JP4720234B2 - L型蒸着ボートおよび蒸着装置 - Google Patents
L型蒸着ボートおよび蒸着装置 Download PDFInfo
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- JP4720234B2 JP4720234B2 JP2005081158A JP2005081158A JP4720234B2 JP 4720234 B2 JP4720234 B2 JP 4720234B2 JP 2005081158 A JP2005081158 A JP 2005081158A JP 2005081158 A JP2005081158 A JP 2005081158A JP 4720234 B2 JP4720234 B2 JP 4720234B2
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- vapor deposition
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- 238000000465 moulding Methods 0.000 description 6
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- 239000010453 quartz Substances 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
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- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- Electroluminescent Light Sources (AREA)
- Physical Vapour Deposition (AREA)
Description
2・・・・底板
3・・・・中板
4、4−2・・・・カバー
5・・・・蒸着材料
6・・・・電極板部
7・・・・電極ジグ
7−2、7−3・・・電極ジグユニット
8・・・・ガイド部
9・・・・蒸発孔
10・・・・温度センサー
11・・・・絶縁板
12・・・・仕切り板
13・・・・基板
14・・・・基板回転上下装置
15・・・・水晶振動式膜厚センサー
16・・・・真空蒸着チャンバー
17・・・・ベースプレート
18、21、22、23、24・・・・電極ジグユニット
Claims (4)
- 蒸着ボートの両端の電極板部を固定するための電極ジグを有する電極ジグユニットを8つ以上有し、前記電極ジグユニットを放射状に配置し、前記蒸着ボートの蒸発孔を同一円上に配置することが可能な蒸着装置に用いられる抵抗加熱式昇華性材料用金属製蒸着ボートであって、蒸着材料を入れる容器部を有する底板と、2つ以上の穴またはメッシュを有する中板または1つ以上の蒸発孔を有するカバーの一方または両方からなり、両端の電極板部から通電することにより容器部が加熱される抵抗加熱式昇華性材料用金属製蒸着ボートにおいて、前記電極板部の片方が底板側にL字型に折り曲げ加工されており、且つ前記蒸着ボートの容器部端から折り曲げ部の位置の距離L5が5mm以上であることを特徴とする蒸着ボート。
- 前記容器部の長さが3cm以上であり、且つ、前記カバーの蒸発孔が1つであって、折り曲げた側の容器部端から該蒸発孔までの距離L6が1cm以内であることを特徴とする請求項1記載の蒸着ボート。
- 前記容器部の深さをH2、前記の容器部幅をD2としたときにH2/D2が1以上4以下であることを特徴とする請求項1または請求項2のいずれかに記載の蒸着ボート。
- 請求項1乃至3のいずれかに記載の蒸着ボートと該蒸着ボートのL字に折り曲げられた電極板部を垂直に差し込み固定できる電極ジグと、蒸着ボートの容器部底に測定部を押し付けることのできる機構を有した温度センサーが一体となって移動調節可能な電極ジグユニットを有することを特徴とする蒸着装置。
Priority Applications (1)
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JP2005081158A JP4720234B2 (ja) | 2005-03-22 | 2005-03-22 | L型蒸着ボートおよび蒸着装置 |
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JP2005081158A JP4720234B2 (ja) | 2005-03-22 | 2005-03-22 | L型蒸着ボートおよび蒸着装置 |
Publications (2)
Publication Number | Publication Date |
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JP2006265576A JP2006265576A (ja) | 2006-10-05 |
JP4720234B2 true JP4720234B2 (ja) | 2011-07-13 |
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JP2005081158A Expired - Fee Related JP4720234B2 (ja) | 2005-03-22 | 2005-03-22 | L型蒸着ボートおよび蒸着装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7290052B2 (ja) | 2019-03-20 | 2023-06-13 | 中国電力株式会社 | ケーブル敷設補助具およびケーブル敷設補助具設置方法 |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106947945A (zh) * | 2017-05-11 | 2017-07-14 | 成都西沃克真空科技有限公司 | 一种阻蒸器用防震式多位阻蒸台 |
CN106995915A (zh) * | 2017-05-11 | 2017-08-01 | 成都西沃克真空科技有限公司 | 一种旋转式多位阻蒸设备 |
CN110872689B (zh) * | 2018-08-30 | 2024-05-28 | 上海祖强能源有限公司 | 蒸发舟拆装工具及蒸镀设备 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58204173A (ja) * | 1982-05-20 | 1983-11-28 | Toshiba Corp | 蒸着装置および蒸着方法 |
JPS6191356A (ja) * | 1984-10-11 | 1986-05-09 | Hitachi Maxell Ltd | 真空蒸着装置 |
JPS6338569A (ja) * | 1986-08-01 | 1988-02-19 | Fuji Xerox Co Ltd | 真空蒸着用蒸発装置 |
JP2004342382A (ja) * | 2003-05-14 | 2004-12-02 | Canon Inc | 有機el発光デバイスの製造方法 |
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2005
- 2005-03-22 JP JP2005081158A patent/JP4720234B2/ja not_active Expired - Fee Related
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7290052B2 (ja) | 2019-03-20 | 2023-06-13 | 中国電力株式会社 | ケーブル敷設補助具およびケーブル敷設補助具設置方法 |
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JP2006265576A (ja) | 2006-10-05 |
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