JP4654424B2 - 光源装置 - Google Patents
光源装置 Download PDFInfo
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- JP4654424B2 JP4654424B2 JP2009189912A JP2009189912A JP4654424B2 JP 4654424 B2 JP4654424 B2 JP 4654424B2 JP 2009189912 A JP2009189912 A JP 2009189912A JP 2009189912 A JP2009189912 A JP 2009189912A JP 4654424 B2 JP4654424 B2 JP 4654424B2
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/37—Non-linear optics for second-harmonic generation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0136—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour for the control of polarisation, e.g. state of polarisation [SOP] control, polarisation scrambling, TE-TM mode conversion or separation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/0327—Operation of the cell; Circuit arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3507—Arrangements comprising two or more nonlinear optical devices
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Description
本発明の実施の形態1に係る光源装置の構成を、図1、2を参照して説明する。図1は、本実施の形態に係る光源装置の構成を示す図である。図2は、本実施の形態に係る光源装置において用いられる偏光調整手段の構成を示す図である。図1に示すように、光源装置は、レーザー光源1、偏光調整手段2、非線形光学結晶3、ダイクロイックミラー4a、4b、空間コヒーレンス劣化手段5、部分反射ミラー6、光検出器7、制御器8、参照用電圧発生器9を備えている。
本発明の実施の形態2に係る光源装置について図4を参照して説明する。図4は、本実施の形態に係る光源装置の構成を示す図である。図4において、図1に示す構成要素と同一の構成要素には同一の符号を付し、説明を省略する。
もちろん、先に記したように偏光子は必ずしも設ける必要はない。
2 偏光調整手段
3 非線形光学結晶
4 ダイクロイックミラー
5 空間コヒーレンス劣化手段
6 部分反射ミラー
7 光検出器
8 制御器
9 参照用電圧発生器
10 分圧回路
11 コンピュータ
12 モータ制御器
13 1/2波長板
20 偏光調整手段
21 光弾性体
22 圧電素子
23 バネ
L1 レーザー光
L2 波長変換光
L3 残存基本波光
Claims (6)
- 基本波を発生するレーザー光源と、
前記基本波又はその高調波を入射光として、波長変換光を発生する少なくとも1つの非線形光学結晶と、
前記波長変換光の出力を電気信号出力に変換する光出力測定器と、
前記入射光の光路上に配置され、前記光出力測定器からの前記電気信号出力に応じて光弾性効果又は電気光学効果によって当該入射光の偏光成分に対する屈折率を変化させて、前記波長変換光の出力強度を安定化させる偏光調整手段と、
前記入射光の光路上に設けられ、その設置角度を変化させることにより前記波長変換光の前記出力強度を変化させる位相差板と、
前記光出力測定器からの前記電気信号出力に応じて、前記偏光調整手段に印加される前記電気信号出力が略一定となるように、前記位相差板の前記設置角度を制御する制御手段と、
を備える光源装置。 - 前記波長変換光の光路上に設けられ、前記波長変換光の空間コヒーレンスを劣化させる光学手段を備える請求項1に記載の光源装置。
- 前記光学手段は、回転駆動される光学素子、液晶空間光変調素子又は形状可変鏡を含むことを特徴とする請求項2に記載の光源装置。
- 前記基本波の波長は1030〜1080nm、前記波長変換光は第4高調波発生による270nm以下の紫外光であり、
前記偏光調整手段は、前記基本波又は第2高調波に対して作用することを特徴とする請求項1〜3のいずれか1項に記載の光源装置。 - 前記基本波の波長は1030〜1080nm、前記波長変換光は前記基本波と第4高調波の和周波混合により発生する216nm以下の紫外光であり、
前記偏光調整手段は、前記基本波、第2高調波又は第4高調波に対して作用することを特徴とする請求項1〜3のいずれか1項に記載の光源装置。 - 前記レーザー光源は、縦マルチモードの基本波を発生することを特徴とする請求項1〜5のいずれか1項に記載の光源装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009189912A JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
US12/858,848 US8305681B2 (en) | 2009-08-19 | 2010-08-18 | Light source apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009189912A JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
Publications (2)
Publication Number | Publication Date |
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JP2011043548A JP2011043548A (ja) | 2011-03-03 |
JP4654424B2 true JP4654424B2 (ja) | 2011-03-23 |
Family
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Application Number | Title | Priority Date | Filing Date |
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JP2009189912A Active JP4654424B2 (ja) | 2009-08-19 | 2009-08-19 | 光源装置 |
Country Status (2)
Country | Link |
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US (1) | US8305681B2 (ja) |
JP (1) | JP4654424B2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9696568B2 (en) | 2015-05-13 | 2017-07-04 | Lasertec Corporation | Light source apparatus and inspection apparatus |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102007002821A1 (de) * | 2007-01-19 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Anordnung zur Frequenzkonvertierung kohärenter optischer Strahlung |
CN103348286B (zh) * | 2011-03-24 | 2015-11-25 | 株式会社尼康 | 紫外线激光装置 |
US9614280B2 (en) * | 2013-05-30 | 2017-04-04 | Phase Sensitive Innovations, Inc. | Optical feed network for phased array antennas |
US9851616B2 (en) * | 2013-06-26 | 2017-12-26 | Texas Instruments Incorporated | Non-moving optical beam steering using non-pixelated liquid crystal optical phased arrays |
US9293882B2 (en) | 2013-09-10 | 2016-03-22 | Kla-Tencor Corporation | Low noise, high stability, deep ultra-violet, continuous wave laser |
WO2016121756A1 (ja) | 2015-01-30 | 2016-08-04 | 株式会社日立ハイテクノロジーズ | 検査装置 |
US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
WO2019167151A1 (ja) | 2018-02-28 | 2019-09-06 | 株式会社日立ハイテクノロジーズ | 検査装置、およびその検査方法 |
CN111142268B (zh) * | 2018-11-05 | 2022-09-16 | 青岛海信激光显示股份有限公司 | 一种消散斑装置、激光光源及激光投影设备 |
DE102020202317A1 (de) * | 2019-03-28 | 2020-10-01 | Advantest Corporation | Vorrichtung zur messung photoakustischer wellen |
JP2023110195A (ja) * | 2022-01-28 | 2023-08-09 | 浜松ホトニクス株式会社 | 光学装置及び光生成方法 |
Family Cites Families (12)
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US5144630A (en) * | 1991-07-29 | 1992-09-01 | Jtt International, Inc. | Multiwavelength solid state laser using frequency conversion techniques |
JP2727935B2 (ja) * | 1993-11-15 | 1998-03-18 | 日本電気株式会社 | 外部高調波発生レーザ発振器 |
JPH09232665A (ja) | 1996-02-22 | 1997-09-05 | Hitachi Metals Ltd | 出力安定化第二高調波光源 |
JPH09243964A (ja) * | 1996-03-14 | 1997-09-19 | Sony Corp | 露光照明装置 |
US5742626A (en) * | 1996-08-14 | 1998-04-21 | Aculight Corporation | Ultraviolet solid state laser, method of using same and laser surgery apparatus |
JPH1070333A (ja) | 1996-08-27 | 1998-03-10 | Shimadzu Corp | 波長変換固体レーザ装置 |
JP3627208B2 (ja) | 1998-11-24 | 2005-03-09 | Hoya Candeo Optronics株式会社 | レーザ装置、レーザカッタ、及びレーザ波長変換方法 |
JP2002267825A (ja) | 2001-03-09 | 2002-09-18 | Sony Corp | 回折型レンズ素子及びこれを用いた照明装置 |
JP4162876B2 (ja) * | 2001-07-30 | 2008-10-08 | 松下電器産業株式会社 | レーザ装置 |
US6785040B2 (en) * | 2001-08-17 | 2004-08-31 | Bae Systems Information And Electronic Systems Integration Inc. | Spectral modulation in an optical wavelength converter |
JP4065880B2 (ja) * | 2005-03-22 | 2008-03-26 | アドバンスド・マスク・インスペクション・テクノロジー株式会社 | レーザー装置及び和周波発生方法 |
DE102007002821A1 (de) * | 2007-01-19 | 2008-07-31 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Verfahren und Anordnung zur Frequenzkonvertierung kohärenter optischer Strahlung |
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2009
- 2009-08-19 JP JP2009189912A patent/JP4654424B2/ja active Active
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- 2010-08-18 US US12/858,848 patent/US8305681B2/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9696568B2 (en) | 2015-05-13 | 2017-07-04 | Lasertec Corporation | Light source apparatus and inspection apparatus |
Also Published As
Publication number | Publication date |
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JP2011043548A (ja) | 2011-03-03 |
US8305681B2 (en) | 2012-11-06 |
US20110220815A1 (en) | 2011-09-15 |
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