JP5203032B2 - 圧接型半導体装置 - Google Patents
圧接型半導体装置 Download PDFInfo
- Publication number
- JP5203032B2 JP5203032B2 JP2008117564A JP2008117564A JP5203032B2 JP 5203032 B2 JP5203032 B2 JP 5203032B2 JP 2008117564 A JP2008117564 A JP 2008117564A JP 2008117564 A JP2008117564 A JP 2008117564A JP 5203032 B2 JP5203032 B2 JP 5203032B2
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- JP
- Japan
- Prior art keywords
- columnar electrode
- electrode
- semiconductor elements
- semiconductor
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
- H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
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- Die Bonding (AREA)
Description
11,12 半導体素子
11A,11B 電極
12A,12B 電極
21 柱状電極部
21a 潰れ部
22 圧接用端子板
23 電極用端子板
31 IGBT
32 エミッタ電極
35 柱状電極部
41 ダイオード
42 アノード電極
44 柱状電極部
57,59 放熱板
71,72 導電性圧接子
Claims (6)
- 複数の半導体素子と、前記複数の半導体素子のそれぞれを表裏の両面から加圧接触する2つの端子板とを備える半導体装置であって、
前記半導体素子の電極の表面に複数の柱状電極部が形成され、
前記2つの端子板の各々を加圧状態で保持する放熱板を備え、
複数の前記柱状電極部が塑性変形して前記端子板に接触する構成であり、
複数の前記柱状電極部のそれぞれは円柱形状を有し、前記柱状電極部における前記端子板側の部分は、前記端子板に近づくにつれて径が小さくなる、ことを特徴とする圧接型半導体装置。 - 少なくとも2つの前記半導体素子はその厚みが異なり、前記2つの半導体素子の各々の表面に設けられた電極の表面に前記柱状電極部が形成され、
前記2つの端子板によって圧接実装される際に、前記2つの半導体素子の各々の表面側の前記電極の前記柱状電極部の塑性変形によって前記2つの半導体素子の厚みの違いを吸収することを特徴とする請求項1記載の圧接型半導体装置。 - 前記半導体素子の電極の表面に形成される前記複数の柱状電極部は、前記電極と同一の金属材料を用いかつ成膜技術に基づき前記電極の前記表面に形成されることを特徴とする請求項1記載の圧接型半導体装置。
- 複数の前記柱状電極部のそれぞれは、隣接する前記柱状電極部との間で、等間隔で配置されていることを特徴とする請求項1記載の圧接型半導体装置。
- 複数の半導体素子と、前記複数の半導体素子のそれぞれを表裏の両面から加圧接触する2つの端子板とを備える半導体装置であって、
前記半導体素子の電極の表面に複数の柱状電極部が形成され、
前記2つの端子板の各々を加圧状態で保持する放熱板を備え、
複数の前記柱状電極部が塑性変形して前記端子板に接触する構成であり、
前記半導体素子の前記電極表面における複数の前記柱状電極部の配置密度は、前記電極表面の中央部の配置密度よりも前記電極表面の周辺部の配置密度が高いことを特徴とする圧接型半導体装置。 - 複数の半導体素子と、前記複数の半導体素子のそれぞれを表裏の両面から加圧接触する2つの端子板とを備える半導体装置であって、
前記半導体素子の電極の表面に複数の柱状電極部が形成され、
前記2つの端子板の各々を加圧状態で保持する放熱板を備え、
複数の前記柱状電極部が塑性変形して前記端子板に接触する構成であり、
前記半導体素子の前記電極表面における複数の前記柱状電極部の横断面の面積の大きさは、前記電極表面の中央部に位置する前記柱状電極部の前記面積よりも前記電極表面の周辺部に位置する前記柱状電極部の前記面積が大きいことを特徴とする圧接型半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008117564A JP5203032B2 (ja) | 2008-04-28 | 2008-04-28 | 圧接型半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2008117564A JP5203032B2 (ja) | 2008-04-28 | 2008-04-28 | 圧接型半導体装置 |
Publications (2)
Publication Number | Publication Date |
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JP2009267246A JP2009267246A (ja) | 2009-11-12 |
JP5203032B2 true JP5203032B2 (ja) | 2013-06-05 |
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Family Applications (1)
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JP2008117564A Expired - Fee Related JP5203032B2 (ja) | 2008-04-28 | 2008-04-28 | 圧接型半導体装置 |
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JP (1) | JP5203032B2 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5664475B2 (ja) * | 2011-06-22 | 2015-02-04 | 株式会社デンソー | 半導体装置 |
JP5702746B2 (ja) * | 2012-02-28 | 2015-04-15 | 株式会社豊田中央研究所 | インバータ用部品 |
US9706643B2 (en) | 2014-06-19 | 2017-07-11 | Panasonic Intellectual Property Management Co., Ltd. | Electronic device and method for manufacturing the same |
JP6804181B2 (ja) * | 2014-07-22 | 2020-12-23 | 日産自動車株式会社 | 電力用半導体モジュール及びその実装方法 |
CN107533983B (zh) * | 2015-05-26 | 2020-06-05 | 三菱电机株式会社 | 压接型半导体装置 |
US9603283B1 (en) * | 2015-10-09 | 2017-03-21 | Raytheon Company | Electronic module with free-formed self-supported vertical interconnects |
JP6108026B1 (ja) | 2016-12-16 | 2017-04-05 | 富士電機株式会社 | 圧接型半導体モジュール |
JP6877251B2 (ja) * | 2017-06-09 | 2021-05-26 | 三菱電機株式会社 | 電力用半導体装置 |
CN109786349B (zh) * | 2018-01-11 | 2020-11-03 | 苏州能讯高能半导体有限公司 | 一种排气式器件以及器件焊接结构 |
JP7080392B2 (ja) * | 2019-03-12 | 2022-06-03 | 三菱電機株式会社 | 圧接型半導体装置 |
JPWO2022210616A1 (ja) * | 2021-03-31 | 2022-10-06 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2974583B2 (ja) * | 1994-05-31 | 1999-11-10 | 株式会社東芝 | 半導体装置およびその製造方法 |
JPH1197463A (ja) * | 1997-09-22 | 1999-04-09 | Hitachi Ltd | 圧接型半導体装置 |
JP2006005292A (ja) * | 2004-06-21 | 2006-01-05 | Nissan Motor Co Ltd | 圧接型半導体装置 |
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- 2008-04-28 JP JP2008117564A patent/JP5203032B2/ja not_active Expired - Fee Related
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