JP5134375B2 - ヒータの支持構造 - Google Patents
ヒータの支持構造 Download PDFInfo
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- JP5134375B2 JP5134375B2 JP2007553926A JP2007553926A JP5134375B2 JP 5134375 B2 JP5134375 B2 JP 5134375B2 JP 2007553926 A JP2007553926 A JP 2007553926A JP 2007553926 A JP2007553926 A JP 2007553926A JP 5134375 B2 JP5134375 B2 JP 5134375B2
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- sic
- heater
- electric
- ceramic
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
- F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
- F27B9/36—Arrangements of heating devices
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
- C04B35/111—Fine ceramics
- C04B35/117—Composites
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/573—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by reaction sintering or recrystallisation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D1/00—Casings; Linings; Walls; Roofs
- F27D1/02—Crowns; Roofs
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D11/00—Arrangement of elements for electric heating in or on furnaces
- F27D11/02—Ohmic resistance heating
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D5/00—Supports, screens, or the like for the charge within the furnace
- F27D5/0006—Composite supporting structures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0001—Heating elements or systems
- F27D99/0006—Electric heating elements or system
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
- C04B2235/3427—Silicates other than clay, e.g. water glass
- C04B2235/3463—Alumino-silicates other than clay, e.g. mullite
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
- C04B2235/30—Constituents and secondary phases not being of a fibrous nature
- C04B2235/38—Non-oxide ceramic constituents or additives
- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3886—Refractory metal nitrides, e.g. vanadium nitride, tungsten nitride
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
- C04B2235/70—Aspects relating to sintered or melt-casted ceramic products
- C04B2235/80—Phases present in the sintered or melt-cast ceramic products other than the main phase
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Composite Materials (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Resistance Heating (AREA)
- Furnace Details (AREA)
- Tunnel Furnaces (AREA)
- Ceramic Products (AREA)
Description
2:被焼成物通路
3、5:電気ヒータ、31:発熱部、32:通電端子
4:耐火性支持板、41:セラミックス支持板、42:SiC系セラミックス板
Claims (5)
- 炉内を少なくとも上方から下方に向けて加熱する電気ヒータを備えた電気焼成炉における電気ヒータの支持構造において、SiC系セラミックス板上に積層した電気絶縁性のセラミックス支持板の上面に、電気ヒータの発熱部を載置し、支持させたことを特徴とするヒータの支持構造。
- 電気ヒータが2珪化モリブデン系サーメット主体の電気抵抗発熱体からなる電気ヒータであって、セラミックス支持板がアルミナセラミックスまたはアルミナ−ムライトセラミックスである請求項1に記載のヒータの支持構造。
- 前記SiC系セラミックス板が、再結晶SiC、焼結SiC、窒化物結合SiCまたはSi含浸SiCを主体としたセラミックス板である請求項1または2に記載のヒータの支持構造。
- 前記電気焼成炉が、SiC系の被焼成物を最高温度が1300℃以上の高温で焼成するものである請求項3に記載のヒータの支持構造。
- 前記電気焼成炉が連続炉であって、1200℃以下の温度領域では前記SiC系セラミックス板としてSi含浸SiCを主体としたセラミックス板を使用し、1200℃超えの領域では、再結晶SiC、窒化物結合SiCまたは焼結SiCを主体としたセラミックス板を使用する請求項4に記載のヒータの支持構造。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007553926A JP5134375B2 (ja) | 2006-01-13 | 2007-01-11 | ヒータの支持構造 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006005596 | 2006-01-13 | ||
JP2006005596 | 2006-01-13 | ||
PCT/JP2007/050211 WO2007080909A1 (ja) | 2006-01-13 | 2007-01-11 | ヒータの支持構造 |
JP2007553926A JP5134375B2 (ja) | 2006-01-13 | 2007-01-11 | ヒータの支持構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2007080909A1 JPWO2007080909A1 (ja) | 2009-06-11 |
JP5134375B2 true JP5134375B2 (ja) | 2013-01-30 |
Family
ID=38256314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007553926A Active JP5134375B2 (ja) | 2006-01-13 | 2007-01-11 | ヒータの支持構造 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8411723B2 (ja) |
EP (1) | EP1972878B1 (ja) |
JP (1) | JP5134375B2 (ja) |
KR (1) | KR20080078905A (ja) |
WO (1) | WO2007080909A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20080078905A (ko) * | 2006-01-13 | 2008-08-28 | 니뽄 가이시 가부시키가이샤 | 히터의 지지 구조 |
DE102008006894A1 (de) * | 2008-01-31 | 2009-08-06 | Karrena Gmbh | Auskleidung eines Feuerungsraums |
JP5270941B2 (ja) * | 2008-03-24 | 2013-08-21 | 日本碍子株式会社 | 加熱炉 |
CN102278890B (zh) * | 2011-08-18 | 2014-04-09 | 苏州大学 | 电加热炉 |
CN104640248B (zh) * | 2015-02-28 | 2016-03-23 | 广东美的暖通设备有限公司 | 电加热器的支撑组件 |
JP2022053947A (ja) * | 2020-09-25 | 2022-04-06 | 日本電気硝子株式会社 | 加熱装置及びガラスの製造方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62108992A (ja) * | 1985-11-05 | 1987-05-20 | 光洋リンドバ−グ株式会社 | 高温連続加熱炉 |
JPH06236794A (ja) * | 1992-03-05 | 1994-08-23 | Riedhammer Gmbh & Co Kg | 工業用炉用の加熱管,工業用炉及び炉を加熱する方法 |
JPH0814769A (ja) * | 1994-06-29 | 1996-01-19 | Ngk Insulators Ltd | 焼成用台車 |
JP2003112984A (ja) * | 2001-10-04 | 2003-04-18 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | 炉材用耐火物および炉ならびに炉壁の表面処理方法 |
JP2005265324A (ja) * | 2004-03-19 | 2005-09-29 | Nippon Steel Corp | 誘導加熱装置 |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1832354A (en) * | 1927-02-17 | 1931-11-17 | New Jersey Zinc Co | Apparatus for reducing zinciferous materials |
DE1948724A1 (de) * | 1969-09-26 | 1971-04-08 | Riedhammer Ludwig Gmbh | Elektrische Heizeinrichtung an Tunneloefen |
US4011395A (en) * | 1975-09-15 | 1977-03-08 | Btu Engineering Company | Electric furnace heater |
JPS60254586A (ja) * | 1984-05-30 | 1985-12-16 | 株式会社デンソー | セラミツクヒ−タ |
JPS6112039A (ja) * | 1984-06-26 | 1986-01-20 | Mitsubishi Electric Corp | セラミツク基板 |
JPS6183825A (ja) * | 1984-10-02 | 1986-04-28 | Babcock Hitachi Kk | バ−ナ点火装置 |
JPS62136865A (ja) * | 1985-12-11 | 1987-06-19 | Hitachi Ltd | モジユ−ル実装構造 |
JPS63129062A (ja) * | 1986-11-14 | 1988-06-01 | 三菱商事株式会社 | Al↓2O↓3−SiC系複合焼結体及びその製造方法 |
JPH0467947A (ja) * | 1990-07-09 | 1992-03-03 | Nissan Motor Co Ltd | 積層型複合部材 |
DE69130205T2 (de) * | 1990-12-25 | 1999-03-25 | Ngk Insulators Ltd | Heizungsapparat für eine Halbleiterscheibe und Verfahren zum Herstellen desselben |
JP2647799B2 (ja) * | 1994-02-04 | 1997-08-27 | 日本碍子株式会社 | セラミックスヒーター及びその製造方法 |
EP0720416B1 (de) | 1994-12-29 | 2004-03-24 | Robert Bosch Gmbh | Keramische Heizeinrichtung, Verfahren zu deren Herstellung und deren Verwendung |
EP0781739B1 (en) * | 1995-12-26 | 1999-10-27 | Asahi Glass Company Ltd. | Jig for heat treatment and process for fabricating the jig |
US6025579A (en) * | 1996-12-27 | 2000-02-15 | Jidosha Kiki Co., Ltd. | Ceramic heater and method of manufacturing the same |
JP2000310491A (ja) | 1999-04-27 | 2000-11-07 | Tokai Konetsu Kogyo Co Ltd | 連続トンネル式電気焼成炉 |
JP2004162963A (ja) * | 2002-11-12 | 2004-06-10 | Sumitomo Electric Ind Ltd | ガス加熱方法及び加熱装置 |
KR20040055044A (ko) * | 2002-12-20 | 2004-06-26 | 우진물산 주식회사 | 전열매트 |
EP1612854A4 (en) * | 2003-04-07 | 2007-10-17 | Tokyo Electron Ltd | LOADING TABLE AND HEAT TREATMENT DEVICE WITH LOADING TABLE |
JP4238772B2 (ja) * | 2003-05-07 | 2009-03-18 | 東京エレクトロン株式会社 | 載置台構造及び熱処理装置 |
JP4454972B2 (ja) * | 2003-06-30 | 2010-04-21 | キヤノン株式会社 | 画像形成装置 |
JP2005340043A (ja) | 2004-05-28 | 2005-12-08 | Sumitomo Electric Ind Ltd | 加熱装置 |
KR20080078905A (ko) * | 2006-01-13 | 2008-08-28 | 니뽄 가이시 가부시키가이샤 | 히터의 지지 구조 |
-
2007
- 2007-01-11 KR KR1020087017423A patent/KR20080078905A/ko not_active Application Discontinuation
- 2007-01-11 WO PCT/JP2007/050211 patent/WO2007080909A1/ja active Application Filing
- 2007-01-11 JP JP2007553926A patent/JP5134375B2/ja active Active
- 2007-01-11 EP EP07706558.9A patent/EP1972878B1/en active Active
-
2008
- 2008-07-07 US US12/168,544 patent/US8411723B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62108992A (ja) * | 1985-11-05 | 1987-05-20 | 光洋リンドバ−グ株式会社 | 高温連続加熱炉 |
JPH06236794A (ja) * | 1992-03-05 | 1994-08-23 | Riedhammer Gmbh & Co Kg | 工業用炉用の加熱管,工業用炉及び炉を加熱する方法 |
JPH0814769A (ja) * | 1994-06-29 | 1996-01-19 | Ngk Insulators Ltd | 焼成用台車 |
JP2003112984A (ja) * | 2001-10-04 | 2003-04-18 | Kitakyushu Foundation For The Advancement Of Industry Science & Technology | 炉材用耐火物および炉ならびに炉壁の表面処理方法 |
JP2005265324A (ja) * | 2004-03-19 | 2005-09-29 | Nippon Steel Corp | 誘導加熱装置 |
Also Published As
Publication number | Publication date |
---|---|
US8411723B2 (en) | 2013-04-02 |
EP1972878A4 (en) | 2011-04-06 |
KR20080078905A (ko) | 2008-08-28 |
JPWO2007080909A1 (ja) | 2009-06-11 |
EP1972878A1 (en) | 2008-09-24 |
EP1972878B1 (en) | 2016-09-28 |
WO2007080909A1 (ja) | 2007-07-19 |
US20080272111A1 (en) | 2008-11-06 |
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