JP4923056B2 - 光学参照マーカ付き光学エンコーダのスケールアッセンブリ - Google Patents
光学参照マーカ付き光学エンコーダのスケールアッセンブリ Download PDFInfo
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- JP4923056B2 JP4923056B2 JP2008534795A JP2008534795A JP4923056B2 JP 4923056 B2 JP4923056 B2 JP 4923056B2 JP 2008534795 A JP2008534795 A JP 2008534795A JP 2008534795 A JP2008534795 A JP 2008534795A JP 4923056 B2 JP4923056 B2 JP 4923056B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34746—Linear encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/366—Particular pulse shapes
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Description
Claims (12)
- 所定位置のスケールに貼付するために寸法取りおよび構成されたフレキシブル平面基板と、
前記平面基板上の光学反射しかつパターン反射金属コーティングを含むマーカパターンであって、光学位置エンコーダの光源と連動して作用し光学位置エンコーダの検出器回路によって検知される光学強度分布を生成するマーカパターンと、
を含む、光学位置エンコーダのスケールに貼付される貼り付け式マーカであって、
前記基板が光学的に透明であり、前記パターン反射金属コーティングが前記光学位置エンコーダの光源および検出器回路から離れた前記基板の表面上に配置される、貼り付け式マーカ。 - 請求項1の貼り付け式マーカであって、前記基板の前記表面に微細構造パターンがあり、前記パターン反射金属コーディングが反射マーカパターンを生成する対応パターン反射金属表面を作製するために前記基板の前記表面に配置されている、貼り付け式マーカ。
- 請求項2の貼り付け式マーカであって、前記マーカパターンが2値パターンを含む、貼り付け式マーカ。
- 請求項1の貼り付け式マーカであって、前記マーカパターンが回折光学素子を含む、貼り付け式マーカ。
- 請求項4の貼り付け式マーカであって、前記回折光学素子がゾーンレンズを含む、貼り付け式マーカ。
- 請求項1の貼り付け式マーカであって、前記マーカパターンは、拡散的に光源からの光を反射するように作用し、スケールの所定位置が検出回路によって検出されたことを示す検出器の光学強度分布が所定の光出力を有する、貼り付け式マーカ。
- 請求項1の貼り付け式マーカであって、中央エリアと外側エリアを有し、前記中央エリアは、前記検出回路によって検知される光学強度分布を生成するため光学的に活性であり、前記外側エリアは、光学的に非活性であり、前記貼り付け式マーカを前記スケールに貼付する最中に設置用ツールと前記貼り付け式マーカの中央エリアとの分離を維持しながら前記設置用ツールと連動するように寸法取りされている、貼り付け式マーカ。
- スケールと、
前記貼り付け式マーカのマーカパターンが前記光学位置エンコーダの光源と連動して作用し前記光学位置エンコーダの検出器回路によって検知される光学強度分布を生成する前記スケールの所定位置に貼付される請求項1の貼り付け式マーカと、
を含む、光学位置エンコーダのスケールアッセンブリ。 - 光源と、
検出器回路と、
請求項8のスケールアッセンブリと、
を含む、光学位置エンコーダ。 - 光学位置エンコーダの光源と連動して作用し前記光学位置エンコーダの検出回路によって検知される光学強度分布を生成する、スケールマークのパターンを有する事前製造光学スケール基板を取得することと、
光学反射しかつパターン反射金属コーティングを含むマーカパターンが形成され、光源と連動して作用し検出器回路によって検知される光学強度分布を生成するフレキシブルマーカ基板のある事前製造光学マーカを取得することであって、前記フレキシブルマーカ基板は光学的に透明であり、前記マーカパターンは前記フレキシブルマーカ基板の背面上に形成されることと、
光学位置エンコーダの動作中に前記マーカパターンが前記検出器によって検出可能になり光学スケールと検出器との間の所定の相対位置のインジケータとなるよう、前記事前製造光学マーカを所定位置で前記事前製造光学スケール基板に貼付することであって、前記事前製造光学マーカは、前記フレキシブルマーカ基板の前記背面が前記光学位置エンコーダの光源および検出器回路から離れて指向されるように貼付されることと、
を含む、光学位置エンコーダのスケールアッセンブリ作製方法。 - 請求項10の方法であって、前記フレキシブルマーカ基板は、前記フレキシブルマーカ基板に取付けられたハンドル部分を含むコンパウンド基板の一部を含み、前記事前製造光学マーカを前記事前製造光学スケール基板に貼付することが、前記ハンドル部分を用いて前記フレキシブルマーカ基板を前記事前製造光学スケール基板上に配置し、その後に前記ハンドル部分を取り外すことを含む、方法。
- 請求項10の方法であって、前記事前製造光学マーカは、中央エリアと外側エリアを有し、前記検出回路によって検知される光学強度分布を生成するため光学的に活性であり、前記外側エリアは、光学的に非活性であり前記設置用ツールと連動するように寸法取りされており、前記事前製造光学マーカを事前製造光学スケール基板に貼付することが、前記設置用ツールと前記事前製造光学マーカの前記中央エリアとの間の分離を維持しながら、前記事前製造光学マーカの前記外側エリアと連動した前記設置用ツールを使用することを含む、方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US73499905P | 2005-11-09 | 2005-11-09 | |
US60/734,999 | 2005-11-09 | ||
PCT/US2006/043835 WO2007056588A2 (en) | 2005-11-09 | 2006-11-09 | Scale assembly for optical encoder having affixed optical reference markers |
Publications (2)
Publication Number | Publication Date |
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JP2009510482A JP2009510482A (ja) | 2009-03-12 |
JP4923056B2 true JP4923056B2 (ja) | 2012-04-25 |
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Application Number | Title | Priority Date | Filing Date |
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JP2008534795A Expired - Fee Related JP4923056B2 (ja) | 2005-11-09 | 2006-11-09 | 光学参照マーカ付き光学エンコーダのスケールアッセンブリ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7343693B2 (ja) |
JP (1) | JP4923056B2 (ja) |
KR (1) | KR20080056003A (ja) |
CN (1) | CN101535776A (ja) |
DE (1) | DE112006002534B4 (ja) |
GB (1) | GB2444464B (ja) |
WO (1) | WO2007056588A2 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7707739B2 (en) * | 2005-11-04 | 2010-05-04 | Dr. Johannes Heidenhain Gmbh | Method for attaching a scale to a carrier, a scale, and carrier having a scale |
US9248000B2 (en) * | 2008-08-15 | 2016-02-02 | Stryker European Holdings I, Llc | System for and method of visualizing an interior of body |
CN102692187B (zh) * | 2011-03-21 | 2016-02-03 | 上海微电子装备有限公司 | 一种激光束偏移测量方法 |
EP3052895B1 (en) * | 2013-10-01 | 2021-06-16 | Renishaw PLC | Method of manufacturing an electronic component |
JP6893819B2 (ja) * | 2017-04-06 | 2021-06-23 | 株式会社ミツトヨ | エンコーダ |
Citations (2)
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JP2001330479A (ja) * | 2000-05-19 | 2001-11-30 | Futaba Corp | 原点信号発生装置 |
JP2005156217A (ja) * | 2003-11-21 | 2005-06-16 | Yokogawa Electric Corp | ターゲットマークシート |
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US4367590A (en) * | 1981-03-27 | 1983-01-11 | Winter Craig R | Calibrated tape for use in constructing wall with vertical studs |
US4703176A (en) * | 1985-06-04 | 1987-10-27 | Plus Development Corporation | Compact polyphase optical position encoder |
US4982509A (en) * | 1988-08-19 | 1991-01-08 | Delta International Machinery Corp. | Measurement system having multiple display orientations |
AT394781B (de) * | 1989-02-03 | 1992-06-25 | Rsf Elektronik Gmbh | Inkrementales messsystem |
US5768242A (en) * | 1996-04-05 | 1998-06-16 | The United States Of America As Representd By The Administrator Of The National Aeronautics And Space Administration | Apparatus and method for focusing a light beam in a three-dimensional recording medium by a dynamic holographic device |
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DE19821558B4 (de) * | 1997-08-08 | 2007-09-13 | Dr. Johannes Heidenhain Gmbh | Maßstab und Verfahren zur Herstellung eines Maßstabes sowie Positionsmeßeinrichtung |
US6739067B2 (en) * | 2002-04-25 | 2004-05-25 | Acu-Rite, Inc. | Cover for a sealed linear encoder and a sealed linear encoder |
DE10229888B4 (de) * | 2002-07-03 | 2010-09-30 | Dr. Johannes Heidenhain Gmbh | Vorrichtung und Verfahren zum Anbringen eines Maßstabs oder Maßstabträgers oder einer Maßstabführung sowie Maßstab, Maßstabträger oder Maßstabführung oder Schutzband dafür |
JP4230810B2 (ja) * | 2003-04-24 | 2009-02-25 | 株式会社ミツトヨ | 測長装置 |
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ES2423212T3 (es) * | 2004-07-23 | 2013-09-18 | Dr. Johannes Heidenhain Gmbh | Componente, en particular sensor, y procedimiento para el encolado del componente |
-
2006
- 2006-11-09 CN CNA2006800415060A patent/CN101535776A/zh active Pending
- 2006-11-09 US US11/598,257 patent/US7343693B2/en not_active Expired - Fee Related
- 2006-11-09 JP JP2008534795A patent/JP4923056B2/ja not_active Expired - Fee Related
- 2006-11-09 KR KR1020087011091A patent/KR20080056003A/ko not_active Application Discontinuation
- 2006-11-09 DE DE112006002534.1T patent/DE112006002534B4/de not_active Expired - Fee Related
- 2006-11-09 GB GB0806084A patent/GB2444464B/en not_active Expired - Fee Related
- 2006-11-09 WO PCT/US2006/043835 patent/WO2007056588A2/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2001330479A (ja) * | 2000-05-19 | 2001-11-30 | Futaba Corp | 原点信号発生装置 |
JP2005156217A (ja) * | 2003-11-21 | 2005-06-16 | Yokogawa Electric Corp | ターゲットマークシート |
Also Published As
Publication number | Publication date |
---|---|
GB2444464A (en) | 2008-06-04 |
JP2009510482A (ja) | 2009-03-12 |
GB0806084D0 (en) | 2008-05-14 |
US20070144026A1 (en) | 2007-06-28 |
DE112006002534T5 (de) | 2008-09-25 |
KR20080056003A (ko) | 2008-06-19 |
US7343693B2 (en) | 2008-03-18 |
GB2444464B (en) | 2010-08-25 |
WO2007056588A2 (en) | 2007-05-18 |
DE112006002534B4 (de) | 2015-01-29 |
WO2007056588A3 (en) | 2009-04-30 |
CN101535776A (zh) | 2009-09-16 |
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