JP4944454B2 - 窒素分析装置 - Google Patents
窒素分析装置 Download PDFInfo
- Publication number
- JP4944454B2 JP4944454B2 JP2006041872A JP2006041872A JP4944454B2 JP 4944454 B2 JP4944454 B2 JP 4944454B2 JP 2006041872 A JP2006041872 A JP 2006041872A JP 2006041872 A JP2006041872 A JP 2006041872A JP 4944454 B2 JP4944454 B2 JP 4944454B2
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- JP
- Japan
- Prior art keywords
- argon
- oxygen
- nitrogen
- gas
- path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims description 192
- 229910052757 nitrogen Inorganic materials 0.000 title claims description 96
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 270
- 229910052786 argon Inorganic materials 0.000 claims description 135
- 239000007789 gas Substances 0.000 claims description 90
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 87
- 239000001301 oxygen Substances 0.000 claims description 87
- 229910052760 oxygen Inorganic materials 0.000 claims description 87
- 238000010790 dilution Methods 0.000 claims description 24
- 239000012895 dilution Substances 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 23
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 13
- 238000004458 analytical method Methods 0.000 claims description 10
- 238000000926 separation method Methods 0.000 claims description 8
- 238000007865 diluting Methods 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 6
- 239000000203 mixture Substances 0.000 description 4
- 238000011088 calibration curve Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 230000009897 systematic effect Effects 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- -1 for example Chemical compound 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000012327 Ruthenium complex Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 150000001491 aromatic compounds Chemical class 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010416 ion conductor Substances 0.000 description 1
- 238000012886 linear function Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- AHKZTVQIVOEVFO-UHFFFAOYSA-N oxide(2-) Chemical compound [O-2] AHKZTVQIVOEVFO-UHFFFAOYSA-N 0.000 description 1
- 229940062098 oxygen 85 % Drugs 0.000 description 1
- 229940063666 oxygen 90 % Drugs 0.000 description 1
- 229940063767 oxygen 95 % Drugs 0.000 description 1
- 125000003367 polycyclic group Chemical group 0.000 description 1
- 229910002076 stabilized zirconia Inorganic materials 0.000 description 1
- 239000007785 strong electrolyte Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/67—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using electric arcs or discharges
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- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Investigating Or Analysing Materials By The Use Of Chemical Reactions (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Description
Claims (3)
- アルゴン塔を備えた空気分離装置の前記アルゴン塔に導入されるフィードアルゴンと、該アルゴン塔から導出される粗アルゴンとにそれぞれ含まれている不純物窒素の濃度を、放電管内での放電により生じる前記不純物窒素に特有の光の発光強度と、前記放電管に試料ガスとして導入される前記フィードアルゴン又は前記粗アルゴンの酸素濃度とに基づいて測定するとともに、校正ガスとして純酸素、酸素バランス窒素及び純アルゴンを流量制御手段を介してそれぞれ導入する3系統の校正ガス導入経路を備えた窒素分析装置において、前記試料ガスが前記粗アルゴンのときに、前記試料ガス中の酸素濃度を前記フィードアルゴンの酸素濃度と同程度にするための希釈用酸素を前記粗アルゴンに添加するための希釈用酸素導入手段を設けたことを特徴とする窒素分析装置。
- 前記校正ガス導入経路の一つの経路に前記フィードアルゴン及び粗アルゴンを窒素分析装置に導入する経路を接続し、該校正ガス導入経路から導入するガスを前記校正ガス、前記フィードアルゴン及び粗アルゴンのいずれかに切り換える導入ガス切換手段と導入するガスの流量を調節する流量調節手段とを設けるとともに、前記校正ガス導入経路の他の一つの経路に前記希釈用酸素を導入する経路を接続し、該他の校正ガス導入経路から導入するガスを前記校正ガス及び前記希釈用酸素のいずれかに切り換える導入ガス切換手段と導入するガスの流量を調節する流量調節手段とを設けことを特徴とする請求項1記載の窒素分析装置。
- 前記フィードアルゴン及び粗アルゴンを窒素分析装置に導入する経路に設けられた前記流量調節手段の一次側に、余剰のフィードアルゴン及び粗アルゴンを導出する経路を設けたことを特徴とする請求項1又は2記載の窒素分析装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006041872A JP4944454B2 (ja) | 2006-02-20 | 2006-02-20 | 窒素分析装置 |
KR1020087021298A KR101006175B1 (ko) | 2006-02-20 | 2007-02-09 | 질소분석장치 |
CN200780005489XA CN101384895B (zh) | 2006-02-20 | 2007-02-09 | 氮气分析装置 |
PCT/JP2007/052343 WO2007097211A1 (ja) | 2006-02-20 | 2007-02-09 | 窒素分析装置 |
EP07713999A EP1988385A4 (en) | 2006-02-20 | 2007-02-09 | NITROGEN ANALYZER |
US12/279,630 US7957003B2 (en) | 2006-02-20 | 2007-02-09 | Nitrogen analyzing apparatus |
TW096105636A TWI437224B (zh) | 2006-02-20 | 2007-02-15 | 氮分析裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006041872A JP4944454B2 (ja) | 2006-02-20 | 2006-02-20 | 窒素分析装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007218816A JP2007218816A (ja) | 2007-08-30 |
JP4944454B2 true JP4944454B2 (ja) | 2012-05-30 |
Family
ID=38437251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006041872A Active JP4944454B2 (ja) | 2006-02-20 | 2006-02-20 | 窒素分析装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US7957003B2 (ja) |
EP (1) | EP1988385A4 (ja) |
JP (1) | JP4944454B2 (ja) |
KR (1) | KR101006175B1 (ja) |
CN (1) | CN101384895B (ja) |
TW (1) | TWI437224B (ja) |
WO (1) | WO2007097211A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8342019B2 (en) * | 2009-05-29 | 2013-01-01 | Horiba, Ltd. | Exhaust gas analyzer and probe unit |
DE102016200517A1 (de) * | 2016-01-18 | 2017-07-20 | Robert Bosch Gmbh | Mikroelektronische Bauelementanordnung und entsprechendes Herstellungsverfahren für eine mikroelektronische Bauelementanordnung |
KR101797637B1 (ko) * | 2016-03-28 | 2017-11-20 | 주식회사아이센랩 | 교정장치 및 이를 구비한 가스성분 분석장치 |
JP6897763B2 (ja) * | 2017-04-17 | 2021-07-07 | 株式会社島津製作所 | 発光分光分析装置 |
US10881887B2 (en) | 2017-09-14 | 2021-01-05 | Agf Manufacturing, Inc. | Valve system and method for venting and measuring a gas content of a fire suppression system |
FR3127041B1 (fr) * | 2021-09-14 | 2023-08-25 | Partelec | Capteur et procédé pour la mesure de concentrations gazeuses dans un mélange gazeux. |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3032654A (en) * | 1958-02-10 | 1962-05-01 | Union Carbide Corp | Emission spectrometer |
DE3722746A1 (de) * | 1987-07-09 | 1989-01-19 | Linde Ag | Verfahren und vorrichtung zur luftzerlegung durch rektifikation |
US5412467A (en) * | 1993-03-24 | 1995-05-02 | Praxair Technology, Inc. | Gas emission spectrometer and method |
DE4407345A1 (de) * | 1994-03-05 | 1995-09-07 | Testo Gmbh & Co | Verfahren und Vorrichtung zum Messen eines Gasmediums mit einem chemischen Sensor |
US5528516A (en) * | 1994-05-25 | 1996-06-18 | System Management Arts, Inc. | Apparatus and method for event correlation and problem reporting |
US6473175B1 (en) * | 2000-04-19 | 2002-10-29 | Praxair Technology, Inc. | Method for analyzing impurities in a gas stream |
JP4024494B2 (ja) * | 2001-03-29 | 2007-12-19 | 大陽日酸株式会社 | ガス中の窒素測定方法及び装置 |
JP4580119B2 (ja) * | 2001-03-30 | 2010-11-10 | 大陽日酸株式会社 | ガス中の不純物分析方法及び装置 |
JP3804798B2 (ja) * | 2002-09-19 | 2006-08-02 | 信越化学工業株式会社 | 液体有機金属化合物の気化供給装置 |
MXPA05005629A (es) * | 2002-11-26 | 2005-09-08 | Praxair Technology Inc | Suministro de gas y recuperacion para atomizador de metal. |
JP2005249551A (ja) * | 2004-03-03 | 2005-09-15 | Taiyo Nippon Sanso Corp | 混合ガス中の不純物の分析方法及び装置 |
-
2006
- 2006-02-20 JP JP2006041872A patent/JP4944454B2/ja active Active
-
2007
- 2007-02-09 KR KR1020087021298A patent/KR101006175B1/ko active IP Right Grant
- 2007-02-09 CN CN200780005489XA patent/CN101384895B/zh active Active
- 2007-02-09 US US12/279,630 patent/US7957003B2/en active Active
- 2007-02-09 EP EP07713999A patent/EP1988385A4/en not_active Withdrawn
- 2007-02-09 WO PCT/JP2007/052343 patent/WO2007097211A1/ja active Application Filing
- 2007-02-15 TW TW096105636A patent/TWI437224B/zh active
Also Published As
Publication number | Publication date |
---|---|
TW200739055A (en) | 2007-10-16 |
CN101384895B (zh) | 2011-07-13 |
WO2007097211A1 (ja) | 2007-08-30 |
KR20080095893A (ko) | 2008-10-29 |
US7957003B2 (en) | 2011-06-07 |
KR101006175B1 (ko) | 2011-01-07 |
EP1988385A1 (en) | 2008-11-05 |
JP2007218816A (ja) | 2007-08-30 |
CN101384895A (zh) | 2009-03-11 |
TWI437224B (zh) | 2014-05-11 |
US20100220320A1 (en) | 2010-09-02 |
EP1988385A4 (en) | 2013-01-16 |
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