JP5059290B2 - 薄膜キャパシタ装置の電極および薄膜キャパシタ装置の電極形成方法 - Google Patents
薄膜キャパシタ装置の電極および薄膜キャパシタ装置の電極形成方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims description 40
- 239000010409 thin film Substances 0.000 title claims description 25
- 239000003990 capacitor Substances 0.000 title claims description 21
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical group [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 88
- 239000010410 layer Substances 0.000 claims description 75
- 229910052697 platinum Inorganic materials 0.000 claims description 41
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 25
- 239000012790 adhesive layer Substances 0.000 claims description 24
- 229910001936 tantalum oxide Inorganic materials 0.000 claims description 22
- 239000011521 glass Substances 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 21
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 21
- 239000004020 conductor Substances 0.000 claims description 20
- 229910000510 noble metal Inorganic materials 0.000 claims description 16
- 230000003647 oxidation Effects 0.000 claims description 12
- 238000007254 oxidation reaction Methods 0.000 claims description 12
- 238000000151 deposition Methods 0.000 claims description 9
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 8
- 229910044991 metal oxide Inorganic materials 0.000 claims description 8
- 150000004706 metal oxides Chemical class 0.000 claims description 8
- 239000001301 oxygen Substances 0.000 claims description 8
- 229910052760 oxygen Inorganic materials 0.000 claims description 8
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 3
- 239000002243 precursor Substances 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 3
- 238000011282 treatment Methods 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 2
- 238000001465 metallisation Methods 0.000 claims description 2
- 229910052703 rhodium Inorganic materials 0.000 claims description 2
- 239000010948 rhodium Substances 0.000 claims description 2
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 2
- 230000008569 process Effects 0.000 description 17
- 229910052715 tantalum Inorganic materials 0.000 description 17
- 238000000576 coating method Methods 0.000 description 16
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 238000000137 annealing Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 11
- 239000010936 titanium Substances 0.000 description 10
- 229910052454 barium strontium titanate Inorganic materials 0.000 description 8
- 229910052719 titanium Inorganic materials 0.000 description 8
- 230000015556 catabolic process Effects 0.000 description 7
- 239000010408 film Substances 0.000 description 7
- 230000035882 stress Effects 0.000 description 7
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 229910052451 lead zirconate titanate Inorganic materials 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000001590 oxidative effect Effects 0.000 description 3
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000000313 electron-beam-induced deposition Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910052758 niobium Inorganic materials 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 230000003938 response to stress Effects 0.000 description 2
- 229910052707 ruthenium Inorganic materials 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910015802 BaSr Inorganic materials 0.000 description 1
- 229920002449 FKM Polymers 0.000 description 1
- 229910020684 PbZr Inorganic materials 0.000 description 1
- 229910004168 TaNb Inorganic materials 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- VNSWULZVUKFJHK-UHFFFAOYSA-N [Sr].[Bi] Chemical compound [Sr].[Bi] VNSWULZVUKFJHK-UHFFFAOYSA-N 0.000 description 1
- 230000001464 adherent effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- JRPBQTZRNDNNOP-UHFFFAOYSA-N barium titanate Chemical compound [Ba+2].[Ba+2].[O-][Ti]([O-])([O-])[O-] JRPBQTZRNDNNOP-UHFFFAOYSA-N 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- IVUXZQJWTQMSQN-UHFFFAOYSA-N distrontium;oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[O-2].[Sr+2].[Sr+2].[Ta+5].[Ta+5] IVUXZQJWTQMSQN-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000007772 electrode material Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- BHEPBYXIRTUNPN-UHFFFAOYSA-N hydridophosphorus(.) (triplet) Chemical compound [PH] BHEPBYXIRTUNPN-UHFFFAOYSA-N 0.000 description 1
- 238000013339 in-process testing Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 description 1
- 230000004807 localization Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910052762 osmium Inorganic materials 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000012703 sol-gel precursor Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- VEALVRVVWBQVSL-UHFFFAOYSA-N strontium titanate Chemical compound [Sr+2].[O-][Ti]([O-])=O VEALVRVVWBQVSL-UHFFFAOYSA-N 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- 150000003608 titanium Chemical class 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 238000009279 wet oxidation reaction Methods 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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- H01G4/002—Details
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02183—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing tantalum, e.g. Ta2O5
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- H01L21/0223—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a process other than a deposition process formation by oxidation, e.g. oxidation of the substrate
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Description
図1を参照すると、本発明の特徴を有するサブコンポーネント10の断面図が示されている。本発明を図面に示されている例示的な実施形態を参照にして説明するが、本発明は多数の代わりの形態の実施形態で実施されることができることを理解すべきである。さらに、素子または材料の任意の適切な寸法、形状またはタイプが使用されることができる。
・5000Åの湿式酸化により開始ウェハを処理する
・下部電極を被覆する(BE)
・強誘電体前駆物質をスピンオン被着し、加熱する(FE)
・上部電極を被覆する(TE)
・キャパシタスタックをエッチングする
・良好な強誘電特性を確かめるためにポイント1を試験する
・中間層誘電体を被覆する(ILD)
・接触部を開く(CT)
・接続金属導体を被覆する(M3)
・接続金属導体をエッチングする
・生産性を調べるためにポイント2を試験する
・被覆ガラスを被着する
・パッドを開く(GL)
・最終的なパラメータ試験をする。
・Ta接着層を被覆する
・例えば、250℃においてウェハへ200Aを蒸着する。
・接着層を酸化する
・例えば、O2中において725℃で2分間RTAを酸化する。
・Pt電極を被覆する
・例えば、310℃においてウェハへ2500Aを蒸着する。
・RTP FE結晶化ステップのないプロセスで使用されるならば、接着アニールが行われることが望ましい
・例えば、O2中において725℃で30秒間、RTAをアニールする。
Claims (10)
- 薄膜のキャパシタ装置の電極において、
基体の上面に形成されたガラス層の上部表面に接着されている金属酸化物接着層と、
この金属酸化物接着層の上面上だけに直接配置されている貴金属の導体層とを具備しており、
前記金属酸化物接着層は完全に酸化されたタンタル酸化物層から形成され、
前記タンタル酸化物層からなる接着層と前記貴金属導体層とは同一形状を有し重ねられて配置されている薄膜のキャパシタ装置の電極。 - 前記貴金属の導体は、プラチナ、パラジウム、金、ロジウムからなるグループから選択される請求項1記載の電極。
- 前記タンタル酸化物接着層は五酸化タンタルで構成されている請求項1記載の電極。
- 貴金属の導体(24)はプラチナを含んでいる請求項1記載の電極。
- 薄膜のキャパシタ装置に電極を形成する方法において、
断面の厚さが均一なガラス基体の上部層の上面上だけに断面の厚さが均一なタンタル酸化物の接着層を直接付着させて被覆し、
このタンタル酸化物接着層は、タンタル金属を付着させ、それに続いて、酸素雰囲気環境中で予め定めた温度に付着したタンタル金属をさらす急速熱処理または金属付着システム内における酸化のいずれか一方を使用して完全に酸化することによって形成され、
300℃以上の温度で前記タンタル酸化物接着層上だけに前記タンタル酸化物接着層と同一形状の貴金属の導体を被着して薄膜のキャパシタ装置の下部電極を形成するステップを含んでいる薄膜のキャパシタ装置の電極形成方法。 - 前記タンタル酸化物接着層は五酸化タンタルで構成されている請求項5記載の方法。
- 薄膜のキャパシタ装置に電極を形成する方法において、
断面の厚さが均一なガラス基体の上部層の上面上だけに断面の厚さが均一なタンタル酸化物の接着層を直接付着させて被覆し、
このタンタル酸化物接着層はタンタル酸化物のターゲットのスパッタリングによって付着させ、
300℃以上の温度で前記タンタル酸化物接着層上だけに前記タンタル酸化物接着層と同一形状の貴金属の導体を被着して薄膜のキャパシタ装置の下部電極を形成するステップを含んでいる薄膜のキャパシタ装置の電極形成方法。 - 薄膜のキャパシタ装置に電極を形成する方法において、
断面の厚さが均一なガラス基体の上部層の上面上だけに断面の厚さが均一なタンタル酸化物の接着層を直接付着させて被覆し、
このタンタル酸化物接着層は、タンタル酸化物の前駆物質のMOCVDまたはMOD、またはゾル・ゲル付着とそれに続く熱酸化処理によって完全に酸化して形成され、
300℃以上の温度で前記タンタル酸化物接着層上だけに前記タンタル酸化物接着層と同一形状の貴金属の導体を被着して薄膜のキャパシタ装置の下部電極を形成するステップを含んでいる薄膜のキャパシタ装置の電極形成方法。 - 前記貴金属導体は蒸着によって付着される請求項5記載の方法。
- 前記貴金属導体は加熱された基体上へ蒸着して付着される請求項5記載の方法。
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US10/147,093 US7335552B2 (en) | 2002-05-15 | 2002-05-15 | Electrode for thin film capacitor devices |
US10/147,093 | 2002-05-15 | ||
PCT/US2003/014934 WO2003098646A1 (en) | 2002-05-15 | 2003-05-12 | Improved electrode for thin film capacitor devices |
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