JP4963611B2 - シリサイド接合体の製造方法およびシリサイド接合体 - Google Patents
シリサイド接合体の製造方法およびシリサイド接合体 Download PDFInfo
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- JP4963611B2 JP4963611B2 JP2007012805A JP2007012805A JP4963611B2 JP 4963611 B2 JP4963611 B2 JP 4963611B2 JP 2007012805 A JP2007012805 A JP 2007012805A JP 2007012805 A JP2007012805 A JP 2007012805A JP 4963611 B2 JP4963611 B2 JP 4963611B2
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/021—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles in a direct manner, e.g. direct copper bonding [DCB]
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/56—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides
- C04B35/565—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide
- C04B35/575—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on carbides or oxycarbides based on silicon carbide obtained by pressure sintering
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- C—CHEMISTRY; METALLURGY
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- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/32—Ceramic
- C04B2237/36—Non-oxidic
- C04B2237/365—Silicon carbide
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/403—Refractory metals
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/405—Iron metal group, e.g. Co or Ni
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/30—Composition of layers of ceramic laminates or of ceramic or metallic articles to be joined by heating, e.g. Si substrates
- C04B2237/40—Metallic
- C04B2237/405—Iron metal group, e.g. Co or Ni
- C04B2237/406—Iron, e.g. steel
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/704—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the ceramic layers or articles
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/70—Forming laminates or joined articles comprising layers of a specific, unusual thickness
- C04B2237/706—Forming laminates or joined articles comprising layers of a specific, unusual thickness of one or more of the metallic layers or articles
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Products (AREA)
- Resistance Heating (AREA)
- Electrodes Of Semiconductors (AREA)
Description
本発明のシリサイド接合体は、炭化ケイ素を主成分とする部材と、コバール材とを接触させた後、接触させたこれら部材およびコバール材を熱処理して接合することにより製造される。
(炭化ケイ素焼結体)
炭化ケイ素焼結体の原料として用いられる炭化ケイ素粉末としては、α型、β型、非晶質あるいはこれらの混合物等が挙げられるが、特に、焼結体の熱膨張率の点から、β型炭化ケイ素粉末が好適である。このβ型炭化ケイ素粉末のグレードには特に制限はなく、一般に市販されているβ型炭化ケイ素粉末を適宜用いることができる。炭化ケイ素粉末の粒径は、高密度化の観点からは小さいことが好ましく、通常0.01〜10μm程度、特には0.05〜5μm程度が好適である。粒径が0.01μm未満であると、計量、混合などの処理工程における取扱いが困難となり、一方、5μmを超えると比表面積が小さくなり、すなわち隣接する粉体との接触面積が小さくなって、高密度化が困難となるため、いずれも好ましくない。
(炭化ケイ素成形体)
炭化ケイ素成形体を製造するにあたっては、まず、原料となる炭化ケイ素粉末と、炭素源と、所望により有機バインダーや消泡剤等とを溶媒中に溶解または分散することによりスラリー状の混合粉体を製造する。このスラリー状の混合粉体を、溶解、分散時に十分に攪拌混合することにより、成形後に得られるグリーン体中に、均一に気孔を分散させることができる。
(シリサイド接合体の製造)
<実施例1>
厚さ0.20mmのコバール材(Ni:29%、Co:17%、Fe:53.5%、Mn:0.3%、Se:0.2%)を2枚の厚さ2mmの炭化ケイ素材で挟んだ状態(SiC/コバール/SiC)で保持し、800℃5時間の条件で熱処理することにより接合させた。その結果を、図2(a)〜(c)の写真図および下記の表1中に示す。
コバール材に代えて、厚さ0.50mmのモリブデン材(Mo)を2枚の厚さ2mmの炭化ケイ素材で挟んだ状態(SiC/Mo/SiC)で保持し、800℃5時間の条件で熱処理することにより接合を試みたが、SiC−Mo間はこの条件では接合できなかった。温度1000℃付近からSiCとMoとの反応は生じるが、面同士を加圧する接合方法ではまったく未反応であった。
厚さ0.20mmのコバール材(Ni:29%、Co:17%、Fe:53.5%、Mn:0.3%、Se:0.2%)およびNi箔を、2枚の厚さ2mmの炭化ケイ素材で挟んだ状態(SiC/Ni/コバール/SiC)で保持し、800℃5時間の条件で熱処理することにより接合させた。
下記の表2に、炭化ケイ素材とコバール材とを熱処理により接合して得られたSiC−コバール接合体における各部の組成分析結果を示す(図5(a)〜(c)の写真図参照)。
2 コバール材
10 シリサイド接合体
A コバール層
B SiC層
C,C1,C2 シリサイド層
Claims (2)
- 炭化ケイ素を主成分とする部材と、コバール材とを接触させる工程と、接触させた該部材およびコバール材を熱処理温度600℃〜1400℃にて熱処理して接合する工程と、を含むことを特徴とするシリサイド接合体の製造方法。
- 請求項1記載の製造方法により製造されたことを特徴とするシリサイド接合体。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007012805A JP4963611B2 (ja) | 2007-01-23 | 2007-01-23 | シリサイド接合体の製造方法およびシリサイド接合体 |
DE102008005323A DE102008005323A1 (de) | 2007-01-23 | 2008-01-21 | Silicidverbindung und Verfahren zur Herstellung derselben |
US12/017,761 US7807269B2 (en) | 2007-01-23 | 2008-01-22 | Silicide joint and method for manufacturing the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007012805A JP4963611B2 (ja) | 2007-01-23 | 2007-01-23 | シリサイド接合体の製造方法およびシリサイド接合体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2008179491A JP2008179491A (ja) | 2008-08-07 |
JP4963611B2 true JP4963611B2 (ja) | 2012-06-27 |
Family
ID=39531073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007012805A Expired - Fee Related JP4963611B2 (ja) | 2007-01-23 | 2007-01-23 | シリサイド接合体の製造方法およびシリサイド接合体 |
Country Status (3)
Country | Link |
---|---|
US (1) | US7807269B2 (ja) |
JP (1) | JP4963611B2 (ja) |
DE (1) | DE102008005323A1 (ja) |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60127271A (ja) * | 1983-12-14 | 1985-07-06 | 株式会社日立製作所 | 非酸化物系セラミックスと鋼との接合方法 |
JPS60136340A (ja) * | 1983-12-26 | 1985-07-19 | Hitachi Ltd | 炭化ケイ素と低融点ガラスの接合構造 |
JPS61226501A (ja) * | 1985-03-29 | 1986-10-08 | Kyocera Corp | セラミツクタ−ボロ−タ |
JPH06102580B2 (ja) * | 1986-02-03 | 1994-12-14 | 株式会社日立製作所 | セラミックスと金属の接合体及び接合方法 |
JPS6350372A (ja) * | 1986-08-20 | 1988-03-03 | 日本鋼管株式会社 | セラミツクと金属との接合方法 |
JPH0942472A (ja) * | 1995-07-28 | 1997-02-14 | Kyocera Corp | バタフライ弁 |
JP2004128493A (ja) | 2002-09-13 | 2004-04-22 | Handotai Rikougaku Kenkyu Center:Kk | ニッケル−シリコン系化合物の形成方法、半導体装置の製造方法、および半導体装置 |
KR100558006B1 (ko) | 2003-11-17 | 2006-03-06 | 삼성전자주식회사 | 니켈 샐리사이드 공정들 및 이를 사용하여 반도체소자를제조하는 방법들 |
JP2006156043A (ja) | 2004-11-26 | 2006-06-15 | Bridgestone Corp | 接合構造及び上記接合構造を有するヒータユニット |
-
2007
- 2007-01-23 JP JP2007012805A patent/JP4963611B2/ja not_active Expired - Fee Related
-
2008
- 2008-01-21 DE DE102008005323A patent/DE102008005323A1/de not_active Ceased
- 2008-01-22 US US12/017,761 patent/US7807269B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
DE102008005323A1 (de) | 2008-07-24 |
US7807269B2 (en) | 2010-10-05 |
JP2008179491A (ja) | 2008-08-07 |
US20080176087A1 (en) | 2008-07-24 |
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