JP4986964B2 - 対流冷却構造を有する結晶成長炉 - Google Patents
対流冷却構造を有する結晶成長炉 Download PDFInfo
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- JP4986964B2 JP4986964B2 JP2008250165A JP2008250165A JP4986964B2 JP 4986964 B2 JP4986964 B2 JP 4986964B2 JP 2008250165 A JP2008250165 A JP 2008250165A JP 2008250165 A JP2008250165 A JP 2008250165A JP 4986964 B2 JP4986964 B2 JP 4986964B2
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- JP
- Japan
- Prior art keywords
- heater
- crystal growth
- heating chamber
- furnace
- growth furnace
- Prior art date
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/003—Heating or cooling of the melt or the crystallised material
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B11/00—Single-crystal growth by normal freezing or freezing under temperature gradient, e.g. Bridgman-Stockbarger method
- C30B11/002—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1004—Apparatus with means for measuring, testing, or sensing
- Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1016—Apparatus with means for treating single-crystal [e.g., heat treating]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1092—Shape defined by a solid member other than seed or product [e.g., Bridgman-Stockbarger]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Silicon Compounds (AREA)
- Furnace Charging Or Discharging (AREA)
- Furnace Details (AREA)
Description
さらに、少なくとも1つのヒータは、懸架されて上側本体に装着される頂部ヒータを含んでおり、この頂部ヒータは、上側ヒータおよび下側ヒータを含んでおり、下側ヒータは、上側ヒータよりも大きな外周を有する。
Claims (9)
- 上側本体および下側本体を含み、密封炉チャンバを形成するように前記下側本体が前記
上側本体の底部に装着される炉本体と、
前記炉本体の前記炉チャンバに収容され、内部空間を共に形成する上側隔壁、複数の側
方隔壁、および下側隔壁を含む加熱室であって、外部空間が前記複数の側方隔壁と前記炉
本体の内壁との間で画定される加熱室と、
前記加熱室の前記内部空間に収容される少なくとも1つのヒータと、
を備える、対流冷却構造を有する結晶成長炉であって、
前記加熱室の前記上側隔壁には、上側開口部が設けられ、前記下側隔壁には、中央開口部が設けられ、
前記加熱室に、上側ドア、下側ドア、上側ドライバ、および下側ドライバが設けられ、
前記上側ドライバが、前記上側隔壁の前記上側開口部に対応する前記上側ドアを選択的に
開閉するために設けられ、前記下側ドライバが、前記下側隔壁の前記中央開口部に対応す
る前記下側ドアを選択的に開閉するために設けられ、
前記少なくとも1つのヒータが、懸架されて前記上側本体に装着される頂部ヒータを含
み、
前記頂部ヒータが、上側ヒータおよび下側ヒータを含み、前記下側ヒータが前記上側ヒータよりも大きな外周を有することを特徴とする結晶成長炉。 - 出口を有し、前記炉本体内に深く延びる導入管をさらに備え、前記出口が前記加熱室の
下部で、前記中央開口部に隣接して配置される、請求項1に記載の結晶成長炉。 - 前記上側ドライバがネジとモータを含む、請求項1に記載の結晶成長炉。
- 前記下側ドライバがネジとモータを含む、請求項1に記載の結晶成長炉。
- 前記加熱室の前記複数の隔壁が、断熱上側カバー構造を共に形成するように前記上側隔
壁の底部に配列され固定される、請求項1に記載の結晶成長炉。 - 前記加熱室が、内側断熱層と外側保温層を含む2層構造を採用する、請求項1に記載の
結晶成長炉。 - 台板および複数の支持柱を有する支持台をさらに備え、前記台板が前記加熱室の前記内
部空間内に配置され、前記複数の支持柱によって前記下側本体に固定され、
前記少なくとも1つのヒータが、前記支持台の前記台板と一緒に組み立てられる底部ヒ
ータを含む、請求項1に記載の結晶成長炉。 - 前記頂部ヒータの前記上側ヒータが、前記上側ヒータにそれぞれ電気的に接続される2
つのグラファイト電極を含む、請求項1に記載の結晶成長炉。 - 前記頂部ヒータの前記下側ヒータが、前記下側ヒータにそれぞれ電気的に接続される2
つのグラファイト電極を含む、請求項1に記載の結晶成長炉。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW096149221A TW200928018A (en) | 2007-12-21 | 2007-12-21 | Crystal-growing furnace with convectional cooling structure |
TW096149221 | 2007-12-21 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2009150637A JP2009150637A (ja) | 2009-07-09 |
JP4986964B2 true JP4986964B2 (ja) | 2012-07-25 |
Family
ID=40690082
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2008250165A Expired - Fee Related JP4986964B2 (ja) | 2007-12-21 | 2008-09-29 | 対流冷却構造を有する結晶成長炉 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8062423B2 (ja) |
JP (1) | JP4986964B2 (ja) |
DE (1) | DE102008026144B4 (ja) |
TW (1) | TW200928018A (ja) |
Families Citing this family (26)
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TW200928018A (en) * | 2007-12-21 | 2009-07-01 | Green Energy Technology Inc | Crystal-growing furnace with convectional cooling structure |
TW200932963A (en) * | 2008-01-29 | 2009-08-01 | Green Energy Technology Inc | Crystal growing furnace with heating improvement structure |
KR100902859B1 (ko) * | 2009-02-17 | 2009-06-16 | (주) 썸백엔지니어링 | 태양전지용 실리콘 제조용 캐스팅 장치 |
IT1396761B1 (it) * | 2009-10-21 | 2012-12-14 | Saet Spa | Metodo e dispositivo per l'ottenimento di un materiale semiconduttore multicristallino, in particolare silicio |
CN101949056B (zh) * | 2010-09-25 | 2013-01-30 | 王敬 | 在坩埚侧壁底端设置有保温部件的定向凝固炉 |
US8562740B2 (en) * | 2010-11-17 | 2013-10-22 | Silicor Materials Inc. | Apparatus for directional solidification of silicon including a refractory material |
US9352389B2 (en) * | 2011-09-16 | 2016-05-31 | Silicor Materials, Inc. | Directional solidification system and method |
TWI539039B (zh) * | 2012-01-26 | 2016-06-21 | 希利柯爾材料股份有限公司 | 矽的純化方法 |
EP2864529A1 (en) * | 2012-06-25 | 2015-04-29 | Silicor Materials Inc. | Lining for surfaces of a refractory crucible for purification of silicon melt and method of purification of the silicon melt using that crucible (s) for melting and further directional solidification |
CN103014851B (zh) * | 2012-12-25 | 2016-01-27 | 南昌大学 | 一种生产定向凝固多晶硅锭的方法 |
TWI643983B (zh) | 2013-03-14 | 2018-12-11 | 美商希利柯爾材料股份有限公司 | 定向凝固系統及方法 |
GB201319671D0 (en) | 2013-11-07 | 2013-12-25 | Ebner Ind Ofenbau | Controlling a temperature of a crucible inside an oven |
CN103615891B (zh) * | 2013-11-20 | 2016-10-05 | 合肥日新高温技术有限公司 | 一种真空气氛高压碳板炉 |
TWM485251U (zh) * | 2014-04-03 | 2014-09-01 | Globalwafers Co Ltd | 晶體生長裝置及其保溫罩 |
CN105648525B (zh) * | 2014-11-17 | 2018-07-10 | 镇江荣德新能源科技有限公司 | 用于多晶硅定向凝固工艺的多晶炉 |
TWI614473B (zh) * | 2015-07-20 | 2018-02-11 | 茂迪股份有限公司 | 長晶爐設備 |
US20180347071A1 (en) * | 2015-07-27 | 2018-12-06 | Corner Star Limited | Systems and methods for low-oxygen crystal growth using a double-layer continuous czochralski process |
CN105088338A (zh) * | 2015-08-14 | 2015-11-25 | 晶科能源有限公司 | 一种多晶铸锭炉及排气装置 |
CN108048903A (zh) * | 2016-02-03 | 2018-05-18 | 陈鸽 | 一种改变载气流向的引流装置 |
AU2017382377B2 (en) * | 2016-12-22 | 2021-03-18 | Etran, Inc. | Elevated transportation system |
CN107523865A (zh) * | 2017-09-28 | 2017-12-29 | 浙江晶盛机电股份有限公司 | 一种定向水冷散热的节能型高效多晶硅铸锭炉 |
JP7186534B2 (ja) * | 2018-07-25 | 2022-12-09 | 昭和電工株式会社 | 結晶成長装置 |
CN109295495B (zh) * | 2018-11-19 | 2020-08-04 | 江苏斯力康科技有限公司 | 利于控制定向凝固平直液固界面的温场调控机构 |
CN110184651A (zh) * | 2019-07-17 | 2019-08-30 | 晶科能源有限公司 | 一种多晶铸锭炉 |
CN112857039B (zh) * | 2021-03-06 | 2023-08-15 | 陕西万豪钛金特材科技有限公司 | 一种基于合金熔炼的烧结炉及冷却方法 |
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-
2007
- 2007-12-21 TW TW096149221A patent/TW200928018A/zh not_active IP Right Cessation
-
2008
- 2008-05-21 US US12/153,545 patent/US8062423B2/en not_active Expired - Fee Related
- 2008-05-30 DE DE102008026144A patent/DE102008026144B4/de not_active Expired - Fee Related
- 2008-09-29 JP JP2008250165A patent/JP4986964B2/ja not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US20090158995A1 (en) | 2009-06-25 |
JP2009150637A (ja) | 2009-07-09 |
DE102008026144B4 (de) | 2013-02-14 |
DE102008026144A1 (de) | 2009-06-25 |
US8062423B2 (en) | 2011-11-22 |
TWI363109B (ja) | 2012-05-01 |
TW200928018A (en) | 2009-07-01 |
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