JP4795109B2 - Carbon nanotube manufacturing apparatus and carbon nanotube manufacturing method - Google Patents

Carbon nanotube manufacturing apparatus and carbon nanotube manufacturing method Download PDF

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JP4795109B2
JP4795109B2 JP2006134810A JP2006134810A JP4795109B2 JP 4795109 B2 JP4795109 B2 JP 4795109B2 JP 2006134810 A JP2006134810 A JP 2006134810A JP 2006134810 A JP2006134810 A JP 2006134810A JP 4795109 B2 JP4795109 B2 JP 4795109B2
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JP2007302536A (en
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阿川　　義昭
晴邦 古瀬
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Ulvac Inc
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本発明はカーボンナノチューブ製造装置にかかり、特に、捕集効率の高いカーボンナノチューブ製造装置に関する。   The present invention relates to a carbon nanotube production apparatus, and more particularly to a carbon nanotube production apparatus with high collection efficiency.

従来のカーボンナノチューブ製造装置を図３に示す。
このカーボンナノチューブ製造装置１０１は真空槽１１１を有しており、該真空槽１１１の内部には、アノード電極１２１とカソード電極１２２とが配置されている。 A conventional carbon nanotube production apparatus is shown in FIG.
The carbon nanotube production apparatus 101 has a vacuum chamber 111, and an anode electrode 121 and a cathode electrode 122 are arranged inside the vacuum chamber 111.

真空槽１１１には真空排気系１１５とガス導入系１１６とが接続されており、真空排気系１１５によって真空槽１１１内部を真空排気した後、ガス導入系１１６から水素ガスとアルゴンガスの混合ガスを真空槽１１１内に導入する。   An evacuation system 115 and a gas introduction system 116 are connected to the vacuum chamber 111, and after the inside of the vacuum chamber 111 is evacuated by the evacuation system 115, a mixed gas of hydrogen gas and argon gas is supplied from the gas introduction system 116. It introduces into the vacuum chamber 111.

アノード電極１２１とカソード電極１２２にはアーク電源１２３が接続されている。アノード電極１２１と、カソード電極１２２とは、所定間隔を開けられており、アーク電源１２３によってアノード電極１２１とカソード電極１２２の間に電圧を印加すると、その間にアーク放電が発生する。   An arc power source 123 is connected to the anode electrode 121 and the cathode electrode 122. The anode electrode 121 and the cathode electrode 122 are spaced apart from each other. When a voltage is applied between the anode electrode 121 and the cathode electrode 122 by the arc power source 123, an arc discharge is generated therebetween.

アノード電極１２１とカソード電極１２２はグラファイトで構成されており、アノード電極１２１には鉄粉等の触媒体が含有されている。
アーク放電によってアノード電極１２１から炭素蒸気と触媒体蒸気が放出され、蜘蛛の巣状の炭素生成物が生成され、上方に舞い上がる。 The anode electrode 121 and the cathode electrode 122 are made of graphite, and the anode electrode 121 contains a catalyst body such as iron powder.
By the arc discharge, the carbon vapor and the catalyst body vapor are released from the anode electrode 121, and a cobweb-like carbon product is generated and soars upward.

アノード電極１２１とカソード電極１２２の上方には捕集部材１１３が配置されており、舞い上がった炭素生成物は捕集部材１１３に付着し、捕集される。炭素生成物中にはカーボンナノチューブが含有されており、捕集部材１１３から炭素生成物を回収することでカーボンナノチューブを得ることができる。
捕集部材１１３には冷却水の循環路１２６が接続されており、一定温度に維持される。
特開２０００−２０３８２１号公報 特開２００２−２３４７１３号公報 特開２００２−２３４７１５号公報 特開２００３−２７７０３２号公報 特開２００４−２１０３号公報 特開２００４−３３１２７７号公報 A collection member 113 is disposed above the anode electrode 121 and the cathode electrode 122, and the soared carbon product adheres to the collection member 113 and is collected. The carbon product contains carbon nanotubes, and the carbon nanotubes can be obtained by collecting the carbon products from the collecting member 113.
A cooling water circulation path 126 is connected to the collecting member 113 and is maintained at a constant temperature.
JP 2000-203821 A JP 2002-234713 A JP 2002-234715 A JP 2003-277032 A Japanese Patent Laid-Open No. 2004-2103 JP 2004-331277 A

上記のカーボンナノチューブ製造装置１０１では、捕集部材１１３の表面のうち、アノード電極１２１の先端及びカソード電極１２２の先端に面した領域が炭素生成物で覆われると、それ以上炭素生成物は付着しなくなり、炭素生成物は、真空槽１１１の内壁等、捕集部材１１３の表面以外の部分に付着してしまう。それらの炭素生成物は回収が困難であり、その結果、カーボンナノチューブの回収率が低下し、また、真空槽１１１の内部の清掃作業も必要になる等問題が多い。   In the carbon nanotube manufacturing apparatus 101 described above, when the region facing the tip of the anode electrode 121 and the tip of the cathode electrode 122 on the surface of the collection member 113 is covered with the carbon product, the carbon product adheres further. The carbon product adheres to portions other than the surface of the collecting member 113 such as the inner wall of the vacuum chamber 111. These carbon products are difficult to recover, and as a result, the recovery rate of carbon nanotubes decreases, and there are many problems such as the need to clean the inside of the vacuum chamber 111.

上記課題を解決するため、本発明は、真空槽と、前記真空槽内に互いに離間して配置されたアノード電極とカソード電極と、前記アノード電極と前記カソード電極間に電圧を印加するアーク電源とを有し、前記アノード電極と前記カソード電極はそれぞれ炭素を含有し、前記真空槽内を真空排気して所望種類のガスを導入し、前記アノード電極と前記カソード電極の間にアーク放電を生じさせると、前記アノード電極側でカーボンナノチューブを含む炭素生成物が生成されるカーボンナノチューブ製造装置であって、前記真空槽の内部に、回転可能な円筒状の捕集部材が配置され、前記捕集部材の円筒の側面は、前記アノード電極の前記アーク放電が生じた部分に向けられ、前記捕集部材は、前記炭素生成物を前記円筒状の側面で回転しながら捕集可能に構成されたカーボンナノチューブ製造装置である。
また、本発明は、前記捕集部材には冷却装置が接続され、前記捕集部材の側面を冷却できるように構成されたカーボンナノチューブ製造装置である。
また、本発明は、真空槽内に一対の電極を配置し、前記真空槽内を真空排気して所望種類のガスを導入し、前記一対の電極間にアーク放電を生じさせ、カーボンナノチューブを含む炭素生成物を発生させるカーボンナノチューブの製造方法であって、前記真空槽内に円筒形状の捕集部材を配置し、前記捕集部材を回転させ、前記炭素生成物を前記捕集部材の円筒側面に付着させて捕集するカーボンナノチューブの製造方法である。
また、本発明は、前記捕集部材を冷却しながら前記炭素生成物を捕集するカーボンナノチューブの製造方法である。 In order to solve the above problems, the present invention provides a vacuum chamber, an anode electrode and a cathode electrode that are spaced apart from each other in the vacuum chamber, and an arc power source that applies a voltage between the anode electrode and the cathode electrode. The anode electrode and the cathode electrode each contain carbon, and the vacuum chamber is evacuated to introduce a desired type of gas, and an arc discharge is generated between the anode electrode and the cathode electrode. A carbon nanotube production apparatus in which a carbon product containing carbon nanotubes is produced on the anode electrode side, wherein a rotatable cylindrical collection member is disposed inside the vacuum chamber, and the collection member The side surface of the cylinder is directed to the portion of the anode electrode where the arc discharge has occurred, and the collecting member rotates the carbon product on the cylindrical side surface. A collection can configured carbon nanotube production apparatus.
In addition, the present invention is the carbon nanotube manufacturing apparatus configured such that a cooling device is connected to the collecting member and a side surface of the collecting member can be cooled.
The present invention also includes a pair of electrodes in a vacuum chamber, evacuating the vacuum chamber to introduce a desired type of gas, causing an arc discharge between the pair of electrodes, and including a carbon nanotube. A carbon nanotube production method for generating a carbon product, wherein a cylindrical collection member is disposed in the vacuum chamber, the collection member is rotated, and the carbon product is disposed on a cylindrical side surface of the collection member. It is the manufacturing method of the carbon nanotube which adheres and collects.
Moreover, this invention is a manufacturing method of the carbon nanotube which collects the said carbon product, cooling the said collection member.

本発明は上記のように構成されており、円筒形状の捕集部材が回転されているので、その側面には、全周に亘って炭素生成物が付着できる。従って、回転しない場合に比べ、炭素生成物を捕集可能な表面積が広くなっており、捕集されずに浮遊し、他の部材の表面に付着する炭素生成物を減少させることができる。   Since the present invention is configured as described above and the cylindrical collecting member is rotated, a carbon product can be attached to the side surface over the entire circumference. Therefore, compared with the case where it does not rotate, the surface area which can collect a carbon product becomes large, it can float without being collected, and the carbon product adhering to the surface of another member can be reduced.

カーボンナノチューブの捕集効率が高い。捕集部材の側面以外の部分に炭素生成物が付着しない。   The collection efficiency of carbon nanotubes is high. A carbon product does not adhere to parts other than the side of a collection member.

図１の符号１０は、本発明の一例のカーボンナノチューブ製造装置を示している。
このカーボンナノチューブ製造装置１０は真空槽１１を有している。
真空槽１１の内部にはカーボンナノチューブ発生装置１２と捕集部材１３とが配置されている。 Reference numeral 10 in FIG. 1 indicates a carbon nanotube manufacturing apparatus according to an example of the present invention.
The carbon nanotube production apparatus 10 has a vacuum chamber 11.
A carbon nanotube generator 12 and a collection member 13 are disposed inside the vacuum chamber 11.

カーボンナノチューブ発生装置１２は、アノード電極２１とカソード電極２２を有している。真空槽１１の外部にはアーク電源２３が配置されており、アノード電極２１とカソード電極２２はアーク電源２３に接続され、アノード電極２１には正電圧、カソード電極２２には負電圧が印加されるように構成されている。   The carbon nanotube generator 12 has an anode electrode 21 and a cathode electrode 22. An arc power source 23 is disposed outside the vacuum chamber 11, and the anode electrode 21 and the cathode electrode 22 are connected to the arc power source 23, and a positive voltage is applied to the anode electrode 21 and a negative voltage is applied to the cathode electrode 22. It is configured as follows.

アノード電極２１とカソード電極２２は棒状であり、その先端が互いに向けられている。
アノード電極２１とカソード電極２２とは同じ高さに配置され、水平方向に互いに離間されている。
アノード電極２１とカソード電極２２には不図示の水平方向移動機構が接続されており、アノード電極２１とカソード電極２２の間の距離Ｗの大きさを変えることができるように構成されている。 The anode electrode 21 and the cathode electrode 22 are rod-shaped and their tips are directed toward each other.
The anode electrode 21 and the cathode electrode 22 are disposed at the same height and are separated from each other in the horizontal direction.
A horizontal movement mechanism (not shown) is connected to the anode electrode 21 and the cathode electrode 22, and the distance W between the anode electrode 21 and the cathode electrode 22 can be changed.

真空槽１１には真空排気系１５とガス導入系１６とが接続されており、前記真空排気系１５によって真空槽１１の内部を真空排気し、前記ガス導入系１６から所望種類のガスを導入し、真空槽１１の内部を導入ガス雰囲気にし、アーク電源２３によって、アノード電極２１とカソード電極２２の間に電圧を印加すると、導入したガスの雰囲気中でアノード電極２１とカソード電極２２の間にアーク放電が発生するように構成されている。   An evacuation system 15 and a gas introduction system 16 are connected to the vacuum chamber 11. The inside of the vacuum chamber 11 is evacuated by the vacuum evacuation system 15, and a desired kind of gas is introduced from the gas introduction system 16. When the inside of the vacuum chamber 11 is set to an introduction gas atmosphere and a voltage is applied between the anode electrode 21 and the cathode electrode 22 by the arc power source 23, an arc is generated between the anode electrode 21 and the cathode electrode 22 in the atmosphere of the introduced gas. It is comprised so that discharge may generate | occur | produce.

捕集部材１３は、アノード電極２１の先端とカソード電極２２の先端の上方に配置されている。
捕集部材１３は円筒形であり、符号１８は捕集部材１３の二底面の中心を通る中心軸線である。
捕集部材１３は、中心軸線１８が水平になるように横倒しの姿勢で配置されており、その円筒形側面が、隙間Ｗに向けられている。
捕集部材１３には、不図示の回転機構が取りつけられており、中心軸線１８を中心に回転できるように構成されている。 The collection member 13 is disposed above the tip of the anode electrode 21 and the tip of the cathode electrode 22.
The collecting member 13 has a cylindrical shape, and reference numeral 18 denotes a central axis passing through the center of the two bottom surfaces of the collecting member 13.
The collection member 13 is disposed in a laid-down posture so that the central axis 18 is horizontal, and the cylindrical side surface is directed to the gap W.
A rotation mechanism (not shown) is attached to the collection member 13 and is configured to be rotatable about the central axis 18.

捕集部材１３には、熱媒体循環路２６が接続されている。熱媒体循環路２６は熱交換器に接続されており、熱交換器を通った液体の熱媒体(水やオイル等)が熱媒体循環路２６から捕集部材１３の内部に供給され、捕集部材１３の内部を通った熱媒体が熱循環路２６に戻り、更に熱交換器に戻るように構成されている。   A heat medium circulation path 26 is connected to the collection member 13. The heat medium circulation path 26 is connected to a heat exchanger, and a liquid heat medium (water, oil, etc.) that has passed through the heat exchanger is supplied from the heat medium circulation path 26 to the inside of the collecting member 13 and collected. The heat medium passing through the inside of the member 13 returns to the heat circulation path 26 and further returns to the heat exchanger.

上記カーボンナノチューブ製造装置１０を用いてカーボンナノチューブを製造する工程について説明する。
真空排気系１５により、真空槽１１の内部を真空排気し、１０-5Torrの圧力に達したところで、ガス導入系１６によって真空槽１１内に水素ガスとアルゴンガスの混合ガスを導入する。 A process for producing carbon nanotubes using the carbon nanotube production apparatus 10 will be described.
The inside of the vacuum chamber 11 is evacuated by the evacuation system 15, and when the pressure reaches 10 −5 Torr, a mixed gas of hydrogen gas and argon gas is introduced into the vacuum chamber 11 by the gas introduction system 16.

水素ガスとアルゴンガスの混合ガスの導入により、真空槽１１内部が水素−アルゴンガス雰囲気となり、圧力が６０Torrで安定したところで、アノード電極２１とカソード電極２２の間にアーク放電を発生させる。   By introducing a mixed gas of hydrogen gas and argon gas, the inside of the vacuum chamber 11 becomes a hydrogen-argon gas atmosphere, and when the pressure is stabilized at 60 Torr, arc discharge is generated between the anode electrode 21 and the cathode electrode 22.

アノード電極２１とカソード電極２２には不図示の移動機構が接続されており、先端間の距離Ｗの大きさを変更できるように構成されている。
自動制御により、距離Ｗの大きさは、アノード電極２１とカソード電極２２の間の電圧が一定になるように調節される。 A moving mechanism (not shown) is connected to the anode electrode 21 and the cathode electrode 22 so that the distance W between the tips can be changed.
By the automatic control, the magnitude of the distance W is adjusted so that the voltage between the anode electrode 21 and the cathode electrode 22 becomes constant.

アノード電極２１とカソード電極２２はグラファイトで構成されており、特にアノード電極２１には鉄粉等の触媒体が含有されている。触媒体は含浸によってアノード電極２１に含有させることができる。   The anode electrode 21 and the cathode electrode 22 are made of graphite. In particular, the anode electrode 21 contains a catalyst body such as iron powder. The catalyst body can be contained in the anode electrode 21 by impregnation.

アーク放電によってアノード電極２１が徐々に蒸発し、それによって炭素蒸気が放出される。その蒸気はカソード電極２２に到達するとカソード電極２２上に炭素生成物が成長する。   The anode electrode 21 is gradually evaporated by the arc discharge, and thereby carbon vapor is released. When the vapor reaches the cathode electrode 22, a carbon product grows on the cathode electrode 22.

アノード電極２１からは触媒体の蒸気も放出されており、触媒体の蒸気が炭素蒸気に作用し、カーボンナノチューブが生成される。従って、炭素生成物中にはカーボンナノチューブが含まれている。   The catalyst body vapor is also released from the anode electrode 21, and the catalyst body vapor acts on the carbon vapor to produce carbon nanotubes. Therefore, carbon nanotubes are contained in the carbon product.

カーボンナノチューブのうち、特に、単層のカーボンナノチューブは、カソード電極２２の表面から離れ、上方に舞い上がり、捕集部材１３の円筒側面に到達し、接触するとそこに付着する。   Among the carbon nanotubes, in particular, single-walled carbon nanotubes move away from the surface of the cathode electrode 22, rise upward, reach the cylindrical side surface of the collecting member 13, and attach to the cylindrical side surface when contacting.

捕集部材１３は上下移動機構に接続され、上下動が可能に構成されている。捕集部材１３とアノード電極２１及びカソード電極２２の間は、アーク放電が生じているときは近づけられ、カーボンナノチューブを回収する時は離されるように構成されている。   The collection member 13 is connected to a vertical movement mechanism and is configured to be movable up and down. The collection member 13 and the anode electrode 21 and the cathode electrode 22 are configured to approach each other when arc discharge is generated, and to be separated when collecting the carbon nanotubes.

アーク放電が生じている間、捕集部材１３は図２に示すように中心軸線１８を中心に回転されており、単層のカーボンナノチューブが捕集部材１３の側面に付着すると回転によって巻き取られる。従って、捕集部材１３の一部表面にカーボンナノチューブが集中して付着することがなく、単層のカーボンナノチューブを高効率で捕集することができる。図２の符号Ｓは、捕集部材１３の側面を示している。
アーク放電を１０分間程度継続させると、純度５０〜６０％の単層カーボンナノチューブが２００ｍｇ得られる。 While the arc discharge is occurring, the collecting member 13 is rotated about the central axis 18 as shown in FIG. 2, and when the single-walled carbon nanotubes adhere to the side surface of the collecting member 13, the collecting member 13 is wound by rotation. . Therefore, carbon nanotubes do not concentrate and adhere to a part of the surface of the collecting member 13, and single-walled carbon nanotubes can be collected with high efficiency. A symbol S in FIG. 2 indicates a side surface of the collecting member 13.
When arc discharge is continued for about 10 minutes, 200 mg of single-walled carbon nanotubes having a purity of 50 to 60% are obtained.

捕集部材１３は、アーク放電によって加熱されるが、捕集部材１３の内部には低温の熱媒体が流れることで冷却され、一定温度を維持するようになっている。
他方、多層のカーボンナノチューブはカソード電極２２上に付着しており、カソード電極２２からは多層のカーボンナノチューブを捕集することができる。 Although the collection member 13 is heated by arc discharge, the collection member 13 is cooled by flowing a low-temperature heat medium in the collection member 13 to maintain a constant temperature.
On the other hand, the multi-walled carbon nanotubes are attached on the cathode electrode 22, and the multi-walled carbon nanotubes can be collected from the cathode electrode 22.

アノード電極２１とカソード電極２２は、その一端が回転軸３１、３２の先端に取りつけられており、回転軸３１、３２が回転すると、アノード電極２１とカソード電極２２は、図２に示すように、それぞれ、水平な中心軸線を中心に回転するように構成されており、アーク放電を発生させながら回転させることでアノード電極２１の先端が均一に蒸発し、カソード電極２２の先端又は側面に均一に炭素生成物が成長するようになっている。図２の符号３３、３４は、アノード電極２１とカソード電極２２の回転軸線をそれぞれ示している。   One end of each of the anode electrode 21 and the cathode electrode 22 is attached to the tip of the rotary shafts 31 and 32. When the rotary shafts 31 and 32 are rotated, the anode electrode 21 and the cathode electrode 22 are, as shown in FIG. Each is configured to rotate about a horizontal central axis, and by rotating while generating arc discharge, the tip of the anode electrode 21 is uniformly evaporated, and the tip or side surface of the cathode electrode 22 is uniformly carbonized. The product is supposed to grow. Reference numerals 33 and 34 in FIG. 2 indicate rotation axes of the anode electrode 21 and the cathode electrode 22, respectively.

また、図１の符号５１〜５３は真空排気系のバルブ、符号５６は油拡散ポンプなどの高真空ポンプ、符号５７は油回転ポンプなどの低真空ポンプである。符号６１、６２はガス導入系のバルブであり、符号６３はマスフローコントローラである。   Further, reference numerals 51 to 53 in FIG. 1 denote vacuum exhaust system valves, reference numeral 56 denotes a high vacuum pump such as an oil diffusion pump, and reference numeral 57 denotes a low vacuum pump such as an oil rotary pump. Reference numerals 61 and 62 are gas introduction valves, and reference numeral 63 is a mass flow controller.

なお，上記触媒体はＦｅであったが，他に，Ｃｏ ，Ｎｉ ，Ｓｃ ，Ｖ ，Ｃｒ ，Ｍｎ ，Ｆｅ ，Ｃｕ ，Ｙ ，Ｚｒ ，Ｎｂ ，Ｍｏ ，Ｐｄ ，Ｔａ ，Ｗ ，Ａｕ ，Ｔｈ ，Ｕ ，Ｌａ ，Ｃｅ ，Ｐｒ ，Ｎｄ ，Ｇｄ ，Ｔｂ ，Ｄｙ ，Ｈｏ ，Ｅｒ ，Ｔｍ ，Ｌｕ等の一種、又は二種以上の金属を用いることができる。   In addition, although the said catalyst body was Fe, besides, Co, Ni, Sc, V, Cr, Mn, Fe, Cu, Y, Zr, Nb, Mo, Pd, Ta, W, Au, Th, U, U , La, Ce, Pr, Nd, Gd, Tb, Dy, Ho, Er, Tm, Lu, etc., or two or more metals can be used.

本発明は、単層のカーボンナノチューブや多層のカーボンナノチューブを生産することができる   The present invention can produce single-walled carbon nanotubes and multi-walled carbon nanotubes.

本発明のカーボンナノチューブ製造装置Carbon nanotube production apparatus of the present invention 捕集部材の回転を説明するための図The figure for demonstrating rotation of a collection member 従来技術のカーボンナノチューブ製造装置Conventional carbon nanotube production equipment

符号の説明Explanation of symbols

１……カーボンナノチューブ製造装置
１１……真空槽
１３……捕集部材
２１……アノード電極
２２……カソード電極
２３……アーク電源
Ｓ……前記捕集部材の側面 DESCRIPTION OF SYMBOLS 1 ... Carbon nanotube manufacturing apparatus 11 ... Vacuum chamber 13 ... Collection member 21 ... Anode electrode 22 ... Cathode electrode 23 ... Arc power supply S ... Side surface of the collection member

Claims (4)

真空槽と、
前記真空槽内に互いに離間して配置されたアノード電極とカソード電極と、
前記アノード電極と前記カソード電極間に電圧を印加するアーク電源とを有し、
前記アノード電極と前記カソード電極はそれぞれ炭素を含有し、前記真空槽内を真空排気して所望種類のガスを導入し、前記アノード電極と前記カソード電極の間にアーク放電を生じさせると、前記アノード電極側でカーボンナノチューブを含む炭素生成物が生成されるカーボンナノチューブ製造装置であって、
前記真空槽の内部に、回転可能な円筒状の捕集部材が配置され、
前記捕集部材の円筒の側面は、前記アノード電極の前記アーク放電が生じた部分に向けられ、
前記捕集部材は、前記炭素生成物を前記円筒状の側面で回転しながら捕集可能に構成されたカーボンナノチューブ製造装置。 A vacuum chamber;
An anode electrode and a cathode electrode that are spaced apart from each other in the vacuum chamber;
An arc power source for applying a voltage between the anode electrode and the cathode electrode;
The anode electrode and the cathode electrode each contain carbon, and when the inside of the vacuum chamber is evacuated to introduce a desired type of gas and an arc discharge is generated between the anode electrode and the cathode electrode, the anode electrode A carbon nanotube production apparatus in which a carbon product containing carbon nanotubes is produced on the electrode side,
Inside the vacuum chamber, a rotatable cylindrical collection member is disposed,
The cylindrical side surface of the collecting member is directed to the portion of the anode electrode where the arc discharge has occurred,
The carbon nanotube production apparatus is configured such that the collection member is capable of collecting the carbon product while rotating on the cylindrical side surface. 前記捕集部材には冷却装置が接続され、前記捕集部材の側面を冷却できるように構成された請求項１記載のカーボンナノチューブ製造装置。   The carbon nanotube manufacturing apparatus according to claim 1, wherein a cooling device is connected to the collecting member so that a side surface of the collecting member can be cooled. 真空槽内に一対の電極を配置し、前記真空槽内を真空排気して所望種類のガスを導入し、前記一対の電極間にアーク放電を生じさせ、カーボンナノチューブを含む炭素生成物を発生させるカーボンナノチューブの製造方法であって、
前記真空槽内に円筒形状の捕集部材を配置し、前記捕集部材を回転させ、前記炭素生成物を前記捕集部材の円筒側面に付着させて捕集するカーボンナノチューブの製造方法。 A pair of electrodes are arranged in a vacuum chamber, the inside of the vacuum chamber is evacuated, a desired type of gas is introduced, an arc discharge is generated between the pair of electrodes, and a carbon product including carbon nanotubes is generated. A method of manufacturing a carbon nanotube,
A method for producing carbon nanotubes, wherein a cylindrical collecting member is disposed in the vacuum chamber, the collecting member is rotated, and the carbon product is attached to a cylindrical side surface of the collecting member and collected. 前記捕集部材を冷却しながら前記炭素生成物を捕集する請求項３記載のカーボンナノチューブの製造方法。   The method for producing a carbon nanotube according to claim 3, wherein the carbon product is collected while cooling the collecting member.
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