JP4955023B2 - Mold for heating press and method for producing silica glass using the same - Google Patents

Mold for heating press and method for producing silica glass using the same Download PDF

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JP4955023B2
JP4955023B2 JP2009008423A JP2009008423A JP4955023B2 JP 4955023 B2 JP4955023 B2 JP 4955023B2 JP 2009008423 A JP2009008423 A JP 2009008423A JP 2009008423 A JP2009008423 A JP 2009008423A JP 4955023 B2 JP4955023 B2 JP 4955023B2
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mold
molding
concave
press
molded
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JP2009078973A (en
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浩之 後藤
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Coorstek KK
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Covalent Materials Corp
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/05—Press-mould die materials
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/40—Product characteristics
    • C03B2215/44—Flat, parallel-faced disc or plate products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/69—Controlling the pressure applied to the glass via the dies

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)

Description

本発明は加熱プレス用成形型、これを用いたシリカガラスの製造方法に係わり、特に割り型の被成形材の噛み込みを防止した加熱プレス用成形型、これを用いたシリカガラスの製造方法に関する。   The present invention relates to a mold for hot press and a method for producing silica glass using the same, and more particularly to a mold for hot press which prevents biting of a mold material to be split, and a method for producing silica glass using the mold. .

熱軟化性素材の成形には、加熱プレス加工が一般的に行われている。その場合、離型性を考慮して、被成形材と成形型の熱膨張率を可能な限り一致させあるいは、成形型の方が被成形材よりも熱膨張率が小さくなるように考慮されている。   A heat press process is generally performed for forming a thermosoftening material. In that case, in consideration of releasability, the thermal expansion coefficient of the molding material and the molding die are matched as much as possible, or the molding die is considered to have a smaller thermal expansion coefficient than the molding material. Yes.

しかしながら、このような従来の加熱プレス用成形型を用い、シリカガラス（石英ガラスと言うこともある）など低熱膨張率の被成形材を成形する際、適当な成形型材料の入手が困難である。このため、転写パターンの壁面に角度を付け、冷却時に成形型が収縮しても被成形材を噛み込まず、滑って離型する方向に移動するよう成形型を設計する方策が採られている。しかし、この方法では、成形型の側面の形状保持、特に垂直に立った壁面を被成形材に与えることができない。   However, it is difficult to obtain an appropriate mold material when molding a molding material having a low thermal expansion coefficient such as silica glass (sometimes referred to as quartz glass) using such a conventional mold for hot pressing. . For this reason, measures are taken to design the mold so that the wall of the transfer pattern is angled and the mold does not bite even if the mold shrinks during cooling, and it moves in the direction of sliding and releasing. . However, with this method, the shape of the side surface of the mold cannot be maintained, and in particular, the vertical wall surface cannot be applied to the material to be molded.

すなわち、図９のような加熱プレス用成形型２２の構成を考えた場合、昇温後に被成形材Ｍの熱膨張係数よりも下型２３の熱膨張係数が大きい場合、下型２３の収縮により被成形材Ｍを噛み込んで、下型２３から被成形材Ｍが離型できないか、あるいは、下型２３が破損するおそれがある。また、プレス成形時、上型２４からの圧力が、被成形材Ｍの外周部ほど変形によって逃げてしまうため、微細なパターンの変形や転写不足が発生する問題があった。   That is, when considering the configuration of the hot pressing mold 22 as shown in FIG. 9, if the thermal expansion coefficient of the lower mold 23 is larger than the thermal expansion coefficient of the molding material M after the temperature rise, the lower mold 23 contracts. There is a possibility that the molding material M is bitten and the molding material M cannot be released from the lower mold 23 or the lower mold 23 is damaged. Further, during press molding, the pressure from the upper mold 24 escapes as the outer peripheral portion of the molding material M is deformed, so that there is a problem that fine pattern deformation or transfer shortage occurs.

また、図９に示す上記従来の成形型で問題となる噛み込みを回避するために、図１０に示すように、加熱プレス用成形型３２の下型３３を分割し、複数個の下分割型３３ｚとするものが提案されている。しかしながら、この下型３３は、冷却時の収縮による応力発生を回避できるが、下型３３の成形側面３３ａ１から積極的な被成形材Ｍへの加圧は期待できず、逆に分割面のズレにより下分割型３３ｚ間に隙間が生じて、被成形材Ｍの形状に悪影響を与える問題があった。 Further, in order to avoid the problem of biting in the conventional mold shown in FIG. 9, the lower mold 33 of the heating press mold 32 is divided as shown in FIG. What is 33z is proposed. However, the lower mold 33, which can avoid stress caused by cooling during contraction, pressurization of the aggressive the molded material M from the molded side 33a 1 of the lower die 33 can not be expected, the splitting surface in the opposite There is a problem in that a gap is generated between the lower divided molds 33z due to the shift, and the shape of the molding material M is adversely affected.

なお、断面三角形状の凹状成形面が設けられた下型を２分割したガラス成形型があるが、この成形型は、上記従来の後者と成形型同様に、冷却時の収縮による応力発生を回避できるが、下型の成形側面から積極的な被成形材への加圧は期待できず、逆に分割面のズレにより下分割型間に隙間が生じて、被成形材の形状に悪影響を与える（例えば、特許文献１など）。   There is a glass mold that divides the lower mold provided with a concave molding surface with a triangular cross section into two parts, but this mold avoids the generation of stress due to shrinkage during cooling, similar to the above-mentioned conventional latter and mold. However, positive pressurization of the molding material from the molding side of the lower mold cannot be expected, and conversely, a gap occurs between the lower molds due to the deviation of the dividing surface, which adversely affects the shape of the molding material. (For example, patent document 1 etc.).

特開平６−９２３２号公報（段落番号［０００８］、図１）Japanese Patent Laid-Open No. 6-9232 (paragraph number [0008], FIG. 1)

本発明は上述した事情を考慮してなされたもので、成形型の収縮により被成形物を噛み込むことがなく、微細なパターンや転写が可能で、被成形材を所望の形状に成形できる加熱プレス用成形型、これを用いたシリカガラスの製造方法を提供することを目的とする。   The present invention has been made in consideration of the above-described circumstances, and does not bite the molding object due to the shrinkage of the molding die, enables a fine pattern and transfer, and can heat the molding material into a desired shape. It aims at providing the shaping | molding die for presses, and the manufacturing method of silica glass using the same.

上記目的を達成するため、本発明の１つの態様によれば、加熱して軟化させた被成形材をプレス成形するのに用いられる加熱プレス用成形型であって、この成形型を構成し凹状成形面が形成された一方の型は、複数に分割された分割型からなり、前記一方の型の凹状成形面の少なくとも成形主面に、前記被成形材と接する表面に転写パターンが形成された成形板が取り付けられ、前記分割型の外周に設けられ先細の凸状嵌合部を、一方の型が取り付けられ、固定軸上に固定された台座に設けられた先細の凹状嵌合部に嵌合することにより一体的に保持され、前記成形型を構成する他方の型により、被成形材を介して一方の型を押圧し、前記凹状成形面の成形側面により被成形材を押圧することを特徴とする加熱プレス用成形型が提供される。これにより、成形型の収縮により被成形物を噛み込むことがなく、微細なパターンや転写が可能で、また、被成形材を所望の形状に成形できる加熱プレス用成形型が実現される。 In order to achieve the above object, according to one aspect of the present invention, there is provided a heating press mold used for press-molding a material to be softened by heating. One mold on which the molding surface is formed is a divided mold divided into a plurality of parts, and a transfer pattern is formed on at least the main molding surface of the concave molding surface of the one mold on the surface in contact with the material to be molded. A molded plate is attached, and a tapered convex fitting part provided on the outer periphery of the split mold is fitted into a tapered concave fitting part provided on a pedestal attached with one mold and fixed on a fixed shaft. By holding together, pressing one mold through the molding material by the other mold constituting the molding mold, and pressing the molding material by the molding side surface of the concave molding surface A featured hot press mold is provided. As a result, there is realized a hot press mold capable of forming a fine pattern and transferring without molding the object to be molded due to shrinkage of the mold, and capable of molding the material to be molded into a desired shape.

好適な一例では、前記成形型は、ガラス状カーボンで形成される。これにより、型の表面の離型膜が不要になる。   In a preferred example, the mold is made of glassy carbon. This eliminates the need for a release film on the mold surface.

また、他の好適な一例では、前記一方の型は、その成形側面と同一方向の面で分割される。これにより、一方の型の収縮により被成形材の噛み込みが発生せず、さらに、一方の型に加わる力は、成形側面同士を接近させる方向に引き付ける分力を発生させやすくなる。   Moreover, in another suitable example, said one type | mold is divided | segmented by the surface of the same direction as the shaping | molding side surface. As a result, the material to be molded does not bite due to the shrinkage of one mold, and the force applied to one mold tends to generate a component that attracts the molding side surfaces in the direction of approaching each other.

また、他の好適な一例では、前記先細の凸状嵌合部及び前記先細の凹状嵌合部は、円錐状あるいは角錐状である。これにより、一方の型に加わる力から、成形側面同士を接近させる方向に引き付ける分力を確実に発生させることができる。   Moreover, in another suitable example, the said taper convex fitting part and the said taper concave fitting part are cone shape or a pyramid shape. Thereby, the component force attracted | pulled in the direction which makes the shaping | molding side surfaces approach can be reliably generate | occur | produced from the force added to one type | mold.

また、他の好適な一例では、前記先細の凹状嵌合部の深さを変えることにより、前記凹状成形面の成形側面と成形主面に加わる力配分を調整することができる。   In another preferable example, the distribution of force applied to the molding side surface and the molding main surface of the concave molding surface can be adjusted by changing the depth of the tapered concave fitting portion.

また、他の好適な一例では、前記凹状成形面の少なくとも成形主面にガラス状カーボン製の成形板が取り付けられる。これにより、凹状成形面の全面に取り付けられる場合には、前記成形体を交換可能にすることで、下型の劣化による交換をなくし、成形コストの低減が図れ、成形主面にのみ取り付けた場合には、分割型の分割面の段差が一層軽減される。   In another preferred example, a glassy carbon molding plate is attached to at least the molding main surface of the concave molding surface. Thereby, when it is attached to the entire surface of the concave molding surface, it is possible to replace the molded body, thereby eliminating the replacement due to deterioration of the lower mold, reducing the molding cost, and attaching only to the molding main surface In this case, the level difference between the split surfaces of the split type is further reduced.

また、本発明の他の態様によれば、請求項１〜６のいずれかの成形型を用いて成形するシリカガラスの製造方法である。これにより、成形型の収縮により被成形物を噛み込むことがなく、微細なパターンや転写が可能で、被成形材を所望の形状に成形できる。   Moreover, according to the other aspect of this invention, it is a manufacturing method of the silica glass shape | molded using the shaping | molding die in any one of Claims 1-6. As a result, the molding object is not bitten by contraction of the molding die, and a fine pattern or transfer is possible, and the molding material can be molded into a desired shape.

本発明に係わる加熱プレス用成形型によれば、成形型の収縮により被成形物を噛み込むことがなく、微細なパターンや転写が可能で、被成形材を所望の形状に成形できる加熱プレス用成形型を提供することができる。   According to the heating press mold according to the present invention, the molded object does not bite due to shrinkage of the molding die, a fine pattern or transfer is possible, and the molding material can be molded into a desired shape. A mold can be provided.

また、本発明に係わるシリカガラスの製造方法によれば、成形型の収縮により被成形物を噛み込むことがなく、微細なパターンや転写が可能で、被成形材を所望の形状に成形できるシリカガラスの製造方法を提供することができる。   In addition, according to the method for producing silica glass according to the present invention, the silica can be molded into a desired shape without being bitten by the shrinkage of the mold, allowing a fine pattern or transfer. A method for producing glass can be provided.

本発明に係わる加熱プレス用成形型の第１実施形態の使用状態を示す概念図。The conceptual diagram which shows the use condition of 1st Embodiment of the shaping | molding die for hot presses concerning this invention. （ａ）は本発明に係わる加熱プレス用成形型の第１実施形態の下型の成形主面の平面図、（ｂ）はその断面図。(A) is a top view of the shaping | molding main surface of the lower mold | type of 1st Embodiment of the shaping | molding die for hot presses concerning this invention, (b) is the sectional drawing. 本発明に係わる加熱プレス用成形型の第１実施形態の下型の平面図。The top view of the lower mold | type of 1st Embodiment of the shaping | molding die for hot presses concerning this invention. 図３の下型を構成する下分割型の側面図。FIG. 4 is a side view of a lower split mold constituting the lower mold of FIG. 3. 本発明に係わる加熱プレス用成形型の使用時の力の状態を示す説明図。Explanatory drawing which shows the state of the force at the time of use of the shaping | molding die for hot presses concerning this invention. 本発明に係わる加熱プレス用成形型の第２実施形態の使用状態を示す概念図。The conceptual diagram which shows the use condition of 2nd Embodiment of the shaping | molding die for hot presses concerning this invention. 本発明に係わる加熱プレス用成形型及び比較例を用いた試験結果図を示し、（ａ）は比較例、（ｂ）は一実施例、（ｃ）は他の実施例である。The test result figure using the shaping | molding die for hot presses concerning this invention and a comparative example is shown, (a) is a comparative example, (b) is one Example, (c) is another Example. 成形試験において比較例に発生する未転写領域の概念図。The conceptual diagram of the untransferred area | region which generate | occur | produces in a comparative example in a shaping | molding test. 従来の加熱プレス用成形型の使用状態を示す概念図。The conceptual diagram which shows the use condition of the shaping | molding die for conventional heat presses. 従来の加熱プレス用成形型の使用状態を示す概念図。The conceptual diagram which shows the use condition of the shaping | molding die for conventional heat presses.

以下、本発明に係わる加熱プレス用成形型の第１実施形態について添付図面を参照して説明する。   Hereinafter, a first embodiment of a heating press mold according to the present invention will be described with reference to the accompanying drawings.

図１は本発明に係わる加熱プレス用成形型の第１実施形態を組み込んだ成形装置の概念図である。   FIG. 1 is a conceptual view of a molding apparatus incorporating a first embodiment of a heating press mold according to the present invention.

図１に示すように、成形装置１には、本発明に係わるプレス用成形型２が組み込まれている。この本発明に係わるプレス用成形型２は、正方形板状の凹状成形面３ａが形成され一方の型としての下型３と、凹状成形面３ａに収納された被成形材、例えばシリカガラスＭを押圧し、凹状成形面３ａに進入する平面視正方形で柱状の他方の型としての上型４で構成されている。   As shown in FIG. 1, a press mold 2 according to the present invention is incorporated in a forming apparatus 1. The pressing mold 2 according to the present invention comprises a lower mold 3 as one mold having a square plate-shaped concave molding surface 3a and a material to be molded, for example, silica glass M, accommodated in the concave molding surface 3a. The upper die 4 is formed as the other die having a square shape in a plan view that presses and enters the concave molding surface 3a.

上記下型３は、熱軟化性素材である被成形材として熱膨張率が小さいガラス等と高温で反応し難い材質、例えば、ガラス状カーボン、モリブデン、タングステン、超硬などが用いられる。被成形材としてシリカガラスが用いられる場合には、ガラス状カーボンが好ましく、その理由として、ガラス状カーボンは、フルフリールアルコールなどの熱硬化性樹脂を成形後、加圧下で徐々に加熱し、硬化後炭素化して製造され、無配向組織を有し、さらに、高耐熱性、高耐食性、高強度、高硬度を有する。また、ガラス状カーボンは、一般的な型材料とは異なり、ガラスとの間の離型性に優れ、型の表面の離型膜が不要になる。   The lower mold 3 is made of a material that does not easily react with a glass having a low coefficient of thermal expansion at a high temperature, such as glassy carbon, molybdenum, tungsten, or carbide, as a molding material that is a thermosoftening material. When silica glass is used as the material to be molded, glassy carbon is preferable, and the glassy carbon is gradually heated under pressure after molding a thermosetting resin such as furfuryl alcohol, It is manufactured by carbonization after curing, has a non-oriented structure, and further has high heat resistance, high corrosion resistance, high strength, and high hardness. Further, unlike general mold materials, glassy carbon is excellent in mold releasability with glass, and a mold release film on the mold surface becomes unnecessary.

また、下型３の形状は、順次断面積が減少する先細形状をなし、成形側面３ａ１と成形主面３ａ２からなる凹状成形面３ａが形成された円板形状の下型主部３ｂと、この下型主部３ｂから突出する円錐あるいは多角錐状の凸状嵌合部３ｃとからなっている。上記成形主面３ａ２には、例えば図２（ａ）、（ｂ）に示すような頂部を有する凸部が形成されている。 The shape of the lower mold 3, without a tapered shape that decreases sequentially sectional area, and a lower die main portion 3b of the disk-shaped concave molding surface 3a is formed consisting of the molded side 3a 1 and the molding main surface 3a 2 , And a convex fitting portion 3c having a conical or polygonal pyramid shape protruding from the lower mold main portion 3b. On the molding main surface 3a 2 , for example, a convex portion having a top as shown in FIGS. 2 (a) and 2 (b) is formed.

さらに、図３及び図４に示すように、下型３は、成形側面３ａ１と同一方向の面（垂直面）で、下分割型３ｚに均等に４分割されて各々平面視扇状をなし、図１に示すように、使用時、下型３の凸状嵌合部３ｃが、台座５に設けられた円錐あるいは多角錐状の凹状嵌合部５ａに嵌合して、一体的に保持されている。これにより、四方より被成形材を均等に押さえ付けることが可能な構成となっており、成形型２からの圧力が、平板状の被成形材へ均一に分配されるように考慮されている。なお、円錐あるいは多角錐の凹状嵌合部の深さを変えることにより、押圧する圧力に対する成形側面と成形主面の圧力配分が適当に調整される。 Further, as shown in FIGS. 3 and 4, the lower die 3 is a surface (vertical surface) in the same direction as the molding side surface 3a 1 and is equally divided into four parts by the lower divided die 3z to form a fan shape in plan view. As shown in FIG. 1, the convex fitting part 3c of the lower mold | type 3 fits with the concave fitting part 5a of the cone or polygonal pyramid shape provided in the base 5 at the time of use, and is hold | maintained integrally. ing. Thus, the material to be molded can be uniformly pressed from four sides, and the pressure from the mold 2 is considered to be uniformly distributed to the plate-shaped material. In addition, by changing the depth of the concave fitting portion of the cone or the polygonal pyramid, the pressure distribution between the molding side surface and the molding main surface with respect to the pressing pressure is appropriately adjusted.

さらに、台座５は固定軸６上に固定されている。   Further, the pedestal 5 is fixed on the fixed shaft 6.

上記上型４は、下型３と同様に、被成形材と反応し難い材質としてガラス状カーボン等が用いられ、油圧手段（図示せず）によって昇降する移動軸７に取り付けられている。プレス用成形型２は、ランプユニット８等の加熱手段により、使用時加熱されている。   Similar to the lower mold 3, the upper mold 4 is made of glassy carbon or the like as a material that hardly reacts with the material to be molded, and is attached to a moving shaft 7 that moves up and down by hydraulic means (not shown). The pressing mold 2 is heated during use by heating means such as the lamp unit 8.

次に本発明に係わる加熱プレス用成形型の第１実施形態を用いた成形方法について説明する。   Next, the shaping | molding method using 1st Embodiment of the shaping | molding die for hot presses concerning this invention is demonstrated.

図１に示すように、下型３の凸状嵌合部３ｃは台座５の凹状嵌合部５ａに嵌合され、下分割型３ｚは一体的に保持されて、下型３が形成されており、下型３及び上型４は、予め加熱されている。   As shown in FIG. 1, the convex fitting part 3c of the lower mold 3 is fitted into the concave fitting part 5a of the base 5, and the lower split mold 3z is integrally held to form the lower mold 3. The lower mold 3 and the upper mold 4 are preheated.

この予熱された下型３の凹状成形面３ａに軟化状態のシリカガラスＭを収納し、移動軸７を降下させて、上型４を降下させ、シリカガラスＭを押圧する。   The silica glass M in a softened state is housed in the concave molding surface 3a of the preheated lower mold 3, the moving shaft 7 is lowered, the upper mold 4 is lowered, and the silica glass M is pressed.

これにより、シリカガラスＭは下型３及び上型４の形状に沿って成形される。   Thereby, the silica glass M is shape | molded along the shape of the lower mold | type 3 and the upper mold | type 4. FIG.

図１及び図５に示すように、このとき、移動軸７の降下に伴って固定軸６との間の構成物に加わる力ｆは、下型３の凸状嵌合部３ｃと台座５の凹状嵌合部５ａの接触面で、この接触面に垂直な分力ｆｖと平行な分力ｆｈに分解され、分力ｆｈにより、下分割型３ｚの成形側面３ａ１同士を接近させる方向への力が加わり、結果として、下分割型３ｚの成形側面３ａ１が被成形材Ｍの側面へ積極的に押し付けられる。同時に下分割型３ｚとの分割面同士が密着し、被成形材Ｍの形状変化に対する影響も軽減できる。シリカガラスＭは下型３及び上型４の形状に沿って成形される。 As shown in FIGS. 1 and 5, at this time, the force f applied to the component between the movable shaft 7 and the fixed shaft 6 as the moving shaft 7 is lowered is caused by the convex fitting portion 3c of the lower mold 3 and the pedestal 5. the contact surface of the recessed fitting portion 5a, is decomposed into vertical component force f v parallel component force f h to the contact surface, the component force f h, to approach the forming side 3a 1 between the lower split 3z A force in the direction is applied, and as a result, the molding side surface 3a 1 of the lower split mold 3z is positively pressed against the side surface of the molding material M. At the same time, the split surfaces of the lower split mold 3z are in close contact with each other, and the influence on the shape change of the molding material M can be reduced. The silica glass M is formed along the shapes of the lower mold 3 and the upper mold 4.

また、下型３は、その成形側面３ａ１と同一方向の面で、下分割型３ｚに均等に４分割されているので、下型３の収縮により被成形材Ｍの噛み込みが発生せず、さらに、下型３に加わる力ｆは、成形側面３ａ１同士を接近させる方向に引き付ける分力ｆｈを発生させやすい。また、下型３の凸状嵌合部３ｃと台座５の凹状嵌合部５ａが、円錐状あるいは角錐状に形成されているので、下型３に加わる力ｆから、成形側面３ａ１同士を接近させる方向に引き付ける分力ｆｈを確実に発生させることができる。 Also, the lower mold 3, in terms of the forming side surface 3a 1 and the same direction, because it is equally divided into four lower split 3z, without biting of the molded material M is generated by the contraction of the lower mold 3 Furthermore, the force f applied to the lower mold 3 tends to generate a component force f h that attracts the molding side surfaces 3a 1 in the direction in which the molding side surfaces 3a 1 approach each other. Moreover, since the convex fitting part 3c of the lower mold | type 3 and the concave fitting part 5a of the base 5 are formed in cone shape or pyramid shape, from the force f added to the lower mold | type 3, shaping | molding side surface 3a 1 is formed. The component force f h attracted in the approaching direction can be reliably generated.

さらに、成形工程において、成形型の熱膨張率を被成形材と同等、あるいはより小さくできない場合にも、力ｆにより被成形材が水平方向に広がろうとした結果、プレス成形用型の下型３を水平方向に広げようとする力が生じてもそれに打勝って、分力ｆｈにより、成形側面３ａ１同士を接近させる方向に引き付けて、被成形材の周辺部での変形を抑制し、プレス成形により、被成形材の側壁成形を可能とすると共に、成形型全面に確実に圧力を加えることができるようになり、プレス成形型に転写パターンを形成しておけば、刻印、特殊形状の転写精度を向上させることができるとともに、被成形物の隅々まで精密な成形を行うことができる。また、成形型と被成形材の熱膨張係数の差によって被成形材が噛み込まれるおそれがある場合でも、側面形状を管理しながら精度よくプレス加工を行うことができる。 Furthermore, in the molding process, even when the coefficient of thermal expansion of the molding die cannot be equal to or smaller than that of the molding material, as a result of the molding material trying to spread in the horizontal direction by the force f, the lower mold of the press molding die 3 overcomes it even if a force to widen in the horizontal direction, the component force f h, attracts a direction to approach the forming side 3a 1 together, suppressing deformation of the peripheral portion of the molded material By press molding, it becomes possible to mold the side wall of the material to be molded, and it is possible to apply pressure to the entire mold, and if a transfer pattern is formed on the press mold, stamping, special shape Transfer accuracy can be improved, and precise molding can be performed to every corner of the molding. Moreover, even when there is a possibility that the molding material may be caught due to a difference in thermal expansion coefficient between the molding die and the molding material, it is possible to perform press processing with high accuracy while managing the side surface shape.

また、本発明に係わる加熱プレス用成形型の第２実施形態について説明する。   In addition, a second embodiment of the heating press mold according to the present invention will be described.

本第２実施形態は、上述した第１実施形態が下型全体に被成形材と反応し難い材質を使用するのに対して、被成形材と接する部位に被成形材と反応し難い材質を使用するものである。   In the second embodiment, the first embodiment described above uses a material that does not easily react with the material to be molded for the entire lower mold, whereas a material that does not easily react with the material to be formed is in contact with the material to be molded. It is what you use.

例えば、図６に示すように、第２実施形態のプレス用成形型２Ａは、共に一般的な金属製の下型３Ａと上型４Ａで構成され、下型３Ａの凹状成形面３Ａａには、その成形主面３Ａａ２に敷設された板状で被成形材と反応し難い材質としてのガラス状カーボン製の成形板１１Ａと、その成形側面３Ａａ１に付設されたガラス状カーボン製の成形側板１２Ａが設けられている。他の構成は図１に示す加熱プレス用成形型と異ならないので、同一符号を付して説明は省略する。 For example, as shown in FIG. 6, the pressing mold 2A of the second embodiment is composed of a general metal lower mold 3A and an upper mold 4A, and the concave molding surface 3Aa of the lower mold 3A includes: glassy carbon made of molded plate 11A, glassy carbon-made mold side plates 12A which are attached to the forming side surface 3Aa 1 as a reaction difficult material as the molded material in the laid plate to the molded main surface 3Aa 2 Is provided. Other configurations are not different from the heating press mold shown in FIG.

このように少なくとも凹状成形面３Ａａの成形主面３Ａａ２にガラス状カーボン製の成形板１１Ａが設けられているので、下分割型３Ａｚの分割面の段差を一層軽減することができ、また、被成形材と接する部位のみにガラス状カーボンを使用して交換可能な別構成とすることで、下型の劣化による交換をなくし、成形コストの低減が図れる。 This way, since the glassy carbon made of molded plate 11A is provided in the molding main surface 3Aa 2 of at least the concave molding surface 3Aa, it is possible to further reduce the step difference of the divided surface of the lower split mold 3AZ, also be By using glassy carbon only for the part in contact with the molding material and having a replaceable configuration, replacement due to deterioration of the lower mold can be eliminated, and the molding cost can be reduced.

このように本発明の加熱用プレス成形型を用いれば、シリカガラスの成型を容易に行うことができるし、表面に例えば、５００μｍ以下の凹凸模様等の精密なパターンを転写したシリカガラスを得ることも容易にできるようになる。   As described above, by using the heating press mold of the present invention, silica glass can be easily molded, and a silica glass having a precise pattern such as a concavo-convex pattern of 500 μm or less on its surface is obtained. Can also be easily done.

勿論、１μｍ以下の凹凸模様はさらに精度よく転写できる。   Of course, uneven patterns of 1 μm or less can be transferred with higher accuracy.

図２のような高さ１００μｍ、幅２００μｍのＶ突起のパターンを施した□４０ｍｍ、厚さ３ｍｍのガラス状カーボン板を下型にし、□４０ｍｍ、厚さ２ｍｍの石英（シリカガラス）板を、四方と上型をガラス状カーボンの鏡面研磨板で囲んで図６に示した形でプレスを行った。その際、下型と上型の温度は１４５０℃、加圧は２．５ｋＮ、加圧時間は８０秒であった。また比較例として、四方の内向かい合った１組の側壁を拘束するガラス状カーボン鏡面研磨板をセットせず、変形が可能な状態で、同一条件にてプレスを行い、前述の図６での転写性と比較した。上記プレスは温度が安定してから加圧を開始し、加圧終了後に加えていた圧力を完全に取り除き、その後に降温を開始した。これは石英が十分に軟化しないうちに加圧した場合、パターン付き下型を破損する可能性があるためと、加圧しながら温度を下げた場合、石英とガラス状カーボンの熱膨張率の差から生じた応力が、本発明の効果により緩和することができないためである。以上のプレスの結果、図８に示すようなＶ突起の裾野にある未転写領域は、図７（ｂ），（ｃ）で示すように、未転写領域Ｕ３〜Ｕ４およびＵ５，Ｕ６が、側壁拘束をしなかった場合（図７（ａ）のＵ１，Ｕ２）に比べ、図６に示した型で拘束した場合には縮小していることが分かった。このことから、本発明での側壁拘束によって転写性が大幅に向上したことが確認された。また、上記プレスを実施しても、石英にもガラス状カーボン型にも破損は生じなかった。型のＶ突起と比較して、本手法によるプレスでもまだ転写性は甘いが、これは窒素雰囲気中のためにエア溜まりが発生した影響であり、図７（ｃ）のように真空中で行えば未転写領域Ｕ５およびＵ６が殆ど認められないことからも明らかな通り改善されることが実験から分かっている。 A glassy carbon plate with a 40 mm, 3 mm thick glass plate with a V protrusion pattern of 100 μm in height and 200 μm in width as shown in FIG. 2 is used as a lower mold, and a quartz (silica glass) plate with 40 mm, 2 mm in thickness, The four sides and the upper die were surrounded by a glass-like carbon mirror polishing plate and pressed in the form shown in FIG. At that time, the temperature of the lower mold and the upper mold was 1450 ° C., the pressure was 2.5 kN, and the pressure time was 80 seconds. Further, as a comparative example, without setting a glassy carbon mirror polishing plate that restrains a set of side walls facing each other in four directions, pressing is performed under the same conditions in a deformable state, and the transfer in FIG. 6 described above is performed. Compared with gender. The press started pressurization after the temperature was stabilized, completely removed the pressure applied after the pressurization was completed, and then started temperature decrease. This is because if the pressure is applied before the quartz is sufficiently softened, the lower mold with the pattern may be damaged, and if the temperature is lowered while applying pressure, the difference in thermal expansion coefficient between quartz and glassy carbon This is because the generated stress cannot be relaxed due to the effect of the present invention. As a result of the above pressing, the untransferred areas at the base of the V protrusions as shown in FIG. 8 are untransferred areas U 3 to U 4 and U 5 , U, as shown in FIGS. 6 was found to be reduced when constrained with the mold shown in FIG. 6 compared to when the side walls were not constrained (U 1 and U 2 in FIG. 7A). From this, it was confirmed that transferability was greatly improved by the side wall restraint in the present invention. Moreover, even if it implemented the said press, neither the quartz nor the glassy carbon type | mold failed. Compared with the V-projection of the mold, the transfer performance is still poor even with the press by this method, but this is due to the effect of air accumulation due to the nitrogen atmosphere, and it is performed in a vacuum as shown in FIG. For example, it has been found from experiments that the untransferred regions U 5 and U 6 are improved as is apparent from the fact that almost no untransferred regions U 5 and U 6 are observed.

なお、本発明は上記実施例に限定されるものではない。例えば図３においては、下分割型３ｚは４分割されているが、２分割の方がセッティングが容易である。また、分割は対角方向に直線で行なわれているが、曲線等でもよい。   In addition, this invention is not limited to the said Example. For example, in FIG. 3, the lower division type 3z is divided into four parts, but setting is easier with the two divisions. Further, the division is performed in a straight line in the diagonal direction, but it may be a curve or the like.

１ 成形装置
２ プレス用成形型
３ 下型
３ａ 凹状成形面
３ａ１ 成形側面
３ａ２ 成形主面
３ｂ 下型主部
３ｃ 凸状嵌合部
３ｚ 下分割型
４ 上型
５ 台座
５ａ 凹状嵌合部
６ 固定軸
７ 移動軸
８ ランプユニット
Ｍ シリカガラス
Ｕ１〜Ｕ６ 未転写領域 DESCRIPTION OF SYMBOLS 1 Molding apparatus 2 Mold for press 3 Lower mold 3a Concave molding surface 3a 1 Molding side surface 3a 2 Molding main surface 3b Lower mold main part 3c Convex fitting part 3z Lower split mold 4 Upper mold 5 Base 5a Concave fitting part 6 the fixed shaft 7 moving shaft 8 lamp unit M silica glass U 1 ~U 6 untransferred region

Claims (7)

加熱して軟化させた被成形材をプレス成形するのに用いられる加熱プレス用成形型であって、この成形型を構成し凹状成形面が形成された一方の型は、複数に分割された分割型からなり、前記一方の型の凹状成形面の少なくとも成形主面に、前記被成形材と接する表面に転写パターンが形成された成形板が取り付けられ、前記分割型の外周に設けられ先細の凸状嵌合部を、一方の型が取り付けられ、固定軸上に固定された台座に設けられた先細の凹状嵌合部に嵌合することにより一体的に保持され、前記成形型を構成する他方の型により、被成形材を介して一方の型を押圧し、前記凹状成形面の成形側面により被成形材を押圧することを特徴とする加熱プレス用成形型。 A heating press mold used for press-molding a material to be softened by heating, and one mold having a concave molding surface and forming the mold is divided into a plurality of divided molds. A mold plate having a transfer pattern formed on a surface in contact with the material to be molded is attached to at least a molding main surface of the concave molding surface of the one mold, and a tapered projection provided on the outer periphery of the split mold. The mold-shaped fitting portion is integrally held by fitting with a tapered concave fitting portion provided on a pedestal fixed on a fixed shaft to which one mold is attached, and the other constituting the mold A mold for heating press, characterized in that one mold is pressed by a mold with a mold, and the mold is pressed by a molding side surface of the concave molding surface. 前記成形型は、ガラス状カーボンで形成されることを特徴とする請求項１に記載の加熱プレス用成形型。 The mold for hot pressing according to claim 1, wherein the mold is made of glassy carbon. 前記一方の型は、その成形側面と同一方向の面で分割されることを特徴とする請求項１または２に記載の加熱プレス用成形型。 The said one type | mold is divided | segmented by the surface of the same direction as the shaping | molding side surface, The shaping die for hot presses of Claim 1 or 2 characterized by the above-mentioned. 前記先細の凸状嵌合部及び前記先細の凹状嵌合部は、円錐状あるいは角錐状であることを特徴とする請求項１ないし３のいずれか１項に記載の加熱プレス用成形型。 The hot-press mold according to any one of claims 1 to 3, wherein the tapered convex fitting portion and the tapered concave fitting portion are conical or pyramidal. 前記先細の凹状嵌合部の深さを変えることにより、前記凹状成形面の成形側面と成形主面に加わる力配分を調整することを特徴とする請求項１ないし４のいずれか１項に記載の加熱プレス用成形型。 5. The force distribution applied to the molding side surface and the molding main surface of the concave molding surface is adjusted by changing the depth of the tapered concave fitting portion. 6. Mold for hot press. 前記凹状成形面の少なくとも成形主面にガラス状カーボン製の成形板が取り付けられることを特徴とする請求項５に記載の加熱プレス用成形型。 6. The hot press molding die according to claim 5, wherein a glassy carbon molding plate is attached to at least a molding main surface of the concave molding surface. 請求項１〜６のいずれかの成形型を用いて成形するシリカガラスの製造方法。 The manufacturing method of the silica glass shape | molded using the shaping | molding die in any one of Claims 1-6.
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