置から離間した後にワークに接触するタイプの吐出方式に好適であり、例えば、弁座に弁体を衝突させて液体材料をノズル先端より飛翔吐出させるジェット式、連続噴射方式或いはデマンド方式のインクジェットタイプなどで実施可能である。 The present invention is suitable for a discharge method in which the liquid material comes into contact with the workpiece after being separated from the discharge device. It can be implemented by an ink jet type of a jet method or a demand method.
１０１ 基板
１０２ パネル
１０３ 滴下点
１０４ 滴下領域
１０５ 非滴下領域
５０１ 滴下装置
５０２ テーブル
５０３ ＸＹＺ駆動手段
６０１ 吐出装置
６０２ 計量部
６０３ プランジャー
６０４ ノズル
６０５ 吐出バルブ
６０６ 貯留容器
６０７ 液供給バルブ
６０８ ネジ軸
６０９ モーター
６１０ 孔
６１１ 吐出口
101 Substrate 102 Panel 103 Dropping point 104 Dropping area 105 Non-dropping area 501 Dropping apparatus 502 Table 503 XYZ driving means 601 Discharging apparatus 602 Measuring section 603 Plunger 604 Nozzle 605 Discharging valve 606 Storage container 607 Liquid supply valve 608 Screw shaft 609 Motor 610 Hole 611 Discharge port
Claims (12)
直線経路毎に滴下点間の最短距離（Ｌ０）が異なる場合に、一の直線経路における滴下点間の最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づき直線経路毎にノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下方法。 A plurality of workpieces with dropping points are arranged on the substrate, and the liquid material is dropped while relatively moving the nozzle and the substrate at a constant speed so that the nozzles of the discharge device run vertically or traverse multiple times on a plurality of workpieces in a straight path. A way to
If the shortest distance between the drop point for each linear path (L 0) are different, the shortest distance (L 0) between the dropping point in one of the linear path and the discharge device is the time required to discharge one (f 0 ), and the relative movement speed of the nozzle and the substrate is set for each linear path based on L 0 / f 0 .
ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づきノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下方法。 A plurality of workpieces having a plurality of dropping points are arranged on the substrate, and the liquid material is moved while the nozzle and the substrate are relatively moved at a constant speed so that the nozzles of the discharge device vertically cross or traverse the plurality of workpieces in a straight path. A method of dripping
In the movement of the nozzle in one linear path, the dropping order is set so that one discharge is performed on one work, and the shortest distance (L 0 ) in the dropping order and the discharge device perform one discharge. The liquid material dropping method is characterized in that the time (f 0 ) required for the calculation is calculated and the relative movement speed of the nozzle and the substrate is set based on L 0 / f 0 .
一のワークにおける一行または一列の滴下点の数と同じ回数だけ、ノズルが一行または一列を直線経路で移動するよう滴下順序を設定することを特徴とする請求項２または３記載の液体材料の滴下方法。 As the nozzle moves in a straight path over a single row or column of drop points,
4. The dropping of the liquid material according to claim 2, wherein the dropping order is set so that the nozzle moves in one line or one line along a straight path as many times as the number of dropping points in one line or one column in one work. Method.
前記制御部は、基板上に複数配列された滴下点を有するワーク上を、吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下するに際し、
直線経路毎に滴下点間の最短距離（Ｌ０）が異なる場合に、一の直線経路における滴下点間の最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づき直線経路毎にノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下装置。 Liquid material dropping device comprising: a discharge device including a nozzle for discharging a liquid material; a table on which a substrate is placed; a drive unit that relatively moves the discharge device and the table; and a control unit that controls these operations. Because
The control unit is a liquid material while relatively moving the nozzle and the substrate at a constant speed so that the nozzle of the discharge device vertically crosses or traverses the workpiece having a plurality of dropping points arranged on the substrate a plurality of times in a straight path. When dripping
If the shortest distance between the drop point for each linear path (L 0) are different, the shortest distance (L 0) between the dropping point in one of the linear path and the discharge device is the time required to discharge one (f 0 ), and the relative movement speed of the nozzle and the substrate is set for each linear path based on L 0 / f 0 .
前記制御部は、基板上に複数配列された複数の滴下点を有するワーク上を、吐出装置の有するノズルが直線経路で複数回縦断または横断するようノズルと基板とを一定速度で相対移動させながら液体材料を滴下するに際し、
ノズルの一の直線経路での移動において、一のワークに対して一の吐出をするよう滴下順序を設定し、その滴下順序における最短距離（Ｌ０）と、吐出装置が一の吐出をするのに要する時間（ｆ０）とを算出し、Ｌ０／ｆ０に基づきノズルと基板の相対移動速度を設定することを特徴とする液体材料の滴下装置。 Liquid material dropping device comprising: a discharge device including a nozzle for discharging a liquid material; a table on which a substrate is placed; a drive unit that relatively moves the discharge device and the table; and a control unit that controls these operations. Because
The control unit moves the nozzle and the substrate relative to each other at a constant speed so that the nozzle of the discharge device traverses or traverses a plurality of times along a straight path on a workpiece having a plurality of dropping points arranged on the substrate. When dripping liquid material,
In the movement of the nozzle in one linear path, the dropping order is set so that one discharge is performed on one work, and the shortest distance (L 0 ) in the dropping order and the discharge device perform one discharge. The liquid material dropping device characterized in that the time (f 0 ) required for the calculation is calculated and the relative movement speed of the nozzle and the substrate is set based on L 0 / f 0 .
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| CN201510300279.XA CN105005165B (en) | 2007-10-30 | 2008-10-27 | Method and apparatus for dropping liquid material |
| KR1020107011475A KR101579200B1 (en) | 2007-10-30 | 2008-10-27 | Method, storge medium recording program and device for dropping liquid material |
| CN2008801190468A CN101883640A (en) | 2007-10-30 | 2008-10-27 | Method, program and device for dropping liquid material |
| PCT/JP2008/003041 WO2009057268A1 (en) | 2007-10-30 | 2008-10-27 | Method, program and device for dropping liquid material |
| CN201410669271.6A CN104401137B (en) | 2007-10-30 | 2008-10-27 | The method of dripping of fluent material and device |
| TW97141556A TWI473664B (en) | 2007-10-30 | 2008-10-29 | Liquid material drop method and memory program memory media and device |
| HK15103937.3A HK1203456A1 (en) | 2007-10-30 | 2011-01-20 | Method and device for dropping liquid material |
| HK16101842.0A HK1213999A1 (en) | 2007-10-30 | 2011-01-20 | Method and device for dropping liquid material |
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| JP5419616B2 (en) | 2009-09-25 | 2014-02-19 | 武蔵エンジニアリング株式会社 | Bubble mixing prevention mechanism, liquid material discharging apparatus including the mechanism, and liquid material discharging method |
| KR101129193B1 (en) * | 2009-12-01 | 2012-03-26 | 주식회사 탑 엔지니어링 | Method for controlling paste dispenser |
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| JP3973209B2 (en) * | 2002-08-29 | 2007-09-12 | 芝浦メカトロニクス株式会社 | Liquid substance dropping apparatus and method |
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| JP2004170386A (en) * | 2002-10-28 | 2004-06-17 | Seiko Epson Corp | Device and method for inspection, device and method for liquid droplet ejection, device and electronic apparatus |
| EP1600809A4 (en) * | 2003-02-21 | 2007-10-31 | Tpo Hong Kong Holding Ltd | Method for manufacturing cell and cell manufactured by such method |
| JP4183577B2 (en) * | 2003-07-25 | 2008-11-19 | 武蔵エンジニアリング株式会社 | Droplet adjustment method, droplet discharge method and apparatus |
| JP4221336B2 (en) * | 2004-06-14 | 2009-02-12 | Ｎｅｃ液晶テクノロジー株式会社 | Manufacturing method of liquid crystal display device |
| JP2006064545A (en) * | 2004-08-27 | 2006-03-09 | Mitsubishi Chemicals Corp | Fluid discharge mechanism, fluid discharge method and fluid-dispensing device |
| JP4935153B2 (en) * | 2005-06-30 | 2012-05-23 | セイコーエプソン株式会社 | Droplet ejection method |
| JP2007011164A (en) * | 2005-07-04 | 2007-01-18 | Nec Kagoshima Ltd | Method of manufacturing liquid crystal display panel by liquid crystal dropping lamination method, and liquid crystal dropping lamination device |
| JP2007017500A (en) * | 2005-07-05 | 2007-01-25 | Sharp Corp | Liquid crystal dropping method |
| CN101430396B (en) * | 2005-11-11 | 2011-08-31 | 精工爱普生株式会社 | Ejection method, method of manufacturing color filter, electro-optical apparatus, and electronic apparatus |
| KR101441142B1 (en) * | 2005-11-30 | 2014-09-17 | 무사시 엔지니어링 가부시키가이샤 | Method of adjusting nozzle clearance of liquid coater and liquid coater |
| CN100573278C (en) * | 2005-12-28 | 2009-12-23 | 上海广电Nec液晶显示器有限公司 | Liquid crystal drip-injection method |
| KR101222958B1 (en) * | 2005-12-30 | 2013-01-17 | 엘지디스플레이 주식회사 | A dropping apparatus of liquid crystal for a liquid crystal display device |
| JP4589267B2 (en) * | 2006-06-02 | 2010-12-01 | 芝浦メカトロニクス株式会社 | Liquid substance dropping device |
| JP2009031390A (en) * | 2007-07-25 | 2009-02-12 | Seiko Epson Corp | Liquid ejecting method, color filter manufacturing method, and organic el element manufacturing method |
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- 2008-10-27 CN CN201410669271.6A patent/CN104401137B/en active Active
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Also Published As
| Publication number | Publication date |
|---|---|
| HK1213999A1 (en) | 2016-07-15 |
| KR101579200B1 (en) | 2016-01-04 |
| WO2009057268A1 (en) | 2009-05-07 |
| CN104401137B (en) | 2016-04-20 |
| KR20100087729A (en) | 2010-08-05 |
| HK1203456A1 (en) | 2015-10-30 |
| JP2009106857A (en) | 2009-05-21 |
| CN105005165A (en) | 2015-10-28 |
| CN104401137A (en) | 2015-03-11 |
| CN101883640A (en) | 2010-11-10 |
| CN105005165B (en) | 2021-07-09 |
| TW200927303A (en) | 2009-07-01 |
| TWI473664B (en) | 2015-02-21 |
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