JP4644679B2 - カーボンナノチューブ電子イオン化装置 - Google Patents
カーボンナノチューブ電子イオン化装置 Download PDFInfo
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 29
- 239000002041 carbon nanotube Substances 0.000 title claims abstract description 28
- 229910021393 carbon nanotube Inorganic materials 0.000 title claims abstract description 26
- 238000010894 electron beam technology Methods 0.000 claims abstract description 59
- 238000010884 ion-beam technique Methods 0.000 claims abstract description 37
- 230000005684 electric field Effects 0.000 claims description 12
- 239000002048 multi walled nanotube Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 238000000605 extraction Methods 0.000 claims description 6
- 238000005040 ion trap Methods 0.000 claims description 2
- 239000002109 single walled nanotube Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 abstract description 7
- 150000002500 ions Chemical class 0.000 description 65
- 239000000523 sample Substances 0.000 description 39
- 238000010893 electron trap Methods 0.000 description 12
- -1 CNT ion Chemical class 0.000 description 10
- 150000001793 charged compounds Chemical class 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- 238000006243 chemical reaction Methods 0.000 description 4
- 238000004949 mass spectrometry Methods 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 238000004590 computer program Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000013467 fragmentation Methods 0.000 description 2
- 238000006062 fragmentation reaction Methods 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 1
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000000451 chemical ionisation Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 229910003472 fullerene Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000000608 laser ablation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/10—Ion sources; Ion guns
- H01J49/14—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers
- H01J49/147—Ion sources; Ion guns using particle bombardment, e.g. ionisation chambers with electrons, e.g. electron impact ionisation, electron attachment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30403—Field emission cathodes characterised by the emitter shape
- H01J2201/30434—Nanotubes
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/902—Specified use of nanostructure
- Y10S977/932—Specified use of nanostructure for electronic or optoelectronic application
- Y10S977/939—Electron emitter, e.g. spindt emitter tip coated with nanoparticles
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- Nanotechnology (AREA)
- Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Analytical Chemistry (AREA)
- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Plasma & Fusion (AREA)
- Composite Materials (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Materials Engineering (AREA)
- Electron Tubes For Measurement (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Luminescent Compositions (AREA)
- Carbon And Carbon Compounds (AREA)
Description
尚、対応する外国出願において、以下の文献が発見されている。
11 イオン化室
12 イオンリペラー
13 電子トラップ
14 磁石
15 加速電位
16 集束半板
17 アルファスリット
18 イオンビーム
19 電子ビーム
20 基板
21 CNT束
22 放出制御格子
23 エネルギー制御格子
30 CNTエミッタ
31 電子レンズ
32 電子ビーム
33 イオンビーム
34 イオン化室
35 電子トラップ
40 CNT電子エミッタ
41 基板
42 CNT層
43 電子エネルギー板
45 試料イオン
46 レーザー加工リークアセンブリ
48 イオンリペラー
49 イオンビーム
L1 抽出レンズ
L2 集束レンズ
64 イオン化室
Claims (16)
- 質量分析計に使用されるイオン源であって、
電子ビームを放出するカーボンナノチューブ束であるカーボンナノチューブ層を含むイオン化室であって、前記カーボンナノチューブ層は該イオン化室の第1の内壁の導電面に固定されているイオン化室と、
前記イオン化室に備えられ、試料を導入する試料入口と、
前記イオン化室に備えられ、イオン化試料分子を出すイオンビーム出口と、
前記イオンビーム出口の近傍に配置され、前記イオン化室を出る前記イオン化試料分子を集束する、少なくとも1つの電極と、
を具備し、
前記第1の内壁における前記導電面と、前記第1の内壁と対向して設けられた前記イオン化室の第2の内壁に備えられた電子エネルギー板とが、前記カーボンナノチューブ束による前記電子ビームの放出に必要な電界が発生するように、電源に接続されている、イオン源。 - 前記カーボンナノチューブ束は、単層カーボンナノチューブ、多層カーボンナノチューブ、または単層カーボンナノチューブと多層カーボンナノチューブとの組み合わせのいずれかを含む、請求項1に記載のイオン源。
- 前記イオン化試料分子の前記イオン化室からの放出を促進するべく、前記イオン化室の内部に、さらにイオンリペラーを具備する、請求項1または2に記載のイオン源。
- 前記少なくとも1つの電極は、集束半板、スリット板、アルファ板、抽出レンズ、または集束レンズのうちの少なくとも1つを含む、請求項1から3のいずれかに記載のイオン源。
- 前記カーボンナノチューブ束は、カーボンナノチューブを平行に規則正しくならべたアレイから構成される、請求項1から4のいずれかに記載のイオン源。
- パルス状のイオン化を行うべく、前記電子ビームと前記イオンリペラーを交互にオンする請求項3に記載のイオン源。
- 前記電子ビームのエネルギーが、10eVから150eVの範囲内である請求項1から6のいずれかに記載のイオン源。
- カーボンナノチューブから構成されたイオン源と、
前記イオン源に接続され、質量電荷比に基づいてイオン化試料分子を分離する質量フィルタと、
前記質量フィルタに接続され、前記イオン化試料分子を検出するイオン検出器と、
を具備し、
前記イオン源は、
電子ビームを放出するカーボンナノチューブ束であるカーボンナノチューブ層を含むイオン化室であって、前記カーボンナノチューブ層は該イオン化室の第1の内壁の導電面に固定されているイオン化室と、
前記イオン化室に備えられ、試料を導入する試料入口と、
前記イオン化室に備えられ、イオン化試料分子を出すイオンビーム出口と、
前記イオンビーム出口の近傍に配置され、前記イオン化室を出る前記イオン化試料分子を集束する、少なくとも1つの電極と、
を具備し、
前記第1の内壁における前記導電面と、前記第1の内壁と対向して設けられた前記イオン化室の第2の内壁に備えられた電子エネルギー板とが、前記カーボンナノチューブ束による前記電子ビームの放出に必要な電界が発生するように、電源に接続されている、質量分析計。 - 前記カーボンナノチューブ束は、単層カーボンナノチューブ、多層カーボンナノチューブ、または単層カーボンナノチューブと多層カーボンナノチューブとの組み合わせのいずれかを含む、請求項8に記載の質量分析計。
- 前記イオン化試料分子の前記イオン化室からの放出を促進するべく、前記イオン化室の内部に、さらにイオンリペラーを具備する、請求項8または9に記載の質量分析計。
- 前記少なくとも1つの電極は、集束半板、スリット板、アルファ板、抽出レンズ、または集束レンズのうちの少なくとも1つを含む、請求項8から10のいずれかに記載の質量分析計。
- 前記質量フィルタは、磁場型、電場型、四重極型、イオントラップ型、飛行時間型から選択した方式に基づいて構成されている、請求項8から11のいずれかに記載の質量分析計。
- 前記イオン源に接続され、電子ビームの放出を制御する電気モジュールをさらに具備する、請求項8から12のいずれかに記載の質量分析計。
- 前記カーボンナノチューブ束は、カーボンナノチューブを平行に規則正しくならべたアレイから構成される、請求項8から13のいずれかに記載の質量分析計。
- パルス状のイオン化を行うべく、前記電子ビームと前記イオンリペラーを交互にオンする請求項10に記載の質量分析計。
- 前記電子ビームのエネルギーが、10eVから150eVの範囲内である請求項8から15のいずれかに記載の質量分析計。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/706,329 US6885010B1 (en) | 2003-11-12 | 2003-11-12 | Carbon nanotube electron ionization sources |
PCT/US2004/037956 WO2005048290A2 (en) | 2003-11-12 | 2004-11-12 | Carbon nanotube electron ionization sources |
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JP2007511064A JP2007511064A (ja) | 2007-04-26 |
JP4644679B2 true JP4644679B2 (ja) | 2011-03-02 |
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JP2006539944A Active JP4644679B2 (ja) | 2003-11-12 | 2004-11-12 | カーボンナノチューブ電子イオン化装置 |
Country Status (8)
Country | Link |
---|---|
US (1) | US6885010B1 (ja) |
EP (1) | EP1683180B1 (ja) |
JP (1) | JP4644679B2 (ja) |
CN (1) | CN1961403B (ja) |
AT (1) | ATE464649T1 (ja) |
CA (1) | CA2545534C (ja) |
DE (1) | DE602004026618D1 (ja) |
WO (1) | WO2005048290A2 (ja) |
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2003
- 2003-11-12 US US10/706,329 patent/US6885010B1/en not_active Expired - Lifetime
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2004
- 2004-11-12 DE DE602004026618T patent/DE602004026618D1/de active Active
- 2004-11-12 CA CA2545534A patent/CA2545534C/en active Active
- 2004-11-12 WO PCT/US2004/037956 patent/WO2005048290A2/en active Application Filing
- 2004-11-12 JP JP2006539944A patent/JP4644679B2/ja active Active
- 2004-11-12 EP EP04810933A patent/EP1683180B1/en active Active
- 2004-11-12 CN CN200480033283.4A patent/CN1961403B/zh active Active
- 2004-11-12 AT AT04810933T patent/ATE464649T1/de not_active IP Right Cessation
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WO1996042101A1 (en) * | 1995-06-12 | 1996-12-27 | Ecole Polytechnique Federale De Lausanne | Electron source and applications of the same |
JPH097540A (ja) * | 1995-06-22 | 1997-01-10 | Shimadzu Corp | 質量分析装置 |
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JP2002530805A (ja) * | 1998-11-12 | 2002-09-17 | ザ ボード オブ トラスティーズ オブ ザ リーランド スタンフォード ジュニア ユニバーシティ | カーボンナノチューブの自己配向性束及びその製造方法 |
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JP2002022899A (ja) * | 2000-07-10 | 2002-01-23 | Iwasaki Electric Co Ltd | 電子線照射装置 |
Also Published As
Publication number | Publication date |
---|---|
US6885010B1 (en) | 2005-04-26 |
EP1683180B1 (en) | 2010-04-14 |
CN1961403B (zh) | 2010-09-15 |
JP2007511064A (ja) | 2007-04-26 |
CA2545534A1 (en) | 2005-05-26 |
US20050098720A1 (en) | 2005-05-12 |
WO2005048290A2 (en) | 2005-05-26 |
WO2005048290A3 (en) | 2005-09-15 |
DE602004026618D1 (de) | 2010-05-27 |
CA2545534C (en) | 2010-01-26 |
CN1961403A (zh) | 2007-05-09 |
EP1683180A2 (en) | 2006-07-26 |
ATE464649T1 (de) | 2010-04-15 |
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