JP4730937B2 - 半導体単結晶製造装置および製造方法 - Google Patents
半導体単結晶製造装置および製造方法 Download PDFInfo
- Publication number
- JP4730937B2 JP4730937B2 JP2004360094A JP2004360094A JP4730937B2 JP 4730937 B2 JP4730937 B2 JP 4730937B2 JP 2004360094 A JP2004360094 A JP 2004360094A JP 2004360094 A JP2004360094 A JP 2004360094A JP 4730937 B2 JP4730937 B2 JP 4730937B2
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- heater
- exhaust
- single crystal
- heat shield
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000013078 crystal Substances 0.000 title claims description 63
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 239000002994 raw material Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 230000008018 melting Effects 0.000 claims description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 23
- 239000000155 melt Substances 0.000 description 22
- 229910002804 graphite Inorganic materials 0.000 description 20
- 239000010439 graphite Substances 0.000 description 20
- 239000007789 gas Substances 0.000 description 18
- 239000010453 quartz Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 239000007795 chemical reaction product Substances 0.000 description 12
- 238000000034 method Methods 0.000 description 12
- 230000005855 radiation Effects 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000010586 diagram Methods 0.000 description 9
- 239000011810 insulating material Substances 0.000 description 9
- 239000011261 inert gas Substances 0.000 description 8
- 238000005192 partition Methods 0.000 description 8
- 230000002093 peripheral effect Effects 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000009833 condensation Methods 0.000 description 3
- 230000005494 condensation Effects 0.000 description 3
- 229920000049 Carbon (fiber) Polymers 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 239000004917 carbon fiber Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000002019 doping agent Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/04—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their crystalline structure, e.g. polycrystalline, cubic or particular orientation of crystalline planes
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/14—Heating of the melt or the crystallised materials
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/1052—Seed pulling including a sectioned crucible [e.g., double crucible, baffle]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1032—Seed pulling
- Y10T117/106—Seed pulling including sealing means details
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10T117/10—Apparatus
- Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
- Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
- Y10T117/108—Including a solid member other than seed or product contacting the liquid [e.g., crucible, immersed heating element]
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
半導体単結晶の原料を溶解するるつぼと、このるつぼの周囲にあって、るつぼ内の原料を加熱するヒータとがチャンバ内に配置され、溶解した原料に種子結晶を浸漬して単結晶を引き上げる引上げ機構が備えられた半導体単結晶製造装置において、
前記ヒータの外側にあって、前記ヒータの周方向に沿って、複数の排気管が設けられていること
を特徴とする。
前記ヒータの外側に、ヒートシールドが設けられ、
前記ヒータと前記ヒートシールドとの間に、前記ヒータの周方向に沿って、複数の排気管が設けられていること
を特徴とする。
前記ヒータの外側に、断熱筒が設けられ、
前記ヒータと前記断熱筒との間に、前記ヒータの周方向に沿って、複数の排気管が設けられていること
を特徴とする。
前記複数の排気管は、前記チャンバの底部に設けられた複数の排気口に連通していること
を特徴とする。
前記複数の排気管は、前記ヒートシールドと独立した隔壁を有する排気管であること
を特徴とする。
前記複数の排気管 は、前記ヒートシールドと共用する隔壁を有する排気管であること
を特徴とする。
を特徴とする。
たとえば図10に示すように、ヒータ6とヒートシールド12との間に、ヒータ6の周方向に沿って、複数の排気管20を設けてもよい(第2発明)。
断面が図1(b)の上面図に相当し、図1(b)のB−B′断面が図1(a)の側面図に相当する。
また、図1では、排気管20は、ヒートシールド12、ヒータ6からそれぞれ離間されて配置されているが、排気管20を、ヒートシールド12、ヒータ6のいずれか一方、あるいは両方に接触するように配置させてもよい。
以下、図10、図11、図12を参照して他の実施例を説明する。図10〜図12は図1(b)に対応する上面図である。
Claims (4)
- 半導体単結晶の原料を溶解するるつぼと、このるつぼの周囲にあって、るつぼ内の原料を加熱するヒータとがチャンバ内に配置され、溶解した原料に種子結晶を浸漬して単結晶を引上げる引上げ機構が備えられ、排気口を介してチャンバ内のガスを排気する半導体単結晶製造装置において、
前記ヒータの外側にヒートシールドが設けられ、
前記ヒータの外側にあって、前記ヒータと前記ヒートシールドとの間に、前記ヒータの周方向に沿って、複数の排気管が設けられ、
前記排気管は、その上端が前記ヒータよりも上方に位置し、下端の開口部が前記排気口に連通する筒状の部材であり、
前記ヒータの上方には、前記ヒータの上端を覆うように形成された円環板状の排気管固定リングが設けられ、
当該排気管固定リングの外周は、前記ヒートシールドに固着されており、当該排気管固定リングの中央の孔には、前記るつぼが位置され、
前記排気管固定リングには、前記排気管が挿通されることで、前記排気管の上端部が当該排気管固定リングを介して前記ヒートシールドによって支持され、前記排気管の上端部を前記チャンバ内で固定する孔が形成されていること
を特徴とする半導体単結晶製造装置。 - 前記ヒートシールドの外側に、断熱筒が設けられていることを特徴とする請求項1記載の半導体単結晶製造装置。
- 前記複数の排気管は、前記チャンバの底部に設けられた複数の排気口に連通していることを特徴とする請求項1または2記載の半導体単結晶製造装置。
- 前記請求項1乃至3いずれか記載の半導体単結晶製造装置を用いる半導体単結晶製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004360094A JP4730937B2 (ja) | 2004-12-13 | 2004-12-13 | 半導体単結晶製造装置および製造方法 |
TW094139598A TWI281521B (en) | 2004-12-13 | 2005-11-11 | Apparatus and method for manufacturing semiconductor single crystal |
KR1020077014200A KR101216313B1 (ko) | 2004-12-13 | 2005-12-13 | 반도체단결정제조장치 및 제조방법 |
US11/792,664 US8753446B2 (en) | 2004-12-13 | 2005-12-13 | Semiconductor single crystal production device and producing method therefor |
PCT/JP2005/022867 WO2006064797A1 (ja) | 2004-12-13 | 2005-12-13 | 半導体単結晶製造装置および製造方法 |
EP05816745.3A EP1840248B1 (en) | 2004-12-13 | 2005-12-13 | Semiconductor single crystal producing device and producing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004360094A JP4730937B2 (ja) | 2004-12-13 | 2004-12-13 | 半導体単結晶製造装置および製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006169010A JP2006169010A (ja) | 2006-06-29 |
JP4730937B2 true JP4730937B2 (ja) | 2011-07-20 |
Family
ID=36587852
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004360094A Active JP4730937B2 (ja) | 2004-12-13 | 2004-12-13 | 半導体単結晶製造装置および製造方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US8753446B2 (ja) |
EP (1) | EP1840248B1 (ja) |
JP (1) | JP4730937B2 (ja) |
KR (1) | KR101216313B1 (ja) |
TW (1) | TWI281521B (ja) |
WO (1) | WO2006064797A1 (ja) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5134376B2 (ja) * | 2006-02-10 | 2013-01-30 | 日本碍子株式会社 | 連続炉の排気方法および排気構造 |
US9664448B2 (en) * | 2012-07-30 | 2017-05-30 | Solar World Industries America Inc. | Melting apparatus |
CN103334153B (zh) * | 2013-06-26 | 2015-07-15 | 英利能源(中国)有限公司 | 一种单晶炉 |
KR102137284B1 (ko) * | 2013-12-19 | 2020-07-23 | 에스케이실트론 주식회사 | 가스배출관 및 이를 포함하는 잉곳성장장치 |
JP6257483B2 (ja) | 2014-09-05 | 2018-01-10 | グローバルウェーハズ・ジャパン株式会社 | シリコン単結晶製造方法 |
US10378121B2 (en) * | 2015-11-24 | 2019-08-13 | Globalwafers Co., Ltd. | Crystal pulling system and method for inhibiting precipitate build-up in exhaust flow path |
CN105525342A (zh) * | 2015-12-22 | 2016-04-27 | 英利集团有限公司 | 一种直拉法制备大尺寸单晶硅棒的方法及单晶炉 |
US10487418B2 (en) | 2016-01-06 | 2019-11-26 | Globalwafers Co., Ltd. | Seed chuck assemblies and crystal pulling systems for reducing deposit build-up during crystal growth process |
JP6881214B2 (ja) * | 2017-10-16 | 2021-06-02 | 株式会社Sumco | シリコン単結晶の製造方法 |
JP6922831B2 (ja) * | 2018-04-27 | 2021-08-18 | 株式会社Sumco | シリコン単結晶の製造方法およびシリコン単結晶の引き上げ装置 |
CN112301413B (zh) * | 2019-07-29 | 2024-02-23 | 内蒙古中环光伏材料有限公司 | 一种适用于拉制大尺寸单晶的排气***及排气方法 |
CN110592660A (zh) * | 2019-09-11 | 2019-12-20 | 上海新昇半导体科技有限公司 | 一种晶体生长装置 |
CN113755944A (zh) * | 2020-06-05 | 2021-12-07 | 西安奕斯伟材料科技有限公司 | 一种单晶炉热场结构、单晶炉及晶棒 |
CN112144105A (zh) * | 2020-09-24 | 2020-12-29 | 西安奕斯伟硅片技术有限公司 | 一种组合排气管和单晶炉 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5441280A (en) * | 1977-09-07 | 1979-04-02 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing apparatus for single crystal |
JPH05254982A (ja) * | 1992-03-11 | 1993-10-05 | Komatsu Denshi Kinzoku Kk | 単結晶製造装置および製造方法 |
JPH0656570A (ja) * | 1992-08-06 | 1994-03-01 | Komatsu Denshi Kinzoku Kk | 単結晶製造装置 |
JPH07223894A (ja) * | 1994-02-10 | 1995-08-22 | Komatsu Electron Metals Co Ltd | 半導体単結晶製造装置 |
JPH092892A (ja) * | 1995-06-22 | 1997-01-07 | Komatsu Electron Metals Co Ltd | 半導体単結晶引き上げ装置 |
JP2001010893A (ja) * | 1999-06-24 | 2001-01-16 | Toshiba Ceramics Co Ltd | 単結晶引上装置 |
JP2002526377A (ja) * | 1998-10-07 | 2002-08-20 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 結晶引上装置の連続酸化法 |
JP2003089594A (ja) * | 2002-07-19 | 2003-03-28 | Komatsu Electronic Metals Co Ltd | 半導体単結晶製造装置 |
JP2004137089A (ja) * | 2002-10-15 | 2004-05-13 | Toshiba Ceramics Co Ltd | シリコン単結晶引上装置 |
JP2004256323A (ja) * | 2003-02-24 | 2004-09-16 | Komatsu Electronic Metals Co Ltd | 単結晶引上げ装置および単結晶製造方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4454096A (en) * | 1981-06-15 | 1984-06-12 | Siltec Corporation | Crystal growth furnace recharge |
JPH05117075A (ja) | 1991-08-30 | 1993-05-14 | Komatsu Electron Metals Co Ltd | 単結晶引上げ装置及び単結晶引上げ方法 |
US6485807B1 (en) * | 1997-02-13 | 2002-11-26 | Samsung Electronics Co., Ltd. | Silicon wafers having controlled distribution of defects, and methods of preparing the same |
SG64470A1 (en) * | 1997-02-13 | 1999-04-27 | Samsung Electronics Co Ltd | Methods of manufacturing monocrystalline silicon ingots and wafers by controlling pull rate profiles in a hot zone furnace and ingots and wafers manufactured thereby |
US5942032A (en) * | 1997-08-01 | 1999-08-24 | Memc Electronic Materials, Inc. | Heat shield assembly and method of growing vacancy rich single crystal silicon |
US5922127A (en) * | 1997-09-30 | 1999-07-13 | Memc Electronic Materials, Inc. | Heat shield for crystal puller |
JP3685026B2 (ja) * | 2000-09-26 | 2005-08-17 | 三菱住友シリコン株式会社 | 結晶成長装置 |
US6942733B2 (en) * | 2003-06-19 | 2005-09-13 | Memc Electronics Materials, Inc. | Fluid sealing system for a crystal puller |
US7635414B2 (en) * | 2003-11-03 | 2009-12-22 | Solaicx, Inc. | System for continuous growing of monocrystalline silicon |
JP2007112663A (ja) * | 2005-10-20 | 2007-05-10 | Sumco Techxiv株式会社 | 半導体単結晶製造装置および製造方法 |
US8152921B2 (en) * | 2006-09-01 | 2012-04-10 | Okmetic Oyj | Crystal manufacturing |
JP2008127217A (ja) * | 2006-11-16 | 2008-06-05 | Sumco Techxiv株式会社 | 半導体単結晶製造装置および製造方法 |
-
2004
- 2004-12-13 JP JP2004360094A patent/JP4730937B2/ja active Active
-
2005
- 2005-11-11 TW TW094139598A patent/TWI281521B/zh active
- 2005-12-13 KR KR1020077014200A patent/KR101216313B1/ko active IP Right Grant
- 2005-12-13 US US11/792,664 patent/US8753446B2/en active Active
- 2005-12-13 EP EP05816745.3A patent/EP1840248B1/en active Active
- 2005-12-13 WO PCT/JP2005/022867 patent/WO2006064797A1/ja active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5441280A (en) * | 1977-09-07 | 1979-04-02 | Nippon Telegr & Teleph Corp <Ntt> | Manufacturing apparatus for single crystal |
JPH05254982A (ja) * | 1992-03-11 | 1993-10-05 | Komatsu Denshi Kinzoku Kk | 単結晶製造装置および製造方法 |
JPH0656570A (ja) * | 1992-08-06 | 1994-03-01 | Komatsu Denshi Kinzoku Kk | 単結晶製造装置 |
JPH07223894A (ja) * | 1994-02-10 | 1995-08-22 | Komatsu Electron Metals Co Ltd | 半導体単結晶製造装置 |
JPH092892A (ja) * | 1995-06-22 | 1997-01-07 | Komatsu Electron Metals Co Ltd | 半導体単結晶引き上げ装置 |
JP2002526377A (ja) * | 1998-10-07 | 2002-08-20 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | 結晶引上装置の連続酸化法 |
JP2001010893A (ja) * | 1999-06-24 | 2001-01-16 | Toshiba Ceramics Co Ltd | 単結晶引上装置 |
JP2003089594A (ja) * | 2002-07-19 | 2003-03-28 | Komatsu Electronic Metals Co Ltd | 半導体単結晶製造装置 |
JP2004137089A (ja) * | 2002-10-15 | 2004-05-13 | Toshiba Ceramics Co Ltd | シリコン単結晶引上装置 |
JP2004256323A (ja) * | 2003-02-24 | 2004-09-16 | Komatsu Electronic Metals Co Ltd | 単結晶引上げ装置および単結晶製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20080110394A1 (en) | 2008-05-15 |
TWI281521B (en) | 2007-05-21 |
US8753446B2 (en) | 2014-06-17 |
EP1840248A1 (en) | 2007-10-03 |
EP1840248A4 (en) | 2009-07-01 |
WO2006064797A1 (ja) | 2006-06-22 |
EP1840248B1 (en) | 2015-02-18 |
KR101216313B1 (ko) | 2012-12-27 |
TW200628641A (en) | 2006-08-16 |
KR20070086546A (ko) | 2007-08-27 |
JP2006169010A (ja) | 2006-06-29 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP1840248B1 (en) | Semiconductor single crystal producing device and producing method | |
EP2465979B1 (en) | Apparatus for manufacturing silicon carbide single crystal | |
CN109868503A (zh) | 一种坩埚组件及长晶炉 | |
JP5556761B2 (ja) | 炭化珪素単結晶製造装置 | |
JP4924105B2 (ja) | 炭化珪素単結晶の製造装置および製造方法 | |
JP6257483B2 (ja) | シリコン単結晶製造方法 | |
EP2465980B1 (en) | Apparatus and method for manufacturing silicon carbide single crystal | |
JP2007277089A (ja) | GaN単結晶の合成方法 | |
JP2006503781A (ja) | 単結晶炭化ケイ素の形成 | |
KR101111681B1 (ko) | 단결정 실리콘 잉곳 제조장치 | |
JP5278302B2 (ja) | 炭化珪素単結晶の製造方法および製造装置 | |
JP3640940B2 (ja) | 半導体単結晶製造装置 | |
JPH07223894A (ja) | 半導体単結晶製造装置 | |
JP5648604B2 (ja) | 炭化珪素単結晶製造装置 | |
JP5831339B2 (ja) | 炭化珪素単結晶の製造方法 | |
JP2010510154A (ja) | 結晶成長用反応炉 | |
JPH05117074A (ja) | 半導体単結晶製造方法および製造装置 | |
KR101477163B1 (ko) | 단결정 실리콘 잉곳 제조장치 | |
CN117552081A (zh) | 石墨坩埚、坩埚托盘和单晶炉 | |
JP5867335B2 (ja) | 炭化珪素単結晶の製造装置および製造方法 | |
JP6187372B2 (ja) | 炭化珪素単結晶製造装置 | |
JP2014224014A (ja) | 炭化珪素単結晶の製造装置 | |
JP5842725B2 (ja) | 炭化珪素単結晶製造装置 | |
JP2019202925A (ja) | 炭化珪素単結晶製造装置および炭化珪素単結晶の製造方法 | |
JP2013035729A (ja) | 炭化珪素単結晶製造装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20071122 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110118 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110317 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20110412 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20110418 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20140428 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 4730937 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |