JP5003320B2 - 導電性バンプとその製造方法およびそれらを用いた電子部品実装構造体とその製造方法 - Google Patents
導電性バンプとその製造方法およびそれらを用いた電子部品実装構造体とその製造方法 Download PDFInfo
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Description
図1は、本発明の実施の形態1における導電性バンプ1の構造を概念的に説明する断面図である。
以下に、本発明の実施の形態2における導電性バンプについて、図8を用いて説明する。
以下に、本発明の実施の形態3における導電性バンプについて、図12を用いて説明する。
以下に、本発明の実施の形態4における導電性バンプについて、図14を用いて説明する。
以下に、本発明の実施の形態5における電子部品実装構造体について、図15を用いて説明する。なお、電子部品実装構造体は、上記各実施の形態の導電性バンプを介して、例えば半導体素子と回路基板とを接続したものである。そして、以下では、実施の形態1の導電性バンプ1を半導体素子に設けた例で説明する。
10 半導体素子(電子部品)
11 絶縁膜
12 電極端子
12a,106a,206a,303a 表面
14,24,25,27,34,54 バンプコア
14a コア柱状部
14b コア頭頂部
14c 中空部
14d 貫通孔
16,26,36,56,106,206 導電ペースト
18,28,38,58 導電ペースト捕獲部
27a 一辺
29 導電ペースト広がり防止壁
34a コア平坦部
34b コア壁部
54a 外部バンプコア
54b 内部バンプコア
58a 第1導電ペースト捕獲部
58b 第2導電ペースト捕獲部
101,201,301 容器
101a,201a 底部
103,203,303 感光性樹脂液
105,205,305 液晶マスク
105a,205a,305a,305b 開口部
107,207 平板
500,700,900 電子部品実装構造体
610,630,640 回路基板
612,632,642 接続端子
620 封止樹脂
Claims (6)
- 電子部品の電極端子の表面に形成した導電性バンプであって、
前記導電性バンプが弾性を有する光硬化性樹脂からなる絶縁性バンプコアと前記バンプコアの周囲に保持された導電ペーストとを、少なくとも備え、
前記バンプコアは前記電極端子の表面に逆凸形状に形成された断面構造を備え、
前記電極端子の表面と前記逆凸形状バンプコアのコア頭頂部との間の凹部により導電ペースト捕獲部を形成していることを特徴とする記載の導電性バンプ。 - 前記電子部品が、半導体ウェハー、半導体素子または回路基板であることを特徴とする請求項1に記載の導電性バンプ。
- 前記導電ペーストが、Ag、Au、Ag−Pd合金、Auめっき樹脂ボールまたははんだ粒子の少なくともいずれかを導電性フィラーとして含有することを特徴とする請求項1または2に記載の導電性バンプ。
- 前記導電ペーストが、樹脂成分として光硬化性樹脂、熱硬化性樹脂または熱可塑性樹脂を有することを特徴とする請求項1から3のいずれか1項に記載の導電性バンプ。
- 請求項1から請求項4のいずれか1項に記載の導電性バンプを電極端子の表面に形成した電子部品と、
接続端子を形成した回路基板と、を備え、
前記導電性バンプを介して、前記電子部品の前記電極端子と前記回路基板の前記接続端子を接続したことを特徴とする電子部品実装構造体。 - 電子部品の電極端子の表面に導電ペースト捕獲部を有する絶縁性バンプコアを光硬化性樹脂を用いた光造形法で形成し、前記バンプコアの前記導電ペースト捕獲部に導電ペーストを担持させて導電性バンプを形成する工程と、
前記電子部品に形成した前記導電性バンプと回路基板に形成した接続端子とを位置合わせして実装する工程と、
を少なくとも含むことを特徴とする電子部品実装構造体の製造方法。
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JP2007177920A JP5003320B2 (ja) | 2007-07-06 | 2007-07-06 | 導電性バンプとその製造方法およびそれらを用いた電子部品実装構造体とその製造方法 |
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JP2007177920A JP5003320B2 (ja) | 2007-07-06 | 2007-07-06 | 導電性バンプとその製造方法およびそれらを用いた電子部品実装構造体とその製造方法 |
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JP2009016633A JP2009016633A (ja) | 2009-01-22 |
JP2009016633A5 JP2009016633A5 (ja) | 2010-05-13 |
JP5003320B2 true JP5003320B2 (ja) | 2012-08-15 |
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US20180250935A1 (en) * | 2015-02-27 | 2018-09-06 | Seiko Epson Corporation | Electronic device |
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JPH08255851A (ja) * | 1995-03-17 | 1996-10-01 | Toshiba Corp | 半導体用パッケージ |
JP2000031204A (ja) * | 1998-07-07 | 2000-01-28 | Ricoh Co Ltd | 半導体パッケージの製造方法 |
JP2002134545A (ja) * | 2000-10-26 | 2002-05-10 | Oki Electric Ind Co Ltd | 半導体集積回路チップ及び基板、並びにその製造方法 |
JP2005294483A (ja) * | 2004-03-31 | 2005-10-20 | Fujikura Ltd | 電子部品及び電子装置 |
JP2006059917A (ja) * | 2004-08-18 | 2006-03-02 | Matsushita Electric Ind Co Ltd | Csp型半導体装置及びその製造方法 |
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