JP4879883B2 - 多段ナノホールアレイ金属膜の製造方法及び同膜構造によって支持されたガス/イオン種選択性膜の製造方法 - Google Patents
多段ナノホールアレイ金属膜の製造方法及び同膜構造によって支持されたガス/イオン種選択性膜の製造方法 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims description 93
- 239000002184 metal Substances 0.000 title claims description 93
- 238000004519 manufacturing process Methods 0.000 title claims description 31
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- 229920000642 polymer Polymers 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 26
- 239000000203 mixture Substances 0.000 claims description 23
- 239000002243 precursor Substances 0.000 claims description 15
- 239000007789 gas Substances 0.000 claims description 14
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 9
- 238000001035 drying Methods 0.000 claims description 9
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- 238000011049 filling Methods 0.000 claims description 7
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 claims description 6
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 6
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical group COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 claims description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 6
- 238000009713 electroplating Methods 0.000 claims description 5
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- 239000002904 solvent Substances 0.000 claims description 3
- 238000000231 atomic layer deposition Methods 0.000 claims description 2
- 239000003637 basic solution Substances 0.000 claims description 2
- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
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- 230000003647 oxidation Effects 0.000 claims description 2
- 238000007254 oxidation reaction Methods 0.000 claims description 2
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- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims 4
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 claims 1
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- 239000010408 film Substances 0.000 description 40
- 239000010410 layer Substances 0.000 description 15
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 239000000446 fuel Substances 0.000 description 10
- 210000004027 cell Anatomy 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 9
- 238000000151 deposition Methods 0.000 description 8
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- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 6
- 239000003054 catalyst Substances 0.000 description 5
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- 241000894007 species Species 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 3
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- 150000002500 ions Chemical class 0.000 description 3
- 229910052763 palladium Inorganic materials 0.000 description 3
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
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- 241001634884 Cochlicopa lubricella Species 0.000 description 1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical class O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
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- 229910021523 barium zirconate Inorganic materials 0.000 description 1
- DQBAOWPVHRWLJC-UHFFFAOYSA-N barium(2+);dioxido(oxo)zirconium Chemical compound [Ba+2].[O-][Zr]([O-])=O DQBAOWPVHRWLJC-UHFFFAOYSA-N 0.000 description 1
- 239000003012 bilayer membrane Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
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- 210000000170 cell membrane Anatomy 0.000 description 1
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- 229910052802 copper Inorganic materials 0.000 description 1
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- 238000005336 cracking Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000000502 dialysis Methods 0.000 description 1
- 238000003487 electrochemical reaction Methods 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 229910021526 gadolinium-doped ceria Inorganic materials 0.000 description 1
- 239000012705 liquid precursor Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052976 metal sulfide Inorganic materials 0.000 description 1
- 239000006262 metallic foam Substances 0.000 description 1
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- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
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Description
Claims (15)
- 金属膜の製造方法であって、
a)互いに反対側に位置する第1及び第2の面を有する多孔質の非金属テンプレート膜を提供する工程と、
b)前記第1の面上に第1の金属層を、該第1の金属層によって前記第1の面の細孔が塞がれないように成膜する第1成膜工程と、
c)前記テンプレート膜のポリマーネガを前記第1の金属層に付着するように提供し、前記ポリマーネガが前記テンプレート膜の細孔を充填することで前記ポリマーネガが前記テンプレート膜と凹凸が逆の構造を有するようにする工程と、
d)前記ポリマーネガの細孔充填部を露出するべく前記非金属テンプレート膜を除去する工程と、
e)前記第1の金属層上に第2の金属を成膜し、前記第2の金属が前記ポリマーネガの前記細孔充填部と接触するようにする第2成膜工程と、
f)前記ポリマーネガを除去する工程とを有し、
前記ポリマーネガは前記非金属テンプレート膜の除去と第2の金属の成膜の間常に前記ポリマーネガの乾燥を防ぐための乾燥防止用液体に浸漬されていることを特徴とする金属膜の製造方法。 - 請求項1において、
前記非金属テンプレート膜は前記第1の面を含む第1の領域と、前記第2の面を含む第2の領域とを有し、
前記第1の領域は第1の細孔サイズを有し、前記第2の領域は第2の細孔サイズを有し、
前記第2の細孔サイズは前記第1の細孔サイズより大きいことを特徴とする金属膜の製造方法。 - 請求項1又は請求項2において、前記非金属テンプレート膜がアルミナまたはシリコンを含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項3の何れか一項において、前記第1成膜工程が2以上の異なる金属組成を成膜する工程を有することを特徴とする金属膜の製造方法。
- 請求項1乃至請求項4の何れか一項において、前記第1成膜工程が30乃至40秒Ptを成膜する工程を含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項5の何れか一項において、前記第1成膜工程が1nm/sの成膜速度で30乃至40秒の間PtをRFスパッタする工程を含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項6の何れか一項において、前記ポリマーネガを提供する工程が、
前記テンプレート膜中の空間を液体ポリマー前駆体で埋める工程と、
前記ポリマー前駆体を硬化して前記ポリマーネガを提供する硬化工程とを有することを特徴とする金属膜の製造方法。 - 請求項7において、前記ポリマー前駆体がメタクリル酸メチル、(MMA)、及びMMAとポリMMAの混合からなる群から選択されたものであることを特徴とする金属膜の製造方法。
- 請求項7又は請求項8において、前記硬化工程が熱硬化工程または前記ポリマー前駆体を窒素雰囲気中で紫外線放射に曝す工程を含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項9の何れか一項において、前記非金属テンプレート膜の除去工程が前記テンプレート膜をエッチング剤中で溶かす工程を含み、前記エッチング剤が塩基性溶液であることを特徴とする金属膜の製造方法。
- 請求項1乃至請求項10の何れか一項において、前記第2成膜工程が電気めっき工程を含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項11の何れか一項において、前記第2成膜工程が2以上の異なる金属組成を成膜する工程を有することを特徴とする金属膜の製造方法。
- 請求項1乃至請求項12の何れか一項において、前記ポリマーネガを除去する工程がアセトン、トルエン、メチルエチルケトン、フォルムアルデヒド及びそれらの混合からなる群から選択された溶剤中で前記ポリマーネガを溶かす工程を含むことを特徴とする金属膜の製造方法。
- 請求項1乃至請求項13の何れか一項において、前記第1の面上にガスまたはイオン種選択性膜を成膜する第3成膜工程を更に有することを特徴とする金属膜の製造方法。
- 請求項14において、前記第3成膜工程は、原子層堆積、パルスレーザ堆積、金属のスパッタリングとそれに続くスパッタされた金属の酸化、金属酸化物のRFスパッタリング、及び金属のスパッタリングからなる群から選択された方法を含むことを特徴とする金属膜の製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US55835104P | 2004-03-30 | 2004-03-30 | |
US60/558,351 | 2004-03-30 | ||
PCT/US2005/010601 WO2005094354A2 (en) | 2004-03-30 | 2005-03-30 | Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure |
Publications (2)
Publication Number | Publication Date |
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JP2008514384A JP2008514384A (ja) | 2008-05-08 |
JP4879883B2 true JP4879883B2 (ja) | 2012-02-22 |
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US (2) | US7108813B2 (ja) |
EP (1) | EP1737553A4 (ja) |
JP (1) | JP4879883B2 (ja) |
CA (1) | CA2561537A1 (ja) |
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Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20050093018A (ko) * | 2004-03-18 | 2005-09-23 | 한국과학기술연구원 | 고효율 3차원 나노 구조 분리막 |
US7108813B2 (en) * | 2004-03-30 | 2006-09-19 | The Board Of Trustees Of The Leland Stanford Junior University | Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure |
US7323033B2 (en) * | 2004-04-30 | 2008-01-29 | Lucent Technologies Inc. | Nanostructured surfaces having variable permeability |
US7700520B2 (en) * | 2005-04-22 | 2010-04-20 | Institute Of Nuclear Energy Research | Methods of making platinum and platinum alloy catalysts with nanonetwork structures |
JP2008540070A (ja) * | 2005-04-29 | 2008-11-20 | ユニバーシティー オブ ロチェスター | 超薄多孔質ナノスケール膜、その製造方法および使用 |
WO2006119252A2 (en) * | 2005-04-29 | 2006-11-09 | University Of Rochester | Ultrathin nanoscale membranes, methods of making, and uses thereof |
JP2009529888A (ja) * | 2006-03-14 | 2009-08-27 | ユニバーシティ オブ ロチェスター | 超薄多孔質メンブレンを有する細胞培養装置およびその使用 |
WO2008141444A1 (en) * | 2007-05-18 | 2008-11-27 | Sim Composites Inc. | Catalyst-coated proton exchange membrane and process of producing same |
RU2455054C2 (ru) * | 2009-10-23 | 2012-07-10 | Федеральное государственное бюджетное учреждение науки Ордена Трудового Красного Знамени Институт нефтехимического синтеза им. А.В. Топчиева Российской академии наук (ИНХС РАН) | Проточный модуль для мембранного катализа и газоразделения и способ его изготовления |
US8956696B2 (en) | 2011-02-10 | 2015-02-17 | Inficon Gmbh | Ultra-thin membrane for chemical analyzer and related method for forming membrane |
CN106654290B (zh) * | 2015-10-30 | 2019-06-25 | 中国科学院大连化学物理研究所 | 多级阶梯状孔结构水传输板及其制备 |
CN106887597B (zh) * | 2015-12-15 | 2019-06-04 | 中国科学院大连化学物理研究所 | 一种孔径梯度分布的水传输板及其制备方法 |
US11819806B1 (en) | 2018-10-15 | 2023-11-21 | Ampcera Inc. | Methods for manufacturing a solid state ionic conductive membrane on a macro porous support scaffold |
US11177498B1 (en) | 2018-10-15 | 2021-11-16 | Ampcera Inc. | Redox flow batteries, components for redox flow batteries and methods for manufacture thereof |
US11600853B1 (en) | 2019-05-14 | 2023-03-07 | Ampcera Inc. | Systems and methods for storing, transporting, and handling of solid-state electrolytes |
CN114744211B (zh) * | 2022-05-13 | 2024-03-29 | 南京邮电大学 | 一种超分支氧化的多孔金属负极集流体及其制备方法 |
Family Cites Families (35)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1107811A (en) * | 1963-09-20 | 1968-03-27 | Energy Conversion Ltd | Improvements in and relating to structures incorporating thin metal membranes |
US4186100A (en) * | 1976-12-13 | 1980-01-29 | Mott Lambert H | Inertial filter of the porous metal type |
US5603983A (en) * | 1986-03-24 | 1997-02-18 | Ensci Inc | Process for the production of conductive and magnetic transitin metal oxide coated three dimensional substrates |
US4857080A (en) * | 1987-12-02 | 1989-08-15 | Membrane Technology & Research, Inc. | Ultrathin composite metal membranes |
JPH07118327B2 (ja) * | 1990-07-07 | 1995-12-18 | 日本碍子株式会社 | 固体電解質型燃料電池及びこれに用いる多孔質電極体 |
US5645626A (en) * | 1990-08-10 | 1997-07-08 | Bend Research, Inc. | Composite hydrogen separation element and module |
US5498278A (en) * | 1990-08-10 | 1996-03-12 | Bend Research, Inc. | Composite hydrogen separation element and module |
JPH0748378B2 (ja) * | 1991-03-28 | 1995-05-24 | 日本碍子株式会社 | 固体電解質燃料電池用空気電極及びこれを有する固体電解質燃料電池 |
DE4202454C1 (ja) * | 1992-01-29 | 1993-07-29 | Siemens Ag, 8000 Muenchen, De | |
US5451386A (en) * | 1993-05-19 | 1995-09-19 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Osu | Hydrogen-selective membrane |
US6159987A (en) * | 1994-03-28 | 2000-12-12 | Taiho Pharmaceuticals, Co. | Bicyclolactam compounds, use thereof and intermediates for preparing thereof |
US5663488A (en) * | 1995-05-31 | 1997-09-02 | Hewlett-Packard Co. | Thermal isolation system in an analytical instrument |
US5620807A (en) * | 1995-08-31 | 1997-04-15 | The Dow Chemical Company | Flow field assembly for electrochemical fuel cells |
JP3182522B2 (ja) * | 1996-12-20 | 2001-07-03 | ファインセラミックス技術研究組合 | 一次元貫通気孔を持つセラミック膜とその製造方法 |
US6673127B1 (en) * | 1997-01-22 | 2004-01-06 | Denora S.P.A. | Method of forming robust metal, metal oxide, and metal alloy layers on ion-conductive polymer membranes |
US5998058A (en) * | 1998-04-29 | 1999-12-07 | International Fuel Cells Corporation | Porous support layer for an electrochemical cell |
CN1163998C (zh) * | 1998-08-05 | 2004-08-25 | 日本电池株式会社 | 高分子电解质膜、电化学装置和高分子电解质膜的制造方法 |
US6335082B1 (en) * | 1999-02-03 | 2002-01-01 | Mdf, Inc. | Reformed medium density fiber board products, such as door skins, and a process for reforming medium density fiber board |
US6680013B1 (en) * | 1999-04-15 | 2004-01-20 | Regents Of The University Of Minnesota | Synthesis of macroporous structures |
US6368751B1 (en) * | 1999-10-08 | 2002-04-09 | Reves, Inc. | Electrochemical electrode for fuel cell |
US6720105B2 (en) * | 1999-11-17 | 2004-04-13 | Neah Power Systems, Inc. | Metallic blocking layers integrally associated with fuel cell electrode structures and fuel cell electrode stack assemblies |
DE10039595B4 (de) * | 2000-08-12 | 2006-06-01 | Umicore Ag & Co. Kg | Verfahren zur Herstellung einer Metallverbundmembran, damit hergestellte Metallverbundmembran und deren Verwendung |
DE10039596C2 (de) * | 2000-08-12 | 2003-03-27 | Omg Ag & Co Kg | Geträgerte Metallmembran, Verfahren zu ihrer Herstellung und Verwendung |
US6929764B2 (en) * | 2000-11-17 | 2005-08-16 | William Marsh Rice University | Polymers having ordered, monodisperse pores and their corresponding ordered, monodisperse colloids |
US6518194B2 (en) * | 2000-12-28 | 2003-02-11 | Thomas Andrew Winningham | Intermediate transfer layers for nanoscale pattern transfer and nanostructure formation |
US6797422B2 (en) * | 2001-01-25 | 2004-09-28 | Gas Technology Institute | Air-breathing direct methanol fuel cell with metal foam current collectors |
US6916454B2 (en) * | 2001-03-30 | 2005-07-12 | Siemens Westinghouse Power Corporation | Metal gas separation membrane |
JP2002355537A (ja) * | 2001-05-29 | 2002-12-10 | Daido Steel Co Ltd | 水素透過膜及びその製造方法 |
US6498278B1 (en) * | 2001-09-05 | 2002-12-24 | Huntsman Petrochemical Corporation | Alkoxylation of 6-membered alkylene carbonates |
US6743543B2 (en) * | 2001-10-31 | 2004-06-01 | Motorola, Inc. | Fuel cell using variable porosity gas diffusion material |
JP4216803B2 (ja) * | 2002-05-29 | 2009-01-28 | 本田技研工業株式会社 | 金属膜の酸化によってナノポーラス基板上に形成されたサブミクロン電解質薄膜 |
JP2006520686A (ja) * | 2003-03-21 | 2006-09-14 | ウスター ポリテクニック インスティチュート | 中間金属層を有する複合ガス分離モジュール |
WO2004098751A1 (en) * | 2003-05-02 | 2004-11-18 | Worcester Polytechnic Institute | Composite gas separation modules having high tamman temperature intermediate layers |
US6913985B2 (en) * | 2003-06-20 | 2005-07-05 | Oki Data Corporation | Method of manufacturing a semiconductor device |
US7108813B2 (en) * | 2004-03-30 | 2006-09-19 | The Board Of Trustees Of The Leland Stanford Junior University | Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure |
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- 2005-03-30 CA CA002561537A patent/CA2561537A1/en not_active Abandoned
- 2005-03-30 JP JP2007506490A patent/JP4879883B2/ja not_active Expired - Fee Related
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EP1737553A4 (en) | 2009-07-15 |
EP1737553A2 (en) | 2007-01-03 |
US20050242022A1 (en) | 2005-11-03 |
US20060273004A1 (en) | 2006-12-07 |
WO2005094354A3 (en) | 2006-04-27 |
CA2561537A1 (en) | 2005-10-13 |
WO2005094354A2 (en) | 2005-10-13 |
US7108813B2 (en) | 2006-09-19 |
US7431838B2 (en) | 2008-10-07 |
JP2008514384A (ja) | 2008-05-08 |
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