JP5060297B2 - スイッチング装置 - Google Patents
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- 239000010432 diamond Substances 0.000 claims description 113
- 229910003460 diamond Inorganic materials 0.000 claims description 112
- 230000003287 optical effect Effects 0.000 claims description 40
- 230000015556 catabolic process Effects 0.000 claims description 33
- 239000002184 metal Substances 0.000 claims description 31
- 229910052751 metal Inorganic materials 0.000 claims description 31
- 238000005286 illumination Methods 0.000 claims description 29
- 239000000969 carrier Substances 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 22
- 230000005684 electric field Effects 0.000 claims description 19
- 230000005855 radiation Effects 0.000 claims description 16
- 238000010521 absorption reaction Methods 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 7
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 6
- 230000003993 interaction Effects 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052698 phosphorus Inorganic materials 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims description 3
- 230000005670 electromagnetic radiation Effects 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000011574 phosphorus Substances 0.000 claims description 3
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 2
- 239000001257 hydrogen Substances 0.000 claims description 2
- 239000002245 particle Substances 0.000 claims description 2
- 229910052717 sulfur Inorganic materials 0.000 claims description 2
- 239000011593 sulfur Substances 0.000 claims description 2
- 238000011017 operating method Methods 0.000 claims 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 230000000977 initiatory effect Effects 0.000 claims 1
- 230000004888 barrier function Effects 0.000 description 11
- 230000005284 excitation Effects 0.000 description 11
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000007547 defect Effects 0.000 description 6
- 238000000151 deposition Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 230000000903 blocking effect Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000002800 charge carrier Substances 0.000 description 3
- 229910052737 gold Inorganic materials 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000001465 metallisation Methods 0.000 description 3
- 150000002739 metals Chemical class 0.000 description 3
- 238000005086 pumping Methods 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 230000002459 sustained effect Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000004576 sand Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
- H01L31/102—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier
- H01L31/108—Devices sensitive to infrared, visible or ultraviolet radiation characterised by only one potential barrier the potential barrier being of the Schottky type
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
- H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
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- H—ELECTRICITY
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
- H01L31/118—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation of the surface barrier or shallow PN junction detector type, e.g. surface barrier alpha-particle detectors
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Description
ダイヤモンド体と;
前記ダイヤモンド体への少なくとも一つの第一金属接点で、ショットキー接点(Shottky contact)であり、スイッチされる印加電圧により逆バイアスに維持された時の前記ダイヤモンド体に隣接した領域中に空乏領域を形成する前記第一金属接点と;
前記スイッチング装置からの電流を運ぶように構成されたダイヤモンド体への少なくとも一つの第二金属接点で、一般にオーム接点である第二金属接点;及び
ショットキー接点に隣接した、ダイヤモンド体中の空乏領域を照明又は照射し、それにより電流を運ぶことができるキャリヤーの発生を開始させるように構成した照明又は照射手段と;
を含み、前記ダイヤモンド体が、前記少なくとも一つの第一金属接点と接触した固有ダイヤモンドの一部分を含み、その固有ダイヤモンドが、硼素のようなドーパント原子を含めた充分低いレベルの不純物を有し、そのため電子特性が固有のキャリヤーによって支配され、そのようなキャリヤーについて大きなキャリヤー易動度及び寿命を有することを特徴とする、
スイッチング装置。
本発明の装置は、比較的低いインピーダンス及び比較的低い光学的スイッチングフラックスをもってオン状態で大きな電流を維持することができ、好ましくはスイッチされる高電圧の存在下でスイッチ切ることもできる高電圧ダイヤモンド系スイッチング装置である。
i) 二つの主要表面を与える本質的に固有の又は高純度のダイヤモンド層で、それらの表面の間の厚さが、装置の適用で印加電圧が、ダイヤモンドの自然的電子なだれ降伏のための電圧より確実に低くなるように設計されているダイヤモンド層。
ii) 前記固有ダイヤモンド層の一つの主要表面上のショットキー障壁接点で、好ましくは装置をスイッチング又は制御するために用いられる放射線に対し半透明にされた有孔金属層又は他の手段により形成されたショットキー障壁接点であり、スイッチすべき高電圧によりそのスイッチのオフ状態で逆バイアスに維持されるショットキー障壁接点。
iii) 固有ダイヤモンド層の第二主要表面上の第二接点で、好ましくはオーム接点であり、一層好ましくは金属接点と組合せた多量にドープしたダイヤモンド層を使用することにより形成した第二接点。
iv) 前記ダイヤモンド中にキャリヤーを発生することができ、装置をスイッチするのに用いられる一つ以上の選択された波長の光を与える光源。この光源は、ショットキー接点により形成された空乏層の少なくとも一部分を照明するように構成されている。照明は、ショットキー接点を形成する有孔金属層を通過するのが好ましい。
本発明の装置は、ISE−TCADシミュレーションを用いてモデム化され、以上の条件を使用した。
Claims (34)
- スイッチング装置であって、
ダイヤモンド体と;
前記ダイヤモンド体への少なくとも一つの第一金属接点で、スイッチされる印加電圧により逆バイアスに維持された場合の前記ダイヤモンド体の隣接領域中の空乏領域を形成するように構成されたショットキー接点である第一金属接点と;
前記スイッチング装置からの電流を運ぶように構成された前記ダイヤモンド体への少なくとも一つの第二金属接点と;
ショットキー接点に隣接した、ダイヤモンド体中の空乏領域を照明又は照射し、それにより電流を運ぶことができるキャリヤーの発生を開始させるように構成された照明又は照射手段と;を含み、
前記ダイヤモンド体が、前記少なくとも一つの第一金属接点と接触した固有ダイヤモンドの一部分を含み、前記固有ダイヤモンドの一部分は、全体レベルとして5ppmより低い不純物を有し、
ここで前記スイッチング装置は、前記ショットキー接点が電子なだれ降伏電圧の近くで逆バイアスになるよう保持され、かつ前記空乏領域の照明又は照射が、前記スイッチング装置を補助電子なだれ降伏にするのに充分であるように構成されていることを特徴とする、前記スイッチング装置。 - 少なくとも一つの第二金属接点が、オーム接点であるか、又はその一部である、請求項1に記載のスイッチング装置。
- オーム接点が、高度にドープされたダイヤモンド層を、第二金属接点と組合せて含む、請求項2に記載のスイッチング装置。
- 固有ダイヤモンド部分が、ダイヤモンド体中の固有ダイヤモンド層を含む、請求項1に記載のスイッチング装置。
- 固有ダイヤモンド層が、使用中、印加電圧で固有ダイヤモンド中に自然的電子なだれ降伏を防止するのに充分な厚さを有する、請求項4に記載のスイッチング装置。
- ダイヤモンド体がCVDダイヤモンド体である、請求項1に記載のスイッチング装置。
- ショットキー接点が照明又は照射に対し半透明である、請求項1に記載のスイッチング装置。
- ショットキー接点が、有孔金属層を含む、請求項7に記載のスイッチング装置。
- 固有ダイヤモンド部分中の全不純物濃度が1ppmより低い、請求項1に記載のスイッチング装置。
- 固有ダイヤモンド部分中の全不純物濃度が0.3ppmより低い、請求項9に記載のスイッチング装置。
- 固有ダイヤモンド部分中の全不純物濃度が0.1ppmより低い、請求項10に記載のスイッチング装置。
- 固有ダイヤモンド部分中の全不純物濃度が0.03ppmより低い、請求項11に記載のスイッチング装置。
- 固有ダイヤモンド部分中の全不純物濃度が0.01ppmより低い、請求項12に記載のスイッチング装置。
- 少なくとも一つの第一金属接点と接触した固有ダイヤモンド部分中の不純物が、硼素、燐、及び硫黄から選択されたドーピング不純物を含み、そのドーピング不純物のレベルが0.1ppmより小さい、請求項1に記載のスイッチング装置。
- ドーピング不純物のレベルが0.03ppmより小さい、請求項14に記載のスイッチング装置。
- ドーピング不純物のレベルが0.01ppmより小さい、請求項15に記載のスイッチング装置。
- ドーピング不純物のレベルが0.003ppmより小さい、請求項16に記載のスイッチング装置。
- ドーピング不純物のレベルが0.001ppmより小さい、請求項17に記載のスイッチング装置。
- 照射手段が、電磁気放射線源を含む、請求項1に記載のスイッチング装置。
- 電磁気放射線源が、180nm〜500nmの波長範囲中に入る放射線を生ずる、請求項19に記載のスイッチング装置。
- 照明又は照射手段が、ダイヤモンド中にキャリヤーを発生する一つ以上の選択された波長の光を与える光源を含む、請求項1に記載のスイッチング装置。
- 照射手段が、X線、電子、又はα粒子を生ずる源を含む、請求項1に記載のスイッチング装置。
- 更に、ダイヤモンド体に一つ以上のキャリヤー発生層を含み、それらが適当な照射で帯電キャリヤーの発生を増大するか又は変更するように構成されている、請求項1に記載のスイッチング装置。
- 一つ以上のキャリヤー発生層が、水素、硼素、窒素、及び燐から選択された不純物により形成されている、請求項23に記載のスイッチング装置。
- ダイヤモンド体の一つ以上の表面が、キャリヤーを発生することができる光源と、ショットキー接点の空乏層との相互作用を増大するように角度がつけられているか、又はプロファイルされている、請求項21に記載のスイッチング装置。
- ダイヤモンド体の一つ以上の表面が、キャリヤーを発生することができる光源と、キャリヤー発生層との相互作用を増大するように角度がつけられているか、又はプロファイルされている、請求項23に記載のスイッチング装置。
- ショットキー接点が、光源とダイヤモンド空乏領域との相互作用を改良するようなやり方で孔が開けられている、請求項21に記載のスイッチング装置。
- ショットキー接点の孔の特徴的大きさが、ダイヤモンド空乏領域での放射線吸収深度と同じである、請求項27に記載のスイッチング装置。
- ショットキー接点中の構造面の間隔及び鋭さを増大することによって決まる電界増加構造をショットキー接点中に設計することにより、光学的手段による電子なだれ降伏閾値電圧を制御できるようにした、請求項21に記載のスイッチング装置。
- 2以上の非零レベルの光学的強度を用いて操作され、それらのレベルの光学的強度が同じか又は異なる波長のところにある、請求項21に記載のスイッチング装置。
- 前記2以上のレベルの光学的強度が同じ波長のところにある、請求項30に記載のスイッチング装置。
- 前記スイッチング装置は、補助電子なだれ降伏の後、その補助電子なだれ降伏を保持するのに充分な点まで印加電圧を減少し、前記照明又は照射が取り除かれたとき前記スイッチング装置が電子なだれから開放されてスイッチオフされるように、構成される、請求項1に記載のスイッチング装置。
- 請求項1に記載のスイッチング装置の作動方法であって、
前記スイッチング装置を、電子なだれ降伏電圧に近い電圧で逆バイアスになるよう保持するステップと、
前記空乏領域の照明又は照射によって、前記スイッチング装置を補助電子なだれ降伏にするステップと、
よりなる前記作動方法。 - 請求項33に記載の作動方法であって、
補助電子なだれ降伏に入った後、補助電子なだれ降伏を持続するのに丁度充分な点まで印加電圧を下げるステップと、
前記空乏領域の照明又は照射を取り除いて電子なだれ状態から脱出させ、それによりスイッチオフするステップと、
よりなる前記作動方法。
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GB0420177.8 | 2004-09-10 | ||
GB0420177A GB0420177D0 (en) | 2004-09-10 | 2004-09-10 | Switching device |
US62106604P | 2004-10-25 | 2004-10-25 | |
US60/621,066 | 2004-10-25 | ||
PCT/IB2005/002654 WO2006027669A1 (en) | 2004-09-10 | 2005-09-08 | Switching device |
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JP2008512865A JP2008512865A (ja) | 2008-04-24 |
JP5060297B2 true JP5060297B2 (ja) | 2012-10-31 |
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EP (1) | EP1803161B1 (ja) |
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US8824178B1 (en) | 2009-12-31 | 2014-09-02 | Solarbridge Technologies, Inc. | Parallel power converter topology |
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US8842454B2 (en) | 2010-11-29 | 2014-09-23 | Solarbridge Technologies, Inc. | Inverter array with localized inverter control |
US9467063B2 (en) | 2010-11-29 | 2016-10-11 | Sunpower Corporation | Technologies for interleaved control of an inverter array |
US8611107B2 (en) | 2011-04-27 | 2013-12-17 | Solarbridge Technologies, Inc. | Method and system for controlling a multi-stage power inverter |
US8599587B2 (en) | 2011-04-27 | 2013-12-03 | Solarbridge Technologies, Inc. | Modular photovoltaic power supply assembly |
US9065354B2 (en) | 2011-04-27 | 2015-06-23 | Sunpower Corporation | Multi-stage power inverter for power bus communication |
US8922185B2 (en) | 2011-07-11 | 2014-12-30 | Solarbridge Technologies, Inc. | Device and method for global maximum power point tracking |
US8284574B2 (en) | 2011-10-17 | 2012-10-09 | Solarbridge Technologies, Inc. | Method and apparatus for controlling an inverter using pulse mode control |
US9276635B2 (en) | 2012-06-29 | 2016-03-01 | Sunpower Corporation | Device, system, and method for communicating with a power inverter using power line communications |
US9584044B2 (en) | 2013-03-15 | 2017-02-28 | Sunpower Corporation | Technologies for converter topologies |
US9564835B2 (en) | 2013-03-15 | 2017-02-07 | Sunpower Corporation | Inverter communications using output signal |
KR20160035582A (ko) * | 2013-07-25 | 2016-03-31 | 휴렛-팩커드 디벨롭먼트 컴퍼니, 엘.피. | 필드 강화 피처를 갖는 저항성 메모리 디바이스 |
US11063162B2 (en) * | 2018-10-14 | 2021-07-13 | Arizona Board Of Regents On Behalf Of Arizona State University | Current generation from radiation with diamond diode-based devices for detection or power generation |
CN111441033A (zh) * | 2020-02-13 | 2020-07-24 | 上海征世科技有限公司 | 一种用钻石制成的手触摸控制开关及其制备方法 |
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JP3329642B2 (ja) * | 1995-04-20 | 2002-09-30 | 株式会社東芝 | 半導体装置 |
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US6858080B2 (en) * | 1998-05-15 | 2005-02-22 | Apollo Diamond, Inc. | Tunable CVD diamond structures |
US6734515B1 (en) * | 1998-09-18 | 2004-05-11 | Mitsubishi Cable Industries, Ltd. | Semiconductor light receiving element |
SE0001860D0 (sv) | 2000-05-22 | 2000-05-22 | Abb Ab | A semiconductor device |
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2005
- 2005-09-08 JP JP2007530786A patent/JP5060297B2/ja not_active Expired - Fee Related
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