JP4933403B2 - リソグラフィ装置用の導管システム、リソグラフィ装置、ポンプ、及び、導管システム内の振動を実質的に低減する方法 - Google Patents
リソグラフィ装置用の導管システム、リソグラフィ装置、ポンプ、及び、導管システム内の振動を実質的に低減する方法 Download PDFInfo
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- JP4933403B2 JP4933403B2 JP2007287992A JP2007287992A JP4933403B2 JP 4933403 B2 JP4933403 B2 JP 4933403B2 JP 2007287992 A JP2007287992 A JP 2007287992A JP 2007287992 A JP2007287992 A JP 2007287992A JP 4933403 B2 JP4933403 B2 JP 4933403B2
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- 238000000034 method Methods 0.000 title claims description 13
- 239000007788 liquid Substances 0.000 claims description 127
- 239000000758 substrate Substances 0.000 claims description 70
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- 239000007924 injection Substances 0.000 claims description 49
- 230000005855 radiation Effects 0.000 claims description 43
- 239000000203 mixture Substances 0.000 claims description 29
- 239000012528 membrane Substances 0.000 claims description 23
- 230000006835 compression Effects 0.000 claims description 12
- 238000007906 compression Methods 0.000 claims description 12
- 230000007423 decrease Effects 0.000 claims description 4
- 238000011038 discontinuous diafiltration by volume reduction Methods 0.000 claims description 3
- 239000012809 cooling fluid Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 107
- 238000000059 patterning Methods 0.000 description 31
- 238000007654 immersion Methods 0.000 description 28
- 239000012530 fluid Substances 0.000 description 8
- 238000005086 pumping Methods 0.000 description 8
- 230000002829 reductive effect Effects 0.000 description 8
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000001459 lithography Methods 0.000 description 4
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- 230000002411 adverse Effects 0.000 description 2
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- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000012876 topography Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000002238 attenuated effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000671 immersion lithography Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
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- 230000005381 magnetic domain Effects 0.000 description 1
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- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/709—Vibration, e.g. vibration detection, compensation, suppression or isolation
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/0042—Systems for the equilibration of forces acting on the machines or pump
- F04C15/0049—Equalization of pressure pulses
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C15/00—Component parts, details or accessories of machines, pumps or pumping installations, not provided for in groups F04C2/00 - F04C14/00
- F04C15/06—Arrangements for admission or discharge of the working fluid, e.g. constructional features of the inlet or outlet
- F04C15/062—Arrangements for supercharging the working space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2/00—Rotary-piston machines or pumps
- F04C2/08—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C2/12—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C2/14—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
- F04C2/18—Rotary-piston machines or pumps of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with similar tooth forms
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70858—Environment aspects, e.g. pressure of beam-path gas, temperature
- G03F7/70866—Environment aspects, e.g. pressure of beam-path gas, temperature of mask or workpiece
- G03F7/70875—Temperature, e.g. temperature control of masks or workpieces via control of stage temperature
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Public Health (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Toxicology (AREA)
- Computer Networks & Wireless Communication (AREA)
- Combustion & Propulsion (AREA)
- Chemical & Material Sciences (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Acoustics & Sound (AREA)
- Aviation & Aerospace Engineering (AREA)
Description
Claims (15)
- 液体又は液/ガス混合物を誘導する少なくとも1つの導管と、
前記液体又は液/ガス混合物の圧力ピーク又は圧力波の少なくとも一部を吸収するため、前記液体又は液/ガス混合物にガスを注入するように構成されたガス圧入ノズルと、を備えるリソグラフィ装置用の導管システム。 - 前記液体又は液/ガス混合物をポンプ輸送するように構成されたポンプをさらに備え、
前記ポンプは、
ポンプインレットと、
ポンプアウトレットと、
前記ポンプインレットと前記ポンプアウトレットとの間にあって、前記液体又は液/ガス混合物を圧縮するためのポンプチャンバとを有し、
前記ガス圧入ノズルが前記ポンプ内に配されている、請求項1記載の導管システム。 - 前記ガス圧入ノズルが加圧ガス源に連結されている、請求項1又は請求項2のいずれかに記載の導管システム。
- 前記加圧ガスの圧力は、前記導管システム内の、少なくとも前記液体又は液/ガス混合物にガスが圧入される箇所における圧力よりも高い、請求項3記載の導管システム。
- 前記ポンプチャンバが、前記ポンプチャンバの体積を増減させるように構成されたコンプレッションエレメントを備える、請求項2乃至請求項4のいずれか一項記載の導管システム。
- 前記コンプレッションエレメントが膜である、請求項5記載の導管システム。
- 前記ガス圧入ノズルは、
前記ポンプアウトレット内に配されているか、
前記ポンプのフィッティング内に配されているか、又は、
少なくとも部分的に、前記ポンプアウトレットに連結された導管又はフィッティングを通るように配され或いはこれに沿って誘導され該ガス圧入ノズルが、前記ポンプアウトレット内或いはその付近で終端する、請求項2乃至請求項6のいずれか一項に記載の導管システム。 - 前記ガス圧入ノズルが環状又はほぼ環状であり、ポンプアウトレットフィッティング又は導管の周囲に配されている、請求項7記載の導管システム。
- 前記ガス圧入ノズルが、前記導管システムの湾曲部又はくびれ部付近に配されている、請求項1乃至請求項6のいずれか一項に記載の導管システム。
- 基板を保持するように構成された基板テーブルと、
パターン付き放射ビームを前記基板のターゲット部分上に投影するように構成された投影システムと、
請求項1乃至請求項9のいずれか一項に記載の導管システムと、を備えるリソグラフィ装置。 - 前記導管システムが冷却流体システムの一部である、請求項10記載のリソグラフィ装置。
- 液体又は液/ガス混合物をポンプ輸送するように構成されたポンプであって、
ポンプインレットと、
ポンプアウトレットと、
前記ポンプインレットと前記ポンプアウトレットとの間にあって、前記液体又は液/ガス混合物を圧縮するポンプチャンバとを備え、前記液体又は液/ガス混合物にガスを注入するガス圧入ノズルが中に配されている、ポンプ。 - 液体の圧縮によって振動が発生する、リソグラフィ装置内の液体流動用導管システムにおいて、圧力波又は圧力ピークを実質的に低減する方法であって、
前記圧力波又は圧力ピークの少なくとも一部を吸収するため、液体の流れにガスを圧入する工程、を含む方法。 - 前記圧入工程が、前記ポンプチャンバの体積減少中に、ポンプのポンプチャンバ内で行われる、請求項13記載の方法。
- 前記ガスが、圧縮ガスであり、かつ、前記ポンプのポンプアウトレット内又はその付近に配されたガス圧入ノズルを介して注入される、請求項14記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US59820406A | 2006-11-13 | 2006-11-13 | |
US11/598,204 | 2006-11-13 |
Publications (2)
Publication Number | Publication Date |
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JP2008124462A JP2008124462A (ja) | 2008-05-29 |
JP4933403B2 true JP4933403B2 (ja) | 2012-05-16 |
Family
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Family Applications (1)
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JP2007287992A Active JP4933403B2 (ja) | 2006-11-13 | 2007-11-06 | リソグラフィ装置用の導管システム、リソグラフィ装置、ポンプ、及び、導管システム内の振動を実質的に低減する方法 |
Country Status (6)
Country | Link |
---|---|
EP (1) | EP1921503A3 (ja) |
JP (1) | JP4933403B2 (ja) |
KR (1) | KR100925834B1 (ja) |
CN (1) | CN101187782B (ja) |
SG (1) | SG143137A1 (ja) |
TW (1) | TWI376576B (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US10074547B2 (en) * | 2013-12-19 | 2018-09-11 | Taiwan Semiconductor Manufacturing Co., Ltd. | Photoresist nozzle device and photoresist supply system |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
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US4509852A (en) | 1980-10-06 | 1985-04-09 | Werner Tabarelli | Apparatus for the photolithographic manufacture of integrated circuit elements |
US4903793A (en) * | 1989-05-11 | 1990-02-27 | Firey Joseph C | Noise suppression by gas liquid mixture |
JPH05126298A (ja) * | 1991-10-31 | 1993-05-21 | Tosoh Corp | 液体移送装置及び液体の移送方法 |
JPH0727043A (ja) * | 1993-07-09 | 1995-01-27 | Fujitsu Ltd | 送液ポンプ |
JPH10125592A (ja) * | 1996-10-21 | 1998-05-15 | Nikon Corp | 温度制御装置及びその方法 |
AU2747999A (en) | 1998-03-26 | 1999-10-18 | Nikon Corporation | Projection exposure method and system |
CN101424881B (zh) | 2002-11-12 | 2011-11-30 | Asml荷兰有限公司 | 光刻投射装置 |
KR101613384B1 (ko) | 2003-08-21 | 2016-04-18 | 가부시키가이샤 니콘 | 노광 장치, 노광 방법 및 디바이스 제조 방법 |
EP2278402B1 (en) * | 2003-08-26 | 2013-03-06 | Nikon Corporation | Exposure apparatus |
KR101380989B1 (ko) * | 2003-08-29 | 2014-04-04 | 가부시키가이샤 니콘 | 노광 장치 및 디바이스 제조 방법 |
JP4605014B2 (ja) | 2003-10-28 | 2011-01-05 | 株式会社ニコン | 露光装置、露光方法、デバイスの製造方法 |
JP4323946B2 (ja) * | 2003-12-19 | 2009-09-02 | キヤノン株式会社 | 露光装置 |
US7394521B2 (en) | 2003-12-23 | 2008-07-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
DE602004027162D1 (de) | 2004-01-05 | 2010-06-24 | Nippon Kogaku Kk | Belichtungsvorrichtung, belichtungsverfahren und bauelementeherstellungsverfahren |
JP4328684B2 (ja) * | 2004-07-16 | 2009-09-09 | 東京エレクトロン株式会社 | 処理液供給システム |
JP2006156655A (ja) * | 2004-11-29 | 2006-06-15 | Dainippon Screen Mfg Co Ltd | 基板処理装置および送液システム |
JP2006222165A (ja) * | 2005-02-08 | 2006-08-24 | Canon Inc | 露光装置 |
JP2006226620A (ja) * | 2005-02-18 | 2006-08-31 | Sharp Corp | 冷媒強制循環回路 |
-
2007
- 2007-10-26 SG SG200717221-6A patent/SG143137A1/en unknown
- 2007-10-30 EP EP07075932A patent/EP1921503A3/en not_active Withdrawn
- 2007-11-05 TW TW96141743A patent/TWI376576B/zh active
- 2007-11-06 JP JP2007287992A patent/JP4933403B2/ja active Active
- 2007-11-12 KR KR1020070115024A patent/KR100925834B1/ko active IP Right Grant
- 2007-11-13 CN CN 200710168155 patent/CN101187782B/zh active Active
Also Published As
Publication number | Publication date |
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KR20080043254A (ko) | 2008-05-16 |
CN101187782A (zh) | 2008-05-28 |
EP1921503A2 (en) | 2008-05-14 |
EP1921503A3 (en) | 2011-08-03 |
CN101187782B (zh) | 2013-01-02 |
KR100925834B1 (ko) | 2009-11-06 |
SG143137A1 (en) | 2008-06-27 |
JP2008124462A (ja) | 2008-05-29 |
TW200832077A (en) | 2008-08-01 |
TWI376576B (en) | 2012-11-11 |
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