JP5089580B2 - 圧縮可能なセンサ本体を用いる圧力センサ - Google Patents
圧縮可能なセンサ本体を用いる圧力センサ Download PDFInfo
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- JP5089580B2 JP5089580B2 JP2008513634A JP2008513634A JP5089580B2 JP 5089580 B2 JP5089580 B2 JP 5089580B2 JP 2008513634 A JP2008513634 A JP 2008513634A JP 2008513634 A JP2008513634 A JP 2008513634A JP 5089580 B2 JP5089580 B2 JP 5089580B2
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- JP
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- Prior art keywords
- sensor
- pressure
- pressure sensor
- strain
- deformable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
- G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
- G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
- G01L13/025—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements using diaphragms
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Description
Claims (17)
- 圧縮可能材料で形成された変形可能センサ本体と、
第1及び第2の圧力を受けるように構成された前記変形可能センサ本体への第1及び第2の圧力接続部と、
前記第1及び第2の圧力の圧力差に応じて変化する電気特性を提供する前記変形可能センサ本体から延びる差圧電気接続部と、
前記変形可能センサ本体の変形に応じて変化する電気特性を有する前記変形可能センサ本体中に完全に埋設された埋込み歪みセンサと、
前記変形可能センサ本体の外側から前記埋込み歪みセンサまで延びる電気接続部とを具備する圧力センサ。 - 前記変形可能センサ本体が圧縮可能なガラス材料で形成されたガラスセンサ本体を含む請求項1に記載の圧力センサ。
- 前記変形可能センサ本体が歪み計を含む請求項1に記載の圧力センサ。
- 前記歪み計が基板上に設けられている請求項3に記載の圧力センサ。
- 前記歪み計が歪みに応答して変化する抵抗を持つ抵抗要素を含む請求項3に記載の圧力センサ。
- 前記歪みセンサが補償センサを含む請求項1に記載の圧力センサ。
- 温度センサを含む請求項1に記載の圧力センサ。
- 前記歪みセンサがコンデンサを含む請求項1に記載の圧力センサ。
- 前記圧力センサが前記変形可能センサ本体内にダイヤフラムを含む請求項1に記載の圧力センサ。
- 前記ダイヤフラムが印加圧力に応答して偏倚するように構成された請求項9に記載の圧力センサ。
- 前記ダイヤフラムが前記圧力センサに印加された差圧に応答して偏倚するように構成された請求項10に記載の圧力センサ。
- 前記圧力センサが隔離流体を介してプロセス流体に結合する請求項1に記載の圧力センサ。
- 前記圧力センサがプロセス流体に直接接触するように構成された請求項1に記載の圧力センサ。
- 請求項1の圧力センサに結合される送信機回路を含むプロセス制御送信機。
- 前記送信機回路が、前記圧力センサの電気特性に基づいて、差圧とライン圧力とを測定するように構成された請求項14に記載のプロセス制御送信機。
- 前記埋込み歪みセンサの電気特性が、印加されたライン圧力に関係する請求項1に記載の圧力センサ。
- 前記埋込み歪みセンサの電気特性が、印加された差圧に関係する請求項1に記載の圧力センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/138,977 | 2005-05-26 | ||
US11/138,977 US7401522B2 (en) | 2005-05-26 | 2005-05-26 | Pressure sensor using compressible sensor body |
PCT/US2006/019955 WO2006127726A1 (en) | 2005-05-26 | 2006-05-23 | Pressure sensor using compressible sensor body |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008542717A JP2008542717A (ja) | 2008-11-27 |
JP5089580B2 true JP5089580B2 (ja) | 2012-12-05 |
Family
ID=36950365
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008513634A Expired - Fee Related JP5089580B2 (ja) | 2005-05-26 | 2006-05-23 | 圧縮可能なセンサ本体を用いる圧力センサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US7401522B2 (ja) |
EP (1) | EP1883798B1 (ja) |
JP (1) | JP5089580B2 (ja) |
CN (1) | CN101180526B (ja) |
RU (1) | RU2400719C2 (ja) |
WO (1) | WO2006127726A1 (ja) |
Families Citing this family (82)
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CN102062652A (zh) * | 2009-11-12 | 2011-05-18 | 无锡千里信步精密机电科技有限公司 | 应用混入微小构造体的柔软感应材料的压力传感器装置及压力信号感应方法 |
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-
2005
- 2005-05-26 US US11/138,977 patent/US7401522B2/en active Active
-
2006
- 2006-05-23 RU RU2007148914/28A patent/RU2400719C2/ru not_active IP Right Cessation
- 2006-05-23 JP JP2008513634A patent/JP5089580B2/ja not_active Expired - Fee Related
- 2006-05-23 CN CN2006800176407A patent/CN101180526B/zh active Active
- 2006-05-23 EP EP06770976A patent/EP1883798B1/en active Active
- 2006-05-23 WO PCT/US2006/019955 patent/WO2006127726A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
CN101180526B (zh) | 2011-04-13 |
EP1883798A1 (en) | 2008-02-06 |
US7401522B2 (en) | 2008-07-22 |
RU2007148914A (ru) | 2009-07-10 |
JP2008542717A (ja) | 2008-11-27 |
CN101180526A (zh) | 2008-05-14 |
WO2006127726A1 (en) | 2006-11-30 |
US20060278005A1 (en) | 2006-12-14 |
RU2400719C2 (ru) | 2010-09-27 |
EP1883798B1 (en) | 2012-05-23 |
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