JP5147856B2 - 母材とファイバー製造のための半完成品としての石英ガラス管の製造方法 - Google Patents
母材とファイバー製造のための半完成品としての石英ガラス管の製造方法 Download PDFInfo
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- JP5147856B2 JP5147856B2 JP2009545910A JP2009545910A JP5147856B2 JP 5147856 B2 JP5147856 B2 JP 5147856B2 JP 2009545910 A JP2009545910 A JP 2009545910A JP 2009545910 A JP2009545910 A JP 2009545910A JP 5147856 B2 JP5147856 B2 JP 5147856B2
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 149
- 238000004519 manufacturing process Methods 0.000 title claims description 30
- 239000000463 material Substances 0.000 title claims description 10
- 239000011265 semifinished product Substances 0.000 title claims description 8
- 239000000835 fiber Substances 0.000 title description 12
- 238000000034 method Methods 0.000 claims description 37
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 29
- 229910052731 fluorine Inorganic materials 0.000 claims description 29
- 239000011737 fluorine Substances 0.000 claims description 29
- 239000002131 composite material Substances 0.000 claims description 25
- 238000005137 deposition process Methods 0.000 claims description 12
- 239000013307 optical fiber Substances 0.000 claims description 12
- 238000004334 fluoridation Methods 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 115
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 11
- 238000000151 deposition Methods 0.000 description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 229910018194 SF 6 Inorganic materials 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000007547 defect Effects 0.000 description 4
- 230000001419 dependent effect Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000654 additive Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 238000012805 post-processing Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 230000000996 additive effect Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 239000004038 photonic crystal Substances 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 229910003902 SiCl 4 Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007634 remodeling Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01413—Reactant delivery systems
- C03B37/0142—Reactant deposition burners
- C03B37/01426—Plasma deposition burners or torches
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/01205—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments
- C03B37/01211—Manufacture of preforms for drawing fibres or filaments starting from tubes, rods, fibres or filaments by inserting one or more rods or tubes into a tube
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/01466—Means for changing or stabilising the diameter or form of tubes or rods
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/06—Glass compositions containing silica with more than 90% silica by weight, e.g. quartz
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/07—Impurity concentration specified
- C03B2201/075—Hydroxyl ion (OH)
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/08—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant
- C03B2201/12—Doped silica-based glasses doped with boron or fluorine or other refractive index decreasing dopant doped with fluorine
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2201/00—Type of glass produced
- C03B2201/06—Doped silica-based glasses
- C03B2201/20—Doped silica-based glasses doped with non-metals other than boron or fluorine
- C03B2201/23—Doped silica-based glasses doped with non-metals other than boron or fluorine doped with hydroxyl groups
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2203/00—Fibre product details, e.g. structure, shape
- C03B2203/42—Photonic crystal fibres, e.g. fibres using the photonic bandgap PBG effect, microstructured or holey optical fibres
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/13—Hollow or container type article [e.g., tube, vase, etc.]
- Y10T428/131—Glass, ceramic, or sintered, fused, fired, or calcined metal oxide or metal carbide containing [e.g., porcelain, brick, cement, etc.]
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Organic Chemistry (AREA)
- Geochemistry & Mineralogy (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Description
図1には、フッ素添加石英ガラスを、キャリアー管3上に堆積する方法を模式的に示す。キャリアー管3は、無添加石英ガラスからなり、内径34mm、外径40mmである。
図2には、模式的に石英ガラスの内管20を示す。これはPOD堆積法で製造され、7重量%のフッ素が一様に添加されている。管20の内径は20mmで、壁厚は7mmである。
実施例1の説明と同様の方法で、無添加石英ガラスのキャリアー管(内径30mm、外径40mm)が用いられる。厚さ40mmの石英ガラス層がキャリアー管の上にPOD法により形成される。この石英ガラスにはフッ素が2.5重量%添加される。
2 バーナー炎、プラズマ炎
3 キャリアー管
4 フッ素添加石英ガラス層
6 長軸
7 高周波コイル
8 反応筒
20,21 内側の石英ガラス層
20‘、21‘ フッ素添加石英ガラス層
21 第二管層
22 複合構造
23、23‘ 外側の石英ガラス層
24 複合管
25 石英ガラス管
26 内壁
Claims (9)
- 光ファイバーを作るための半完成品として、石英ガラス管を製造する方法であって、
前記石英ガラス管は、内側のフッ素添加石英ガラス層と、外側の石英ガラス層を含み、
前記内側のフッ素添加石英ガラス層は第一プラズマ堆積処理で製造され、
前記第一プラズマ堆積処理では、壁厚が少なくとも1.5mmで、フッ素含有量が少なくとも1.5重量%である内側の石英ガラス層がキャリアー管の上に形成され、
前記外側の石英ガラス層は第二プラズマ堆積処理で、前記内側のフッ素添加の石英ガラス層上に直接あるいは間接的に堆積されて、複合管を形成し、
前記複合管から前記キャリアー管が除去された後、前記複合管は延伸されて石英ガラス管となることを特徴とする、石英ガラス管を製造する方法。 - 前記内側の石英ガラス層は、壁厚が少なくとも5mmで製造されることを特徴とする、請求項1に記載の石英ガラス管を製造する方法。
- 前記内側の石英ガラス層は、壁厚が少なくとも10mmで製造されることを特徴とする、請求項1に記載の石英ガラス管を製造する方法。
- 前記外側の石英ガラス層が、石英ガラスの粘度を増加させる材料を添加されていることを特徴とする、請求項1から3のいずれかに記載の石英ガラス管を製造する方法。
- 前記内側のフッ素添加石英ガラス層が、厚さ1mm未満の層で形成されていることを特徴とする、請求項1から4のいずれかに記載の石英ガラス管を製造する方法。
- 前記外側の石英ガラス層が、厚さ1mm未満の層で形成されていることを特徴とする、請求項1から5のいずれかに記載の石英ガラス管を製造する方法。
- 前記外側の石英ガラス層が、厚さが1mmを超える層で形成されていることを特徴とする、請求項1から5のいずれかに記載の石英ガラス管を製造する方法。
- 前記複合管の延伸に際して、延伸比が3から100の範囲に設定されることを特徴とする、請求項1から7のいずれかに記載の石英ガラス管を製造する方法。
- 延伸に際して、得られる石英ガラス管の内孔が、工具なしで形成されることを特徴とする、請求項1から8のいずれかに記載の石英ガラス管を製造する方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007003889A DE102007003889B3 (de) | 2007-01-19 | 2007-01-19 | Quarzglasrohr als Halbzeug für die Vorform- und Faserherstellung, dessen Verwendung sowie Verfahren zur Herstellung des Quarzglasrohres |
DE102007003889.7 | 2007-01-19 | ||
PCT/EP2008/050381 WO2008087132A1 (en) | 2007-01-19 | 2008-01-15 | Quartz glass tube as a semifinished product for preform and fiber manufacture, and method for making the quartz glass tube |
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Publication Number | Publication Date |
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JP2010516597A JP2010516597A (ja) | 2010-05-20 |
JP5147856B2 true JP5147856B2 (ja) | 2013-02-20 |
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JP2009545910A Active JP5147856B2 (ja) | 2007-01-19 | 2008-01-15 | 母材とファイバー製造のための半完成品としての石英ガラス管の製造方法 |
Country Status (4)
Country | Link |
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US (1) | US8544299B2 (ja) |
JP (1) | JP5147856B2 (ja) |
DE (1) | DE102007003889B3 (ja) |
WO (1) | WO2008087132A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5744070B2 (ja) * | 2010-03-10 | 2015-07-01 | ヘレーウス クヴァルツグラース ゲゼルシャフト ミット ベシュレンクテル ハフツング ウント コンパニー コマンディートゲゼルシャフトHeraeus Quarzglas GmbH & Co. KG | 光ファイバを製造するための方法並びに管状半製品 |
FR2963787B1 (fr) | 2010-08-10 | 2012-09-21 | Draka Comteq France | Procede de fabrication d'une preforme de fibre optique |
US9873629B2 (en) * | 2011-06-30 | 2018-01-23 | Corning Incorporated | Methods for producing optical fiber preforms with low index trenches |
DE102011108612A1 (de) * | 2011-07-27 | 2013-01-31 | Heraeus Quarzglas Gmbh & Co. Kg | Plasma-Abscheideprozess zur Herstellung einer optischen Vorform mit einer Mantelglasschicht aus fluordotiertem Quarzglas |
EP3112323B1 (de) * | 2015-07-03 | 2021-09-01 | Heraeus Quarzglas GmbH & Co. KG | Verfahren zur herstellung eines substratrohres aus quarzglas |
CN113264670A (zh) * | 2021-04-13 | 2021-08-17 | 江苏永鼎股份有限公司 | 一种制备大尺寸掺氟石英管的方法及掺氟石英管 |
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JPS6077138A (ja) * | 1983-10-03 | 1985-05-01 | Furukawa Electric Co Ltd:The | 光フアイバ用ド−プト石英の合成方法 |
JPS61247633A (ja) * | 1985-04-25 | 1986-11-04 | Sumitomo Electric Ind Ltd | 光フアイバ−用ガラス母材の製造方法 |
US4758126A (en) * | 1987-02-19 | 1988-07-19 | Johnson Peter E | Plate feed apparatus |
GB2208114A (en) * | 1987-07-01 | 1989-03-01 | Pirelli General Plc | Optical fibre preforms |
FR2650584B1 (fr) * | 1989-08-02 | 1993-12-17 | Cie Generale D Electricite | Procede de fabrication d'une fibre optique a gaine dopee |
US6253580B1 (en) * | 1997-12-19 | 2001-07-03 | Fibercore, Inc. | Method of making a tubular member for optical fiber production using plasma outside vapor deposition |
US6536240B1 (en) * | 1998-04-10 | 2003-03-25 | Mikhail Ivanovich Gouskov | Method of making an optical fiber preform via multiple plasma depositing and sintering steps |
DE19852704A1 (de) | 1998-11-16 | 2000-05-18 | Heraeus Quarzglas | Verfahren zur Herstellung einer Vorform für eine optische Faser und für die Durchführung des Verfahrens geeignetes Substratrohr |
DE19856892C2 (de) * | 1998-12-10 | 2001-03-15 | Heraeus Quarzglas | Verfahren zur Herstellung eines Rohres aus glasigem Werkstoff, insbesondere aus Quarzglas |
FR2823198B1 (fr) * | 2001-04-09 | 2003-07-04 | Cit Alcatel | Procede de fabrication de preformes a grande capacite par mcvd |
US20020186942A1 (en) * | 2001-05-01 | 2002-12-12 | Bubnov Mikhail M. | Low-loss highly phosphorus-doped fibers for Raman amplification |
JP4093553B2 (ja) * | 2002-08-07 | 2008-06-04 | 信越化学工業株式会社 | 光ファイバプリフォームとその製造方法、及びこれを線引きして得られる光ファイバ |
US20040159124A1 (en) * | 2003-02-14 | 2004-08-19 | Atkins Robert M. | Optical fiber manufacture |
DE10316487B4 (de) * | 2003-04-09 | 2005-03-31 | Heraeus Tenevo Ag | Verfahren zur Herstellung einer Vorform für optische Fasern |
JP4292862B2 (ja) * | 2003-05-12 | 2009-07-08 | 住友電気工業株式会社 | 光ファイバ用母材の製造方法及び光ファイバの製造方法 |
FR2863605B1 (fr) * | 2003-12-15 | 2006-04-28 | Cit Alcatel | Procede de recharge plasma autour d'un tube dope au fluor |
DE102006031898B4 (de) * | 2006-07-07 | 2009-09-10 | Heraeus Quarzglas Gmbh & Co. Kg | Verfahren zur Herstellung eines rohrförmigen Halbzeugs aus fluordotiertem Quarzglas |
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2007
- 2007-01-19 DE DE102007003889A patent/DE102007003889B3/de active Active
-
2008
- 2008-01-15 JP JP2009545910A patent/JP5147856B2/ja active Active
- 2008-01-15 WO PCT/EP2008/050381 patent/WO2008087132A1/en active Application Filing
- 2008-01-15 US US12/448,998 patent/US8544299B2/en active Active
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Publication number | Publication date |
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US20100034998A1 (en) | 2010-02-11 |
DE102007003889B3 (de) | 2008-09-11 |
JP2010516597A (ja) | 2010-05-20 |
US8544299B2 (en) | 2013-10-01 |
WO2008087132A1 (en) | 2008-07-24 |
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