JP4909260B2 - クライオポンプ用バルブ・アセンブリ - Google Patents
クライオポンプ用バルブ・アセンブリ Download PDFInfo
- Publication number
- JP4909260B2 JP4909260B2 JP2007503989A JP2007503989A JP4909260B2 JP 4909260 B2 JP4909260 B2 JP 4909260B2 JP 2007503989 A JP2007503989 A JP 2007503989A JP 2007503989 A JP2007503989 A JP 2007503989A JP 4909260 B2 JP4909260 B2 JP 4909260B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- valve assembly
- cryopump
- roughing
- duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000010926 purge Methods 0.000 claims abstract description 32
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 42
- 239000007789 gas Substances 0.000 claims description 36
- 229910052757 nitrogen Inorganic materials 0.000 claims description 18
- 230000007246 mechanism Effects 0.000 claims description 12
- 239000012530 fluid Substances 0.000 claims description 4
- 230000005855 radiation Effects 0.000 description 7
- 238000005086 pumping Methods 0.000 description 6
- 238000011069 regeneration method Methods 0.000 description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- 230000008929 regeneration Effects 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 230000035515 penetration Effects 0.000 description 4
- 238000009835 boiling Methods 0.000 description 3
- 239000003463 adsorbent Substances 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 1
- 239000003610 charcoal Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002808 molecular sieve Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000003507 refrigerant Substances 0.000 description 1
- URGAHOPLAPQHLN-UHFFFAOYSA-N sodium aluminosilicate Chemical compound [Na+].[Al+3].[O-][Si]([O-])=O.[O-][Si]([O-])=O URGAHOPLAPQHLN-UHFFFAOYSA-N 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressor (AREA)
Description
130 排気筒
140 加圧気体(加圧窒素)の供給源
300 ダクト付きバルブ・アッセンブリ
305,325 排気弁
305 逃がし弁
310 逃がし弁ポート
315 排気パージ弁
320 粗引き弁ポート
325 粗引き弁
345 パージ弁
380 アクチュエータ
400 接続機構(同軸接続機構)
410 内側ダクト
420 外側ダクト
Claims (12)
- 統合型クライオポンプ・バルブを形成するダクト付きバルブ・アセンブリ300であって、
クライオポンプへの接合部を有する、前記バルブ・アセンブリ300のハウジング、
前記接合部における前記バルブ・アセンブリ300の外側ダクト420の内側に内側ダクト410を隙間を有して接続する接続機構400、
前記外側ダクト420を粗引き弁ポート320または逃がし弁ポート310に接続する排気弁325,305、ならびに
前記内側ダクト410を介して加圧気体の供給源140を前記クライオポンプに接続するパージ弁345
を有するダクト付きバルブ・アセンブリ300。 - 請求項1において、前記排気弁325,305が、前記粗引き弁ポート320を介して前記バルブ・アセンブリ300の前記外側ダクト420を粗引き真空ポンプ120に接続する粗引き弁325であるダクト付きバルブ・アセンブリ300。
- 請求項1において、前記排気弁325,305が、前記逃がし弁ポート310を介して前記バルブ・アセンブリ300の前記外側ダクト420を排気筒130に接続する逃がし弁305であるダクト付きバルブ・アセンブリ300。
- 請求項3において、前記粗引き弁ポート320を介して前記バルブ・アセンブリ300の前記外側ダクト420を粗引き真空ポンプ120に接続する粗引き弁325をさらに有するダクト付きバルブ・アセンブリ300。
- 請求項3において、前記加圧気体の供給源140を前記排気筒130に接続する排気パージ弁315をさらに有するダクト付きバルブ・アセンブリ300。
- 請求項1において、前記加圧気体の供給源140が、前記パージ弁345および前記排気弁325,305の付勢機構を制御するように接続されているダクト付きバルブ・アセンブリ300。
- 請求項6において、前記粗引き弁325の付勢を制御するアクチュエータ380をさらに有するダクト付きバルブ・アセンブリ300。
- 請求項1において、前記加圧気体の供給源140が、加圧窒素の供給源140であるダクト付きバルブ・アセンブリ300。
- 請求項1において、前記外側ダクト420へ流体に関して連通している圧力計をさらに有するダクト付きバルブ・アセンブリ300。
- 統合型クライオポンプ・バルブを形成するダクト付きバルブ・アセンブリ300であって、
クライオポンプへの接合部を有する、前記バルブ・アセンブリ300のハウジング、
前記接合部における前記バルブ・アセンブリ300の外側ダクト420の内側に内側ダクト410を隙間を有して接続する接続機構400、
前記外側ダクト420を粗引き真空ポンプ120に接続する粗引き弁325、
前記外側ダクト420を排気筒130に接続する逃がし弁305、
加圧窒素の供給源140を前記排気筒130に接続する排気パージ弁315、
前記内側ダクト410を介して前記加圧窒素の供給源140をクライオポンプに接続するパージ弁345、
前記粗引き弁325の付勢を制御するアクチュエータ380、ならびに
前記外側ダクト420へ流体に関して連通している圧力計
を有するダクト付きバルブ・アセンブリ300。 - 請求項1から10までのいずれか一項において、前記接合部における前記バルブ・アセンブリ300の外側ダクト420の内側に内側ダクト410を隙間を有して接続する接続機構400が同軸接続機構400であるダクト付きバルブ・アセンブリ300。
- ダクト付き統合型バルブ・アセンブリを備えたクライオポンプであって、前記バルブ・アセンブリとして請求項1から11までのいずれか一項に記載のダクト付きバルブ・アセンブリ300を備えたクライオポンプ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/804,842 | 2004-03-19 | ||
US10/804,842 US7194867B2 (en) | 2004-03-19 | 2004-03-19 | Integrated rough/purge/vent (RPV) valve |
PCT/US2005/008363 WO2005090788A1 (en) | 2004-03-19 | 2005-03-11 | Valve assembly for a cryopump |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007529684A JP2007529684A (ja) | 2007-10-25 |
JP2007529684A5 JP2007529684A5 (ja) | 2008-04-24 |
JP4909260B2 true JP4909260B2 (ja) | 2012-04-04 |
Family
ID=34964857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2007503989A Active JP4909260B2 (ja) | 2004-03-19 | 2005-03-11 | クライオポンプ用バルブ・アセンブリ |
Country Status (9)
Country | Link |
---|---|
US (1) | US7194867B2 (ja) |
EP (1) | EP1730401B1 (ja) |
JP (1) | JP4909260B2 (ja) |
KR (1) | KR20060130257A (ja) |
CN (1) | CN1934356B (ja) |
AT (1) | ATE434725T1 (ja) |
DE (1) | DE602005015089D1 (ja) |
TW (1) | TWI418706B (ja) |
WO (1) | WO2005090788A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7228687B2 (en) * | 2004-08-12 | 2007-06-12 | Vat Holding Ag | Valve device |
US7445705B2 (en) * | 2004-08-19 | 2008-11-04 | Ford Motor Company | Particle filter for fuel cell coolant |
US20090242046A1 (en) * | 2008-03-31 | 2009-10-01 | Benjamin Riordon | Valve module |
CN101975649B (zh) * | 2010-09-17 | 2012-02-15 | 中国科学院上海技术物理研究所 | 一种柔性非碰撞式冷指限位保护装置 |
JP5296811B2 (ja) * | 2011-01-17 | 2013-09-25 | 住友重機械工業株式会社 | クライオポンプ及び真空バルブ装置 |
JP5679910B2 (ja) * | 2011-06-03 | 2015-03-04 | 住友重機械工業株式会社 | クライオポンプ制御装置、クライオポンプシステム、及びクライオポンプの真空度保持判定方法 |
US8833383B2 (en) | 2011-07-20 | 2014-09-16 | Ferrotec (Usa) Corporation | Multi-vane throttle valve |
CN105570516B (zh) * | 2014-11-06 | 2017-10-27 | 台湾气立股份有限公司 | 真空控制阀 |
GB2552958B (en) * | 2016-08-15 | 2019-10-30 | Edwards Ltd | Turbo pump vent assembly and method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996022465A1 (en) * | 1995-01-18 | 1996-07-25 | Helix Technology Corporation | Controlled cryopump regeneration pressures |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3335550A (en) * | 1964-04-24 | 1967-08-15 | Union Carbide Corp | Cryosorption apparatus |
US4117694A (en) * | 1977-02-09 | 1978-10-03 | Belmore Richard J | Rotatable refrigerated valve |
US4697617A (en) * | 1985-01-22 | 1987-10-06 | Helix Technology Corporation | Pressure relief filter and valve and cryopump utilizing the same |
US4834136A (en) * | 1985-01-22 | 1989-05-30 | Helix Technology Corporation | Pressure relief filter and valve and cryopump utilizing the same |
US4719938A (en) * | 1985-01-22 | 1988-01-19 | Helix Technology Corporation | Self-cleaning valve and cryopump utilizing the same |
US4718442A (en) | 1986-02-27 | 1988-01-12 | Helix Technology Corporation | Cryogenic refrigerator compressor with externally adjustable by-pass/relief valve |
US4799359A (en) * | 1986-02-27 | 1989-01-24 | Helix Technology Corporation | Cryogenic refrigerator compressor with externally adjustable by-pass/relief valve |
WO1990012231A1 (en) | 1989-04-07 | 1990-10-18 | Helix Technology Corporation | Pressure relief valve and cryopump utilizing the same |
US5009073A (en) * | 1990-05-01 | 1991-04-23 | Marin Tek, Inc. | Fast cycle cryogenic flex probe |
DE9111236U1 (de) * | 1991-09-10 | 1992-07-09 | Leybold AG, 6450 Hanau | Kryopumpe |
US5242277A (en) * | 1991-11-21 | 1993-09-07 | Helix Technology Corporation | Ultra high vacuum cryopump relief valve assembly |
US5228299A (en) * | 1992-04-16 | 1993-07-20 | Helix Technology Corporation | Cryopump water drain |
GB2325707B (en) * | 1996-03-20 | 2000-06-21 | Helix Tech Corp | Purge and rough cryopump regeneration process, cryopump and controller |
US5906102A (en) | 1996-04-12 | 1999-05-25 | Helix Technology Corporation | Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve |
US5901558A (en) * | 1997-08-20 | 1999-05-11 | Helix Technology Corporation | Water pump with integral gate valve |
US5974809A (en) * | 1998-01-21 | 1999-11-02 | Helix Technology Corporation | Cryopump with an exhaust filter |
CN2420438Y (zh) * | 2000-03-31 | 2001-02-21 | 钟乃光 | 带保温罩壳的低温液体活塞泵 |
-
2004
- 2004-03-19 US US10/804,842 patent/US7194867B2/en active Active
-
2005
- 2005-03-11 CN CN2005800088929A patent/CN1934356B/zh active Active
- 2005-03-11 AT AT05732680T patent/ATE434725T1/de not_active IP Right Cessation
- 2005-03-11 JP JP2007503989A patent/JP4909260B2/ja active Active
- 2005-03-11 EP EP05732680A patent/EP1730401B1/en active Active
- 2005-03-11 DE DE602005015089T patent/DE602005015089D1/de active Active
- 2005-03-11 KR KR1020067021594A patent/KR20060130257A/ko not_active Application Discontinuation
- 2005-03-11 WO PCT/US2005/008363 patent/WO2005090788A1/en active Application Filing
- 2005-03-15 TW TW094107815A patent/TWI418706B/zh active
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1996022465A1 (en) * | 1995-01-18 | 1996-07-25 | Helix Technology Corporation | Controlled cryopump regeneration pressures |
Also Published As
Publication number | Publication date |
---|---|
CN1934356B (zh) | 2012-11-21 |
KR20060130257A (ko) | 2006-12-18 |
TW200532111A (en) | 2005-10-01 |
TWI418706B (zh) | 2013-12-11 |
EP1730401B1 (en) | 2009-06-24 |
EP1730401A1 (en) | 2006-12-13 |
WO2005090788A1 (en) | 2005-09-29 |
JP2007529684A (ja) | 2007-10-25 |
ATE434725T1 (de) | 2009-07-15 |
CN1934356A (zh) | 2007-03-21 |
DE602005015089D1 (de) | 2009-08-06 |
US20050204753A1 (en) | 2005-09-22 |
US7194867B2 (en) | 2007-03-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4909260B2 (ja) | クライオポンプ用バルブ・アセンブリ | |
CN100363534C (zh) | 利用现场吸气泵***来处理晶片的方法 | |
JP6145443B2 (ja) | 輻射シールド、極低温ユニットおよびクライオポンプ | |
US4679401A (en) | Temperature control of cryogenic systems | |
US5375424A (en) | Cryopump with electronically controlled regeneration | |
US5517823A (en) | Pressure controlled cryopump regeneration method and system | |
JP5552693B2 (ja) | クライオポンプルーバ拡張部 | |
US5862671A (en) | Purge and rough cryopump regeneration process, cryopump and controller | |
US5782096A (en) | Cryopump with improved shielding | |
JPS59206684A (ja) | 複数ポ−トクライオポンプ | |
JP5296811B2 (ja) | クライオポンプ及び真空バルブ装置 | |
KR20170018790A (ko) | 크라이오펌프 | |
US5906102A (en) | Cryopump with gas heated exhaust valve and method of warming surfaces of an exhaust valve | |
JP2763524B2 (ja) | 二次ポンプ装置 | |
EP0214277B1 (en) | Cryopump regeneration method and apparatus | |
US5356270A (en) | Ultra high vacuum cryopump relief valve assembly | |
JP5732404B2 (ja) | 排気系が組み込まれたプロセスチャンバ | |
JP2000249056A (ja) | クライオポンプの運転制御方法および運転制御装置 | |
JPH02154403A (ja) | 超電導磁石装置の真空排気装置 | |
McCrary | Use of cryopumps on large space simulation systems | |
JPH04362283A (ja) | クライオポンプ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20080310 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080310 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20101109 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20110208 |
|
A602 | Written permission of extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A602 Effective date: 20110216 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110308 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110802 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110830 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120110 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120113 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150120 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 Ref document number: 4909260 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313113 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |