JP4681018B2 - 全反射蛍光x線分析装置 - Google Patents
全反射蛍光x線分析装置 Download PDFInfo
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- JP4681018B2 JP4681018B2 JP2008065241A JP2008065241A JP4681018B2 JP 4681018 B2 JP4681018 B2 JP 4681018B2 JP 2008065241 A JP2008065241 A JP 2008065241A JP 2008065241 A JP2008065241 A JP 2008065241A JP 4681018 B2 JP4681018 B2 JP 4681018B2
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- 238000004876 x-ray fluorescence Methods 0.000 title claims description 8
- 238000005259 measurement Methods 0.000 claims description 16
- 238000006073 displacement reaction Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000000624 total reflection X-ray fluorescence spectroscopy Methods 0.000 description 1
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Description
1a 試料表面
3 1次X線
5a 基準X線
5b 蛍光X線
18 ステージ
24 制御手段
Q ステージによる回転の軸心
θ 試料への1次X線の入射角度
Claims (1)
- 載置された試料の回転および傾き調整が可能なステージを備え、試料表面の測定点に微小な入射角度で1次X線を入射させて、発生する蛍光X線の強度を測定する全反射蛍光X線分析装置であって、
前記ステージによる回転の軸心上にある測定点に微小な入射角度で1次X線が入射するように、前記ステージの初期状態からの傾きを表すステージ角度を所定の第1ステージ角度に調整するとともに、試料の主成分元素からの蛍光X線である基準X線の強度を測定して第1測定強度として記憶し、
前記ステージにより試料を180度回転させ、前記基準X線の測定強度が前記第1測定強度と合致するようにステージ角度を調整して第2ステージ角度として記憶し、
前記第2ステージ角度から前記第1ステージ角度を減じて2で除した値を入射角度補正値として記憶し、
前記ステージによる試料の回転を元に戻し、所望の微小な入射角度に対応するステージ角度から前記入射角度補正値を減じた角度にステージ角度を調整することにより、入射角度を設定する制御手段を備えた全反射蛍光X線分析装置。
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JP2008065241A JP4681018B2 (ja) | 2008-03-14 | 2008-03-14 | 全反射蛍光x線分析装置 |
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JP2008065241A JP4681018B2 (ja) | 2008-03-14 | 2008-03-14 | 全反射蛍光x線分析装置 |
Publications (2)
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JP2009222463A JP2009222463A (ja) | 2009-10-01 |
JP4681018B2 true JP4681018B2 (ja) | 2011-05-11 |
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JP2008065241A Active JP4681018B2 (ja) | 2008-03-14 | 2008-03-14 | 全反射蛍光x線分析装置 |
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Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN104807845B (zh) * | 2015-04-21 | 2018-05-08 | 南京航空航天大学 | 一种快速检测化妆品中重金属含量的掠入式x荧光测量装置 |
CN110715945B (zh) * | 2019-08-28 | 2022-12-13 | 广州中国科学院工业技术研究院 | 一种用于微焦点x射线工业ct的载物夹具 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04131761U (ja) * | 1991-05-24 | 1992-12-04 | 理学電機工業株式会社 | 全反射蛍光x線分析装置 |
JP2003254918A (ja) * | 2002-03-04 | 2003-09-10 | Rigaku Corp | 単結晶体の方位測定装置、この装置におけるガイド部材の角度誤差の検出方法及び単結晶体の方位測定方法 |
JP2006214868A (ja) * | 2005-02-03 | 2006-08-17 | Siltronic Japan Corp | 全反射蛍光x線分析装置 |
JP2006242970A (ja) * | 2006-06-19 | 2006-09-14 | Toshiba It & Control Systems Corp | 結晶方位決定装置 |
JP2007107952A (ja) * | 2005-10-12 | 2007-04-26 | National Institute Of Advanced Industrial & Technology | 蛍光x線分析法 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH03235046A (ja) * | 1990-02-09 | 1991-10-21 | Toshiba Corp | 全反射蛍光x線分析装置 |
JPH0833359B2 (ja) * | 1990-02-23 | 1996-03-29 | 理学電機工業株式会社 | 全反射蛍光x線分析装置 |
JPH0552777A (ja) * | 1991-08-22 | 1993-03-02 | Mitsubishi Materials Corp | 全反射蛍光x線分析装置の入射角補正方法 |
JP2613513B2 (ja) * | 1991-11-05 | 1997-05-28 | 理学電機工業株式会社 | 蛍光x線の分析方法 |
JPH05249055A (ja) * | 1992-03-03 | 1993-09-28 | Toshiba Corp | 全反射螢光x線分析装置 |
JP2630249B2 (ja) * | 1994-02-16 | 1997-07-16 | 日本電気株式会社 | 全反射蛍光x線分析装置 |
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- 2008-03-14 JP JP2008065241A patent/JP4681018B2/ja active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04131761U (ja) * | 1991-05-24 | 1992-12-04 | 理学電機工業株式会社 | 全反射蛍光x線分析装置 |
JP2003254918A (ja) * | 2002-03-04 | 2003-09-10 | Rigaku Corp | 単結晶体の方位測定装置、この装置におけるガイド部材の角度誤差の検出方法及び単結晶体の方位測定方法 |
JP2006214868A (ja) * | 2005-02-03 | 2006-08-17 | Siltronic Japan Corp | 全反射蛍光x線分析装置 |
JP2007107952A (ja) * | 2005-10-12 | 2007-04-26 | National Institute Of Advanced Industrial & Technology | 蛍光x線分析法 |
JP2006242970A (ja) * | 2006-06-19 | 2006-09-14 | Toshiba It & Control Systems Corp | 結晶方位決定装置 |
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