JP4762719B2 - 光電子増倍管 - Google Patents
光電子増倍管 Download PDFInfo
- Publication number
- JP4762719B2 JP4762719B2 JP2005518024A JP2005518024A JP4762719B2 JP 4762719 B2 JP4762719 B2 JP 4762719B2 JP 2005518024 A JP2005518024 A JP 2005518024A JP 2005518024 A JP2005518024 A JP 2005518024A JP 4762719 B2 JP4762719 B2 JP 4762719B2
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- JP
- Japan
- Prior art keywords
- electrons
- envelope
- photocathode
- photomultiplier tube
- anode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000004044 response Effects 0.000 claims description 3
- 239000000758 substrate Substances 0.000 description 62
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 41
- 229910052710 silicon Inorganic materials 0.000 description 41
- 239000010703 silicon Substances 0.000 description 41
- 239000011521 glass Substances 0.000 description 39
- 239000003153 chemical reaction reagent Substances 0.000 description 19
- 238000001514 detection method Methods 0.000 description 15
- 238000006243 chemical reaction Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 13
- 238000009792 diffusion process Methods 0.000 description 11
- 239000002904 solvent Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 7
- 238000005530 etching Methods 0.000 description 5
- 238000000605 extraction Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
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- 238000004458 analytical method Methods 0.000 description 4
- 230000006872 improvement Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 239000005357 flat glass Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 229940088597 hormone Drugs 0.000 description 1
- 239000005556 hormone Substances 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/08—Cathode arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
- H01J43/06—Electrode arrangements
- H01J43/18—Electrode arrangements using essentially more than one dynode
- H01J43/24—Dynodes having potential gradient along their surfaces
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
- H01J43/04—Electron multipliers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Electron Tubes For Measurement (AREA)
- Measurement Of Radiation (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
Claims (2)
- 内部が真空状態に維持された外囲器と、
前記外囲器内に収納された光電面であって、該外囲器を介して取り込まれた光に応じて電子を該外囲器の内部に放出する光電面と、
前記外囲器内に収納された電子増倍部であって、電子の進行方向に沿って伸びた溝部を有する電子増倍管と、そして、
前記外囲器内に収納された陽極であって、前記電子増倍部でカスケード増倍された電子のうち到達した電子を信号として取り出すための陽極とを備えた光電子増倍管であって、
前記溝部を規定する一対の壁部それぞれの表面であって前記電子の進行方向に対して並行に配置された平坦な表面上には、前記光電面からの光電子をカスケード増倍するための二次電子放出面が表面に形成された1又はそれ以上の凸部が、前記電子の進行方向に沿って設けられており、
前記二次電子放出面が形成される前記凸部それぞれの表面は、前記電子の進行方向に対して直交することなく前記電子の進行方向に対して傾斜した斜面により構成され、
前記一対の壁部のうち一方の壁部の表面に設けられた凸部と、他方の壁部の表面に設けられた凸部は、前記電子の進行方向に沿って交互に配置され、
前記一対の壁部のうち一方の壁部の表面に設けられた前記凸部の高さBは、該一対の壁部の間隔Aに対して、
B≧A/2
なる関係を満たしている光電子増倍管。 - 内部が真空状態に維持された外囲器と、
前記外囲器内に収納された光電面であって、該外囲器を介して取り込まれた光に応じて電子を該外囲器の内部に放出する光電面と、
前記外囲器内に収納された電子増倍部であって、電子の進行方向に沿って伸びた貫通孔を有する電子増倍管と、そして、
前記外囲器内に収納された陽極であって、前記電子増倍部でカスケード増倍された電子のうち到達した電子を信号として取り出すための陽極とを備えた光電子増倍管であって、
前記貫通孔を規定する壁部の表面には、前記光電面からの光電子をカスケード増倍するための二次電子放出面が表面に形成された1又はそれ以上の凸部が設けられており、
前記二次電子放出面が形成される前記凸部それぞれの表面は、前記電子の進行方向に対して直交することなく前記電子の進行方向に対して傾斜した斜面により構成され、
前記貫通孔を規定する壁部の表面に設けられた凸部は、前記電子の進行方向に沿って交互に配置され、
前記壁部の表面に設けられた前記凸部の高さBは、前記貫通孔の開口径に相当する間隔Aに対して、
B≧A/2
なる関係を満たしている光電子増倍管。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005518024A JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004040405 | 2004-02-17 | ||
JP2004040405 | 2004-02-17 | ||
PCT/JP2005/002302 WO2005078759A1 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
JP2005518024A JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005078759A1 JPWO2005078759A1 (ja) | 2007-10-18 |
JP4762719B2 true JP4762719B2 (ja) | 2011-08-31 |
Family
ID=34857885
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005518022A Active JP5000137B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管及びその製造方法 |
JP2005518024A Active JP4762719B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管 |
JP2011115234A Active JP5254400B2 (ja) | 2004-02-17 | 2011-05-23 | 光電子増倍管及びその製造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005518022A Active JP5000137B2 (ja) | 2004-02-17 | 2005-02-16 | 光電子増倍管及びその製造方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011115234A Active JP5254400B2 (ja) | 2004-02-17 | 2011-05-23 | 光電子増倍管及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (6) | US7977878B2 (ja) |
EP (3) | EP1717842A4 (ja) |
JP (3) | JP5000137B2 (ja) |
CN (2) | CN1922710B (ja) |
WO (2) | WO2005078759A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9514920B2 (en) | 2015-03-03 | 2016-12-06 | Hamamatsu Photonics K.K. | Electron multiplier body, photomultiplier tube, and photomultiplier |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4708117B2 (ja) | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP4708118B2 (ja) * | 2005-08-10 | 2011-06-22 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP4819437B2 (ja) | 2005-08-12 | 2011-11-24 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP4331147B2 (ja) * | 2005-08-12 | 2009-09-16 | 浜松ホトニクス株式会社 | 光電子増倍管 |
WO2007111072A1 (ja) | 2006-03-29 | 2007-10-04 | Hamamatsu Photonics K.K. | 光電変換デバイスの製造方法 |
US7403589B1 (en) * | 2007-03-27 | 2008-07-22 | General Electric Company | Photon counting CT detector using solid-state photomultiplier and scintillator |
JP5290805B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
JP5290804B2 (ja) * | 2009-02-25 | 2013-09-18 | 浜松ホトニクス株式会社 | 光電子増倍管 |
US7999216B2 (en) * | 2009-03-09 | 2011-08-16 | Bae Systems Information And Electronic Systems Integration Inc. | Selective channel charging for microchannel plate |
US7973272B2 (en) | 2009-03-09 | 2011-07-05 | Bae Systems Information And Electronic Systems Integration, Inc. | Interface techniques for coupling a microchannel plate to a readout circuit |
JP6151505B2 (ja) * | 2012-10-30 | 2017-06-21 | 浜松ホトニクス株式会社 | 光検出ユニットおよびその製造方法 |
KR101395102B1 (ko) | 2013-02-14 | 2014-05-16 | 한국과학기술원 | Pcb 기판을 이용한 실리콘 광전자증배관의 패키징 방법 |
CN103456594B (zh) * | 2013-08-02 | 2015-08-26 | 西安交通大学 | 一种提高光电倍增器光阴极光利用率的优化设计方法 |
EP3021351A1 (de) * | 2014-11-17 | 2016-05-18 | Bayer Technology Services GmbH | Sekundärelektronenvervielfacher und verfahren zum herstellen eines solchen |
FI3631299T3 (fi) | 2017-05-30 | 2024-06-13 | Carrier Corp | Puolijohdekalvo ja valokennovalonilmaisin |
JP6395906B1 (ja) * | 2017-06-30 | 2018-09-26 | 浜松ホトニクス株式会社 | 電子増倍体 |
JP6431574B1 (ja) * | 2017-07-12 | 2018-11-28 | 浜松ホトニクス株式会社 | 電子管 |
US10163599B1 (en) * | 2018-01-03 | 2018-12-25 | Eagle Technology, Llc | Electron multiplier for MEMs light detection device |
US10734184B1 (en) * | 2019-06-21 | 2020-08-04 | Elbit Systems Of America, Llc | Wafer scale image intensifier |
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JPH05144410A (ja) * | 1991-05-21 | 1993-06-11 | Commiss Energ Atom | セラミツク製電子増倍構造体、光電子増倍管、およびその製法 |
US5568013A (en) * | 1994-07-29 | 1996-10-22 | Center For Advanced Fiberoptic Applications | Micro-fabricated electron multipliers |
JP2000113851A (ja) * | 1998-10-01 | 2000-04-21 | New Japan Radio Co Ltd | 電子増倍管およびマルチチャンネルプレートならびにそれらの製造方法 |
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-
2005
- 2005-02-16 EP EP05719154A patent/EP1717842A4/en not_active Withdrawn
- 2005-02-16 JP JP2005518022A patent/JP5000137B2/ja active Active
- 2005-02-16 CN CN2005800051680A patent/CN1922710B/zh active Active
- 2005-02-16 EP EP05710248.5A patent/EP1717843B1/en active Active
- 2005-02-16 EP EP15191508.9A patent/EP2993685A1/en not_active Withdrawn
- 2005-02-16 CN CNB2005800047030A patent/CN100555553C/zh active Active
- 2005-02-16 US US10/589,602 patent/US7977878B2/en active Active
- 2005-02-16 US US10/586,498 patent/US7602122B2/en active Active
- 2005-02-16 JP JP2005518024A patent/JP4762719B2/ja active Active
- 2005-02-16 WO PCT/JP2005/002302 patent/WO2005078759A1/ja active Application Filing
- 2005-02-16 WO PCT/JP2005/002298 patent/WO2005078760A1/ja active Application Filing
-
2011
- 2011-05-23 JP JP2011115234A patent/JP5254400B2/ja active Active
- 2011-05-23 US US13/113,604 patent/US8242694B2/en active Active
-
2012
- 2012-07-13 US US13/548,772 patent/US8643258B2/en active Active
-
2013
- 2013-12-20 US US14/136,236 patent/US9147559B2/en active Active
-
2015
- 2015-09-01 US US14/841,886 patent/US9460899B2/en active Active
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US3244922A (en) * | 1962-11-05 | 1966-04-05 | Itt | Electron multiplier having undulated passage with semiconductive secondary emissive coating |
US3375184A (en) * | 1963-10-23 | 1968-03-26 | Solvay | Electrolytic cell with controllable multiple electrodes |
US3374380A (en) * | 1965-11-10 | 1968-03-19 | Bendix Corp | Apparatus for suppression of ion feedback in electron multipliers |
JPS5016145B1 (ja) * | 1968-05-31 | 1975-06-11 | ||
JPH05144410A (ja) * | 1991-05-21 | 1993-06-11 | Commiss Energ Atom | セラミツク製電子増倍構造体、光電子増倍管、およびその製法 |
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JP2000113851A (ja) * | 1998-10-01 | 2000-04-21 | New Japan Radio Co Ltd | 電子増倍管およびマルチチャンネルプレートならびにそれらの製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9514920B2 (en) | 2015-03-03 | 2016-12-06 | Hamamatsu Photonics K.K. | Electron multiplier body, photomultiplier tube, and photomultiplier |
Also Published As
Publication number | Publication date |
---|---|
WO2005078759A1 (ja) | 2005-08-25 |
EP1717843A4 (en) | 2008-12-17 |
CN1922710A (zh) | 2007-02-28 |
US20140111085A1 (en) | 2014-04-24 |
US20120274204A1 (en) | 2012-11-01 |
US20080018246A1 (en) | 2008-01-24 |
EP2993685A1 (en) | 2016-03-09 |
JP5000137B2 (ja) | 2012-08-15 |
CN100555553C (zh) | 2009-10-28 |
CN1918686A (zh) | 2007-02-21 |
EP1717843B1 (en) | 2015-12-23 |
US8242694B2 (en) | 2012-08-14 |
US20070194713A1 (en) | 2007-08-23 |
JP2011187454A (ja) | 2011-09-22 |
US8643258B2 (en) | 2014-02-04 |
US20150371835A1 (en) | 2015-12-24 |
US7977878B2 (en) | 2011-07-12 |
US9147559B2 (en) | 2015-09-29 |
EP1717843A1 (en) | 2006-11-02 |
US9460899B2 (en) | 2016-10-04 |
EP1717842A1 (en) | 2006-11-02 |
WO2005078760A1 (ja) | 2005-08-25 |
JPWO2005078760A1 (ja) | 2007-10-18 |
EP1717842A4 (en) | 2008-06-18 |
JPWO2005078759A1 (ja) | 2007-10-18 |
US7602122B2 (en) | 2009-10-13 |
CN1922710B (zh) | 2010-10-13 |
JP5254400B2 (ja) | 2013-08-07 |
US20110221336A1 (en) | 2011-09-15 |
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