JP5215711B2 - Optical component cleaning method and cleaning apparatus - Google Patents
Optical component cleaning method and cleaning apparatus Download PDFInfo
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本発明は、光学部品の洗浄装置及び洗浄方法に関する。詳しくは、本発明は、光学部品に付着したピッチ、ワックス、保護膜などの油性汚れと研磨剤、研磨屑、チリ、埃などの粒子汚れが複合した汚れを除去するための洗浄方法及び洗浄装置に関する。 The present invention relates to an optical component cleaning apparatus and a cleaning method. More specifically, the present invention relates to a cleaning method and a cleaning apparatus for removing dirt composed of oily dirt such as pitch, wax and protective film attached to an optical component and particle dirt such as abrasives, polishing dust, dust and dust. About.
レンズなどの光学部品の製造において、研磨治具に光学部品を固定するためにバインダーとしてピッチ、ワックスなどが用いられ、研磨工程では研磨剤が用いられている。また、研磨後の光学部品表面は保護膜で被覆される場合もある。したがって、光学部品の表面には、ピッチ、ワックス、保護膜などの油性汚れと研磨剤、研磨屑、チリ、埃などの粒子汚れが複合して付着している。光学部品に蒸着膜を成膜する場合等には、光学部品の表面からこれらの汚れを高度に除去することが求められる。 In manufacturing an optical component such as a lens, pitch, wax, or the like is used as a binder to fix the optical component to a polishing jig, and an abrasive is used in the polishing step. Further, the surface of the optical component after polishing may be covered with a protective film. Therefore, oily dirt such as pitch, wax, protective film and particle dirt such as abrasive, polishing dust, dust, and dust adhere to the surface of the optical component in combination. When depositing a vapor deposition film on an optical component, it is required to remove these stains from the surface of the optical component.
溶剤系洗浄剤は、ピッチ等の油性汚れに対して高い洗浄力を有する反面、研磨剤等の粒子汚れの除去性能は低い。したがって、光学部品は、通常、ピッチ等の油性汚れの除去を塩素系溶剤等の溶剤系洗浄剤で行った後に、研磨剤等の粒子汚れを弱アルカリ性の水系洗浄剤で除去して仕上げられる（非特許文献１）。 The solvent-based cleaning agent has a high detergency against oily stains such as pitch, but has low performance for removing particle stains such as abrasives. Therefore, optical parts are usually finished by removing oily dirt such as pitch with a solvent-based cleaning agent such as a chlorine solvent, and then removing particle dirt such as an abrasive with a weak alkaline aqueous cleaning agent ( Non-patent document 1).
しかしながら、耐水性の低い硝材からなる光学部品は、水系洗浄剤や水に浸漬させると潜傷、白焼け、青焼けといわれる損傷が発生する。また、水系洗浄剤や水の浸漬槽に超音波を印加すると、このような損傷に加えて洗傷が発生する。このような損傷は光学部品として致命的な欠陥となる。 However, an optical component made of a glass material having low water resistance causes damages such as latent scratches, white burns, and blue burns when immersed in an aqueous cleaning agent or water. Further, when ultrasonic waves are applied to an aqueous cleaning agent or a water immersion bath, in addition to such damage, washing occurs. Such damage becomes a fatal defect as an optical component.
耐水性の低い硝材からなる光学部品については、溶剤系洗浄剤でピッチ等の油性汚れを除去した後に、表面に残存している研磨剤等の粒子汚れをクリーニングペーパーや布等にアルコール等の溶剤を染み込ませて、人手で拭き上げる方法がとられているが、作業に非常に時間がかかるため生産性が悪く、また、作業は熟練を要するものであった。 For optical parts made of glass materials with low water resistance, after removing oily dirt such as pitch with a solvent-based cleaning agent, remove particle dirt such as abrasives remaining on the surface with a solvent such as alcohol on cleaning paper or cloth However, since it takes a very long time to work, the productivity is poor, and the work requires skill.
そこで、光学部品を洗浄する方法として、非水系洗浄液又は準水系洗浄液に浸漬して洗浄する工程と、光学部品を回転しているブラシに当接して洗浄するブラシ洗浄工程と、光学部品を非水系洗浄液又は準水系洗浄液に浸漬して仕上げのリンス洗浄工程とを組み合わせる光学部品の洗浄方法が提案されている（特許文献１）。しかしながら、ブラシ洗浄工程で粒子の除去は行えるものの、ブラシによって光学部品に荷重がかかるために、荷重の調整が悪いと光学部品表面に洗傷が入る恐れがある。また、光学部品の形状が変わる度にブラシの調整が必要となり、非効率である。 Therefore, as a method for cleaning optical components, a step of cleaning by immersing in a non-aqueous cleaning solution or a semi-aqueous cleaning solution, a brush cleaning step of cleaning the optical component in contact with a rotating brush, and a non-aqueous cleaning of the optical component There has been proposed a cleaning method for optical components that is combined with a final rinse cleaning step by dipping in a cleaning solution or a semi-aqueous cleaning solution (Patent Document 1). However, although particles can be removed in the brush cleaning process, since a load is applied to the optical component by the brush, there is a risk that the surface of the optical component may be washed if the load is poorly adjusted. In addition, each time the shape of the optical component changes, it is necessary to adjust the brush, which is inefficient.
このため、ピッチ、ワックス、保護膜などの油性汚れと研磨剤、研磨屑、チリ、埃などの粒子汚れが複合して付着している光学部品の表面を、部品に損傷を与えることなく、効率よく、かつ、高度に除去する洗浄装置及び洗浄方法が求められていた。
本発明は、ピッチ、ワックス、保護膜などの油性汚れと研磨剤、研磨屑、チリ、埃などの粒子汚れが複合して付着している光学部品を、部品に損傷を与えることなく、高効率、
かつ、高度に汚れを除去するための洗浄方法及び洗浄装置を提供することを課題とする。
The present invention is a highly efficient optical component in which oily dirt such as pitch, wax, protective film, etc. and particle dirt such as abrasives, polishing dust, dust, and dust are combined and adhered without damaging the parts. ,
It is another object of the present invention to provide a cleaning method and a cleaning apparatus for highly removing dirt.
本発明の光学部品の洗浄方法は、光学部品を、界面活性剤を実質的に含まない非水系洗浄剤Ａに少なくとも１回浸漬して洗浄する洗浄工程（ａ）と、洗浄工程（ａ）により洗浄された光学部品を、界面活性剤を含む非水系洗浄剤Ｂに少なくとも１回浸漬して洗浄する洗浄工程（ｂ）と、洗浄工程（ｂ）により洗浄された光学部品を、さらに界面活性剤を実質的に含まない非水系洗浄剤Ａ'に少なくとも１回浸漬して洗浄する洗浄工程（ｃ）とを有し、
非水系洗浄剤Ｂが、炭素数９〜１８の芳香族炭化水素６０〜９８重量％と、界面活性剤２〜３０重量％と、水分０．０５〜１０．０重量％とを含むことを特徴としている。
The optical component cleaning method of the present invention comprises a cleaning step (a) in which an optical component is immersed and cleaned at least once in a non-aqueous cleaning agent A substantially free of a surfactant, and a cleaning step (a). A cleaning step (b) for cleaning the cleaned optical component by immersing it in a non-aqueous cleaning agent B containing a surfactant at least once, and further cleaning the optical component cleaned by the cleaning step (b). It possesses a cleaning step of cleaning by dipping at least once in a non-aqueous detergent a 'that is substantially free of (c) and
The non-aqueous cleaning agent B contains 60 to 98% by weight of an aromatic hydrocarbon having 9 to 18 carbon atoms, 2 to 30% by weight of a surfactant, and 0.05 to 10.0% by weight of water. It is said.
本発明の光学部品の洗浄方法は、洗浄工程（ａ）及び／又は洗浄工程（ｃ）で使用された非水系洗浄剤の少なくとも一部を抜き出して蒸留し、蒸留で得られた留出液を洗浄工程（ａ）及び／又は洗浄工程（ｃ）に再び使用することが好ましい。 In the method for cleaning an optical component of the present invention, at least a part of the non-aqueous cleaning agent used in the cleaning step (a) and / or the cleaning step (c) is extracted and distilled, and a distillate obtained by distillation is removed. It is preferably used again in the washing step (a) and / or the washing step (c).
本発明の光学部品の洗浄方法は、洗浄工程（ｃ）で使用された非水系洗浄剤Ａ’の少なくとも一部を、洗浄工程（ａ）及び／又は洗浄工程（ｂ）の非水系洗浄剤として使用することが好ましい。 In the optical component cleaning method of the present invention, at least a part of the non-aqueous cleaning agent A ′ used in the cleaning step (c) is used as the non-aqueous cleaning agent in the cleaning step (a) and / or the cleaning step (b). It is preferable to use it.
本発明の光学部品の洗浄方法は、非水系洗浄剤Ａ及び非水系洗浄剤Ａ'が、炭素数９〜１８の芳香族炭化水素からなる洗浄剤であり、非水系洗浄剤Ｂに含まれる界面活性剤が、アニオン性界面活性剤５〜８３重量％と、非イオン性界面活性剤１７〜９５重量％とからなることが好ましい。 In the optical component cleaning method of the present invention, the non-aqueous cleaning agent A and the non-aqueous cleaning agent A ′ are cleaning agents composed of aromatic hydrocarbons having 9 to 18 carbon atoms, and the interface included in the non-aqueous cleaning agent B. The activator is preferably composed of 5 to 83% by weight of an anionic surfactant and 17 to 95% by weight of a nonionic surfactant.
本発明の光学部品の洗浄装置は、前記の光学部品の洗浄方法において使用する装置であって、界面活性剤を実質的に含まない非水系洗浄剤Ａにより光学部品を洗浄する１以上の洗浄槽（１）と、洗浄槽（１）の後段に設けられ、界面活性剤を含む非水系洗浄剤Ｂにより光学部品を洗浄する１以上の洗浄槽（２）と、洗浄槽（２）の後段に設けられ、界面活性剤を実質的に含まない非水系洗浄剤Ａ’により光学部品を洗浄する１以上の洗浄槽（３）とを有することを特徴としている。 The optical component cleaning apparatus of the present invention is an apparatus used in the optical component cleaning method described above, and is one or more cleaning tanks for cleaning optical components with a non-aqueous cleaning agent A substantially free of a surfactant. (1), one or more cleaning tanks (2) provided after the cleaning tank (1) for cleaning optical components with a non-aqueous cleaning agent B containing a surfactant, and after the cleaning tank (2) And one or more cleaning tanks (3) for cleaning optical components with a non-aqueous cleaning agent A ′ substantially free of surfactant.
本発明の光学部品の洗浄装置は、（Ａ）洗浄槽（１）及び／又は洗浄槽（３）から排出される排出液の少なくとも一部を蒸留する手段と、蒸留で得られた留出液を洗浄槽（１）及び／又は（３）に導入する手段とを有することが好ましい。また、（Ｂ）洗浄槽（３）中の非水系洗浄剤Ａ’の少なくとも一部を、洗浄槽（１）及び／又は洗浄槽（２）に導入する手段を有することも好ましい。 The optical component cleaning apparatus of the present invention comprises (A) a means for distilling at least part of the discharged liquid discharged from the cleaning tank (1) and / or the cleaning tank (3), and a distillate obtained by distillation. It is preferable to have means for introducing the water into the washing tank (1) and / or (3). It is also preferable to have means for introducing (B) at least a part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) into the cleaning tank (1) and / or the cleaning tank (2).
本発明によれば、潜傷などの損傷を与えることなく、光学部品に付着したピッチ、ワックス、保護膜などの油性汚れと研磨剤、研磨屑、チリ、埃などの粒子汚れの複合した汚れを高効率、かつ、高度に除去することのできる、光学部品の洗浄装置及び洗浄方法を提供することができる。また、被洗浄物の汚れにより汚染された非水系洗浄剤を蒸留により浄化・回収し、再利用する手段を有する場合には、洗浄剤の使用量を削減し、より効率的な光学部品の洗浄を行うことができる。 According to the present invention, the oily dirt such as pitch, wax, and protective film adhered to the optical component and the particle dirt such as abrasive, polishing dust, dust, and dust are combined without causing damage such as latent scratches. It is possible to provide a cleaning device and a cleaning method for an optical component that can be removed with high efficiency and high degree. In addition, if there is a means to purify and collect non-aqueous cleaning agents contaminated by dirt on the object to be cleaned by distillation and reuse it, the amount of cleaning agent used can be reduced and more efficient optical component cleaning is possible. It can be performed.
本発明が対象とする被洗浄物である光学部品としては、本発明に係る非水系洗浄剤により洗浄可能な素材で構成される光学部品を特に制限なく用いることができるが、たとえば、ピッチやワックスなどをバインダーとして研磨されたものなど、ピッチ、ワックス、保護膜、接着剤などの油性汚れと、研磨剤、研磨屑、チリ、埃などの粒子汚れが複合して付着した光学部品が挙げられる。このうち特に、ピッチあるいはワックスをバインダーとして用いて研磨した、ガラス製あるいは硬質プラスチック製の光学レンズ、プリズムなど、光学部品表面に油性汚れと無機微粒子汚れとが付着した光学部品が、効果的に洗浄を行える被洗浄物として挙げられる。 As an optical component that is an object to be cleaned, an optical component made of a material that can be cleaned with the non-aqueous cleaning agent according to the present invention can be used without particular limitation. For example, an optical component in which oily dirt such as pitch, wax, protective film, and adhesive and particle dirt such as abrasive, dust, dust, and dust are combined and adhered, such as those polished with a binder as a binder. Of these, optical parts with oily dirt and inorganic particulate dirt on the surface of optical parts, such as glass or hard plastic optical lenses and prisms polished with pitch or wax as a binder, are effectively cleaned. As an object to be cleaned.
以下、本発明について具体的に説明する。
洗浄方法
本発明の光学部品の洗浄方法は、光学部品を、界面活性剤を実質的に含まない非水系洗浄剤Ａに少なくとも１回浸漬して洗浄する洗浄工程（ａ）と、洗浄工程（ａ）により洗浄された光学部品を、界面活性剤を含む非水系洗浄剤Ｂに少なくとも１回浸漬して洗浄する洗浄工程（ｂ）と、洗浄工程（ｂ）により洗浄された光学部品を、さらに界面活性剤を実質的に含まない非水系洗浄剤Ａ’に少なくとも１回浸漬して洗浄する洗浄工程（ｃ）とを有する。
Hereinafter, the present invention will be specifically described.
Cleaning Method The optical component cleaning method of the present invention includes a cleaning step (a) in which the optical component is cleaned by immersing it in a non-aqueous cleaning agent A substantially free from a surfactant, and a cleaning step (a The cleaning step (b) in which the optical component cleaned in step (b) is immersed in a non-aqueous cleaning agent B containing a surfactant at least once for cleaning, and the optical component cleaned in the cleaning step (b) is further interfaced. And a cleaning step (c) of cleaning by immersing at least once in a non-aqueous cleaning agent A ′ substantially free of an active agent.
洗浄工程（ａ）で用いる非水系洗浄剤Ａは、界面活性剤を実質的に含まない炭化水素系の洗浄剤であり、ピッチ、ワックス、保護膜などの油性汚れを溶解し得る炭化水素類を主成分とし、実質的に界面活性剤を含まない洗浄剤が用いられる。このような非水系洗浄剤Ａとしては、好ましくは炭素数９〜１８の芳香族炭化水素、より好ましくは炭素数９〜１２の芳香族炭化水素であり、５０重量％以上、より好ましくは６０重量％以上含有する洗浄剤が挙げられる。非水系洗浄剤Ａを構成する炭化水素類は、揮発性が高すぎると洗浄の際の危険性が増大するため、沸点範囲が１５０〜３５０℃、特には１６０〜３００℃であることが好ましい。 The non-aqueous cleaning agent A used in the cleaning step (a) is a hydrocarbon-based cleaning agent substantially free of a surfactant, and includes hydrocarbons that can dissolve oily dirt such as pitch, wax, and protective film. A cleaning agent which is a main component and does not substantially contain a surfactant is used. Such a non-aqueous cleaning agent A is preferably an aromatic hydrocarbon having 9 to 18 carbon atoms, more preferably an aromatic hydrocarbon having 9 to 12 carbon atoms, and is preferably 50% by weight or more, more preferably 60% by weight. % Or more of the cleaning agent. The hydrocarbons constituting the non-aqueous cleaning agent A have a boiling range of 150 to 350 ° C., particularly 160 to 300 ° C., because if the volatility is too high, the danger of cleaning increases.
また、非水系洗浄剤Ａは水分が０．１重量％以下、好ましくは０．０３重量％以下であることが好ましい。水分が０．１重量％を超えると、油性汚れの溶解力が低下する可能性があるため好ましくない。 The non-aqueous cleaning agent A has a water content of 0.1% by weight or less, preferably 0.03% by weight or less. If the water content exceeds 0.1% by weight, the dissolving power of the oily soil may be lowered, which is not preferable.
本発明に係る非水系洗浄剤Ａ、及び後述する非水系洗浄剤Ｂ並びにＡ’は、必要に応じて、本発明の目的を損なわない範囲で、例えば脂肪族炭化水素などの、上述した以外の成分を含有してもよい。 The non-aqueous cleaning agent A according to the present invention, and the non-aqueous cleaning agent B and A ′, which will be described later, are within the range not impairing the object of the present invention, if necessary, such as aliphatic hydrocarbons other than those described above. You may contain a component.
洗浄工程（ａ）は、被洗浄物である光学部品を最初に洗浄する工程であって、界面活性剤を実質的に含まない非水系洗浄剤Ａが充填された洗浄槽（１）で光学部品を洗浄する。非水系洗浄剤Ａが充填された洗浄槽（１）は複数設置して構わない。洗浄工程（ａ）においては、被洗浄物である光学部品に付着している主に、ピッチ、ワックス、保護膜などの油性汚れの除去を行う。洗浄槽（１）内において、光学部品上の油性汚れの少なくとも一部は、非水系洗浄剤Ａに移行する。 The cleaning step (a) is a step of cleaning the optical component that is the object to be cleaned first, and is performed in the cleaning tank (1) filled with the non-aqueous cleaning agent A substantially not containing the surfactant. Wash. A plurality of cleaning tanks (1) filled with the non-aqueous cleaning agent A may be installed. In the cleaning step (a), mainly oily dirt such as pitch, wax, protective film, etc. adhering to the optical component that is the object to be cleaned is removed. In the cleaning tank (1), at least a part of the oily dirt on the optical component is transferred to the non-aqueous cleaning agent A.
洗浄工程（ａ）に続く洗浄工程（ｂ）は、非水系洗浄剤Ｂが充填された洗浄槽（２）を有し、光学部品上に付着した粒子汚れ及び洗浄槽（１）での洗浄で残存した油性汚れを効果的に除去する。 The cleaning step (b) subsequent to the cleaning step (a) has a cleaning tank (2) filled with the non-aqueous cleaning agent B, and is a particle dirt adhering to the optical component and cleaning in the cleaning tank (1). Effectively remove remaining oily soil.
非水系洗浄剤Ｂは、界面活性剤と炭化水素類とを含有する。好ましくは、非水系洗浄剤Ｂは、界面活性剤含有量が１〜３０重量％、より好ましくは２〜２０重量％の非水系溶剤であることが望ましい。界面活性剤が１重量％未満であると洗浄性が低下し無機微粒子の除去が行えなくなるおそれがあり、３０重量％を超えても洗浄性が格段に向上することはない。 The non-aqueous cleaning agent B contains a surfactant and hydrocarbons. Preferably, the non-aqueous detergent B is a non-aqueous solvent having a surfactant content of 1 to 30% by weight, more preferably 2 to 20% by weight. If the surfactant is less than 1% by weight, the cleaning properties may be reduced and the inorganic fine particles may not be removed. Even if the amount exceeds 30% by weight, the cleaning properties will not be significantly improved.
非水系洗浄剤Ｂを構成する界面活性剤は、アニオン性界面活性剤と非イオン性界面活性剤とを含むことが好ましく、より好ましくは界面活性剤中のアニオン性界面活性剤が５〜
８３重量％、非イオン性界面活性剤が１７〜９５重量％、さらに好ましくは界面活性剤中のアニオン性界面活性剤が１７〜７５重量％、非イオン性界面活性剤が２５〜８３重量％であることが望ましい。非水系洗浄剤Ｂが、このような量比でアニオン性界面活性剤と非イオン性界面活性剤とを含む界面活性剤を含有することにより、光学部品上に残存する研磨剤、研磨屑、チリ、埃などの複数種の粒子が混在した粒子汚れを効率的に除去することができる。
The surfactant constituting the non-aqueous detergent B preferably contains an anionic surfactant and a nonionic surfactant, more preferably 5 to 5 anionic surfactants in the surfactant.
83 wt%, nonionic surfactant is 17 to 95 wt%, more preferably anionic surfactant in surfactant is 17 to 75 wt%, nonionic surfactant is 25 to 83 wt% It is desirable to be. When the non-aqueous cleaning agent B contains a surfactant containing an anionic surfactant and a nonionic surfactant in such a quantitative ratio, the abrasive, polishing dust, and dust remaining on the optical component In addition, it is possible to efficiently remove particle contamination in which plural kinds of particles such as dust are mixed.
非水系洗浄剤Ｂを構成する炭化水素類としては、非水系洗浄剤Ａと同様の炭化水素類が挙げられる。すなわち、非水系洗浄剤Ｂ中の炭化水素類が、好ましくは炭素数９〜１８の芳香族炭化水素、より好ましくは炭素数９〜１２の芳香族炭化水素であり、５０重量％以上、より好ましくは６０重量％以上含有することが望ましく、沸点範囲が１５０〜３５０℃、特には１６０〜３００℃であることが望ましい。本発明では、非水系洗浄剤Ｂを構成する炭化水素類が、洗浄槽（１）における非水系洗浄剤Ａと同組成であることが特に好ましい。 Examples of the hydrocarbons constituting the non-aqueous cleaning agent B include the same hydrocarbons as the non-aqueous cleaning agent A. That is, the hydrocarbons in the non-aqueous cleaning agent B are preferably aromatic hydrocarbons having 9 to 18 carbon atoms, more preferably aromatic hydrocarbons having 9 to 12 carbon atoms, and more preferably 50% by weight or more. Is preferably contained in an amount of 60% by weight or more, and the boiling range is preferably 150 to 350 ° C, particularly 160 to 300 ° C. In the present invention, it is particularly preferable that the hydrocarbons constituting the non-aqueous cleaning agent B have the same composition as the non-aqueous cleaning agent A in the cleaning tank (1).
このような組成を有する非水系洗浄剤Ｂを用いることにより、光学部品上に付着した粒子汚れ及び洗浄槽（１）での洗浄で残存した油性汚れを効果的に除去することができる。
非水系洗浄剤Ｂは、あらかじめ調製して洗浄槽（２）に導入されてもよく、また、各成分をそれぞれ導入して、洗浄槽（２）中で所望組成の非水系洗浄剤Ｂとなるよう調製してもよい。非水系洗浄剤Ｂを洗浄槽（２）中で調製する場合、あるいは別途非水系洗浄剤Ｂを調製する場合においては、たとえば、非水系洗浄剤Ｂ中における所望濃度の２〜２０倍の濃度である界面活性剤の濃縮液を、界面活性剤を含まない炭化水素類に添加する形で供給することができる。
By using the non-aqueous cleaning agent B having such a composition, it is possible to effectively remove the particulate dirt adhering to the optical component and the oily dirt remaining after the washing in the washing tank (1).
The non-aqueous cleaning agent B may be prepared in advance and introduced into the cleaning tank (2), or each component may be introduced to become the non-aqueous cleaning agent B having a desired composition in the cleaning tank (2). It may be prepared as follows. When the non-aqueous cleaning agent B is prepared in the cleaning tank (2) or when the non-aqueous cleaning agent B is separately prepared, for example, at a
また、非水系洗浄剤Ｂは水分が０．０５重量％以上、好ましくは０．１重量％以上、かつ、１０．０重量％以下、好ましくは５．０重量％以下であることが望ましい。水分が０．０５重量％より少ないと無機微粒子の除去効率が悪くなり、１０．０重量％を超えると、潜傷、白焼け、青焼けなどの問題が生じる可能性がある。 The non-aqueous cleaning agent B has a water content of 0.05% by weight or more, preferably 0.1% by weight or more and 10.0% by weight or less, preferably 5.0% by weight or less. If the water content is less than 0.05% by weight, the removal efficiency of the inorganic fine particles is deteriorated, and if it exceeds 10.0% by weight, problems such as latent scratches, white burns, and blue burns may occur.
洗浄槽（２）での洗浄を終えた光学部品は、通常、洗浄前に付着していた油性汚れ及び粒子汚れがほぼ除去された状態となる。しかしながら、洗浄槽（２）での洗浄を終えたままの光学部品の表面には、非水系洗浄剤Ｂが付着しているため、そのまま乾燥させると、洗浄後の光学部品表面に非水系洗浄剤Ｂに含有されている界面活性剤が残存する場合がある。このため本発明では、洗浄工程（ｂ）に続き、洗浄工程（ｃ）において洗浄する。洗浄工程（ｃ）は、非水系洗浄剤Ａ’が充填された洗浄槽（３）を有し、洗浄槽（２）にて洗浄した光学部品をさらに洗浄する工程であって、主に、洗浄槽（２）における洗浄により光学部品上に付着した界面活性剤成分を充分に除去する。 The optical parts that have been cleaned in the cleaning tank (2) are usually in a state in which oily stains and particle stains adhering before washing are almost removed. However, since the non-aqueous cleaning agent B adheres to the surface of the optical component that has been cleaned in the cleaning tank (2), when it is dried as it is, the non-aqueous cleaning agent is applied to the cleaned optical component surface. The surfactant contained in B may remain. For this reason, in this invention, it wash | cleans in a washing process (c) following a washing process (b). The cleaning step (c) has a cleaning tank (3) filled with the non-aqueous cleaning agent A ′, and further cleans the optical components cleaned in the cleaning tank (2). The surfactant component adhering to the optical component is sufficiently removed by washing in the tank (2).
洗浄槽（３）では、洗浄槽（１）及び（２）での洗浄を終えた光学部品を、さらに非水系洗浄剤Ａ’により洗浄する。非水系洗浄剤Ａ’としては、上述した洗浄工程（ａ）で用いた非水系洗浄剤Ａと同様のものを用いることができる。洗浄槽（３）で用いる非水系洗浄剤Ａ’は、洗浄槽（１）で用いる非水系洗浄剤Ａと同じ組成であっても、異なる組成であってもよいが、洗浄槽（１）で用いる非水系洗浄剤Ａと同じ組成であることが好ましい。 In the cleaning tank (3), the optical components that have been cleaned in the cleaning tanks (1) and (2) are further cleaned with a non-aqueous cleaning agent A '. As the non-aqueous cleaning agent A ', the same non-aqueous cleaning agent A used in the above-described cleaning step (a) can be used. The non-aqueous cleaning agent A ′ used in the cleaning tank (3) may be the same composition as the non-aqueous cleaning agent A used in the cleaning tank (1) or may have a different composition, but in the cleaning tank (1) It is preferable that it is the same composition as the non-aqueous cleaning agent A to be used.
また、非水系洗浄剤Ａ’は水分が０．１重量％以下、好ましくは０．０３重量％以下であることが好ましい。水分が０．１重量％を超えると、シミなどの問題を生じる可能性がある。 The non-aqueous cleaning agent A ′ has a water content of 0.1% by weight or less, preferably 0.03% by weight or less. If the water content exceeds 0.1% by weight, problems such as spots may occur.
洗浄工程（ａ）、（ｂ）及び（ｃ）では、それぞれ、各工程で用いる洗浄剤に、被洗浄
物である光学部品を１回以上浸漬する。一つの洗浄工程において、浸漬を２回以上行う場合には、同一の非水系洗浄剤に複数回浸漬してもよいが、洗浄剤組成が同じであって、汚れがないか、又は汚れの程度が順次低くなる非水系洗浄剤に、順次浸漬するのが望ましい。
In the cleaning steps (a), (b), and (c), the optical component that is the object to be cleaned is immersed once or more in the cleaning agent used in each step. In the case where immersion is performed twice or more in one cleaning step, it may be immersed multiple times in the same non-aqueous cleaning agent, but the cleaning composition is the same and there is no contamination or the degree of contamination. It is desirable to immerse sequentially in a non-aqueous cleaning agent that gradually decreases.
各洗浄工程において、浸漬による洗浄時には、洗浄効果を高める目的で、超音波を照射することが好ましく、また、揺動を加えることも好ましい。
このような本発明の光学部品の洗浄方法は、好適には、後述する本発明の光学部品の洗浄装置を用いて行うことができる。
In each cleaning step, at the time of cleaning by immersion, it is preferable to irradiate ultrasonic waves for the purpose of enhancing the cleaning effect, and it is also preferable to add rocking.
Such an optical component cleaning method of the present invention can be preferably performed using an optical component cleaning apparatus of the present invention described later.
また、近年の環境への影響を考えると、環境負荷の低減という観点から、洗浄剤をリサイクルして再利用することが望まれる。
洗浄工程（ａ）及び／又は洗浄工程（ｃ）に使用される非水系洗浄剤（汚染された非水系洗浄剤ＡあるいはＡ’）の少なくとも一部を抜き出して、洗浄槽外に設けた蒸留手段に導入して蒸留し、汚染がないかあるいは少ない留出液を得て、これを洗浄槽（１）及び／又は洗浄槽（３）に再導入して用いることができる。また、この留出液は、洗浄槽（２）で用いる非水系洗浄剤Ｂの原料としても用いることができる。このように汚染された非水系洗浄剤Ａ及び／又はＡ’を蒸留によりリサイクル使用すると、用いる非水系洗浄剤の総量を減少させることができるため好適である。
Considering the recent environmental impact, it is desirable to recycle and reuse the cleaning agent from the viewpoint of reducing the environmental load.
Distillation means provided outside the washing tank by extracting at least a part of the non-aqueous detergent (contaminated non-aqueous detergent A or A ′) used in the washing step (a) and / or the washing step (c). And distilled to obtain a distillate having no or little contamination, which can be reintroduced into the washing tank (1) and / or the washing tank (3). The distillate can also be used as a raw material for the non-aqueous cleaning agent B used in the cleaning tank (2). When the contaminated non-aqueous cleaning agent A and / or A ′ is recycled by distillation, it is preferable because the total amount of the non-aqueous cleaning agent to be used can be reduced.
洗浄工程（ａ）及び／又は洗浄工程（ｃ）からの抜き出し液の少なくとも一部を蒸留する手段は、単独であっても複数であってもよいが、洗浄槽（１）で用いる非水系洗浄剤Ａと、洗浄槽（３）で用いる非水系洗浄剤Ａ’の組成が同様である場合には、単独で双方を処理することができるため好ましい。 The means for distilling at least a part of the extracted liquid from the washing step (a) and / or the washing step (c) may be single or plural, but the non-aqueous washing used in the washing tank (1) In the case where the composition of the agent A and the non-aqueous detergent A ′ used in the washing tank (3) are the same, it is preferable because both can be treated independently.
非水系洗浄剤Ａ及び／又はＡ’の蒸留手段では、汚れ成分を含んだ非水系洗浄剤を
蒸留によりほぼ炭化水素類のみとして得られる留出液と、汚れ成分と炭化水素分とを含む残留成分とに分離する。留出液は、炭化水素類の純度が９９％以上となることが好ましい。この純度は、導電率測定、吸光度測定、屈折率測定、比重測定、粘度測定、不揮発分定量、ガスクロマトグラム分析等の一般的な方法で行うことができる。得られた留出液は、回収して非水系洗浄剤Ａ又はＡ’として、あるいは非水系洗浄剤Ｂの原料として用いることができる。蒸留手段における残留成分には、汚れ成分が濃縮されるため、系外へ搬出し、適宜産業廃棄物等として処理する。
In the distillation means of the non-aqueous cleaning agent A and / or A ′, a distillate obtained by distilling the non-aqueous cleaning agent containing the soil component as almost only hydrocarbons, and a residue containing the soil component and the hydrocarbon content Separated into components. The distillate preferably has a hydrocarbon purity of 99% or higher. This purity can be performed by a general method such as conductivity measurement, absorbance measurement, refractive index measurement, specific gravity measurement, viscosity measurement, non-volatile content determination, gas chromatogram analysis and the like. The obtained distillate can be recovered and used as non-aqueous detergent A or A ′ or as a raw material for non-aqueous detergent B. Since the residual components in the distillation means are contaminated with dirt components, they are transported out of the system and appropriately treated as industrial waste.
本発明の光学部品の洗浄方法では、洗浄槽（２）において非水系洗浄剤Ｂが用いられ、その後段に設けられた洗浄槽（３）において非水系洗浄剤Ａ’が用いられるが、洗浄時における非水系洗浄剤Ａ’の汚染程度は、非水系洗浄剤Ｂよりも低く保たれる。本発明で用いる非水系洗浄剤Ｂは界面活性剤を含むが、非水系洗浄剤Ａ’は被洗浄物に同伴された微量の界面活性剤が混入する場合などを除き、界面活性剤を実質的に含まない。そして通常、本発明で用いる非水系洗浄剤Ｂは、界面活性剤以外の組成を非水系洗浄剤Ａ及び／又はＡ’と同様とすることができる。このため、非水系洗浄剤Ａ’の少なくとも一部を、非水系洗浄剤Ｂの原料として用いることが可能であり、本発明の洗浄装置は、洗浄槽（３）中の非水系洗浄剤Ａ’の少なくとも一部を、洗浄槽（２）に導入する機構を有する構成とすることができる。非水系洗浄剤Ａ’の少なくとも一部を洗浄槽（２）に導入する機構は、特に限定されるものではなくどのようなものであってもよいが、洗浄槽（３）からオーバーフローにより抜き出した非水系洗浄剤Ａ’を、界面活性剤などの追加成分とともに非水系洗浄剤Ｂの原料として用い、混合槽などで非水系洗浄剤Ｂを調製して洗浄槽（２）に導入する手段が挙げられる。 In the optical component cleaning method of the present invention, the non-aqueous cleaning agent B is used in the cleaning tank (2), and the non-aqueous cleaning agent A ′ is used in the cleaning tank (3) provided in the subsequent stage. The contamination level of the non-aqueous cleaning agent A ′ is kept lower than that of the non-aqueous cleaning agent B. The non-aqueous cleaning agent B used in the present invention contains a surfactant, but the non-aqueous cleaning agent A ′ substantially contains the surfactant except when a small amount of the surfactant accompanying the object to be cleaned is mixed. Not included. In general, the non-aqueous cleaning agent B used in the present invention can have the same composition as the non-aqueous cleaning agent A and / or A ′ except for the surfactant. For this reason, it is possible to use at least a part of the non-aqueous cleaning agent A ′ as a raw material of the non-aqueous cleaning agent B, and the cleaning device of the present invention uses the non-aqueous cleaning agent A ′ in the cleaning tank (3). It can be set as the structure which has a mechanism which introduce | transduces at least one part into a washing tank (2). The mechanism for introducing at least a part of the non-aqueous cleaning agent A ′ into the cleaning tank (2) is not particularly limited and may be any type, but is extracted from the cleaning tank (3) by overflow. Non-aqueous cleaning agent A ′ is used as a raw material for non-aqueous cleaning agent B together with additional components such as a surfactant, and non-aqueous cleaning agent B is prepared in a mixing tank and introduced into the cleaning tank (2). It is done.
また、洗浄槽（３）内の非水系洗浄剤Ａ’は、洗浄槽（１）内の非水系洗浄剤Ａよりも
汚染程度が低いため、非水系洗浄剤Ａと非水系洗浄剤Ａ’の組成が同等である場合には、洗浄槽（３）内の非水系洗浄剤Ａ’の一部をオーバーフローなどにより抜き出し、非水系洗浄剤Ａの一部として洗浄槽（１）に導入して用いることもできる。
Further, since the non-aqueous cleaning agent A ′ in the cleaning tank (3) is less contaminated than the non-aqueous cleaning agent A in the cleaning tank (1), the non-aqueous cleaning agent A and the non-aqueous cleaning agent A ′. When the compositions are equivalent, a part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) is extracted by overflow or the like and introduced into the cleaning tank (1) as a part of the non-aqueous cleaning agent A for use. You can also.
本発明では、各洗浄工程において、被洗浄物である光学部品を非水系洗浄剤に浸漬するため、光学部品上の汚れは、浸漬した非水系洗浄剤側に移行する。このため、各工程で用いる非水系洗浄剤の汚れの程度を一定範囲以内に制御することが好ましい。 In the present invention, in each cleaning step, since the optical component that is the object to be cleaned is immersed in the non-aqueous cleaning agent, the stain on the optical component is transferred to the immersed non-aqueous cleaning agent side. For this reason, it is preferable to control the degree of contamination of the non-aqueous cleaning agent used in each step within a certain range.
各工程における非水系洗浄剤の汚染程度の管理は、どのような方法で行ってもよく、たとえば、導電率測定、吸光度測定、屈折率測定、比重測定、粘度測定、不揮発分定量、ガスクロマトグラム分析等の手段を適宜採用することができる。 Management of the degree of contamination of the non-aqueous detergent in each step may be performed by any method, for example, conductivity measurement, absorbance measurement, refractive index measurement, specific gravity measurement, viscosity measurement, nonvolatile content determination, gas chromatogram analysis. Such means can be employed as appropriate.
非水系洗浄剤の汚染程度は、汚染された非水系洗浄剤の一部を抜き出して排出し、汚染されていないか又は汚染の程度の少ない非水系洗浄剤を添加することで制御してもよく、汚染された非水系洗浄剤を濾過、吸着などの浄化処理手段で処理しながら用いることで制御してもよく、これらを組み合わせて制御してもよい。 The degree of contamination of the non-aqueous cleaning agent may be controlled by extracting and discharging a part of the contaminated non-aqueous cleaning agent, and adding a non-aqueous cleaning agent that is not contaminated or less contaminated. The control may be performed by using the contaminated non-aqueous cleaning agent while being processed by a purification processing means such as filtration and adsorption, or may be controlled in combination.
各洗浄槽が複数の槽から構成されている場合には、その後段の槽から前段の槽へ、非水系洗浄剤の一部を導入する手段を有することが好ましく、後段の槽から前段の槽へ、非水系洗浄剤の一部をオーバーフローさせて導入する機構を有することがより好ましい。 When each cleaning tank is composed of a plurality of tanks, it is preferable to have a means for introducing a part of the non-aqueous cleaning agent from the subsequent tank to the previous tank. It is more preferable to have a mechanism for introducing a part of the non-aqueous detergent by overflowing.
たとえば、洗浄槽（１）が２つ以上の洗浄槽からなる場合、洗浄槽（１）内の前段にある洗浄槽から、汚染された非水系洗浄剤Ａの一部を排出液として排出するとともに、洗浄槽（１）内の後段にある洗浄槽内の非水系洗浄剤Ａの一部をオーバーフローさせて、前段にある洗浄槽内に導入し、後段の洗浄槽内には汚染のない新たな非水系洗浄剤Ａを追加導入する態様が好ましく挙げられる。このような態様が好ましいことは、洗浄槽（２）あるいは洗浄槽（３）が２つ以上の洗浄槽を有する場合にも同様である。 For example, when the cleaning tank (1) is composed of two or more cleaning tanks, a part of the contaminated non-aqueous cleaning agent A is discharged from the cleaning tank in the preceding stage in the cleaning tank (1) as a drainage liquid. In the cleaning tank (1), a part of the non-aqueous cleaning agent A in the subsequent cleaning tank is overflowed and introduced into the cleaning tank in the previous stage, and the rear cleaning tank is newly contaminated. An embodiment in which non-aqueous detergent A is additionally introduced is preferred. Such a mode is preferable when the cleaning tank (2) or the cleaning tank (3) has two or more cleaning tanks.
本発明の光学部品の洗浄方法では、洗浄工程（ａ）において、光学部品上に付着した汚れのうち主に油性の汚れを除去することができ、洗浄工程（ｂ）において、残存する粒子状の汚れと洗浄工程（ａ）で除去しきれなかった油性の汚れとを除去することができ、さらに洗浄工程（ｃ）において、洗浄工程（ｂ）で付着した界面活性剤を光学部品表面から除去することができる。 In the cleaning method for an optical component of the present invention, oil-based stains can be removed from the stains adhering to the optical component in the cleaning step (a), and the remaining particulate matter can be removed in the cleaning step (b). It is possible to remove the dirt and the oily dirt that could not be removed in the cleaning step (a). Further, in the cleaning step (c), the surfactant adhered in the cleaning step (b) is removed from the surface of the optical component. be able to.
このような洗浄方法では、油性汚れと粒子状汚れとの複合汚れを有するような光学部品から、水系洗浄剤に浸漬することなく複合汚れを高度に除去でき、しかも界面活性剤の残存などの問題もないので、潜傷、白焼け、青焼けなどの問題を生じることなく、高度な光学特性を求められる用途の光学部品をも好適に洗浄することができる。 With such a cleaning method, it is possible to highly remove composite dirt from an optical component having a composite dirt of oily dirt and particulate dirt without being immersed in an aqueous cleaning agent, and there are problems such as remaining surfactant. Therefore, it is possible to suitably clean optical components for applications requiring high optical characteristics without causing problems such as latent scratches, white burns, and blue burns.
洗浄装置
本発明の光学部品の洗浄装置は、非水系洗浄剤Ａにより光学部品を洗浄する１以上の洗浄槽（１）と、非水系洗浄剤Ｂにより光学部品を洗浄する１以上の洗浄槽（２）と、非水系洗浄剤Ａ’により光学部品を洗浄する１以上の洗浄槽（３）とを有し、洗浄槽（３）中の非水系洗浄剤Ａ’の少なくとも一部が、洗浄槽（１）及び／又は洗浄槽（２）に導入される機構を有する。
Cleaning Device An optical component cleaning device according to the present invention includes one or more cleaning tanks (1) for cleaning optical components with a non-aqueous cleaning agent A and one or more cleaning tanks for cleaning optical components with a non-aqueous cleaning agent B ( 2) and one or more cleaning tanks (3) for cleaning optical components with the non-aqueous cleaning agent A ′, and at least a part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) is a cleaning tank. (1) and / or a mechanism introduced into the cleaning tank (2).
本発明に係る洗浄槽（１）、（２）、（３）は、それぞれ、被洗浄物である光学部品を非水系洗浄剤Ａ、非水系洗浄剤Ｂあるいは非水系洗浄剤Ａ’により洗浄する洗浄槽である。これらの各洗浄槽は、光学部品を各非水系洗浄剤で洗浄する手段としての機能を有していればよく、光学部品を非水系洗浄剤に浸漬して洗浄するもの、光学部品に非水系洗浄剤を吹き付けて洗浄するもの等のいずれの形態であってもよいが、光学部品を非水系洗浄剤に浸漬して洗浄する手段であることが好ましい。 In the cleaning tanks (1), (2), and (3) according to the present invention, the optical parts that are the objects to be cleaned are cleaned with the non-aqueous cleaning agent A, the non-aqueous cleaning agent B, or the non-aqueous cleaning agent A ′, respectively. It is a washing tank. Each of these cleaning tanks only needs to have a function as a means for cleaning the optical components with each non-aqueous cleaning agent. The optical components are cleaned by immersing them in the non-aqueous cleaning agent. Although it may be any form such as cleaning by spraying a cleaning agent, it is preferably a means for immersing and cleaning an optical component in a non-aqueous cleaning agent.
本発明の洗浄装置では、洗浄槽（２）は洗浄槽（１）の後段に、洗浄槽（３）は洗浄槽（２）の後段にそれぞれ設けられる。洗浄槽（１）、（２）、（３）はそれぞれ、１槽から構成されていてもよく、複数の槽から構成されていてもよい。洗浄槽（１）、（２）あるいは（３）が複数の槽を有する場合、前段の槽で洗浄された光学部品は、順次後段の槽で洗浄される。 In the cleaning apparatus of the present invention, the cleaning tank (2) is provided in the subsequent stage of the cleaning tank (1), and the cleaning tank (3) is provided in the subsequent stage of the cleaning tank (2). Each of the cleaning tanks (1), (2), and (3) may be composed of one tank or a plurality of tanks. When the cleaning tank (1), (2) or (3) has a plurality of tanks, the optical components cleaned in the preceding tank are sequentially cleaned in the subsequent tank.
各槽における洗浄で、被洗浄物を汚染していた汚れは、槽内の非水系洗浄剤に移行していくが、非水系洗浄剤の汚染の度合は、前段で高く後段で低いものとなる。
本発明の洗浄装置は、洗浄槽（１）、（２）、（３）のそれぞれにおいて、洗浄槽内の非水系洗浄剤の汚染程度を所定のレベル以内に管理することが望ましく、汚染程度を監視する手段を有することが好ましい。汚染程度を監視する手段としては、前述した公知の方法を制限なく用いることができ、たとえば、導電率測定、吸光度測定、屈折率測定、比重測定、粘度測定、不揮発分定量、ガスクロマトグラム分析等の手段が挙げられる。
The dirt that has contaminated the object to be cleaned in each tank is transferred to the non-aqueous cleaning agent in the tank, but the degree of contamination of the non-aqueous cleaning agent is high in the previous stage and low in the subsequent stage. .
In the cleaning apparatus of the present invention, in each of the cleaning tanks (1), (2), and (3), it is desirable to manage the contamination level of the non-aqueous cleaning agent in the cleaning tank within a predetermined level. It is preferable to have a means for monitoring. As a means for monitoring the degree of contamination, the above-mentioned known methods can be used without limitation. For example, conductivity measurement, absorbance measurement, refractive index measurement, specific gravity measurement, viscosity measurement, nonvolatile content determination, gas chromatogram analysis, etc. Means are mentioned.
非水系洗浄剤の汚染程度は、汚染された非水系洗浄剤の一部を抜き出して排出し、汚染されていないか又は汚染の程度の少ない非水系洗浄剤を添加することで制御してもよく、汚染された非水系洗浄剤を濾過、吸着などの浄化処理手段で処理しながら用いることで制御してもよく、これらを組み合わせて制御してもよい。 The degree of contamination of the non-aqueous cleaning agent may be controlled by extracting and discharging a part of the contaminated non-aqueous cleaning agent, and adding a non-aqueous cleaning agent that is not contaminated or less contaminated. The control may be performed by using the contaminated non-aqueous cleaning agent while being processed by a purification processing means such as filtration and adsorption, or may be controlled in combination.
各洗浄槽が複数の槽から構成されている場合には、その後段の槽から前段の槽へ、非水系洗浄剤の一部を導入する手段を有することが好ましく、後段の槽から前段の槽へ、非水系洗浄剤の一部をオーバーフローさせて導入する機構を有することがより好ましい。 When each cleaning tank is composed of a plurality of tanks, it is preferable to have a means for introducing a part of the non-aqueous cleaning agent from the subsequent tank to the previous tank. It is more preferable to have a mechanism for introducing a part of the non-aqueous detergent by overflowing.
たとえば、洗浄槽（１）が２つ以上の洗浄槽からなる場合、洗浄槽（１）内の前段にある洗浄槽から、汚染された非水系洗浄剤Ａの一部を排出液として排出するとともに、洗浄槽（１）内の後段にある洗浄槽内の非水系洗浄剤Ａの一部をオーバーフローさせて、前段にある洗浄槽内に導入し、後段の洗浄槽内には汚染のない新たな非水系洗浄剤Ａを追加導入する態様が好ましく挙げられる。このような態様が好ましいことは、洗浄槽（２）あるいは洗浄槽（３）が２つ以上の洗浄槽を有する場合にも同様である。 For example, when the cleaning tank (1) is composed of two or more cleaning tanks, a part of the contaminated non-aqueous cleaning agent A is discharged from the cleaning tank in the preceding stage in the cleaning tank (1) as a drainage liquid. In the cleaning tank (1), a part of the non-aqueous cleaning agent A in the subsequent cleaning tank is overflowed and introduced into the cleaning tank in the previous stage, and the rear cleaning tank is newly contaminated. An embodiment in which non-aqueous detergent A is additionally introduced is preferred. Such a mode is preferable when the cleaning tank (2) or the cleaning tank (3) has two or more cleaning tanks.
ここで、洗浄槽（１）及び／又は洗浄槽（３）から排出された排出液（汚染された非水系洗浄剤ＡあるいはＡ’）は、洗浄槽外に設けた蒸留手段に導入して蒸留し、汚染がないかあるいは少ない留出液を得て、これを洗浄槽（１）及び／又は洗浄槽（３）に再導入して用いることができる。また、この留出液は、洗浄槽（２）で用いる非水系洗浄剤Ｂの原料としても用いることができる。このように汚染された非水系洗浄剤Ａ及び／又はＡ’を蒸留によりリサイクル使用すると、用いる非水系洗浄剤の総量を減少させることができるため好適である。このため本発明の洗浄装置は、（Ａ）洗浄槽（１）及び／又は洗浄槽（３）から排出される排出液の少なくとも一部を蒸留する手段と、蒸留で得られた留出液を洗浄槽（１）及び／又は（３）に導入する手段とを有することが好ましい。排出液の少なくとも一部を蒸留する手段は、単独であっても複数であってもよいが、洗浄槽（１）で用いる非水系洗浄剤Ａと、洗浄槽（３）で用いる非水系洗浄剤Ａ’の組成が同様である場合には、単独で双方を処理することができるため好ましい。 Here, the discharged liquid (contaminated non-aqueous cleaning agent A or A ′) discharged from the cleaning tank (1) and / or the cleaning tank (3) is introduced into a distillation means provided outside the cleaning tank and distilled. Then, a distillate having no or little contamination can be obtained and used by reintroducing it into the washing tank (1) and / or the washing tank (3). The distillate can also be used as a raw material for the non-aqueous cleaning agent B used in the cleaning tank (2). It is preferable to recycle the contaminated non-aqueous cleaning agent A and / or A ′ by distillation because the total amount of the non-aqueous cleaning agent used can be reduced. For this reason, the cleaning apparatus of the present invention comprises (A) a means for distilling at least part of the discharged liquid discharged from the cleaning tank (1) and / or the cleaning tank (3), and a distillate obtained by distillation. It is preferable to have a means for introducing into the washing tank (1) and / or (3). The means for distilling at least a part of the discharged liquid may be single or plural, but the non-aqueous cleaning agent A used in the cleaning tank (1) and the non-aqueous cleaning agent used in the cleaning tank (3) When the composition of A ′ is the same, it is preferable because both can be processed independently.
非水系洗浄剤Ａ及び／又はＡ’の蒸留手段では、汚れ成分を含んだ非水系洗浄剤を蒸留によりほぼ炭化水素類のみとして得られる留出液と、汚れ成分と炭化水素分とを含む残留成分とに分離する。留出液は、炭化水素類の純度が９９％以上となることが好ましい。この純度は、導電率測定、吸光度測定、屈折率測定、比重測定、粘度測定、不揮発分定量、
ガスクロマトグラム分析等の一般的な方法で行うことができる。得られた留出液は、回収して非水系洗浄剤Ａ又はＡ’として、あるいは非水系洗浄剤Ｂの原料として用いることができる。蒸留手段における残留成分には、汚れ成分が濃縮されるため、系外へ搬出し、適宜産業廃棄物等として処理する。
In the distillation means of the non-aqueous cleaning agent A and / or A ′, a distillate obtained by distilling the non-aqueous cleaning agent containing the soil component as almost only hydrocarbons, and a residue containing the soil component and the hydrocarbon content Separated into components. The distillate preferably has a hydrocarbon purity of 99% or higher. This purity is conductivity measurement, absorbance measurement, refractive index measurement, specific gravity measurement, viscosity measurement, nonvolatile content determination,
It can be performed by a general method such as gas chromatogram analysis. The obtained distillate can be recovered and used as non-aqueous detergent A or A ′ or as a raw material for non-aqueous detergent B. Since the residual components in the distillation means are contaminated with dirt components, they are transported out of the system and appropriately treated as industrial waste.
本発明の光学部品の製造装置では、洗浄槽（２）において非水系洗浄剤Ｂが用いられ、その後段に設けられた洗浄槽（３）において非水系洗浄剤Ａ’が用いられるが、洗浄時における非水系洗浄剤Ａ’の汚染程度は、非水系洗浄剤Ｂよりも低く保たれる。本発明で用いる非水系洗浄剤Ｂは界面活性剤を含むが、非水系洗浄剤Ａ’は被洗浄物に同伴された微量の界面活性剤が混入する場合などを除き、界面活性剤を実質的に含まない。そして通常、本発明で用いる非水系洗浄剤Ｂは、界面活性剤以外の組成を非水系洗浄剤Ａ及び／又はＡ’と同様とすることができる。このため、非水系洗浄剤Ａ’の少なくとも一部を、非水系洗浄剤Ｂの原料として用いることが可能であり、本発明の洗浄装置は、洗浄槽（３）中の非水系洗浄剤Ａ’の少なくとも一部を、洗浄槽（２）に導入する手段を有する構成とすることができる。非水系洗浄剤Ａ’の少なくとも一部を洗浄槽（２）に導入する機構は、特に限定されるものではなくどのようなものであってもよいが、洗浄槽（３）からオーバーフローにより抜き出した非水系洗浄剤Ａ’を、界面活性剤などの追加成分とともに非水系洗浄剤Ｂの原料として用い、混合槽などで非水系洗浄剤Ｂを調製して洗浄槽（２）に導入する手段が挙げられる。 In the optical component manufacturing apparatus of the present invention, the non-aqueous cleaning agent B is used in the cleaning tank (2), and the non-aqueous cleaning agent A ′ is used in the cleaning tank (3) provided in the subsequent stage. The contamination level of the non-aqueous cleaning agent A ′ is kept lower than that of the non-aqueous cleaning agent B. The non-aqueous cleaning agent B used in the present invention contains a surfactant, but the non-aqueous cleaning agent A ′ substantially contains the surfactant except when a small amount of the surfactant accompanying the object to be cleaned is mixed. Not included. In general, the non-aqueous cleaning agent B used in the present invention can have the same composition as the non-aqueous cleaning agent A and / or A ′ except for the surfactant. For this reason, it is possible to use at least a part of the non-aqueous cleaning agent A ′ as a raw material of the non-aqueous cleaning agent B, and the cleaning device of the present invention uses the non-aqueous cleaning agent A ′ in the cleaning tank (3). It can be set as the structure which has a means to introduce | transduce at least one part into a washing tank (2). The mechanism for introducing at least a part of the non-aqueous cleaning agent A ′ into the cleaning tank (2) is not particularly limited and may be any type, but is extracted from the cleaning tank (3) by overflow. Non-aqueous cleaning agent A ′ is used as a raw material for non-aqueous cleaning agent B together with additional components such as a surfactant, and non-aqueous cleaning agent B is prepared in a mixing tank and introduced into the cleaning tank (2). It is done.
また、洗浄槽（３）内の非水系洗浄剤Ａ’は、洗浄槽（１）内の非水系洗浄剤Ａよりも汚染程度が低いため、非水系洗浄剤Ａと非水系洗浄剤Ａ’の組成が同等である場合などには、洗浄槽（３）内の非水系洗浄剤Ａ’の一部をオーバーフローなどにより抜き出し、非水系洗浄剤Ａの一部として洗浄槽（１）に導入する手段を有する構成とすることもできる。 Further, since the non-aqueous cleaning agent A ′ in the cleaning tank (3) is less contaminated than the non-aqueous cleaning agent A in the cleaning tank (1), the non-aqueous cleaning agent A and the non-aqueous cleaning agent A ′. When the compositions are the same, a part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) is extracted by overflow or the like and introduced into the cleaning tank (1) as a part of the non-aqueous cleaning agent A. It can also be set as the structure which has these.
このように本発明の洗浄装置は、（Ｂ）洗浄槽（３）中の非水系洗浄剤Ａ’の少なくとも一部を、洗浄槽（１）及び／又は洗浄槽（２）に導入する手段を有することも好ましい。本発明の洗浄装置は、上述した手段（Ａ）および（Ｂ）のいずれか一方を有していることも好ましく、また、兼ね備えて有していることも好ましい。 As described above, the cleaning apparatus of the present invention (B) means for introducing at least a part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) into the cleaning tank (1) and / or the cleaning tank (2). It is also preferable to have it. The cleaning apparatus of the present invention preferably has any one of the above-described means (A) and (B), and preferably also has both.
本発明に係る洗浄槽（１）、（２）あるいは（３）は、少なくとも一部に、洗浄槽内に超音波照射を行えるよう、超音波振動子が備えていることが好ましい。洗浄槽の少なくとも一部が超音波振動子を備えている場合、超音波振動子はそれを具備する洗浄槽の底部に備えられていることが好ましく、それにより洗浄槽内に超音波を発振し、超音波照射下での洗浄を行うことができる。超音波照射下での洗浄は、光学部品上に付着した研磨剤、研磨屑、チリ、埃などの粒子状物の除去に効果的である。 The cleaning tank (1), (2) or (3) according to the present invention is preferably provided with an ultrasonic vibrator at least partially so that ultrasonic irradiation can be performed in the cleaning tank. When at least a part of the cleaning tank includes an ultrasonic vibrator, the ultrasonic vibrator is preferably provided at the bottom of the cleaning tank including the ultrasonic vibrator, thereby oscillating ultrasonic waves in the cleaning tank. In addition, cleaning can be performed under ultrasonic irradiation. Cleaning under ultrasonic irradiation is effective in removing particulate matters such as abrasives, polishing debris, dust, and dust adhering to the optical component.
また、本発明の洗浄装置は、洗浄性を向上させるために、洗浄槽（１）、（２）、（３）の少なくとも一部が、被洗浄物である光学部品を揺動する手段を備えていることも好ましく、洗浄剤を撹拌する手段を備えていることも好ましい。 In the cleaning apparatus of the present invention, in order to improve the cleaning performance, at least a part of the cleaning tanks (1), (2), (3) includes means for swinging the optical component that is the object to be cleaned. It is also preferable that a means for stirring the cleaning agent is provided.
非水系洗浄剤Ａは、界面活性剤を実質的に含まないため、洗浄槽（１）においては、光学部品上に付着した研磨剤、研磨屑、チリ、埃などの粒子汚れを完全に除去することは困難なため、洗浄槽（１）での洗浄を終えた光学部品は、後続する洗浄槽（２）において、界面活性剤を含む非水系洗浄剤Ｂによりさらに洗浄する。 Since the non-aqueous cleaning agent A does not substantially contain a surfactant, the cleaning tank (1) completely removes particle contamination such as abrasives, polishing debris, dust, and dust adhering to the optical component. Since this is difficult, the optical component that has been cleaned in the cleaning tank (1) is further cleaned with a non-aqueous cleaning agent B containing a surfactant in the subsequent cleaning tank (2).
光学部品は、洗浄槽（１）での洗浄の後、洗浄槽（２）へ導入して洗浄されるため、洗浄槽（１）内の汚れを含んだ非水系洗浄剤Ａの一部は、通常、光学部品に同伴されて洗浄槽（２）内に持ち込まれる。また、洗浄槽（２）内の汚れを含んだ非水系洗浄剤Ｂの一部
は、通常、光学部品に同伴されて洗浄槽（３）内に持ち込まれる。このため、非水系洗浄剤Ａ、非水系洗浄剤Ｂ、ならびに非水系洗浄剤Ａ’は、類似の成分を含んでいることが望ましく、いずれもが炭素数９〜１８の芳香族炭化水素を含有することが好ましい。
Since the optical part is introduced into the cleaning tank (2) and cleaned after cleaning in the cleaning tank (1), a part of the non-aqueous cleaning agent A containing dirt in the cleaning tank (1) Usually, it is brought into the cleaning tank (2) along with the optical components. In addition, a part of the non-aqueous cleaning agent B containing dirt in the cleaning tank (2) is usually brought into the cleaning tank (3) along with the optical components. For this reason, it is desirable that the non-aqueous cleaning agent A, the non-aqueous cleaning agent B, and the non-aqueous cleaning agent A ′ contain similar components, all of which contain aromatic hydrocarbons having 9 to 18 carbon atoms. It is preferable to do.
なお、洗浄槽（１）と（２）との間、及び／又は洗浄槽（２）と（３）との間には、光学部品上に付着した洗浄液を除去する手段が設けられていてもよい。
洗浄槽（２）は、洗浄槽（１）にて洗浄した光学部品をさらに洗浄する槽であって、主に、光学部品上に残存する研磨剤、研磨屑、チリ、埃などの粒子汚れの除去を行う。
Note that a means for removing the cleaning liquid adhering to the optical component may be provided between the cleaning tanks (1) and (2) and / or between the cleaning tanks (2) and (3). Good.
The cleaning tank (2) is a tank that further cleans the optical components cleaned in the cleaning tank (1), and is mainly used to remove particles such as abrasives, polishing debris, dust, and dust remaining on the optical components. Perform removal.
洗浄槽（２）においては、非水系洗浄剤Ｂの汚染程度を、洗浄槽（１）と同様に管理することが望ましく、これに加えて界面活性剤濃度を所定のレベルに管理するのが望ましい。非水系洗浄剤Ｂの界面活性剤濃度は、屈折率測定、比重測定、不揮発分定量などの一般的な方法で測定することができ、洗浄槽（２）はこれらを測定する手段を具備することができる。 In the cleaning tank (2), it is desirable to manage the degree of contamination of the non-aqueous cleaning agent B in the same manner as in the cleaning tank (1), and in addition to this, it is desirable to manage the surfactant concentration to a predetermined level. . The surfactant concentration of the non-aqueous cleaning agent B can be measured by general methods such as refractive index measurement, specific gravity measurement, and non-volatile content determination, and the cleaning tank (2) has means for measuring these. Can do.
また、洗浄槽（２）においては、通常、光学部品表面の微粒子状の付着物が非水系洗浄剤Ｂに移行して、光学部品が洗浄される。洗浄槽（２）内の非水系洗浄剤Ｂの汚染程度を一定範囲以内に保つためには、汚染した非水系洗浄剤Ｂの少なくとも一部を洗浄槽（２）から抜き出し、汚染されていないか汚染の程度の低い非水系洗浄剤Ｂあるいはその構成成分を洗浄槽（２）に導入する態様を取ることができる。また、汚染した非水系洗浄剤Ｂ中の微粒子状物を除去することによっても、非水系洗浄剤Ｂの汚染程度を制御することができる。微粒子状物の除去は、たとえば、非水系洗浄剤Ｂを連続して、又は間欠的に、フィルター材などでろ過処理する方法が好適であり、洗浄槽（２）がろ過手段を具備することが好ましい。非水系洗浄剤Ｂのろ過は、洗浄槽（２）の内部で行っても、外部で行ってもよい。 Further, in the cleaning tank (2), the particulate deposits on the surface of the optical component usually move to the non-aqueous cleaning agent B, and the optical component is cleaned. In order to keep the contamination level of the non-aqueous cleaning agent B in the cleaning tank (2) within a certain range, at least a part of the contaminated non-aqueous cleaning agent B is extracted from the cleaning tank (2) and is not contaminated. It is possible to adopt a mode in which the non-aqueous cleaning agent B having a low degree of contamination or its constituent components are introduced into the cleaning tank (2). Also, the degree of contamination of the non-aqueous cleaning agent B can be controlled by removing the particulate matter in the contaminated non-aqueous cleaning agent B. For the removal of the particulate matter, for example, a method of filtering the non-aqueous cleaning agent B continuously or intermittently with a filter material or the like is suitable, and the cleaning tank (2) is provided with a filtering means. preferable. The filtration of the non-aqueous cleaning agent B may be performed inside or outside the cleaning tank (2).
本発明では、洗浄槽（１）で用いる非水系洗浄剤Ａ、洗浄槽（２）で用いる非水系洗浄剤Ｂ、及び洗浄槽（３）で用いる非水系洗浄剤Ａ’が、すべて同じ種類の炭化水素系洗浄剤を含んでいることが好ましく、これらのいずれもが、炭素数９〜１８の芳香族炭化水素を含むことが好ましい。 In the present invention, the non-aqueous cleaning agent A used in the cleaning tank (1), the non-aqueous cleaning agent B used in the cleaning tank (2), and the non-aqueous cleaning agent A ′ used in the cleaning tank (3) are all of the same type. A hydrocarbon-based cleaning agent is preferably included, and any of these preferably includes an aromatic hydrocarbon having 9 to 18 carbon atoms.
このような本発明の洗浄装置では、水系洗浄剤に浸漬することなく光学部品を高度に複合汚れを除去でき、しかも界面活性剤の残存などの問題もないので、潜傷、白焼け、青焼けなどの問題を生じることなく、光学部品を高度に洗浄することができる。 In such a cleaning device of the present invention, optical components can be highly removed without immersing them in an aqueous cleaning agent, and there is no problem such as residual surfactant, so latent scratches, white-burning, blue-burning The optical component can be highly cleaned without causing problems such as.
このような本発明の洗浄装置及び洗浄方法としては、たとえば図１に示すような態様が挙げられる。図１は、各１槽の洗浄槽（１）（図中の１）、洗浄槽（２）（図中の２）及び洗浄槽（３）（図中の３）からなる、全３槽の洗浄槽を有する洗浄装置である。 As such a cleaning apparatus and cleaning method of the present invention, for example, an embodiment as shown in FIG. FIG. 1 shows a total of three tanks each consisting of a washing tank (1) (1 in the figure), a washing tank (2) (2 in the figure) and a washing tank (3) (3 in the figure). A cleaning apparatus having a cleaning tank.
被洗浄物である複合汚れを有する光学部品は、洗浄槽（１）、洗浄槽（２）及び洗浄槽（３）において、順次各槽内の洗浄液に浸漬されて洗浄される。
洗浄槽（１）及び（３）には、同一組成の炭化水素洗浄剤である非水系洗浄剤Ａが、洗浄槽（２）には、非水系洗浄剤Ａと界面活性剤とからなる非水系洗浄剤Ｂが充填されている。洗浄槽（１）及び（３）において、洗浄に伴い汚れを含むようになった非水系洗浄剤Ａは、それぞれラインｅ又はラインｇから抜き出され、一方炭化水素洗浄剤タンク５からラインａ又はラインｃを通じて汚れを含まない炭化水素洗浄剤が添加され、これにより洗浄槽（１）及び（３）内の非水系洗浄剤Ａの汚れ程度は所定の一定レベル以下に保たれる。また、洗浄槽（２）において洗浄に伴い汚れを含むようになった非水系洗浄剤Ｂは、ラインｆから抜き出され、一方炭化水素洗浄剤タンク５からラインｂを通じて導入される汚れを含まない非水系洗浄剤Ａと、界面活性剤濃縮液タンク６からラインｉを通じて導入される界面活性剤濃縮液とが、非水系洗浄剤Ｂの組成となる量で添加されることにより、洗浄槽（２）内の非水系洗浄剤Ｂの汚れ程度は一定レベル以下に保たれる。
The optical component having composite dirt, which is the object to be cleaned, is sequentially immersed in the cleaning liquid in each tank and cleaned in the cleaning tank (1), the cleaning tank (2), and the cleaning tank (3).
The cleaning tanks (1) and (3) include a non-aqueous cleaning agent A, which is a hydrocarbon cleaning agent of the same composition, and the cleaning tank (2) includes a non-aqueous cleaning agent composed of a non-aqueous cleaning agent A and a surfactant. Cleaning agent B is filled. In the cleaning tanks (1) and (3), the non-aqueous cleaning agent A that has become contaminated with the cleaning is extracted from the line e or the line g, respectively, while the hydrocarbon
ここで、ラインｅ及びｇから抜き出された汚れを有する非水系洗浄剤Ａは、蒸留装置４に導入され、留出液として得られる汚れを含まない炭化水素洗浄剤成分と、濃縮された汚れを含む残留液とに分離され、ラインｄを通じて炭化水素洗浄剤タンク５に移送される。留出液として得られた炭化水素洗浄剤成分は、蒸留条件にもよるが、通常非水系洗浄剤Ａと同様の炭化水素組成を有しており、これを非水系洗浄剤Ａとしてラインａあるいはラインｃを通じて洗浄槽（１）あるいは（３）に導入して用いることができ、また、非水系洗浄剤Ｂを構成する炭化水素洗浄剤成分としてラインｂを通じて洗浄槽（２）に導入して用いることもできる。なお、炭化水素洗浄剤タンク５には、蒸留装置から回収される炭化水素洗浄剤成分で不足する分の炭化水素洗浄剤を、外部から適宜導入することができる。また、炭化水素洗浄剤タンク５においては、非水系洗浄剤Ａの組成が一定に保たれるよう、必要に応じて炭化水素洗浄剤の成分組成の調製を行ってもよい。
Here, the non-aqueous cleaning agent A having dirt extracted from the lines e and g is introduced into the
蒸留装置４における残留液は、濃縮された汚れを含み、場合によっては界面活性剤成分をも含有するものであり、ラインｋより系外に排出される。排出された残留液は、適宜産業廃棄物として処理されるのが望ましい。
The residual liquid in the
洗浄槽（３）中の非水系洗浄剤Ａの一部は、ラインｊを通じて洗浄槽（１）に導入することができ、また、ラインｈを通じて非水系洗浄剤Ｂの成分として洗浄槽（２）に導入することもできる。洗浄槽（３）中の非水系洗浄剤Ａの一部を洗浄槽（１）及び／又は（２）に導入する場合、洗浄槽（３）から非水系洗浄剤Ａを抜き出す方法としては、特に限定されるものではないがオーバーフローによる方法を採用することができる。洗浄槽（３）中の非水系洗浄剤Ａは、洗浄槽（１）あるいは（２）中の非水系洗浄剤よりも汚染程度を低く保たれており、これにより光学部品を高度に洗浄する効果を達成することができる。このため、洗浄槽（３）内の非水系洗浄剤Ａをそのまま洗浄槽（１）の非水系洗浄剤Ａとして、あるいは洗浄槽（２）の非水系洗浄剤Ｂの成分として、直接導入することによっても、洗浄槽（１）あるいは（２）中の非水系洗浄剤の汚染程度を低下させることができる。 Part of the non-aqueous cleaning agent A in the cleaning tank (3) can be introduced into the cleaning tank (1) through the line j, and the cleaning tank (2) as a component of the non-aqueous cleaning agent B through the line h. Can also be introduced. When a part of the non-aqueous cleaning agent A in the cleaning tank (3) is introduced into the cleaning tank (1) and / or (2), as a method of extracting the non-aqueous cleaning agent A from the cleaning tank (3), in particular Although not limited thereto, an overflow method can be employed. The non-aqueous cleaning agent A in the cleaning tank (3) is kept at a lower level of contamination than the non-aqueous cleaning agent in the cleaning tank (1) or (2), and thereby the effect of highly cleaning optical components. Can be achieved. For this reason, the non-aqueous cleaning agent A in the cleaning tank (3) is directly introduced as the non-aqueous cleaning agent A in the cleaning tank (1) or as a component of the non-aqueous cleaning agent B in the cleaning tank (2). As a result, the degree of contamination of the non-aqueous cleaning agent in the cleaning tank (1) or (2) can be reduced.
以下、実施例に基づいて本発明をさらに具体的に説明するが、本発明はこれらの実施例に限定されるものではない。 EXAMPLES Hereinafter, although this invention is demonstrated further more concretely based on an Example, this invention is not limited to these Examples.
［実施例１］
洗浄槽として３槽からなる洗浄装置を用いた。第１槽及び第３槽に、炭素数９〜１２の芳香族炭化水素から成る非水系洗浄剤Ａ（ジャパンエナジー製 ＥＭ２０００Ｅ：沸点１８０〜１９２℃、水分０．０２重量％）を充填した。第２槽には、前記ＥＭ２０００Ｅ（ジャパンエナジー製）を８５．０重量％、アニオン性界面活性剤としてジオクチルスルホコハク酸ナトリウムを７．０重量％、非イオン性界面活性剤としてソルビタントリオレートを７．０重量、水分１．０重量％から成る非水系洗浄剤Ｂを充填した。尚、第１〜３の洗浄槽底部には超音波振動子が備えられているものを用いた。
[Example 1]
A cleaning device comprising three tanks was used as the cleaning tank. The 1st tank and the 3rd tank were filled with the non-aqueous cleaning agent A (Japan Energy EM2000E: boiling point 180-192 degreeC, water | moisture content 0.02 weight%) which consists of a C9-C12 aromatic hydrocarbon. In the second tank, 85.0% by weight of EM2000E (manufactured by Japan Energy), 7.0% by weight of sodium dioctylsulfosuccinate as an anionic surfactant, and 7.% of sorbitan trioleate as a nonionic surfactant. A non-aqueous detergent B consisting of 0% by weight and 1.0% by weight of water was filled. In addition, what was equipped with the ultrasonic transducer | vibrator was used for the 1st-3rd washing tank bottom part.
被洗浄部品として、光学レンズを研磨皿にアスファルトピッチで固定し、酸化セリウムを主成分とする研磨剤で研磨した後に、フェノール系樹脂からなる保護膜を塗布した耐水性の低い硝材からなる光学レンズ（直径１５ｍｍ、厚さ５ｍｍ）を用いた。
An optical lens made of a glass material with low water resistance in which an optical lens is fixed to a polishing dish with an asphalt pitch, polished with an abrasive containing cerium oxide as a main component, and then a protective film made of a phenolic resin is applied. (Diameter 15 mm,
前記の光学レンズを第１槽に浸漬して２５℃で２分間超音波を照射しながら洗浄を行った。次に第２槽においても２５℃で２分間超音波を照射しながら洗浄を行い、第２槽での
洗浄後にさらに第３槽で２５℃で２分間超音波を照射しながら洗浄を行った。第３槽での洗浄後、光学レンズを温風乾燥した。
The optical lens was immersed in the first tank and washed while being irradiated with ultrasonic waves at 25 ° C. for 2 minutes. Next, also in the 2nd tank, it wash | cleaned, irradiating an ultrasonic wave for 2 minutes at 25 degreeC, and it wash | cleaned while irradiating an ultrasonic wave for 2 minutes at 25 degreeC after the washing | cleaning in a 2nd tank. After washing in the third tank, the optical lens was dried with warm air.
洗浄終了後の光学レンズは、ハロゲンランプの光路内に設置して、レンズ表面を目視観察した。レンズ表面には、ピッチ等の油性汚れ及び研磨剤等の粒子汚れがなく、かつ、潜傷、白焼け、青焼け等の損傷がないことを確認した。 After the cleaning, the optical lens was installed in the light path of the halogen lamp, and the lens surface was visually observed. It was confirmed that the lens surface was free of oily stains such as pitch and particle stains such as abrasives, and was not damaged such as latent scratches, white burns, and blue burns.
［実施例２］
実施例１で使用した第１槽の汚染された非水系洗浄剤Ａを蒸留機で蒸留して、得られた留出液を第３槽の非水系洗浄剤Ａ’として使用した以外、実施例１と同様にして光学レンズの洗浄を行った。尚、蒸留により得られた留出液の汚染度は０．１重量％以下であった。
[Example 2]
Example 1 except that the contaminated non-aqueous cleaning agent A in the first tank used in Example 1 was distilled with a distiller and the resulting distillate was used as the non-aqueous cleaning agent A ′ in the third tank. The optical lens was washed as in 1. The degree of contamination of the distillate obtained by distillation was 0.1% by weight or less.
洗浄終了後の光学レンズは、ハロゲンランプの光路内に設置して、レンズ表面を目視観察した。レンズ表面には、ピッチ等の油性汚れ及び研磨剤等の粒子汚れがなく、かつ、潜傷、白焼け、青焼け等の損傷がないことを確認した。 After the cleaning, the optical lens was installed in the light path of the halogen lamp, and the lens surface was visually observed. It was confirmed that the lens surface was free of oily stains such as pitch and particle stains such as abrasives, and was not damaged such as latent scratches, white burns, and blue burns.
［実施例３］
実施例１での洗浄において、同様の被洗浄部品を順次同様に洗浄に供し、第１槽の汚染度が３重量％になったときに、第１槽の汚染された非水系洗浄剤Ａの１０容量％を抜き出した。また、第３槽の汚染度は０．５重量％以下になるようにモニターした。
[Example 3]
In the cleaning in Example 1, the same parts to be cleaned were sequentially cleaned in the same manner, and when the contamination degree of the first tank reached 3% by weight, the contaminated non-aqueous cleaning agent A in the first tank 10% by volume was extracted. Further, the degree of contamination in the third tank was monitored to be 0.5% by weight or less.
第１槽より抜き出された汚染された非水系洗浄剤Ａは、蒸留機に導入して減圧蒸留により蒸留再生して汚染度０．１重量％以下の非水系洗浄剤Ａを得た。蒸留再生により得られた非水系洗浄剤Ａは貯留タンクに貯留し、貯留タンクから第３槽に一定の流速５ｍＬ／分で送液し、これにより第３槽からオーバーフローする洗浄剤は第１槽に流入させた。その後、再び、前記被洗浄部品の洗浄を実施例１と同条件で行ったところ、洗浄終了後の光学レンズには、ピッチ等の油性汚れ及び研磨剤等の粒子汚れがなく、かつ、潜傷、白焼け、青焼け等の損傷がないことを確認した。 The contaminated non-aqueous cleaning agent A extracted from the first tank was introduced into a distiller and distilled and regenerated by distillation under reduced pressure to obtain a non-aqueous cleaning agent A having a contamination degree of 0.1% by weight or less. The non-aqueous cleaning agent A obtained by distillation regeneration is stored in a storage tank, and is sent from the storage tank to the third tank at a constant flow rate of 5 mL / min, whereby the cleaning agent overflowing from the third tank is the first tank. Flowed into. Thereafter, the cleaning of the parts to be cleaned was performed again under the same conditions as in Example 1. As a result, the optical lens after the cleaning was free from oily dirt such as pitch and particle dirt such as abrasives and latent scratches. It was confirmed that there was no damage such as white burn, blue burn.
［比較例１］
実施例１において、第２槽内で用いた洗浄剤を、第１槽及び第３槽と同じＥＭ２０００Ｅにした以外、実施例１と同様にして光学レンズの洗浄を行った。
[Comparative Example 1]
In Example 1, the optical lens was cleaned in the same manner as in Example 1 except that the cleaning agent used in the second tank was changed to the same EM2000E as the first tank and the third tank.
洗浄後の光学レンズをハロゲンランプの光路内に設置して、レンズ表面を目視観察した結果、レンズ表面には、ピッチ等の油性汚れは見られなかったものの、研磨剤等の粒子汚れが一部残存していた。 As a result of installing the optical lens after cleaning in the optical path of the halogen lamp and visually observing the lens surface, no oily dirt such as pitch was found on the lens surface, but part of the particle dirt such as abrasives was found. It remained.
［比較例２］
実施例１において、第１槽を省略した以外は、実施例１と同様にして光学レンズの洗浄を行った。
洗浄後の光学レンズをハロゲンランプの光路内に設置して、レンズ表面を目視観察した結果、レンズ表面には、ピッチ等の油性汚れが一部残存していた。
[Comparative Example 2]
In Example 1, the optical lens was cleaned in the same manner as in Example 1 except that the first tank was omitted.
As a result of visually observing the lens surface by installing the cleaned optical lens in the optical path of the halogen lamp, a part of oily dirt such as pitch remained on the lens surface.
［比較例３］
実施例１において、第３槽を省略した以外は、実施例１と同様にして光学レンズの洗浄を行った。
洗浄後の光学レンズをハロゲンランプの光路内に設置して、レンズ表面を目視観察した結果、レンズ表面には、界面活性剤が残存していた。
[Comparative Example 3]
In Example 1, the optical lens was cleaned in the same manner as in Example 1 except that the third tank was omitted.
As a result of installing the cleaned optical lens in the optical path of the halogen lamp and visually observing the lens surface, the surfactant remained on the lens surface.
［比較例４］
実施例１において、第２槽内で用いた洗浄剤を、ＥＭ２０００Ｅを８５．０重量％、アニオン性界面活性剤としてジオクチルスルホコハク酸ナトリウムを７．５重量％、非イオン性界面活性剤としてソルビタントリオレートを７．５重量から成る非水系洗浄剤Ｂ（水分０．０２重量％）にした以外、実施例１と同様にして光学レンズの洗浄を行った。
[Comparative Example 4]
In Example 1, the cleaning agent used in the second tank was 85.0% by weight of EM2000E, 7.5% by weight of sodium dioctylsulfosuccinate as an anionic surfactant, and sorbitan trio as a nonionic surfactant. The optical lens was cleaned in the same manner as in Example 1 except that the rate was changed to 7.5% by weight of non-aqueous cleaning agent B (water content 0.02% by weight).
洗浄後の光学レンズをハロゲンランプの光路内に設置して、レンズ表面を目視観察した結果、レンズ表面には、ピッチ等の油性汚れは見られなかったものの、研磨剤等の粒子汚れが一部残存していた。 As a result of installing the optical lens after cleaning in the optical path of the halogen lamp and visually observing the lens surface, no oily dirt such as pitch was found on the lens surface, but part of the particle dirt such as abrasives was found. It remained.
本発明の洗浄装置及び洗浄方法は、各種光学部品の洗浄に好適であり、特に、ピッチやワックスなどの油性の固定剤を用いて研磨して製造された、光学レンズなどの光学部品の洗浄に好適である。また本発明の洗浄装置及び洗浄方法は、輸送や保管などのために保護膜を設けた精密光学部品などの保護膜除去にも適用することができる。 The cleaning apparatus and the cleaning method of the present invention are suitable for cleaning various optical components, and particularly for cleaning optical components such as optical lenses manufactured by polishing with an oily fixing agent such as pitch or wax. Is preferred. The cleaning apparatus and cleaning method of the present invention can also be applied to removal of a protective film such as a precision optical component provided with a protective film for transportation or storage.
１：洗浄槽（１）
２：洗浄槽（２）
３：洗浄槽（３）
４：蒸留装置
５：炭化水素洗浄剤タンク
６：界面活性剤濃縮液タンク
ａ〜ｋ：ライン
1: Washing tank (1)
2: Cleaning tank (2)
3: Washing tank (3)
4: Distillation device 5: Hydrocarbon detergent tank 6: Surfactant concentrate tank ak: Line
Claims (6)
非水系洗浄剤Ｂが、炭素数９〜１８の芳香族炭化水素６０〜９８重量％と、界面活性剤２〜３０重量％と、水分０．０５〜１０．０重量％とを含むことを特徴とする光学部品の洗浄方法。 A cleaning step (a) in which an optical component is cleaned by immersing it in a non-aqueous cleaning agent A substantially free of a surfactant, and the optical component cleaned in the cleaning step (a) A cleaning step (b) in which cleaning is performed by immersing in a non-aqueous cleaning agent B containing at least once, and a non-aqueous cleaning agent that is substantially free of a surfactant and further includes an optical component cleaned by the cleaning step (b) It possesses a cleaning step of cleaning by dipping at least once and (c) a ',
The non-aqueous cleaning agent B contains 60 to 98% by weight of an aromatic hydrocarbon having 9 to 18 carbon atoms, 2 to 30% by weight of a surfactant, and 0.05 to 10.0% by weight of water. Cleaning method for optical parts.
（Ａ）：洗浄槽（１）及び／又は洗浄槽（３）から排出される排出液の少なくとも一部を蒸留する手段、および、蒸留で得られた留出液を洗浄槽（１）及び／又は洗浄槽（３）に導入する手段、
（Ｂ）：洗浄槽（３）中の非水系洗浄剤Ａ'の少なくとも一部を、洗浄槽（１）及び／又は洗浄槽（２）に導入する手段。 The optical component cleaning apparatus according to claim 5, further comprising the following means (A) and / or (B):
(A): means for distilling at least a part of the effluent discharged from the washing tank (1) and / or the washing tank (3), and the distillate obtained by distillation in the washing tank (1) and / or Or means for introducing into the washing tank (3),
(B): Means for introducing at least part of the non-aqueous cleaning agent A ′ in the cleaning tank (3) into the cleaning tank (1) and / or the cleaning tank (2).
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| CN106216308B (en) * | 2016-08-08 | 2018-10-23 | 泉州市三星消防设备有限公司 | A kind of cleaning method of optical element after polishing |
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